FR1381922A - Méthode de fabrication de semi-conducteurs - Google Patents
Méthode de fabrication de semi-conducteursInfo
- Publication number
- FR1381922A FR1381922A FR963005A FR963005A FR1381922A FR 1381922 A FR1381922 A FR 1381922A FR 963005 A FR963005 A FR 963005A FR 963005 A FR963005 A FR 963005A FR 1381922 A FR1381922 A FR 1381922A
- Authority
- FR
- France
- Prior art keywords
- semiconductor manufacturing
- semiconductor
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02639—Preparation of substrate for selective deposition
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR963005A FR1381922A (fr) | 1963-02-08 | 1964-02-07 | Méthode de fabrication de semi-conducteurs |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB523263 | 1963-02-08 | ||
GB5233/63A GB998199A (en) | 1963-02-08 | 1963-02-08 | Improvements in or relating to the manufacture of semiconductor devices |
FR963005A FR1381922A (fr) | 1963-02-08 | 1964-02-07 | Méthode de fabrication de semi-conducteurs |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1381922A true FR1381922A (fr) | 1964-12-14 |
Family
ID=27247753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR963005A Expired FR1381922A (fr) | 1963-02-08 | 1964-02-07 | Méthode de fabrication de semi-conducteurs |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1381922A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2252638A1 (fr) * | 1973-11-23 | 1975-06-20 | Commissariat Energie Atomique |
-
1964
- 1964-02-07 FR FR963005A patent/FR1381922A/fr not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2252638A1 (fr) * | 1973-11-23 | 1975-06-20 | Commissariat Energie Atomique |
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