FI940740A0 - Detektor foer paovisning av fotoner eller partiklar, foerfarande foer framstaellning av detektorn och maetningsfoerfarande - Google Patents

Detektor foer paovisning av fotoner eller partiklar, foerfarande foer framstaellning av detektorn och maetningsfoerfarande

Info

Publication number
FI940740A0
FI940740A0 FI940740A FI940740A FI940740A0 FI 940740 A0 FI940740 A0 FI 940740A0 FI 940740 A FI940740 A FI 940740A FI 940740 A FI940740 A FI 940740A FI 940740 A0 FI940740 A0 FI 940740A0
Authority
FI
Finland
Prior art keywords
detectors
production
photoners
particulates
detector
Prior art date
Application number
FI940740A
Other languages
English (en)
Inventor
Arto Salokatve
Mika Toivonen
Marko Jalonen
Hannu Kojola
Markus Pessa
Original Assignee
Arto Salokatve
Mika Toivonen
Marko Jalonen
Hannu Kojola
Markus Pessa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arto Salokatve, Mika Toivonen, Marko Jalonen, Hannu Kojola, Markus Pessa filed Critical Arto Salokatve
Priority to FI940740A priority Critical patent/FI940740A0/fi
Publication of FI940740A0 publication Critical patent/FI940740A0/fi
Priority to DE69517304T priority patent/DE69517304D1/de
Priority to AU17092/95A priority patent/AU1709295A/en
Priority to PCT/FI1995/000080 priority patent/WO1995022834A1/en
Priority to US08/700,441 priority patent/US5914491A/en
Priority to EP95908964A priority patent/EP0746871B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
FI940740A 1994-02-17 1994-02-17 Detektor foer paovisning av fotoner eller partiklar, foerfarande foer framstaellning av detektorn och maetningsfoerfarande FI940740A0 (fi)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI940740A FI940740A0 (fi) 1994-02-17 1994-02-17 Detektor foer paovisning av fotoner eller partiklar, foerfarande foer framstaellning av detektorn och maetningsfoerfarande
DE69517304T DE69517304D1 (de) 1994-02-17 1995-02-17 Photonen- oder teilchendetektor, herstellungsverfahren des detektors und messverfahren
AU17092/95A AU1709295A (en) 1994-02-17 1995-02-17 Detector for detecting photons or particles, method for fabricating the detector, and measuring method
PCT/FI1995/000080 WO1995022834A1 (en) 1994-02-17 1995-02-17 Detector for detecting photons or particles, method for fabricating the detector, and measuring method
US08/700,441 US5914491A (en) 1994-02-17 1995-02-17 Detector for detecting photons or particles, method for fabricating the detector, and measuring method
EP95908964A EP0746871B1 (en) 1994-02-17 1995-02-17 Detector for detecting photons or particles, method for fabricating the detector, and measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI940740A FI940740A0 (fi) 1994-02-17 1994-02-17 Detektor foer paovisning av fotoner eller partiklar, foerfarande foer framstaellning av detektorn och maetningsfoerfarande

Publications (1)

Publication Number Publication Date
FI940740A0 true FI940740A0 (fi) 1994-02-17

Family

ID=8540135

Family Applications (1)

Application Number Title Priority Date Filing Date
FI940740A FI940740A0 (fi) 1994-02-17 1994-02-17 Detektor foer paovisning av fotoner eller partiklar, foerfarande foer framstaellning av detektorn och maetningsfoerfarande

Country Status (6)

Country Link
US (1) US5914491A (fi)
EP (1) EP0746871B1 (fi)
AU (1) AU1709295A (fi)
DE (1) DE69517304D1 (fi)
FI (1) FI940740A0 (fi)
WO (1) WO1995022834A1 (fi)

