FI965017A0 - pressure sensor - Google Patents

pressure sensor

Info

Publication number
FI965017A0
FI965017A0 FI965017A FI965017A FI965017A0 FI 965017 A0 FI965017 A0 FI 965017A0 FI 965017 A FI965017 A FI 965017A FI 965017 A FI965017 A FI 965017A FI 965017 A0 FI965017 A0 FI 965017A0
Authority
FI
Finland
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Application number
FI965017A
Other languages
Finnish (fi)
Other versions
FI101426B (en
FI101426B1 (en
Inventor
Ray Olsson
Per Bjoerkman
Original Assignee
Ccm Instr Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ccm Instr Ab filed Critical Ccm Instr Ab
Priority to FI965017A priority Critical patent/FI101426B1/en
Publication of FI965017A0 publication Critical patent/FI965017A0/en
Priority to PCT/IB1997/001561 priority patent/WO1998026261A1/en
Application granted granted Critical
Publication of FI101426B publication Critical patent/FI101426B/en
Publication of FI101426B1 publication Critical patent/FI101426B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
FI965017A 1996-12-13 1996-12-13 Pressure transmitter FI101426B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FI965017A FI101426B1 (en) 1996-12-13 1996-12-13 Pressure transmitter
PCT/IB1997/001561 WO1998026261A1 (en) 1996-12-13 1997-12-12 Pressure transducer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI965017 1996-12-13
FI965017A FI101426B1 (en) 1996-12-13 1996-12-13 Pressure transmitter

Publications (3)

Publication Number Publication Date
FI965017A0 true FI965017A0 (en) 1996-12-13
FI101426B FI101426B (en) 1998-06-15
FI101426B1 FI101426B1 (en) 1998-06-15

Family

ID=8547271

Family Applications (1)

Application Number Title Priority Date Filing Date
FI965017A FI101426B1 (en) 1996-12-13 1996-12-13 Pressure transmitter

Country Status (2)

Country Link
FI (1) FI101426B1 (en)
WO (1) WO1998026261A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009051611A1 (en) * 2009-11-02 2011-05-05 Vega Grieshaber Kg cell
US8393222B2 (en) * 2010-02-27 2013-03-12 Codman Neuro Sciences Sárl Apparatus and method for minimizing drift of a piezo-resistive pressure sensor due to progressive release of mechanical stress over time
EP2806258B1 (en) * 2013-05-20 2018-09-12 ams international AG Differential pressure sensor
US10548492B2 (en) * 2016-12-08 2020-02-04 MEAS Switzerland S.a.r.l. Pressure sensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4689999A (en) * 1985-07-26 1987-09-01 The Garrett Corporation Temperature compensated pressure transducer
US5561247A (en) * 1993-03-30 1996-10-01 Honda Motor Co., Ltd. Pressure sensor

Also Published As

Publication number Publication date
WO1998026261A1 (en) 1998-06-18
FI101426B (en) 1998-06-15
FI101426B1 (en) 1998-06-15

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Legal Events

Date Code Title Description
GB Transfer or assigment of application

Owner name: BALZERS AND LEYBOLD INSTRUMENTATION AB

PC Transfer of assignment of patent

Owner name: INFICON AALAND AB

Free format text: INFICON AALAND AB

MM Patent lapsed