FI20165553A - Mikromekaaninen resonaattori - Google Patents

Mikromekaaninen resonaattori

Info

Publication number
FI20165553A
FI20165553A FI20165553A FI20165553A FI20165553A FI 20165553 A FI20165553 A FI 20165553A FI 20165553 A FI20165553 A FI 20165553A FI 20165553 A FI20165553 A FI 20165553A FI 20165553 A FI20165553 A FI 20165553A
Authority
FI
Finland
Prior art keywords
location
resonator element
length
width
smaller portion
Prior art date
Application number
FI20165553A
Other languages
English (en)
Swedish (sv)
Other versions
FI127787B (fi
Inventor
Antti Jaakkola
Panu Pekko
Original Assignee
Teknologian Tutkimuskeskus Vtt Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teknologian Tutkimuskeskus Vtt Oy filed Critical Teknologian Tutkimuskeskus Vtt Oy
Priority to FI20165553A priority Critical patent/FI127787B/fi
Priority to EP17746152.2A priority patent/EP3479477B1/en
Priority to JP2018568200A priority patent/JP7069056B2/ja
Priority to CN201780040389.4A priority patent/CN109417373B/zh
Priority to KR1020197002410A priority patent/KR102408336B1/ko
Priority to US16/313,655 priority patent/US10931255B2/en
Priority to PCT/FI2017/050486 priority patent/WO2018002439A1/en
Publication of FI20165553A publication Critical patent/FI20165553A/fi
Application granted granted Critical
Publication of FI127787B publication Critical patent/FI127787B/fi
Priority to JP2021165989A priority patent/JP7266077B2/ja

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0081—Thermal properties
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2436—Disk resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H03H2009/02385—Anchors for square resonators, i.e. resonators comprising a square vibrating membrane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02527—Combined
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H2009/2442—Square resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Thermal Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
FI20165553A 2016-07-01 2016-07-01 Mikromekaaninen resonaattori FI127787B (fi)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FI20165553A FI127787B (fi) 2016-07-01 2016-07-01 Mikromekaaninen resonaattori
EP17746152.2A EP3479477B1 (en) 2016-07-01 2017-06-29 Micromechanical resonator
JP2018568200A JP7069056B2 (ja) 2016-07-01 2017-06-29 マイクロメカニカル共振器
CN201780040389.4A CN109417373B (zh) 2016-07-01 2017-06-29 微机械谐振器
KR1020197002410A KR102408336B1 (ko) 2016-07-01 2017-06-29 마이크로기계식 공진기
US16/313,655 US10931255B2 (en) 2016-07-01 2017-06-29 Micromechanical resonator
PCT/FI2017/050486 WO2018002439A1 (en) 2016-07-01 2017-06-29 Micromechanical resonator
JP2021165989A JP7266077B2 (ja) 2016-07-01 2021-10-08 マイクロメカニカル共振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20165553A FI127787B (fi) 2016-07-01 2016-07-01 Mikromekaaninen resonaattori

Publications (2)

Publication Number Publication Date
FI20165553A true FI20165553A (fi) 2018-01-02
FI127787B FI127787B (fi) 2019-02-28

Family

ID=59501478

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20165553A FI127787B (fi) 2016-07-01 2016-07-01 Mikromekaaninen resonaattori

Country Status (7)

Country Link
US (1) US10931255B2 (fi)
EP (1) EP3479477B1 (fi)
JP (2) JP7069056B2 (fi)
KR (1) KR102408336B1 (fi)
CN (1) CN109417373B (fi)
FI (1) FI127787B (fi)
WO (1) WO2018002439A1 (fi)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019048736A1 (en) 2017-09-05 2019-03-14 Tikitin Oy FREQUENCY REFERENCE OSCILLATOR DEVICE AND METHOD FOR STABILIZING FREQUENCY REFERENCE SIGNAL
WO2019048737A1 (en) 2017-09-05 2019-03-14 Tikitin Oy FREQUENCY REFERENCE OSCILLATOR WITH REGULATED TEMPERATURE ENCLOSURE AND METHOD FOR MANUFACTURING THE SAME

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11533042B2 (en) * 2018-01-16 2022-12-20 Georgia Tech Research Corporation Distributed-mode beam and frame resonators for high frequency timing circuits
FI128208B (fi) 2018-02-08 2019-12-31 Tikitin Oy Kytketty MEMS-resonaattori
US10476480B1 (en) * 2018-07-06 2019-11-12 Globalfoundries Singapore Pte. Ltd. Dual-mode MEMS resonator, oscillator, sensor, timing device, acoustic filter and front-end module and the methods of making
US11626856B2 (en) * 2019-10-30 2023-04-11 X-Celeprint Limited Non-linear tethers for suspended devices
US11637540B2 (en) 2019-10-30 2023-04-25 X-Celeprint Limited Non-linear tethers for suspended devices
WO2023162301A1 (ja) * 2022-02-28 2023-08-31 株式会社村田製作所 共振子、共振装置、及び共振子製造方法

