ES2190004T3 - Compuestos fotosensibles, composiciones de resina fotosensible y procedimiento de formacion de imagenes utilizando dichos compuestos o dichas composiciones. - Google Patents

Compuestos fotosensibles, composiciones de resina fotosensible y procedimiento de formacion de imagenes utilizando dichos compuestos o dichas composiciones.

Info

Publication number
ES2190004T3
ES2190004T3 ES98108552T ES98108552T ES2190004T3 ES 2190004 T3 ES2190004 T3 ES 2190004T3 ES 98108552 T ES98108552 T ES 98108552T ES 98108552 T ES98108552 T ES 98108552T ES 2190004 T3 ES2190004 T3 ES 2190004T3
Authority
ES
Spain
Prior art keywords
photosensible
compounds
compositions
image formation
formation procedure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES98108552T
Other languages
English (en)
Inventor
Toru Shibuya
Jian Rong Xie
Noriaki Tochizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Gosei Co Ltd
Original Assignee
Toyo Gosei Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP12186097A external-priority patent/JP3163036B2/ja
Priority claimed from JP23749097A external-priority patent/JP3856412B2/ja
Application filed by Toyo Gosei Co Ltd filed Critical Toyo Gosei Co Ltd
Application granted granted Critical
Publication of ES2190004T3 publication Critical patent/ES2190004T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/008—Azides
    • G03F7/012—Macromolecular azides; Macromolecular additives, e.g. binders

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Materials For Photolithography (AREA)
  • Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)

Abstract

EL COMPUESTO FOTOSENSIBLE DE LA PRESENTE INVENCION COMPRENDE LA UNIDAD SIGUIENTE: Y ESTA PARTICULARMENTE EXPRESADA POR LA FORMULA SIGUIENTE: COMPOSICIONES DE RESINAS FOTOSENSIBLES DIFERENTES SE PUEDEN PREPARAR A PARTIR DE ESTE COMPUESTO DE RESINA FOTOSENSIBLE NOVEDOSO, Y LAS COMPOSICIONES DE RESINA FOTOSENSIBLES ASI OBTENIDAS NO PRESENTAN PROBLEMAS DE POLUCION AMBIENTAL, Y PRODUCIENDOSE CON UN PROCESO DE ALTA RESOLUCION CON UN ALTO NIVEL DE SENSIBILIDAD Y EXHIBIENDO EXCELENTES CARACTERISTICAS DE ADHESION A SUSTRATOS, REVESTIMIENTO Y ESTABILIDAD DURANTE SU ALMACENAMIENTO.
ES98108552T 1997-05-13 1998-05-11 Compuestos fotosensibles, composiciones de resina fotosensible y procedimiento de formacion de imagenes utilizando dichos compuestos o dichas composiciones. Expired - Lifetime ES2190004T3 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP12186097A JP3163036B2 (ja) 1997-05-13 1997-05-13 感光性化合物及び感光性樹脂
JP23749097A JP3856412B2 (ja) 1997-09-02 1997-09-02 パターン形成方法
PCT/JP1998/005028 WO2000028382A1 (en) 1997-05-13 1998-11-09 Photosensitive compounds, photosensitive resin compositions, and pattern formation method making use of the compounds or compositions

Publications (1)

Publication Number Publication Date
ES2190004T3 true ES2190004T3 (es) 2003-07-16

Family

ID=27308567

Family Applications (1)

Application Number Title Priority Date Filing Date
ES98108552T Expired - Lifetime ES2190004T3 (es) 1997-05-13 1998-05-11 Compuestos fotosensibles, composiciones de resina fotosensible y procedimiento de formacion de imagenes utilizando dichos compuestos o dichas composiciones.

Country Status (7)

Country Link
EP (1) EP0878739B1 (es)
CN (1) CN1131461C (es)
AU (1) AU772375B2 (es)
DE (1) DE69809629T2 (es)
ES (1) ES2190004T3 (es)
TW (1) TW539923B (es)
WO (1) WO2000028382A1 (es)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0878739B1 (en) * 1997-05-13 2002-11-27 Toyo Gosei Kogyo Co., Ltd. Photosensitive compounds, photosensitive resin compositions, and pattern formation method making use of the compounds or compositions
JP4390237B2 (ja) 2000-02-14 2009-12-24 東洋合成工業株式会社 感光性化合物及び感光性樹脂
JP3849641B2 (ja) 2001-03-29 2006-11-22 日立化成工業株式会社 回路形成用感光性フィルム及びプリント配線板の製造法
JP4036440B2 (ja) * 2002-03-29 2008-01-23 東洋合成工業株式会社 新規な感光性化合物及び感光性樹脂並びに感光性組成物
JP4637476B2 (ja) * 2002-12-19 2011-02-23 東京応化工業株式会社 ホトレジスト組成物の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL270002A (es) * 1960-10-08
JPS5239289B2 (es) * 1974-07-01 1977-10-04
JPH0742329B2 (ja) * 1986-03-18 1995-05-10 工業技術院長 感光性樹脂の製造方法
JPH02204750A (ja) * 1989-02-03 1990-08-14 Hitachi Ltd 感光性組成物、及びそれを用いたパターン形成方法
JP3428715B2 (ja) * 1994-02-23 2003-07-22 東洋合成工業株式会社 感光性樹脂組成物
US5866296A (en) * 1996-01-25 1999-02-02 Toyo Gosei Co., Ltd. Photosensitive resin composition
JP4093501B2 (ja) * 1997-05-13 2008-06-04 東洋合成工業株式会社 感光性化合物及び感光性樹脂
EP0878739B1 (en) * 1997-05-13 2002-11-27 Toyo Gosei Kogyo Co., Ltd. Photosensitive compounds, photosensitive resin compositions, and pattern formation method making use of the compounds or compositions

Also Published As

Publication number Publication date
CN1203381A (zh) 1998-12-30
CN1131461C (zh) 2003-12-17
EP0878739B1 (en) 2002-11-27
TW539923B (en) 2003-07-01
AU9762898A (en) 2000-05-29
AU772375B2 (en) 2004-04-29
EP0878739A1 (en) 1998-11-18
WO2000028382A1 (en) 2000-05-18
DE69809629T2 (de) 2003-09-11
DE69809629D1 (de) 2003-01-09

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