ES2479894A2 - Electro-optical device and method for obtaining high density and low energy ion beams (Machine-translation by Google Translate, not legally binding) - Google Patents

Electro-optical device and method for obtaining high density and low energy ion beams (Machine-translation by Google Translate, not legally binding) Download PDF

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Publication number
ES2479894A2
ES2479894A2 ES201201264A ES201201264A ES2479894A2 ES 2479894 A2 ES2479894 A2 ES 2479894A2 ES 201201264 A ES201201264 A ES 201201264A ES 201201264 A ES201201264 A ES 201201264A ES 2479894 A2 ES2479894 A2 ES 2479894A2
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Spain
Prior art keywords
electro
optical device
high density
ion beams
translation
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Granted
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ES201201264A
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Spanish (es)
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ES2479894R1 (en
ES2479894B1 (en
Inventor
Ángel GONZÁLEZ UREÑA
Vitaly RUDNEV
Jesús TORNERO LÓPEZ
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Universidad Complutense de Madrid
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Universidad Complutense de Madrid
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Priority to ES201201264A priority Critical patent/ES2479894B1/en
Publication of ES2479894A2 publication Critical patent/ES2479894A2/en
Publication of ES2479894R1 publication Critical patent/ES2479894R1/en
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Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/087—Deviation, concentration or focusing of the beam by electric or magnetic means by electrical means

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

Electro-optical device and method for obtaining high density and low energy ion beams. An electro-optical device is described, formed by three consecutive elements: a first einzel lens, a cylindrical element and a second einzel lens, whose use allows to focus and brake ion beams of high density and energy. This is carried out by using voltage pulses applied to the cylindrical element while it is traversed by the ions. At the same time, the use of the two einzel lenses makes it possible to focus the ion beam and ensure a high current density in the image plane. This device is very useful in spectroscopic and analytical applications to detect ionic species with high resolution and sensitivity, as well as other more technological uses such as etching or ion implantation in the semiconductor industry or similar. (Machine-translation by Google Translate, not legally binding)

Description

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Claims (1)

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ES201201264A 2012-12-21 2012-12-21 Electro-optical device and method to obtain high density and low energy ion beams Active ES2479894B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES201201264A ES2479894B1 (en) 2012-12-21 2012-12-21 Electro-optical device and method to obtain high density and low energy ion beams

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES201201264A ES2479894B1 (en) 2012-12-21 2012-12-21 Electro-optical device and method to obtain high density and low energy ion beams

Publications (3)

Publication Number Publication Date
ES2479894A2 true ES2479894A2 (en) 2014-07-24
ES2479894R1 ES2479894R1 (en) 2014-08-29
ES2479894B1 ES2479894B1 (en) 2015-10-13

Family

ID=51211445

Family Applications (1)

Application Number Title Priority Date Filing Date
ES201201264A Active ES2479894B1 (en) 2012-12-21 2012-12-21 Electro-optical device and method to obtain high density and low energy ion beams

Country Status (1)

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ES (1) ES2479894B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002530833A (en) * 1998-11-24 2002-09-17 アプライド マテリアルズ インコーポレイテッド Detector array for efficient secondary electron collection in microcolumns
EP1929505A4 (en) * 2005-08-18 2009-12-02 Cebt Co Ltd Detector for electron column and method for detecting electrons for electron column
KR101010338B1 (en) * 2005-08-18 2011-01-25 전자빔기술센터 주식회사 Method for changing energy of electron beam in electron column
WO2008090380A1 (en) * 2007-01-25 2008-07-31 Nfab Limited Improved particle beam generator

Also Published As

Publication number Publication date
ES2479894R1 (en) 2014-08-29
ES2479894B1 (en) 2015-10-13

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