FI20090319A0 - Prosessinsäätömenetelmä - Google Patents
ProsessinsäätömenetelmäInfo
- Publication number
- FI20090319A0 FI20090319A0 FI20090319A FI20090319A FI20090319A0 FI 20090319 A0 FI20090319 A0 FI 20090319A0 FI 20090319 A FI20090319 A FI 20090319A FI 20090319 A FI20090319 A FI 20090319A FI 20090319 A0 FI20090319 A0 FI 20090319A0
- Authority
- FI
- Finland
- Prior art keywords
- monitoring
- control method
- process control
- adjusting
- parameter based
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 5
- 238000004886 process control Methods 0.000 title 1
- 238000012544 monitoring process Methods 0.000 abstract 4
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- 238000005137 deposition process Methods 0.000 abstract 2
- 239000011882 ultra-fine particle Substances 0.000 abstract 2
- 239000000443 aerosol Substances 0.000 abstract 1
- 239000002243 precursor Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Geochemistry & Mineralogy (AREA)
- Dispersion Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20090319A FI20090319A0 (fi) | 2009-09-03 | 2009-09-03 | Prosessinsäätömenetelmä |
US13/392,237 US8673389B2 (en) | 2009-09-03 | 2010-09-02 | Process for controlling coating deposition |
CN201080046136.6A CN102597316B (zh) | 2009-09-03 | 2010-09-02 | 用于控制涂覆沉积的方法和设备 |
PCT/FI2010/050685 WO2011027035A1 (en) | 2009-09-03 | 2010-09-02 | Process and apparatus for controlling coating deposition |
EP10813392.7A EP2473651B1 (en) | 2009-09-03 | 2010-09-02 | Process and apparatus for controlling coating deposition |
EA201270338A EA023563B1 (ru) | 2009-09-03 | 2010-09-02 | Способ и устройство для контроля процесса покрытия методом осаждения |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20090319A FI20090319A0 (fi) | 2009-09-03 | 2009-09-03 | Prosessinsäätömenetelmä |
Publications (1)
Publication Number | Publication Date |
---|---|
FI20090319A0 true FI20090319A0 (fi) | 2009-09-03 |
Family
ID=41136321
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20090319A FI20090319A0 (fi) | 2009-09-03 | 2009-09-03 | Prosessinsäätömenetelmä |
Country Status (6)
Country | Link |
---|---|
US (1) | US8673389B2 (fi) |
EP (1) | EP2473651B1 (fi) |
CN (1) | CN102597316B (fi) |
EA (1) | EA023563B1 (fi) |
FI (1) | FI20090319A0 (fi) |
WO (1) | WO2011027035A1 (fi) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10581020B2 (en) | 2011-02-08 | 2020-03-03 | Vitro Flat Glass Llc | Light extracting substrate for organic light emitting diode |
JP2012046780A (ja) * | 2010-08-25 | 2012-03-08 | Tokyo Electron Ltd | 蒸着処理装置および蒸着処理方法 |
FI124113B (fi) * | 2010-08-30 | 2014-03-31 | Beneq Oy | Laitteisto ja menetelmä substraatin pinnan muokkaamiseksi |
FI20115236A0 (fi) * | 2011-03-09 | 2011-03-09 | Beneq Oy | Pinnoitusmenetelmä, laite ja käyttö |
WO2012146828A2 (en) * | 2011-04-28 | 2012-11-01 | Beneq Oy | Process and apparatus for coating |
DE102012200211A1 (de) * | 2012-01-09 | 2013-07-11 | Carl Zeiss Nts Gmbh | Vorrichtung und Verfahren zur Oberflächenbearbeitung eines Substrates |
WO2015162035A1 (en) * | 2014-04-24 | 2015-10-29 | Basf Se | Gas phase process for producing conductive metal oxide films |
US11220737B2 (en) | 2014-06-25 | 2022-01-11 | Universal Display Corporation | Systems and methods of modulating flow during vapor jet deposition of organic materials |
EP2960059B1 (en) | 2014-06-25 | 2018-10-24 | Universal Display Corporation | Systems and methods of modulating flow during vapor jet deposition of organic materials |
US11267012B2 (en) * | 2014-06-25 | 2022-03-08 | Universal Display Corporation | Spatial control of vapor condensation using convection |
EP3218317B1 (en) | 2014-11-13 | 2018-10-17 | Gerresheimer Glas GmbH | Glass forming machine particle filter, a plunger unit, a blow head, a blow head support and a glass forming machine adapted to or comprising said filter |
