FR1431666A - Process for the heat treatment of monocrystalline semiconductor bodies - Google Patents

Process for the heat treatment of monocrystalline semiconductor bodies

Info

Publication number
FR1431666A
FR1431666A FR966683A FR966683A FR1431666A FR 1431666 A FR1431666 A FR 1431666A FR 966683 A FR966683 A FR 966683A FR 966683 A FR966683 A FR 966683A FR 1431666 A FR1431666 A FR 1431666A
Authority
FR
France
Prior art keywords
heat treatment
monocrystalline semiconductor
semiconductor bodies
monocrystalline
bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR966683A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens AG
Original Assignee
Siemens Schuckertwerke AG
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Schuckertwerke AG, Siemens AG filed Critical Siemens Schuckertwerke AG
Priority to FR966683A priority Critical patent/FR1431666A/en
Application granted granted Critical
Publication of FR1431666A publication Critical patent/FR1431666A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR966683A 1963-03-29 1964-03-09 Process for the heat treatment of monocrystalline semiconductor bodies Expired FR1431666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR966683A FR1431666A (en) 1963-03-29 1964-03-09 Process for the heat treatment of monocrystalline semiconductor bodies

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES0084444 1963-03-29
FR966683A FR1431666A (en) 1963-03-29 1964-03-09 Process for the heat treatment of monocrystalline semiconductor bodies

Publications (1)

Publication Number Publication Date
FR1431666A true FR1431666A (en) 1966-03-18

Family

ID=25997181

Family Applications (1)

Application Number Title Priority Date Filing Date
FR966683A Expired FR1431666A (en) 1963-03-29 1964-03-09 Process for the heat treatment of monocrystalline semiconductor bodies

Country Status (1)

Country Link
FR (1) FR1431666A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0604096A1 (en) * 1992-12-21 1994-06-29 General Electric Company Fused quartz diffusion tubes for semiconductor manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0604096A1 (en) * 1992-12-21 1994-06-29 General Electric Company Fused quartz diffusion tubes for semiconductor manufacture

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