ES2119023T3 - Instalacion de recubrimiento al vacio. - Google Patents
Instalacion de recubrimiento al vacio.Info
- Publication number
- ES2119023T3 ES2119023T3 ES94108188T ES94108188T ES2119023T3 ES 2119023 T3 ES2119023 T3 ES 2119023T3 ES 94108188 T ES94108188 T ES 94108188T ES 94108188 T ES94108188 T ES 94108188T ES 2119023 T3 ES2119023 T3 ES 2119023T3
- Authority
- ES
- Spain
- Prior art keywords
- chamber
- transport
- substrate
- treatment
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
EN UNA INSTALACION DE RECUBRIMIENTO DE VACIO PARA LA APLICACION DE CAPAS DELGADAS SOBRE SUBSTRATO (3,3'',...), CON UNA CAMARA (4) DE ENTRADA, AL MENOS UNA OTRA CAMARA (5) PARA EL TRATAMIENTO DEL SUBSTRATO (3,3'',...) Y CON UNA CAMARA (4) DE SALIDA ASI COMO CON UN EQUIPO (7) DE TRANSPORTE DISPUESTO EN UNA CAMARA (6) DE TRANSPORTE EVACUABLE PARA EL TRANSPORTE DEL SUBSTRATO (3,3'',...) A TRAVES DE LAS CAMARAS (4,5,6), SE HA PREVISTO UN EQUIPO (7) DE TRANSPORTE, QUE ESTA DISPUESTO ALREDEDOR DE UN EJE (8) CONJUNTO, Y MUESTRA SOPORTES (9,10) OSCILABLES ALREDEDOR DE ESTE EJE. EN AL MENOS DOS POSICIONES, ES DECIR EN UNA POSICION DE ENTRADA Y SALIDA Y EN UNA POSICION DE TRATAMIENTO SE DISPONE DE SOPORTES (9,10) RESPECTIVAMENTE CON UN MOVIMIENTO DE DESPLAZAMIENTO QUE SE EJECUTA CONTRA LA PARED (11) DE LA CAMARA (6) DE TRANSPORTE. ESTE MOVIMIENTO DE DESPLAZAMIENTO SE DIMENSIONA EN LA PRIMERA POSICION, DE FORMA QUE EL SOPORTE (10) EN LA POSICION ELEVADA CIERRA LA ABERTURA (17) DE LA CAMARA (4) DE ENTRADAY SALIDA EN LA PARED (11) DE LA CAMARA (3) DE TRANSPORTE. SOBRE CADA SOPORTE (9,10) ES ASENTABLE RESPECTIVAMENTE UN RECIPIENTE (12,13) EN FORMA DE COPA PARA LA RECEPCION SE UN SUBSTRATO (3,3'',...) Y EL SOPORTE (9) SE ELEVA EN LA ZONA DE LA POSICION (5) DE TRATAMIENTO DEL RECIPIENTE (12) DE MODO TAN AMPLIO, QUE EL BORDE (16) SUPERIOR DEL RECIPIENTE (12) SE COLOCA DE FORMA ESTANCA EN EL BORDE (14) DE LA ABERTURA PARA LA CAMARA (5) DE TRATAMIENTO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4341635A DE4341635C2 (de) | 1993-12-07 | 1993-12-07 | Vakuumbeschichtungsanlage |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2119023T3 true ES2119023T3 (es) | 1998-10-01 |
Family
ID=6504356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES94108188T Expired - Lifetime ES2119023T3 (es) | 1993-12-07 | 1994-05-27 | Instalacion de recubrimiento al vacio. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5538560A (es) |
EP (1) | EP0657563B1 (es) |
JP (1) | JP2583747B2 (es) |
DE (2) | DE4341635C2 (es) |
ES (1) | ES2119023T3 (es) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6325901B1 (en) * | 1996-04-18 | 2001-12-04 | Kabushiki Kaisha Toshiba | Method of producing a cathode-ray tube and apparatus therefor |
IT1290911B1 (it) * | 1997-02-03 | 1998-12-14 | Siv Soc Italiana Vetro | Procedimento e dispositivo per l'alimentazione di impianti da vuoto atti al deposito di rivestimenti superficiali su substrati. |
DE19742923A1 (de) | 1997-09-29 | 1999-04-01 | Leybold Systems Gmbh | Vorrichtung zum Beschichten eines im wesentlichen flachen, scheibenförmigen Substrats |
DE19824040C1 (de) * | 1998-05-29 | 1999-10-07 | Angew Solarenergie Ase Gmbh | Anordnung sowie Verfahren zum Beschichten von Gegenständen |
US6264804B1 (en) | 2000-04-12 | 2001-07-24 | Ske Technology Corp. | System and method for handling and masking a substrate in a sputter deposition system |
