FI20146151A - Peililevy optista interferometriä varten ja optinen interferometri - Google Patents
Peililevy optista interferometriä varten ja optinen interferometriInfo
- Publication number
- FI20146151A FI20146151A FI20146151A FI20146151A FI20146151A FI 20146151 A FI20146151 A FI 20146151A FI 20146151 A FI20146151 A FI 20146151A FI 20146151 A FI20146151 A FI 20146151A FI 20146151 A FI20146151 A FI 20146151A
- Authority
- FI
- Finland
- Prior art keywords
- optical interferometer
- mirror plate
- interferometer
- optical
- mirror
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00596—Mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/142—Coating structures, e.g. thin films multilayers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Computer Hardware Design (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Spectrometry And Color Measurement (AREA)
- Micromachines (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20146151A FI126791B (fi) | 2014-12-29 | 2014-12-29 | Peililevy optista interferometriä varten, menetelmä peililevyn valmistamiseksi ja optinen interferometri |
JP2017544031A JP6255543B1 (ja) | 2014-12-29 | 2015-12-18 | 光学的干渉計用ミラープレート、ミラープレートの製造方法及び光学的干渉計 |
CN201580077176.XA CN107250741B (zh) | 2014-12-29 | 2015-12-18 | 用于光学干涉计的镜板及光学干涉计 |
US15/540,074 US10088362B2 (en) | 2014-12-29 | 2015-12-18 | Mirror plate for an optical interferometer and an optical interferometer |
EP15875303.8A EP3241002B1 (en) | 2014-12-29 | 2015-12-18 | Mirror plate for an optical interferometer and an optical interferometer |
PCT/FI2015/050909 WO2016107973A1 (en) | 2014-12-29 | 2015-12-18 | Mirror plate for an optical interferometer and an optical interferometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20146151A FI126791B (fi) | 2014-12-29 | 2014-12-29 | Peililevy optista interferometriä varten, menetelmä peililevyn valmistamiseksi ja optinen interferometri |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20146151A true FI20146151A (fi) | 2016-06-30 |
FI126791B FI126791B (fi) | 2017-05-31 |
Family
ID=56284340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20146151A FI126791B (fi) | 2014-12-29 | 2014-12-29 | Peililevy optista interferometriä varten, menetelmä peililevyn valmistamiseksi ja optinen interferometri |
Country Status (6)
Country | Link |
---|---|
US (1) | US10088362B2 (fi) |
EP (1) | EP3241002B1 (fi) |
JP (1) | JP6255543B1 (fi) |
CN (1) | CN107250741B (fi) |
FI (1) | FI126791B (fi) |
WO (1) | WO2016107973A1 (fi) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10260941B2 (en) * | 2016-10-04 | 2019-04-16 | Precitec Optronik Gmbh | Chromatic confocal distance sensor |
US10955336B2 (en) * | 2017-08-26 | 2021-03-23 | Innovative Micro Technology | Gas sensor comprising a rotatable Fabry-Perot multilayer etalon |
JP7313115B2 (ja) * | 2017-11-24 | 2023-07-24 | 浜松ホトニクス株式会社 | 光検査装置及び光検査方法 |
JP7043885B2 (ja) * | 2018-02-26 | 2022-03-30 | セイコーエプソン株式会社 | 分光装置、温度特性導出装置、分光システム、分光方法、及び温度特性導出方法 |
CN113227730A (zh) * | 2018-12-21 | 2021-08-06 | ams传感器新加坡私人有限公司 | 用于光谱仪***的线性温度校准补偿 |
DE102019210707A1 (de) * | 2019-07-19 | 2021-01-21 | Robert Bosch Gmbh | Interferometereinrichtung und Verfahren zum Betreiben einer Interferometereinrichtung |
EP3904847A4 (en) * | 2019-11-19 | 2022-08-03 | Shenzhen Hypernano Optics Technology Co., Ltd | SELF-CALIBRATION METHOD FOR FABRY-PEROT TUNABLE RESONATOR AND SPECTRUM ACQUISITION DEVICE WITH SELF-CALIBRATION FUNCTION |
US11788887B2 (en) * | 2020-03-27 | 2023-10-17 | Nanohmics, Inc. | Tunable notch filter |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62257032A (ja) | 1986-04-30 | 1987-11-09 | Sharp Corp | 可変干渉装置 |
US5550373A (en) | 1994-12-30 | 1996-08-27 | Honeywell Inc. | Fabry-Perot micro filter-detector |
US5940579A (en) | 1997-02-26 | 1999-08-17 | White Consolidated Industries, Inc. | Capacitive leakage current cancellation for heating panel |
JP5085101B2 (ja) * | 2006-11-17 | 2012-11-28 | オリンパス株式会社 | 可変分光素子 |
JP2008197362A (ja) * | 2007-02-13 | 2008-08-28 | Olympus Corp | 可変分光素子 |
JP2011027780A (ja) | 2009-07-21 | 2011-02-10 | Denso Corp | ファブリペロー干渉計及びその製造方法 |
JP5779852B2 (ja) * | 2010-08-25 | 2015-09-16 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光モジュール、および光分析装置 |
JP5909850B2 (ja) * | 2011-02-15 | 2016-04-27 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
JP2012173314A (ja) * | 2011-02-17 | 2012-09-10 | Seiko Epson Corp | 波長可変干渉フィルター、光モジュール、および電子機器 |
FI125897B (fi) * | 2011-06-06 | 2016-03-31 | Teknologian Tutkimuskeskus Vtt Oy | Mikromekaanisesti säädettävä Fabry-Perot-interferometri ja menetelmä sen valmistamiseksi |
JP5834718B2 (ja) * | 2011-09-29 | 2015-12-24 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
DE102013201506A1 (de) * | 2012-02-17 | 2013-08-22 | Carl Zeiss Smt Gmbh | Optisches Bauelement |
FI125690B (fi) * | 2013-06-18 | 2016-01-15 | Teknologian Tutkimuskeskus Vtt Oy | Peili Fabry-Perot-interferometriä varten ja menetelmä sen valmistamiseksi |
-
2014
- 2014-12-29 FI FI20146151A patent/FI126791B/fi active IP Right Grant
-
2015
- 2015-12-18 JP JP2017544031A patent/JP6255543B1/ja active Active
- 2015-12-18 EP EP15875303.8A patent/EP3241002B1/en active Active
- 2015-12-18 CN CN201580077176.XA patent/CN107250741B/zh active Active
- 2015-12-18 WO PCT/FI2015/050909 patent/WO2016107973A1/en active Application Filing
- 2015-12-18 US US15/540,074 patent/US10088362B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20170350761A1 (en) | 2017-12-07 |
CN107250741A (zh) | 2017-10-13 |
US10088362B2 (en) | 2018-10-02 |
JP2018508826A (ja) | 2018-03-29 |
JP6255543B1 (ja) | 2017-12-27 |
FI126791B (fi) | 2017-05-31 |
EP3241002A4 (en) | 2018-01-10 |
WO2016107973A1 (en) | 2016-07-07 |
EP3241002B1 (en) | 2019-05-22 |
EP3241002A1 (en) | 2017-11-08 |
CN107250741B (zh) | 2018-06-05 |
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Legal Events
Date | Code | Title | Description |
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PC | Transfer of assignment of patent |
Owner name: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY |
|
FG | Patent granted |
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