ES318876A1 - Metodo de fabricacion de un circuito integrado, por corrosion selectiva de un substrato recubierto de capas multiples de pelicula delgada perfeccionado. - Google Patents
Metodo de fabricacion de un circuito integrado, por corrosion selectiva de un substrato recubierto de capas multiples de pelicula delgada perfeccionado.Info
- Publication number
- ES318876A1 ES318876A1 ES0318876A ES318876A ES318876A1 ES 318876 A1 ES318876 A1 ES 318876A1 ES 0318876 A ES0318876 A ES 0318876A ES 318876 A ES318876 A ES 318876A ES 318876 A1 ES318876 A1 ES 318876A1
- Authority
- ES
- Spain
- Prior art keywords
- translation
- manufacturing
- integrated circuit
- machine
- legally binding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000010410 layer Substances 0.000 abstract 5
- 239000003990 capacitor Substances 0.000 abstract 2
- 238000005260 corrosion Methods 0.000 abstract 2
- 230000007797 corrosion Effects 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 150000004706 metal oxides Chemical class 0.000 abstract 1
- 239000011241 protective layer Substances 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C13/00—Resistors not provided for elsewhere
- H01C13/02—Structural combinations of resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/40—Structural combinations of fixed capacitors with other electric elements, the structure mainly consisting of a capacitor, e.g. RC combinations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/901—Printed circuit
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49126—Assembling bases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US409656A US3406043A (en) | 1964-11-09 | 1964-11-09 | Integrated circuit containing multilayer tantalum compounds |
Publications (1)
Publication Number | Publication Date |
---|---|
ES318876A1 true ES318876A1 (es) | 1966-05-01 |
Family
ID=23621435
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES0318876A Expired ES318876A1 (es) | 1964-11-09 | 1965-10-25 | Metodo de fabricacion de un circuito integrado, por corrosion selectiva de un substrato recubierto de capas multiples de pelicula delgada perfeccionado. |
Country Status (10)
Country | Link |
---|---|
US (1) | US3406043A (es) |
BE (1) | BE671926A (es) |
CH (1) | CH453505A (es) |
DE (1) | DE1615010B1 (es) |
ES (1) | ES318876A1 (es) |
FR (1) | FR1462496A (es) |
GB (1) | GB1125394A (es) |
IL (1) | IL24471A (es) |
NL (1) | NL141750B (es) |
SE (1) | SE326746B (es) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3489656A (en) * | 1964-11-09 | 1970-01-13 | Western Electric Co | Method of producing an integrated circuit containing multilayer tantalum compounds |
US3487522A (en) * | 1966-02-01 | 1970-01-06 | Western Electric Co | Multilayered thin-film intermediates employing parting layers to permit selective,sequential etching |
US3479237A (en) * | 1966-04-08 | 1969-11-18 | Bell Telephone Labor Inc | Etch masks on semiconductor surfaces |
US3491433A (en) * | 1966-06-08 | 1970-01-27 | Nippon Electric Co | Method of making an insulated gate semiconductor device |
US3544287A (en) * | 1967-04-13 | 1970-12-01 | Western Electric Co | Heat treatment of multilayered thin film structures employing oxide parting layers |
US3617373A (en) * | 1968-05-24 | 1971-11-02 | Western Electric Co | Methods of making thin film patterns |
DE1790013B1 (de) * | 1968-08-27 | 1971-11-25 | Siemens Ag | Elektrische duennschichtschaltung |
US3772102A (en) * | 1969-10-27 | 1973-11-13 | Gen Electric | Method of transferring a desired pattern in silicon to a substrate layer |