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EP0876678A1 (en) * 1996-01-25 1998-11-11 Era Patents Limited Photomultiplier
JPH10326579A (ja) * 1997-03-28 1998-12-08 Canon Inc 画像形成装置とその製造方法
US6492657B1 (en) * 2000-01-27 2002-12-10 Burle Technologies, Inc. Integrated semiconductor microchannel plate and planar diode electron flux amplifier and collector
US20050077539A1 (en) * 2003-08-18 2005-04-14 Jan Lipson Semiconductor avalanche photodetector with vacuum or gaseous gap electron acceleration region
CA2684811C (en) * 2009-11-06 2017-05-23 Bubble Technology Industries Inc. Microstructure photomultiplier assembly
US8873596B2 (en) 2011-07-22 2014-10-28 Kla-Tencor Corporation Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal
US10197501B2 (en) 2011-12-12 2019-02-05 Kla-Tencor Corporation Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors
US9496425B2 (en) 2012-04-10 2016-11-15 Kla-Tencor Corporation Back-illuminated sensor with boron layer
US9601299B2 (en) 2012-08-03 2017-03-21 Kla-Tencor Corporation Photocathode including silicon substrate with boron layer
US9151940B2 (en) 2012-12-05 2015-10-06 Kla-Tencor Corporation Semiconductor inspection and metrology system using laser pulse multiplier
US9426400B2 (en) 2012-12-10 2016-08-23 Kla-Tencor Corporation Method and apparatus for high speed acquisition of moving images using pulsed illumination
US9529182B2 (en) 2013-02-13 2016-12-27 KLA—Tencor Corporation 193nm laser and inspection system
US9608399B2 (en) 2013-03-18 2017-03-28 Kla-Tencor Corporation 193 nm laser and an inspection system using a 193 nm laser
US9478402B2 (en) 2013-04-01 2016-10-25 Kla-Tencor Corporation Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor
RU2546053C1 (ru) * 2013-09-13 2015-04-10 Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Саратовский Государственный Университет Имени Н.Г. Чернышевского" Способ создания сверхбыстродействующего вакуумного туннельного фотодиода с наноструктурированным эмиттером
US9347890B2 (en) 2013-12-19 2016-05-24 Kla-Tencor Corporation Low-noise sensor and an inspection system using a low-noise sensor
US9748294B2 (en) 2014-01-10 2017-08-29 Hamamatsu Photonics K.K. Anti-reflection layer for back-illuminated sensor
US9410901B2 (en) 2014-03-17 2016-08-09 Kla-Tencor Corporation Image sensor, an inspection system and a method of inspecting an article
US9804101B2 (en) 2014-03-20 2017-10-31 Kla-Tencor Corporation System and method for reducing the bandwidth of a laser and an inspection system and method using a laser
US9767986B2 (en) 2014-08-29 2017-09-19 Kla-Tencor Corporation Scanning electron microscope and methods of inspecting and reviewing samples
US9419407B2 (en) 2014-09-25 2016-08-16 Kla-Tencor Corporation Laser assembly and inspection system using monolithic bandwidth narrowing apparatus
US9748729B2 (en) 2014-10-03 2017-08-29 Kla-Tencor Corporation 183NM laser and inspection system
US9860466B2 (en) 2015-05-14 2018-01-02 Kla-Tencor Corporation Sensor with electrically controllable aperture for inspection and metrology systems
US10748730B2 (en) 2015-05-21 2020-08-18 Kla-Tencor Corporation Photocathode including field emitter array on a silicon substrate with boron layer
US10462391B2 (en) 2015-08-14 2019-10-29 Kla-Tencor Corporation Dark-field inspection using a low-noise sensor
US10313622B2 (en) 2016-04-06 2019-06-04 Kla-Tencor Corporation Dual-column-parallel CCD sensor and inspection systems using a sensor
US10778925B2 (en) 2016-04-06 2020-09-15 Kla-Tencor Corporation Multiple column per channel CCD sensor architecture for inspection and metrology
US10175555B2 (en) 2017-01-03 2019-01-08 KLA—Tencor Corporation 183 nm CW laser and inspection system
US11114489B2 (en) 2018-06-18 2021-09-07 Kla-Tencor Corporation Back-illuminated sensor and a method of manufacturing a sensor
US10943760B2 (en) 2018-10-12 2021-03-09 Kla Corporation Electron gun and electron microscope
US11114491B2 (en) 2018-12-12 2021-09-07 Kla Corporation Back-illuminated sensor and a method of manufacturing a sensor
US11848350B2 (en) 2020-04-08 2023-12-19 Kla Corporation Back-illuminated sensor and a method of manufacturing a sensor using a silicon on insulator wafer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3513345A (en) 1967-12-13 1970-05-19 Westinghouse Electric Corp High speed electron multiplier
US4586068A (en) * 1983-10-07 1986-04-29 Rockwell International Corporation Solid state photomultiplier
US5326978A (en) * 1992-12-17 1994-07-05 Intevac, Inc. Focused electron-bombarded detector
US5349177A (en) * 1993-02-22 1994-09-20 Itt Corporation Image intensifier tube having a solid state electron amplifier

Also Published As

Publication number Publication date
EP0746871B1 (en) 2000-05-31
DE69517304D1 (de) 2000-07-06
EP0746871A1 (en) 1996-12-11
AU1709295A (en) 1995-09-04
WO1995022834A1 (en) 1995-08-24
US5914491A (en) 1999-06-22

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Legal Events

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