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JPS5459278U (fi) * 1977-10-03 1979-04-24
US6710680B2 (en) * 2001-12-20 2004-03-23 Motorola, Inc. Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges
WO2010077311A1 (en) * 2008-12-17 2010-07-08 Sand9, Inc. Multi-port mechanical resonating devices and related methods
JP5848131B2 (ja) * 2008-12-17 2016-01-27 アナログ デバイシス， インコーポレイテッド 機械共振構造体を備える機器
FR2946479A1 (fr) * 2009-06-09 2010-12-10 Commissariat Energie Atomique Resonateur electromecanique a ancrage resonant.
JP2012531097A (ja) * 2009-06-19 2012-12-06 ジョージア・テック・リサーチ・コーポレイション 受動温度補償を提供する高密度トレンチアレイを有するマイクロメカニカル共振器を形成する方法
FI124453B (fi) * 2010-08-13 2014-09-15 Valtion Teknillinen Mikromekaaninen resonaattorijärjestelmä ja menetelmä sen valmistamiseksi
FI20105851A (fi) 2010-08-13 2012-02-14 Valtion Teknillinen Mikromekaaninen resonaattori ja menetelmä sen valmistamiseksi
EP2479891A1 (en) 2011-01-21 2012-07-25 Imec MEMS resonator with optimized support anchoring
FI126586B (fi) * 2011-02-17 2017-02-28 Teknologian Tutkimuskeskus Vtt Oy Uudet mikromekaaniset laitteet
FI123933B (fi) * 2011-05-13 2013-12-31 Teknologian Tutkimuskeskus Vtt Mikromekaaninen laite ja menetelmä sen suunnittelemiseksi
US9431993B1 (en) * 2011-09-26 2016-08-30 Micrel, Incorporated Temperature compensated resonator with a pair of spaced apart internal dielectric layers
US9299910B1 (en) * 2012-05-17 2016-03-29 Analog Devices, Inc. Resonator anchors and related apparatus and methods
US9954513B1 (en) * 2012-12-21 2018-04-24 Analog Devices, Inc. Methods and apparatus for anchoring resonators
JP6094671B2 (ja) 2013-05-13 2017-03-15 株式会社村田製作所 振動装置
JP6213563B2 (ja) 2013-07-04 2017-10-18 株式会社村田製作所 振動装置
WO2016006433A1 (ja) * 2014-07-10 2016-01-14 株式会社村田製作所 振動装置
EP3202034B1 (en) * 2014-10-03 2020-05-06 Teknologian Tutkimuskeskus VTT OY Temperature compensated compound resonator
WO2016051025A1 (en) * 2014-10-03 2016-04-07 Teknologian Tutkimuskeskus Vtt Oy Temperature compensated plate resonator
JP6644355B2 (ja) 2016-05-26 2020-02-12 株式会社村田製作所 共振子及び共振装置
US10367469B2 (en) * 2016-12-22 2019-07-30 Murata Manufacturing Co., Ltd. Corner coupling resonator array

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019048736A1 (en) 2017-09-05 2019-03-14 Tikitin Oy FREQUENCY REFERENCE OSCILLATOR DEVICE AND METHOD FOR STABILIZING FREQUENCY REFERENCE SIGNAL
WO2019048737A1 (en) 2017-09-05 2019-03-14 Tikitin Oy FREQUENCY REFERENCE OSCILLATOR WITH REGULATED TEMPERATURE ENCLOSURE AND METHOD FOR MANUFACTURING THE SAME

Also Published As

Publication number Publication date
JP7069056B2 (ja) 2022-05-17
US20190173450A1 (en) 2019-06-06
JP2022003827A (ja) 2022-01-11
JP2019525548A (ja) 2019-09-05
JP7266077B2 (ja) 2023-04-27
EP3479477B1 (en) 2019-12-04
KR102408336B1 (ko) 2022-06-14
KR20190026784A (ko) 2019-03-13
FI127787B (fi) 2019-02-28
CN109417373A (zh) 2019-03-01
CN109417373B (zh) 2023-04-04
EP3479477A1 (en) 2019-05-08
US10931255B2 (en) 2021-02-23
WO2018002439A1 (en) 2018-01-04

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