US3844831A (en) * | 1972-10-27 | 1974-10-29 | Ibm | Forming a compact multilevel interconnection metallurgy system for semi-conductor devices |
GB1424980A (en) * | 1973-06-20 | 1976-02-11 | Siemens Ag | Thin-film electrical circuits |
US3907620A (en) * | 1973-06-27 | 1975-09-23 | Hewlett Packard Co | A process of forming metallization structures on semiconductor devices |
US3874922A (en) * | 1973-08-16 | 1975-04-01 | Boeing Co | Tantalum thin film resistors by reactive evaporation |
US3916071A (en) * | 1973-11-05 | 1975-10-28 | Texas Instruments Inc | Ceramic substrate for receiving resistive film and method of forming chromium/chromium oxide ceramic substrate |
US4098917A (en) * | 1976-09-08 | 1978-07-04 | Texas Instruments Incorporated | Method of providing a patterned metal layer on a substrate employing metal mask and ion milling |
US4189516A (en) * | 1978-07-17 | 1980-02-19 | National Research Development Corporation | Epitaxial crystalline aluminium nitride |
DE2851584B2 (de) * | 1978-11-29 | 1980-09-04 | Fried. Krupp Gmbh, 4300 Essen | Verbundkörper |
US4226932A (en) * | 1979-07-05 | 1980-10-07 | Gte Automatic Electric Laboratories Incorporated | Titanium nitride as one layer of a multi-layered coating intended to be etched |
JPS5831336A (ja) * | 1981-08-19 | 1983-02-24 | Konishiroku Photo Ind Co Ltd | ホトマスク素材 |
JP2619838B2 (ja) * | 1989-09-08 | 1997-06-11 | 新日本製鐵株式会社 | セラミックスコーティング金属板 |
US5221449A (en) * | 1990-10-26 | 1993-06-22 | International Business Machines Corporation | Method of making Alpha-Ta thin films |
JPH0819516B2 (ja) * | 1990-10-26 | 1996-02-28 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | 薄膜状のアルファTaを形成するための方法および構造 |
US7676905B2 (en) * | 2005-08-15 | 2010-03-16 | Hitachi Global Storage Technologies Netherlands B.V. | Method of manufacturing a self aligned magnetoresistive sensor |
TW201134337A (en) * | 2010-03-25 | 2011-10-01 | Kinik Co | Method for manufacturing substrate and the structure thereof |
JP6092674B2 (ja) | 2013-03-22 | 2017-03-08 | シャープ株式会社 | 構造体、無線通信装置および構造体の製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE590576A (es) * | 1959-05-06 | |||
FR1300771A (fr) * | 1961-05-09 | 1962-08-10 | Haloid Xerox | Panneau de circuit imprimé à deux dimensions |
US3256588A (en) * | 1962-10-23 | 1966-06-21 | Philco Corp | Method of fabricating thin film r-c circuits on single substrate |
-
1964
- 1964-11-09 US US409656A patent/US3406043A/en not_active Expired - Lifetime
-
1965
- 1965-10-15 IL IL24471A patent/IL24471A/en unknown
- 1965-10-19 GB GB44155/65A patent/GB1125394A/en not_active Expired
- 1965-10-25 ES ES0318876A patent/ES318876A1/es not_active Expired
- 1965-11-03 NL NL656514243A patent/NL141750B/xx unknown
- 1965-11-03 DE DE1965W0040226 patent/DE1615010B1/de active Pending
- 1965-11-05 BE BE671926D patent/BE671926A/xx unknown
- 1965-11-08 SE SE14397/65A patent/SE326746B/xx unknown
- 1965-11-08 FR FR37717A patent/FR1462496A/fr not_active Expired
- 1965-11-09 CH CH1541965A patent/CH453505A/de unknown
Also Published As
Publication number | Publication date |
---|---|
DE1615010B1 (de) | 1971-02-11 |
IL24471A (en) | 1969-03-27 |
FR1462496A (fr) | 1966-04-15 |
US3406043A (en) | 1968-10-15 |
NL141750B (nl) | 1974-03-15 |
SE326746B (es) | 1970-08-03 |
BE671926A (es) | 1966-03-01 |
CH453505A (de) | 1968-06-14 |
NL6514243A (es) | 1966-05-10 |
GB1125394A (en) | 1968-08-28 |
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