EP3308138B1 (en) * | 2015-06-05 | 2023-11-22 | Koninklijke Philips N.V. | Method of designing a particle sensor and particle sensing method |
KR102420015B1 (ko) * | 2015-08-28 | 2022-07-12 | 삼성전자주식회사 | Cs-ald 장치의 샤워헤드 |
US10566534B2 (en) | 2015-10-12 | 2020-02-18 | Universal Display Corporation | Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP) |
US11213848B2 (en) * | 2015-12-11 | 2022-01-04 | Vitro Flat Glass Llc | Nanoparticle coater |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51143583A (en) * | 1975-06-06 | 1976-12-09 | Hitachi Ltd | Method for regulating gas-phase chemical reaction |
EP0196806B1 (en) | 1985-03-11 | 1990-11-07 | Applied Materials, Inc. | Optimized process for forming borophosphosilicate glass |
JP2706861B2 (ja) | 1991-07-23 | 1998-01-28 | 動力炉・核燃料開発事業団 | クラスター生成装置 |
FI98832C (fi) | 1995-09-15 | 1997-08-25 | Juha Tikkanen | Menetelmä ja laite materiaalin ruiskuttamiseksi |
GB9620151D0 (en) * | 1996-09-27 | 1996-11-13 | Surface Tech Sys Ltd | Plasma processing apparatus |
US6342265B1 (en) * | 1997-08-20 | 2002-01-29 | Triumf | Apparatus and method for in-situ thickness and stoichiometry measurement of thin films |
JP3349965B2 (ja) * | 1998-11-05 | 2002-11-25 | 松下電器産業株式会社 | 微粒子分級方法及び装置 |
US7515264B2 (en) | 1999-06-15 | 2009-04-07 | Tokyo Electron Limited | Particle-measuring system and particle-measuring method |
JP3535785B2 (ja) * | 1999-11-26 | 2004-06-07 | Necエレクトロニクス株式会社 | クリーニング終点検出装置およびクリーニング終点検出方法 |
US6607597B2 (en) | 2001-01-30 | 2003-08-19 | Msp Corporation | Method and apparatus for deposition of particles on surfaces |
FI118278B (fi) | 2003-06-24 | 2007-09-14 | Dekati Oy | Menetelmä ja anturilaite hiukkaspäästöjen mittaamiseksi polttomoottorin pakokaasuista |
US7220456B2 (en) * | 2004-03-31 | 2007-05-22 | Eastman Kodak Company | Process for the selective deposition of particulate material |
US7435444B2 (en) * | 2004-07-23 | 2008-10-14 | Johns Manville | Control of pre-cured product moisture for formaldehyde-free fiberglass products |
JP4593243B2 (ja) * | 2004-11-18 | 2010-12-08 | 株式会社トプコン | 気中粒子監視装置および真空処理装置 |
KR100614101B1 (ko) * | 2005-09-15 | 2006-08-22 | 한국과학기술연구원 | 입자 계수기 |
FI20060288A0 (fi) * | 2006-03-27 | 2006-03-27 | Abr Innova Oy | Pinnoitusmenetelmä |
US20070281105A1 (en) * | 2006-06-02 | 2007-12-06 | Nima Mokhlesi | Atomic Layer Deposition of Oxides Using Krypton as an Ion Generating Feeding Gas |
US20080124453A1 (en) | 2006-11-28 | 2008-05-29 | Applied Matrials, Inc. | In-situ detection of gas-phase particle formation in nitride film deposition |
EP2192091A1 (en) | 2008-12-01 | 2010-06-02 | ETH Zurich | Process for providing super-hydrophilic properties to a substrate |
FR2943787B1 (fr) * | 2009-03-26 | 2012-10-12 | Commissariat Energie Atomique | Micro-dispositif de detection in situ de particules d'interet dans un milieu fluide, et procede de mise en oeuvre |
-
2009
- 2009-09-03 FI FI20090319A patent/FI20090319A0/fi not_active Application Discontinuation
-
2010
- 2010-09-02 EA EA201270338A patent/EA023563B1/ru not_active IP Right Cessation
- 2010-09-02 CN CN201080046136.6A patent/CN102597316B/zh not_active Expired - Fee Related
- 2010-09-02 WO PCT/FI2010/050685 patent/WO2011027035A1/en active Application Filing
- 2010-09-02 EP EP10813392.7A patent/EP2473651B1/en not_active Not-in-force
- 2010-09-02 US US13/392,237 patent/US8673389B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP2473651A1 (en) | 2012-07-11 |
EP2473651A4 (en) | 2013-12-04 |
WO2011027035A1 (en) | 2011-03-10 |
EA201270338A1 (ru) | 2012-09-28 |
US20120189766A1 (en) | 2012-07-26 |
US8673389B2 (en) | 2014-03-18 |
EP2473651B1 (en) | 2016-11-09 |
EA023563B1 (ru) | 2016-06-30 |
CN102597316A (zh) | 2012-07-18 |
CN102597316B (zh) | 2015-03-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FD | Application lapsed |