FI20155015A - Kapasitiivisen sensorin jatkuva itsetestaus - Google Patents
Kapasitiivisen sensorin jatkuva itsetestausInfo
- Publication number
- FI20155015A FI20155015A FI20155015A FI20155015A FI20155015A FI 20155015 A FI20155015 A FI 20155015A FI 20155015 A FI20155015 A FI 20155015A FI 20155015 A FI20155015 A FI 20155015A FI 20155015 A FI20155015 A FI 20155015A
- Authority
- FI
- Finland
- Prior art keywords
- testing
- capacitive sensor
- continuous self
- self
- continuous
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3187—Built-in tests
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D2218/00—Indexing scheme relating to details of testing or calibration
- G01D2218/10—Testing of sensors or measuring arrangements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20155015A FI127069B (fi) | 2015-01-12 | 2015-01-12 | Kapasitiivisen sensorin jatkuva itsetestaus |
TW104136836A TWI611189B (zh) | 2015-01-12 | 2015-11-09 | 用於在電容感測器中進行連續自我測試的裝置和方法 |
EP16701368.9A EP3245523B1 (en) | 2015-01-12 | 2016-01-08 | Continuous self-test for capacitive sensors |
PCT/IB2016/050088 WO2016113653A1 (en) | 2015-01-12 | 2016-01-08 | Continuous self-test in capacitive sensor |
US14/992,107 US10024882B2 (en) | 2015-01-12 | 2016-01-11 | Continuous self-test in capacitive sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20155015A FI127069B (fi) | 2015-01-12 | 2015-01-12 | Kapasitiivisen sensorin jatkuva itsetestaus |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20155015A true FI20155015A (fi) | 2016-07-13 |
FI127069B FI127069B (fi) | 2017-10-31 |
Family
ID=55221466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20155015A FI127069B (fi) | 2015-01-12 | 2015-01-12 | Kapasitiivisen sensorin jatkuva itsetestaus |
Country Status (5)
Country | Link |
---|---|
US (1) | US10024882B2 (fi) |
EP (1) | EP3245523B1 (fi) |
FI (1) | FI127069B (fi) |
TW (1) | TWI611189B (fi) |
WO (1) | WO2016113653A1 (fi) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT201600103234A1 (it) | 2016-10-14 | 2018-04-14 | Green Seas Ventures Ldt | Sistema Costruttivo afferente un sensore capacitivo di tensione |
EP3327446B1 (en) * | 2016-11-24 | 2019-06-05 | EM Microelectronic-Marin SA | Capacitive accelerometer |
US9983032B1 (en) | 2017-06-01 | 2018-05-29 | Nxp Usa, Inc. | Sensor device and method for continuous fault monitoring of sensor device |
EP3524999B1 (en) * | 2018-02-08 | 2023-12-06 | Nxp B.V. | Built-in self-test for a radar unit receiver and method therefor |
US10531213B2 (en) * | 2018-03-29 | 2020-01-07 | Cirrus Logic, Inc. | MEMS transducer system |
IT201800004114A1 (it) | 2018-03-30 | 2019-09-30 | Green Seas Ventures Ltd C/O Citco B V I Ltd | Sistema costruttivo afferente un sensore capacitivo di tensione |
US11112269B2 (en) | 2018-07-09 | 2021-09-07 | Analog Devices, Inc. | Methods and systems for self-testing MEMS inertial sensors |
CN109085370A (zh) * | 2018-08-31 | 2018-12-25 | 高新兴创联科技有限公司 | 机车速度采集装置及控制方法 |
WO2020131903A1 (en) | 2018-12-17 | 2020-06-25 | G & W Electric Company | Electrical sensor assembly |
US11346876B2 (en) | 2018-12-17 | 2022-05-31 | G & W Electric Company | Electrical sensor assembly |
US11268975B2 (en) * | 2019-12-19 | 2022-03-08 | Invensense, Inc. | Accelerometer sensitivity self-calibration with duty cycle control of drive signal |
EP4092424A1 (en) | 2021-05-19 | 2022-11-23 | Murata Manufacturing Co., Ltd. | Safety mechanism for sensors |
US11953533B2 (en) * | 2021-06-15 | 2024-04-09 | Capital One Services, Llc | Detecting capacitive faults and sensitivity faults in capacitive sensors |
US20230128205A1 (en) * | 2021-10-25 | 2023-04-27 | Stmicroelectronics S.R.L. | Mems accelerometer self-test using a variable excitation voltage and fixed timing |
US20230152346A1 (en) * | 2021-11-16 | 2023-05-18 | Alexey Vladimirovich Veryyaskin | Capacitance sensing method and assembly |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5900529A (en) * | 1997-07-10 | 1999-05-04 | Trw Inc. | Apparatus and method for testing an acceleration sensor |
US6629448B1 (en) | 2000-02-25 | 2003-10-07 | Seagate Technology Llc | In-situ testing of a MEMS accelerometer in a disc storage system |
US6497146B1 (en) * | 2000-09-15 | 2002-12-24 | Bei Technologies, Inc. | Inertial rate sensor and method with built-in testing |
JP2004258019A (ja) * | 2003-02-06 | 2004-09-16 | Denso Corp | 物理量センサ |
US7031863B2 (en) * | 2003-12-22 | 2006-04-18 | Texas Instruments Incorporated | Variable condition responsive sense system and method |
TWI292034B (en) * | 2006-01-18 | 2008-01-01 | Analog Integrations Corp | Single-chip device for micro-array inertial system |
EP1959233A1 (en) * | 2007-02-13 | 2008-08-20 | STMicroelectronics S.r.l. | Microelectromechanical gyroscope with self-test function and control method of a microelectromechanical gyroscope |
US20090241634A1 (en) | 2008-03-28 | 2009-10-01 | Cenk Acar | Micromachined accelerometer and method with continuous self-testing |
US20100145660A1 (en) | 2008-12-08 | 2010-06-10 | Robert Bosch Gmbh | Mems sensor with built-in self-test |
IT1397594B1 (it) * | 2009-12-21 | 2013-01-16 | St Microelectronics Rousset | Giroscopio microelettromeccanico con funzione di auto-test continua e metodo di controllo di un giroscopio microelettromeccanico. |
US9238580B2 (en) | 2013-03-11 | 2016-01-19 | Analog Devices Global | Spread-spectrum MEMS self-test system and method |
-
2015
- 2015-01-12 FI FI20155015A patent/FI127069B/fi active IP Right Grant
- 2015-11-09 TW TW104136836A patent/TWI611189B/zh active
-
2016
- 2016-01-08 EP EP16701368.9A patent/EP3245523B1/en active Active
- 2016-01-08 WO PCT/IB2016/050088 patent/WO2016113653A1/en active Application Filing
- 2016-01-11 US US14/992,107 patent/US10024882B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TW201625952A (zh) | 2016-07-16 |
EP3245523B1 (en) | 2022-03-02 |
TWI611189B (zh) | 2018-01-11 |
US10024882B2 (en) | 2018-07-17 |
EP3245523A1 (en) | 2017-11-22 |
FI127069B (fi) | 2017-10-31 |
WO2016113653A1 (en) | 2016-07-21 |
US20160202286A1 (en) | 2016-07-14 |
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