FI862763A0 - Plasmaprocessenhet med cellstruktur. - Google Patents
Plasmaprocessenhet med cellstruktur.Info
- Publication number
- FI862763A0 FI862763A0 FI862763A FI862763A FI862763A0 FI 862763 A0 FI862763 A0 FI 862763A0 FI 862763 A FI862763 A FI 862763A FI 862763 A FI862763 A FI 862763A FI 862763 A0 FI862763 A0 FI 862763A0
- Authority
- FI
- Finland
- Prior art keywords
- plasmaprocessenhet
- cellstruktur
- med
- plasmaprocessenhet med
- med cellstruktur
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
- B01J12/002—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor carried out in the plasma state
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI862763A FI75968C (fi) | 1986-06-30 | 1986-06-30 | Plasmaprocessenhet med cellstruktur. |
PCT/FI1987/000088 WO1988000088A1 (en) | 1986-06-30 | 1987-06-30 | Shell-structured plasma process unit |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI862763 | 1986-06-30 | ||
FI862763A FI75968C (fi) | 1986-06-30 | 1986-06-30 | Plasmaprocessenhet med cellstruktur. |
Publications (4)
Publication Number | Publication Date |
---|---|
FI862763A0 true FI862763A0 (fi) | 1986-06-30 |
FI862763A FI862763A (fi) | 1987-12-31 |
FI75968B FI75968B (fi) | 1988-04-29 |
FI75968C FI75968C (fi) | 1988-08-08 |
Family
ID=8522853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI862763A FI75968C (fi) | 1986-06-30 | 1986-06-30 | Plasmaprocessenhet med cellstruktur. |
Country Status (2)
Country | Link |
---|---|
FI (1) | FI75968C (fi) |
WO (1) | WO1988000088A1 (fi) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8906045D0 (en) * | 1989-03-16 | 1989-04-26 | Davy Mckee London | Apparatus |
BR9307981B1 (pt) * | 1992-06-15 | 2010-07-27 | encosto para uma cadeira. | |
US7160521B2 (en) | 2001-07-11 | 2007-01-09 | Applied Materials, Inc. | Treatment of effluent from a substrate processing chamber |
WO2004064983A1 (en) * | 2003-01-13 | 2004-08-05 | Applied Materials, Inc. | Treatment of effluent from a substrate processing chamber |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3780675A (en) * | 1972-04-18 | 1973-12-25 | Boardman Co | Plasma arc refuse disintegrator |
CA1225441A (en) * | 1984-01-23 | 1987-08-11 | Edward S. Fox | Plasma pyrolysis waste destruction |
-
1986
- 1986-06-30 FI FI862763A patent/FI75968C/fi not_active IP Right Cessation
-
1987
- 1987-06-30 WO PCT/FI1987/000088 patent/WO1988000088A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
FI75968C (fi) | 1988-08-08 |
FI862763A (fi) | 1987-12-31 |
FI75968B (fi) | 1988-04-29 |
WO1988000088A1 (en) | 1988-01-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM | Patent lapsed | ||
MM | Patent lapsed |
Owner name: IMATRAN VOIMA OY |