FR1444794A - Dispositif pour changement automatique de masques - Google Patents
Dispositif pour changement automatique de masquesInfo
- Publication number
- FR1444794A FR1444794A FR17750A FR17750A FR1444794A FR 1444794 A FR1444794 A FR 1444794A FR 17750 A FR17750 A FR 17750A FR 17750 A FR17750 A FR 17750A FR 1444794 A FR1444794 A FR 1444794A
- Authority
- FR
- France
- Prior art keywords
- automatic mask
- mask change
- change
- automatic
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR17750A FR1444794A (fr) | 1965-05-20 | 1965-05-20 | Dispositif pour changement automatique de masques |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR17750A FR1444794A (fr) | 1965-05-20 | 1965-05-20 | Dispositif pour changement automatique de masques |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1444794A true FR1444794A (fr) | 1966-07-08 |
Family
ID=8579273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR17750A Expired FR1444794A (fr) | 1965-05-20 | 1965-05-20 | Dispositif pour changement automatique de masques |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1444794A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2418545A1 (fr) * | 2010-08-12 | 2012-02-15 | Applied Materials, Inc. | Support de masque, module de manipulation de masque et procédé de réglage de masque |
-
1965
- 1965-05-20 FR FR17750A patent/FR1444794A/fr not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2418545A1 (fr) * | 2010-08-12 | 2012-02-15 | Applied Materials, Inc. | Support de masque, module de manipulation de masque et procédé de réglage de masque |
US9348237B2 (en) | 2010-08-12 | 2016-05-24 | Applied Materials, Inc. | Mask carrier, mask handling module and method for adjusting a mask |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR1504375A (fr) | Dispositif de ventilation pour moissonneuse-batteuse | |
FR1471722A (fr) | Dispositif pour inhalations | |
FR1445802A (fr) | Dispositif de positionnement automatique pour perforatrices | |
CH466673A (fr) | Dispositif de débrayage automatique pour machine-outil | |
CH434001A (fr) | Dispositif sélecteur pour changement de vitesses | |
FR1444794A (fr) | Dispositif pour changement automatique de masques | |
FR1356380A (fr) | Dispositif de commande automatique de fréquence | |
FR1521686A (fr) | Dispositif de changement de vitesse automatique | |
FR1458573A (fr) | Dispositif de régulation automatique | |
FR1488433A (fr) | Dispositif de bouchage perfectionné pour capsulage automatique | |
FR1402228A (fr) | Dispositif de réglage automatique pour métier à tricoter et machine similaire | |
FR1500876A (fr) | Dispositif de régulation automatique | |
OA00023A (fr) | Dispositif automatique de positionnement de wagons. | |
FR1434280A (fr) | Dispositif de déconnexion automatique | |
FR1528060A (fr) | Dispositif pour le réglage automatique de la densité de fluides | |
FR1442029A (fr) | Dispositif indicateur pour transmission automatique | |
FR1434257A (fr) | Dispositif de commande automatique de changement de vitesses | |
FR92817E (fr) | Dispositif de réglage automatique pour freins. | |
FR1507382A (fr) | Circuit de commande pour dispositif de poinconnage automatique | |
FR1450828A (fr) | Dispositif de débâtissage automatique pour filtres | |
FR1459658A (fr) | Dispositif automatique de pesage | |
FR1376593A (fr) | Dispositif photosensible de réglage de position pour usinage automatique | |
FR1377586A (fr) | Dispositif berceur automatique | |
FR1299334A (fr) | Dispositif automatique de changement de cliché | |
CH450526A (fr) | Dispositif de sélection pour distributeur automatique |