FI940240A0 - Menetelmä mikrohuokoisen, kaasua läpäisevän elektrodin valmistamiseksisekä mikrohuokoinen kaasua läpäisevä elektrodi - Google Patents
Menetelmä mikrohuokoisen, kaasua läpäisevän elektrodin valmistamiseksisekä mikrohuokoinen kaasua läpäisevä elektrodiInfo
- Publication number
- FI940240A0 FI940240A0 FI940240A FI940240A FI940240A0 FI 940240 A0 FI940240 A0 FI 940240A0 FI 940240 A FI940240 A FI 940240A FI 940240 A FI940240 A FI 940240A FI 940240 A0 FI940240 A0 FI 940240A0
- Authority
- FI
- Finland
- Prior art keywords
- permeable electrode
- microporous gas
- manufacturing
- microporous
- gas
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Electrochemistry (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Physical Vapour Deposition (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI940240A FI98861C (fi) | 1994-01-18 | 1994-01-18 | Menetelmä mikrohuokoisen, kaasua läpäisevän elektrodin valmistamiseksisekä mikrohuokoinen kaasua läpäisevä elektrodi |
DE69418174T DE69418174T2 (de) | 1994-01-18 | 1994-12-23 | Microporöse gasdurchlässige Elektrode und Verfahren zur Herstellung derselben |
EP94309784A EP0665303B1 (en) | 1994-01-18 | 1994-12-23 | Method of producing a microporous, gas permeable electrode structure and a microporous, gas permeable electrode structure |
US08/371,128 US5607564A (en) | 1994-01-18 | 1995-01-11 | Method of producing a microporous, gas permeable electrode structure and a microporous, gas permeable electrode structure |
JP00501195A JP3585973B2 (ja) | 1994-01-18 | 1995-01-17 | ミクロ細孔ガス透過性電極構造の製法及びミクロ細孔ガス透過性電極構造 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI940240 | 1994-01-18 | ||
FI940240A FI98861C (fi) | 1994-01-18 | 1994-01-18 | Menetelmä mikrohuokoisen, kaasua läpäisevän elektrodin valmistamiseksisekä mikrohuokoinen kaasua läpäisevä elektrodi |
Publications (4)
Publication Number | Publication Date |
---|---|
FI940240A0 true FI940240A0 (fi) | 1994-01-18 |
FI940240A FI940240A (fi) | 1995-07-19 |
FI98861B FI98861B (fi) | 1997-05-15 |
FI98861C FI98861C (fi) | 1997-08-25 |
Family
ID=8539544
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI940240A FI98861C (fi) | 1994-01-18 | 1994-01-18 | Menetelmä mikrohuokoisen, kaasua läpäisevän elektrodin valmistamiseksisekä mikrohuokoinen kaasua läpäisevä elektrodi |
Country Status (5)
Country | Link |
---|---|
US (1) | US5607564A (fi) |
EP (1) | EP0665303B1 (fi) |
JP (1) | JP3585973B2 (fi) |
DE (1) | DE69418174T2 (fi) |
FI (1) | FI98861C (fi) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2774499B1 (fr) * | 1998-02-03 | 2000-04-07 | Silmag Sa | Procede de realisation d'une couche mince perpendiculaire a la surface d'un substrat |
AU2000244335A1 (en) * | 2000-05-15 | 2001-11-26 | Yamatake Corporation | Humidity sensor |
EP1262767B1 (en) * | 2001-05-31 | 2011-02-16 | Ngk Spark Plug Co., Ltd | Humidity sensor |
JP5041837B2 (ja) * | 2007-03-20 | 2012-10-03 | 富士電機株式会社 | 薄膜ガスセンサおよびその製造方法 |
US8124246B2 (en) * | 2008-11-19 | 2012-02-28 | Honeywell International Inc. | Coated components and methods of fabricating coated components and coated turbine disks |
JP5385657B2 (ja) * | 2009-03-27 | 2014-01-08 | 株式会社堀場製作所 | ガスセンサ |
US9689785B2 (en) * | 2012-06-18 | 2017-06-27 | Postech Academy-Industry Foundation | Metal oxide semiconductor gas sensor having nanostructure and method for manufacturing same |
EP3004868B1 (en) | 2013-05-30 | 2022-12-28 | Vaisala Oyj | A dual gas sensor structure and measurement method |
EP3495807A1 (en) * | 2017-12-08 | 2019-06-12 | MEAS France | Method for manufacturing a humidity sensor and humidity sensor |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2056503B (en) * | 1979-08-09 | 1983-12-07 | Standard Telephones Cables Ltd | Porous metal films |
JPH0244023B2 (ja) * | 1982-04-28 | 1990-10-02 | Hokuriku Elect Ind | Alnoyokyokusankahakumakuomochiitashitsudosensasoshioyobisonoseizohoho |
JPS5983352A (ja) * | 1982-11-05 | 1984-05-14 | Nissan Motor Co Ltd | 燃料電池用電極の製造方法 |
JPS59173743A (ja) * | 1983-03-23 | 1984-10-01 | Sharp Corp | 感湿素子 |
DE3345990A1 (de) * | 1983-12-20 | 1985-06-27 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen einer implantierbaren elektrode |
JPS60140609A (ja) * | 1983-12-27 | 1985-07-25 | シャープ株式会社 | 透湿性導電膜の製造方法 |
JPS61277046A (ja) * | 1985-05-31 | 1986-12-08 | Chino Corp | 湿度素子 |
EP0349925A1 (de) * | 1988-07-04 | 1990-01-10 | INTERATOM Gesellschaft mit beschränkter Haftung | Verfahren zum Beschichten von Gegenständen aus hochschmelzenden Metallen |
JP2629963B2 (ja) * | 1989-06-30 | 1997-07-16 | 旭硝子株式会社 | 高耐久性低水素過電圧陰極 |
US5104695A (en) * | 1989-09-08 | 1992-04-14 | International Business Machines Corporation | Method and apparatus for vapor deposition of material onto a substrate |
-
1994
- 1994-01-18 FI FI940240A patent/FI98861C/fi not_active IP Right Cessation
- 1994-12-23 EP EP94309784A patent/EP0665303B1/en not_active Expired - Lifetime
- 1994-12-23 DE DE69418174T patent/DE69418174T2/de not_active Expired - Lifetime
-
1995
- 1995-01-11 US US08/371,128 patent/US5607564A/en not_active Expired - Lifetime
- 1995-01-17 JP JP00501195A patent/JP3585973B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
FI98861C (fi) | 1997-08-25 |
FI940240A (fi) | 1995-07-19 |
FI98861B (fi) | 1997-05-15 |
DE69418174T2 (de) | 1999-10-28 |
US5607564A (en) | 1997-03-04 |
JP3585973B2 (ja) | 2004-11-10 |
DE69418174D1 (de) | 1999-06-02 |
JPH07260733A (ja) | 1995-10-13 |
EP0665303B1 (en) | 1999-04-28 |
EP0665303A1 (en) | 1995-08-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BB | Publication of examined application | ||
MA | Patent expired |