FI963976A - Elektriskt reglerbart optiskt filter - Google Patents

Elektriskt reglerbart optiskt filter Download PDF

Info

Publication number
FI963976A
FI963976A FI963976A FI963976A FI963976A FI 963976 A FI963976 A FI 963976A FI 963976 A FI963976 A FI 963976A FI 963976 A FI963976 A FI 963976A FI 963976 A FI963976 A FI 963976A
Authority
FI
Finland
Prior art keywords
optical filter
adjustable optical
electrically adjustable
electrically
filter
Prior art date
Application number
FI963976A
Other languages
English (en)
Finnish (fi)
Other versions
FI108581B (sv
FI963976A0 (sv
Inventor
Ari Lehto
Martti Bolmberg
Altti Torkkeli
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI963976A priority Critical patent/FI108581B/sv
Publication of FI963976A0 publication Critical patent/FI963976A0/sv
Priority to AU44626/97A priority patent/AU4462697A/en
Priority to PCT/FI1997/000600 priority patent/WO1998014804A1/en
Priority to JP51626898A priority patent/JP2001525075A/ja
Priority to EP97942986A priority patent/EP0929830A1/en
Publication of FI963976A publication Critical patent/FI963976A/sv
Application granted granted Critical
Publication of FI108581B publication Critical patent/FI108581B/sv

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
FI963976A 1996-10-03 1996-10-03 Elektriskt reglerbart optiskt filter FI108581B (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI963976A FI108581B (sv) 1996-10-03 1996-10-03 Elektriskt reglerbart optiskt filter
AU44626/97A AU4462697A (en) 1996-10-03 1997-10-03 Electrically adjustable optical filter
PCT/FI1997/000600 WO1998014804A1 (en) 1996-10-03 1997-10-03 Electrically adjustable optical filter
JP51626898A JP2001525075A (ja) 1996-10-03 1997-10-03 電気的に調整可能な光学的フィルタ
EP97942986A EP0929830A1 (en) 1996-10-03 1997-10-03 Electrically adjustable optical filter

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI963976A FI108581B (sv) 1996-10-03 1996-10-03 Elektriskt reglerbart optiskt filter
FI963976 1996-10-03

Publications (3)

Publication Number Publication Date
FI963976A0 FI963976A0 (sv) 1996-10-03
FI963976A true FI963976A (sv) 1998-04-04
FI108581B FI108581B (sv) 2002-02-15

Family

ID=8546805

Family Applications (1)

Application Number Title Priority Date Filing Date
FI963976A FI108581B (sv) 1996-10-03 1996-10-03 Elektriskt reglerbart optiskt filter

Country Status (5)

Country Link
EP (1) EP0929830A1 (sv)
JP (1) JP2001525075A (sv)
AU (1) AU4462697A (sv)
FI (1) FI108581B (sv)
WO (1) WO1998014804A1 (sv)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2119712B1 (es) * 1996-12-17 1999-05-16 Consejo Superior Investigacion Procedimiento y dispositivo optico microfabricado para la deteccion de bandas de absorcion/emision en el infrarrojo.
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
FI981456A0 (sv) * 1998-06-24 1998-06-24 Valtion Teknillinen Förfarande för elektrisk reglering av avståndet mellan mikromekaniska elektroder
FR2820513B1 (fr) * 2001-02-05 2004-05-21 Centre Nat Rech Scient Dispositif optoelectronique a filtrage de longueur d'onde par couplage de cavites
JP4720022B2 (ja) * 2001-05-30 2011-07-13 ソニー株式会社 光学多層構造体およびその製造方法、光スイッチング素子、並びに画像表示装置
WO2003001251A1 (en) * 2001-06-25 2003-01-03 Massachusetts Institute Of Technology Air gaps for optical applications
JP4736282B2 (ja) * 2001-09-05 2011-07-27 ソニー株式会社 薄膜光学装置
WO2003056367A1 (en) * 2001-12-21 2003-07-10 Nokia Corporation Reflective flat panel display
US7370185B2 (en) * 2003-04-30 2008-05-06 Hewlett-Packard Development Company, L.P. Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
JP4383194B2 (ja) * 2004-02-03 2009-12-16 古河電気工業株式会社 所定の波長光学特性を有する誘電体多層膜フィルタ、その設計方法、その設計プログラム、およびその誘電体多層膜フィルタを用いた光アド・ドロップシステム
DE102004013851B4 (de) * 2004-03-20 2021-06-17 Robert Bosch Gmbh Verfahren zur Herstellung eines Interferenzfilter aus alternierenden Luft-Halbleiter-Schichtsystemen sowie ein mit dem Verfahren hergestellter Infrarotfilter
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
NO20051850A (no) 2005-04-15 2006-09-25 Sinvent As Infrarød deteksjon av gass - diffraktiv.
EP1910218A1 (en) 2005-07-22 2008-04-16 Qualcomm Mems Technologies, Inc. Mems devices having support structures and methods of fabricating the same
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
JP5224218B2 (ja) 2007-07-23 2013-07-03 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ投影露光装置の光学システム
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
DE102008045504B4 (de) 2008-09-03 2011-05-05 Gottfried Wilhelm Leibniz Universität Hannover Optischer Sensor mit einem photoelektrischen Bildabtastsensor und Verfahren zur Abtastung von Bildausschnitten
US8979349B2 (en) 2009-05-29 2015-03-17 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
JP5625614B2 (ja) 2010-08-20 2014-11-19 セイコーエプソン株式会社 光フィルター、光フィルターモジュール、分光測定器および光機器
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
US8995043B2 (en) 2011-11-29 2015-03-31 Qualcomm Mems Technologies, Inc. Interferometric modulator with dual absorbing layers
US9041751B2 (en) 2012-11-01 2015-05-26 Qualcomm Mems Technologies, Inc. Electromechanical systems display device including a movable absorber and a movable reflector assembly
JP6390090B2 (ja) * 2013-11-19 2018-09-19 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
CN107240647B (zh) * 2017-06-05 2018-10-23 京东方科技集团股份有限公司 一种有机发光二极管器件、灯具
JP7200658B2 (ja) * 2018-09-27 2023-01-10 セイコーエプソン株式会社 光学装置、及び電子機器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345328A (en) * 1992-08-12 1994-09-06 Sandia Corporation Tandem resonator reflectance modulator
FI94804C (sv) * 1994-02-17 1995-10-25 Vaisala Oy Elektriskt reglerbar ytmikromekanisk Fabry-Perot-interferometer för optisk materialanalys

Also Published As

Publication number Publication date
FI108581B (sv) 2002-02-15
WO1998014804A1 (en) 1998-04-09
JP2001525075A (ja) 2001-12-04
FI963976A0 (sv) 1996-10-03
AU4462697A (en) 1998-04-24
EP0929830A1 (en) 1999-07-21

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