FR1429874A - Dispositif semi-conducteur et son procédé de fabrication - Google Patents
Dispositif semi-conducteur et son procédé de fabricationInfo
- Publication number
- FR1429874A FR1429874A FR12728A FR12728A FR1429874A FR 1429874 A FR1429874 A FR 1429874A FR 12728 A FR12728 A FR 12728A FR 12728 A FR12728 A FR 12728A FR 1429874 A FR1429874 A FR 1429874A
- Authority
- FR
- France
- Prior art keywords
- semiconductor device
- manufacturing process
- manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR12728A FR1429874A (fr) | 1964-04-13 | 1965-04-09 | Dispositif semi-conducteur et son procédé de fabrication |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US35905164A | 1964-04-13 | 1964-04-13 | |
US384568A US3337375A (en) | 1964-04-13 | 1964-06-24 | Semiconductor method and device |
FR12728A FR1429874A (fr) | 1964-04-13 | 1965-04-09 | Dispositif semi-conducteur et son procédé de fabrication |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1429874A true FR1429874A (fr) | 1966-02-25 |
Family
ID=27242066
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR12728A Expired FR1429874A (fr) | 1964-04-13 | 1965-04-09 | Dispositif semi-conducteur et son procédé de fabrication |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1429874A (fr) |
-
1965
- 1965-04-09 FR FR12728A patent/FR1429874A/fr not_active Expired
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CH465079A (fr) | Dispositif semi-conducteur photosensible et son procédé de fabrication | |
FR1319897A (fr) | Dispositif semiconducteur et son procédé de fabrication | |
FR1385209A (fr) | Dispositif photosensible et son procédé de fabrication | |
FR1456952A (fr) | Dispositif semiconducteur et son procédé de fabrication | |
FR1422047A (fr) | électrode-composite et son procédé de fabrication | |
FR1459371A (fr) | Dispositif à semi-conducteurs et son procédé de fabrication | |
FR1516465A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1420926A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1454921A (fr) | Dispositif à semi-conducteurs et son procédé de fabrication | |
FR1446740A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1429874A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1462034A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR2003233A1 (fr) | Dispositif semi-conducteur et son procede de fabrication | |
FR1409657A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1524758A (fr) | Dispositif semiconducteur et son procédé de fabrication | |
FR1477382A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
BE613411A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1381808A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1409543A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1417944A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1540854A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1536024A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1520217A (fr) | Dispositif semi-conducteur et son procédé de fabrication | |
FR1357172A (fr) | Dispositif thermo-électrique et son procédé de fabrication | |
FR1363745A (fr) | Dispositif à semi-conducteur et son procédé de fabrication |