FI20155151A - Mirror plate for Fabry-Perot interferometer and Fabry-Perot interferometer - Google Patents

Mirror plate for Fabry-Perot interferometer and Fabry-Perot interferometer Download PDF

Info

Publication number
FI20155151A
FI20155151A FI20155151A FI20155151A FI20155151A FI 20155151 A FI20155151 A FI 20155151A FI 20155151 A FI20155151 A FI 20155151A FI 20155151 A FI20155151 A FI 20155151A FI 20155151 A FI20155151 A FI 20155151A
Authority
FI
Finland
Prior art keywords
fabry
perot interferometer
mirror plate
perot
interferometer
Prior art date
Application number
FI20155151A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI127159B (en
Inventor
Aapo Varpula
Mika Prunnila
Kestutis Grigoras
Original Assignee
Teknologian Tutkimuskeskus Vtt Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teknologian Tutkimuskeskus Vtt Oy filed Critical Teknologian Tutkimuskeskus Vtt Oy
Priority to FI20155151A priority Critical patent/FI127159B/en
Priority to EP16761146.6A priority patent/EP3268708B1/en
Priority to PCT/FI2016/050139 priority patent/WO2016142583A1/en
Priority to JP2017547156A priority patent/JP6730300B2/en
Priority to US15/556,662 priority patent/US10495514B2/en
Priority to CN201680014528.1A priority patent/CN107430032B/en
Publication of FI20155151A publication Critical patent/FI20155151A/en
Application granted granted Critical
Publication of FI127159B publication Critical patent/FI127159B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0414—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using plane or convex mirrors, parallel phase plates, or plane beam-splitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0278—Control or determination of height or angle information for sensors or receivers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02019—Chemical etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G01J2003/2879—Calibrating scan, e.g. Fabry Perot interferometer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
FI20155151A 2015-03-09 2015-03-09 Mirror disk for Fabry-Perot interferometer and Fabry-Perot interferometer FI127159B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI20155151A FI127159B (en) 2015-03-09 2015-03-09 Mirror disk for Fabry-Perot interferometer and Fabry-Perot interferometer
EP16761146.6A EP3268708B1 (en) 2015-03-09 2016-03-08 A mirror plate for a fabry-perot interferometer and a fabry-perot interferometer
PCT/FI2016/050139 WO2016142583A1 (en) 2015-03-09 2016-03-08 A mirror plate for a fabry-perot interferometer and a fabry-perot interferometer
JP2017547156A JP6730300B2 (en) 2015-03-09 2016-03-08 Mirror plate for Fabry-Perot interferometer, and Fabry-Perot interferometer
US15/556,662 US10495514B2 (en) 2015-03-09 2016-03-08 Mirror plate for a fabry-perot interferometer and a fabry-perot interferometer
CN201680014528.1A CN107430032B (en) 2015-03-09 2016-03-08 Runner plate and Fabry-Perot interferometer for Fabry-Perot interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20155151A FI127159B (en) 2015-03-09 2015-03-09 Mirror disk for Fabry-Perot interferometer and Fabry-Perot interferometer

Publications (2)

Publication Number Publication Date
FI20155151A true FI20155151A (en) 2016-09-10
FI127159B FI127159B (en) 2017-12-15

Family

ID=56879977

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20155151A FI127159B (en) 2015-03-09 2015-03-09 Mirror disk for Fabry-Perot interferometer and Fabry-Perot interferometer

Country Status (6)

Country Link
US (1) US10495514B2 (en)
EP (1) EP3268708B1 (en)
JP (1) JP6730300B2 (en)
CN (1) CN107430032B (en)
FI (1) FI127159B (en)
WO (1) WO2016142583A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6958131B2 (en) * 2017-08-31 2021-11-02 セイコーエプソン株式会社 Optical modules, electronic devices, and control methods for optical modules
CN109870449B (en) * 2019-02-25 2021-11-26 京东方科技集团股份有限公司 Gas monitoring device, system and method and cabinet
FI20225209A1 (en) * 2019-10-09 2022-03-09 Hamamatsu Photonics Kk Light detection device
JP7304534B2 (en) * 2020-10-30 2023-07-07 パナソニックＩｐマネジメント株式会社 Photodetector, structure manufacturing method, and photodetector manufacturing method
CN114647076A (en) * 2022-03-23 2022-06-21 优尼科(青岛)微电子有限公司 Leveling system and leveling method for electrostatic MEMS Fabry-Perot cavity chip

