FR1295513A - Plasma cathode for pulsed electron beams - Google Patents
Plasma cathode for pulsed electron beamsInfo
- Publication number
- FR1295513A FR1295513A FR860036A FR860036A FR1295513A FR 1295513 A FR1295513 A FR 1295513A FR 860036 A FR860036 A FR 860036A FR 860036 A FR860036 A FR 860036A FR 1295513 A FR1295513 A FR 1295513A
- Authority
- FR
- France
- Prior art keywords
- electron beams
- pulsed electron
- plasma cathode
- cathode
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0062—Tubes with temperature ionized gas as electron source
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR860036A FR1295513A (en) | 1961-04-27 | 1961-04-27 | Plasma cathode for pulsed electron beams |
GB1540962A GB984891A (en) | 1961-04-27 | 1962-04-19 | Improvements in electron sources |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR860036A FR1295513A (en) | 1961-04-27 | 1961-04-27 | Plasma cathode for pulsed electron beams |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1295513A true FR1295513A (en) | 1962-06-08 |
Family
ID=8753950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR860036A Expired FR1295513A (en) | 1961-04-27 | 1961-04-27 | Plasma cathode for pulsed electron beams |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR1295513A (en) |
GB (1) | GB984891A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011123477A1 (en) * | 2010-03-29 | 2011-10-06 | Glenn Lane | Spatial segregation of plasma components |
-
1961
- 1961-04-27 FR FR860036A patent/FR1295513A/en not_active Expired
-
1962
- 1962-04-19 GB GB1540962A patent/GB984891A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB984891A (en) | 1965-03-03 |
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