FI20020292A - Menetelmä kapasitiivisen anturin lämpötilariippuvuuden pienentämiseksi sekä kapasitiivinen anturirakenne - Google Patents

Menetelmä kapasitiivisen anturin lämpötilariippuvuuden pienentämiseksi sekä kapasitiivinen anturirakenne Download PDF

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Publication number
FI20020292A
FI20020292A FI20020292A FI20020292A FI20020292A FI 20020292 A FI20020292 A FI 20020292A FI 20020292 A FI20020292 A FI 20020292A FI 20020292 A FI20020292 A FI 20020292A FI 20020292 A FI20020292 A FI 20020292A
Authority
FI
Finland
Prior art keywords
capacitive sensor
reducing
temperature dependence
sensor structure
capacitive
Prior art date
Application number
FI20020292A
Other languages
English (en)
Swedish (sv)
Other versions
FI20020292A0 (fi
FI114825B (fi
Inventor
Heikki Kuisma
Juha Lahdenperae
Risto Mutikainen
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Priority to FI20020292A priority Critical patent/FI114825B/fi
Publication of FI20020292A0 publication Critical patent/FI20020292A0/fi
Priority to US10/503,089 priority patent/US7302857B2/en
Priority to AU2003202615A priority patent/AU2003202615A1/en
Priority to PCT/FI2003/000101 priority patent/WO2003069295A1/en
Priority to DE10392273T priority patent/DE10392273T5/de
Publication of FI20020292A publication Critical patent/FI20020292A/fi
Application granted granted Critical
Publication of FI114825B publication Critical patent/FI114825B/fi

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
FI20020292A 2002-02-13 2002-02-13 Menetelmä kapasitiivisen anturin lämpötilariippuvuuden pienentämiseksi sekä kapasitiivinen anturirakenne FI114825B (fi)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI20020292A FI114825B (fi) 2002-02-13 2002-02-13 Menetelmä kapasitiivisen anturin lämpötilariippuvuuden pienentämiseksi sekä kapasitiivinen anturirakenne
US10/503,089 US7302857B2 (en) 2002-02-13 2003-02-10 Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction
AU2003202615A AU2003202615A1 (en) 2002-02-13 2003-02-10 Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction
PCT/FI2003/000101 WO2003069295A1 (en) 2002-02-13 2003-02-10 Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction
DE10392273T DE10392273T5 (de) 2002-02-13 2003-02-10 Verfahren zur Reduzierung der Temperaturabhängigkeit eines kapazitiven Sensors und Aufbau eines kapazitiven Sensors

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20020292 2002-02-13
FI20020292A FI114825B (fi) 2002-02-13 2002-02-13 Menetelmä kapasitiivisen anturin lämpötilariippuvuuden pienentämiseksi sekä kapasitiivinen anturirakenne

Publications (3)

Publication Number Publication Date
FI20020292A0 FI20020292A0 (fi) 2002-02-13
FI20020292A true FI20020292A (fi) 2003-11-20
FI114825B FI114825B (fi) 2004-12-31

Family

ID=8563194

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20020292A FI114825B (fi) 2002-02-13 2002-02-13 Menetelmä kapasitiivisen anturin lämpötilariippuvuuden pienentämiseksi sekä kapasitiivinen anturirakenne

Country Status (5)

Country Link
US (1) US7302857B2 (fi)
AU (1) AU2003202615A1 (fi)
DE (1) DE10392273T5 (fi)
FI (1) FI114825B (fi)
WO (1) WO2003069295A1 (fi)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5593613B2 (ja) * 2009-02-12 2014-09-24 ヤマハ株式会社 音響用木質材料及びその製造方法並びにアコースティック楽器
US8724832B2 (en) 2011-08-30 2014-05-13 Qualcomm Mems Technologies, Inc. Piezoelectric microphone fabricated on glass
US8824706B2 (en) 2011-08-30 2014-09-02 Qualcomm Mems Technologies, Inc. Piezoelectric microphone fabricated on glass
US8811636B2 (en) 2011-11-29 2014-08-19 Qualcomm Mems Technologies, Inc. Microspeaker with piezoelectric, metal and dielectric membrane
FI125958B (fi) 2013-05-10 2016-04-29 Murata Manufacturing Co Parannettu paineanturi

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
DE2543083C3 (de) * 1975-09-26 1979-01-11 Siemens Ag, 1000 Berlin Und 8000 Muenchen Bildsensor sowie Verfahren zum Betrieb eines solchen Bildsensors
US4203128A (en) * 1976-11-08 1980-05-13 Wisconsin Alumni Research Foundation Electrostatically deformable thin silicon membranes
US4773972A (en) * 1986-10-30 1988-09-27 Ford Motor Company Method of making silicon capacitive pressure sensor with glass layer between silicon wafers
GB2202084A (en) * 1987-03-13 1988-09-14 Philips Electronic Associated Thermal-image sensing devices and their manufacture
US4823230A (en) * 1988-03-04 1989-04-18 General Electric Company Pressure transducer
JPH0795602B2 (ja) * 1989-12-01 1995-10-11 三菱電機株式会社 太陽電池及びその製造方法
DE4136995C2 (de) 1991-11-11 1996-08-08 Sensycon Ind Sensorsyst Kapazitiver Drucksensor
US5365790A (en) * 1992-04-02 1994-11-22 Motorola, Inc. Device with bonded conductive and insulating substrates and method therefore
TW218426B (fi) * 1992-05-11 1994-01-01 Samsung Electronics Co Ltd
JP2625362B2 (ja) * 1993-11-17 1997-07-02 日本電気株式会社 半導体装置の製造方法
US5600072A (en) * 1995-06-23 1997-02-04 Motorola, Inc. Capacitive pressure sensor and method for making the same
DE19640960A1 (de) * 1996-10-04 1998-04-09 Bosch Gmbh Robert Kapazitiver Drucksensor mit variabler Kavitätenhöhe
US5936164A (en) 1997-08-27 1999-08-10 Delco Electronics Corporation All-silicon capacitive pressure sensor
US6465271B1 (en) * 1998-07-07 2002-10-15 Wen H. Ko Method of fabricating silicon capacitive sensor
US6555870B1 (en) * 1999-06-29 2003-04-29 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device and method for producing same
US6507475B1 (en) * 2000-06-27 2003-01-14 Motorola, Inc. Capacitive device and method of manufacture
US6842965B2 (en) * 2000-12-28 2005-01-18 Matsushita Electric Industrial Co., Ltd. Method for manufacturing a strain detector
EP1223420A3 (en) * 2001-01-16 2003-07-09 Fujikura Ltd. Pressure sensor and manufacturing method thereof
KR100404904B1 (ko) * 2001-06-09 2003-11-07 전자부품연구원 차동 용량형 압력센서 및 그 제조방법

Also Published As

Publication number Publication date
US20050105245A1 (en) 2005-05-19
FI20020292A0 (fi) 2002-02-13
FI114825B (fi) 2004-12-31
WO2003069295A1 (en) 2003-08-21
AU2003202615A1 (en) 2003-09-04
DE10392273T5 (de) 2005-03-10
US7302857B2 (en) 2007-12-04

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Owner name: MURATA ELECTRONICS OY

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