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5525828A (en) * 1991-10-31 1996-06-11 International Business Machines Corporation High speed silicon-based lateral junction photodetectors having recessed electrodes and thick oxide to reduce fringing fields
US6381022B1 (en) * 1992-01-22 2002-04-30 Northeastern University Light modulating device
US5799028A (en) * 1996-07-18 1998-08-25 Sdl, Inc. Passivation and protection of a semiconductor surface
US6399405B1 (en) * 1998-12-21 2002-06-04 Xerox Corporation Process for constructing a spectrophotometer
US20050032357A1 (en) * 2002-01-17 2005-02-10 Rantala Juha T. Dielectric materials and methods for integrated circuit applications
CN1619295A (en) * 2004-12-10 2005-05-25 南京农业大学 Pork colour grading instrument
JP4379457B2 (en) * 2006-01-19 2009-12-09 セイコーエプソン株式会社 Optical device, wavelength tunable filter, wavelength tunable filter module, and optical spectrum analyzer
CN100538432C (en) * 2006-01-19 2009-09-09 精工爱普生株式会社 Wave length variable filter, wave length variable filter module and optical spectrum analyser
JP2010127739A (en) * 2008-11-27 2010-06-10 Toppan Printing Co Ltd Spectral sensitivity characteristic measurement apparatus and spectral sensitivity characteristic measurement method
JP2011027780A (en) * 2009-07-21 2011-02-10 Denso Corp Fabry-perot interferometer and manufacturing method of the same
IL201742A0 (en) * 2009-10-25 2010-06-16 Elbit Sys Electro Optics Elop Tunable spectral filter
JP5716412B2 (en) 2011-01-24 2015-05-13 セイコーエプソン株式会社 Wavelength variable interference filter, optical module, and optical analyzer
FI125612B (en) 2012-05-08 2015-12-15 Teknologian Tutkimuskeskus Vtt Oy Fabry-Perot interferometer
JP6182918B2 (en) * 2013-03-18 2017-08-23 セイコーエプソン株式会社 Interference filter, optical filter device, optical module, and electronic apparatus
FI125690B (en) * 2013-06-18 2016-01-15 Teknologian Tutkimuskeskus Vtt Oy Mirror for a Fabry-Perot interferometer and method of manufacturing the same

Also Published As

Publication number Publication date
JP2018511822A (en) 2018-04-26
CN107430032A (en) 2017-12-01
FI127159B (en) 2017-12-15
EP3268708A1 (en) 2018-01-17
US10495514B2 (en) 2019-12-03
WO2016142583A1 (en) 2016-09-15
EP3268708B1 (en) 2020-04-29
CN107430032B (en) 2019-04-16
US20180052049A1 (en) 2018-02-22
JP6730300B2 (en) 2020-07-29
EP3268708A4 (en) 2018-08-29

Similar Documents

Publication Publication Date Title
MA53943A (en) ROR-GAMMA MODULATORS
MA55328A (en) ROR-GAMMA MODULATORS
DK3722274T3 (en) 2-PERFLUORBUTYLPENTANE FOR OPHTHALMIC ADMINISTRATION
FI20135666A (en) Mirror for Fabry-Perot interferometer and method for its manufacture
FI20146151A (en) Mirror plate for optical interferometer and optical interferometer
DK3529240T3 (en) Pharmaceutical compounds
DK3490986T3 (en) PIPERIDINE-CXCR7 RECEPTOR MODULATORS
DK3634377T3 (en) Pharmaceutical formulation
EP3539351A4 (en) Devices for per-cc measurement gap configuration
DK3278801T3 (en) PHARMACEUTICAL COMPOSITION CONTAINING MIRROR BACKGROUND
DK3463345T3 (en) PHARMACEUTICAL COMBINATIONS
FI20155151A (en) Mirror plate for Fabry-Perot interferometer and Fabry-Perot interferometer
DK3386591T3 (en) HETEROAROMATIC NMDA RECEPTOR MODULATORS AND USES THEREOF
DK3365629T3 (en) H-SHAPED WATERPASS
DK3601277T3 (en) PHARMACEUTICAL FORMULATION
DK3548016T3 (en) ROR-GAMMA (RORY) MODULATORS
DK3371163T3 (en) PYRROLIDINE DERIVATIVES
EP3330686A4 (en) Optical interferometer
DK3606953T3 (en) FGFR3-BINDING MOLECULES
GB201614185D0 (en) Compact interferometer spectrometer
DK3424500T3 (en) PHARMACEUTICAL COMPOSITION INCLUDING FAMITINIB
EP3321650A4 (en) Optical interferometer
FR3056165B3 (en) MIRROR
FI12003U1 (en) Sauna and element for sauna
IT201700101845A1 (en) Perfected glasses case

Legal Events

Date Code Title Description
FG Patent granted

Ref document number: 127159

Country of ref document: FI

Kind code of ref document: B