FR1325289A - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
FR1325289A
FR1325289A FR898997A FR898997A FR1325289A FR 1325289 A FR1325289 A FR 1325289A FR 898997 A FR898997 A FR 898997A FR 898997 A FR898997 A FR 898997A FR 1325289 A FR1325289 A FR 1325289A
Authority
FR
France
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR898997A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US113356A external-priority patent/US3117247A/en
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Priority to FR898997A priority Critical patent/FR1325289A/en
Application granted granted Critical
Publication of FR1325289A publication Critical patent/FR1325289A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR898997A 1961-05-29 1962-05-28 Vacuum pump Expired FR1325289A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR898997A FR1325289A (en) 1961-05-29 1962-05-28 Vacuum pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US113356A US3117247A (en) 1961-05-29 1961-05-29 Vacuum pump
FR898997A FR1325289A (en) 1961-05-29 1962-05-28 Vacuum pump

Publications (1)

Publication Number Publication Date
FR1325289A true FR1325289A (en) 1963-04-26

Family

ID=26195899

Family Applications (1)

Application Number Title Priority Date Filing Date
FR898997A Expired FR1325289A (en) 1961-05-29 1962-05-28 Vacuum pump

Country Status (1)

Country Link
FR (1) FR1325289A (en)

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