DE10122070B4 (de) * | 2001-05-07 | 2005-07-07 | Texas Instruments Deutschland Gmbh | Kathodenzerstäubungskammer zum Aufbringen von Material auf der Oberfläche einer in der Kammer befindlichen Halbleiterscheibe |
DE10215040B4 (de) | 2002-04-05 | 2019-02-21 | Leybold Optics Gmbh | Vorrichtung und Verfahren zum Be- und Entladen einer Vakuumkammer |
FR2843129B1 (fr) * | 2002-08-01 | 2006-01-06 | Tecmachine | Installation pour le traitement sous vide notamment de substrats |
DE102004055388A1 (de) | 2004-11-17 | 2006-05-18 | Jrw Technology + Engineering Gmbh | Vorrichtung zur Bearbeitung von Werkstücken im Vakuum |
US7581916B2 (en) * | 2006-07-14 | 2009-09-01 | Ulvac-Phi, Inc. | Sample introduction and transfer system and method |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3856654A (en) * | 1971-08-26 | 1974-12-24 | Western Electric Co | Apparatus for feeding and coating masses of workpieces in a controlled atmosphere |
CH573985A5 (es) * | 1973-11-22 | 1976-03-31 | Balzers Patent Beteilig Ag | |
US4410407A (en) * | 1981-12-22 | 1983-10-18 | Raytheon Company | Sputtering apparatus and methods |
US4588343A (en) * | 1984-05-18 | 1986-05-13 | Varian Associates, Inc. | Workpiece lifting and holding apparatus |
US4861565A (en) * | 1987-01-27 | 1989-08-29 | The Hall Chemical Company | Method of separately recovering metal values of petroleum refining catalyst |
US5259942A (en) * | 1989-03-30 | 1993-11-09 | Leybold Aktiengesellschaft | Device for transferring a workpiece into and out from a vacuum chamber |
JP3466607B2 (ja) * | 1989-09-13 | 2003-11-17 | ソニー株式会社 | スパッタリング装置 |
DE4313353C2 (de) * | 1993-04-23 | 1997-08-28 | Leybold Ag | Vakuum-Beschichtungsanlage |
-
1993
- 1993-12-07 DE DE4341635A patent/DE4341635C2/de not_active Expired - Fee Related
-
1994
- 1994-05-27 ES ES94108188T patent/ES2119023T3/es not_active Expired - Lifetime
- 1994-05-27 DE DE59406727T patent/DE59406727D1/de not_active Expired - Lifetime
- 1994-05-27 EP EP94108188A patent/EP0657563B1/de not_active Expired - Lifetime
- 1994-07-26 US US08/280,310 patent/US5538560A/en not_active Expired - Fee Related
- 1994-12-06 JP JP6302334A patent/JP2583747B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE59406727D1 (de) | 1998-09-24 |
EP0657563B1 (de) | 1998-08-19 |
DE4341635C2 (de) | 2002-07-18 |
DE4341635A1 (de) | 1995-06-08 |
US5538560A (en) | 1996-07-23 |
JP2583747B2 (ja) | 1997-02-19 |
EP0657563A3 (de) | 1996-12-18 |
JPH07252656A (ja) | 1995-10-03 |
EP0657563A2 (de) | 1995-06-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ES2119023T3 (es) | Instalacion de recubrimiento al vacio. | |
TR200000130T2 (tr) | Bariyer maddesi. | |
KR100498779B1 (ko) | 판 모양의 기판을 비접촉 지지하기 위한 공구 | |
KR880701205A (ko) | 모듀울 반도체 웨이퍼 운반 및 처리 시스템 | |
CA2255030A1 (en) | Air freshener dispenser device | |
CA2049870A1 (en) | System for expelling volatile impurities from groundwater | |
AU2864095A (en) | Person supporting device | |
ES2146052T3 (es) | Instalacion de revestimiento al vacio. | |
CA2326485A1 (en) | Anticancer compositions | |
MX9204906A (es) | Recipiente para circundar la raiz de una planta. | |
ES2159065T3 (es) | Instalacion de tratamiento en vacio para aplicar capas sobre substratos. | |
ES2080039T3 (es) | Generador de gas para sistema de retencion en un vehiculo. | |
EP1163056A4 (en) | PROJECTOR WASHING SYSTEM | |
AU2367001A (en) | Device for storing and dispensing a free-flowing substance | |
MY111442A (en) | Centrifugal seal assembly | |
CA2277679A1 (en) | Blood collection tube assembly | |
CO5160325A1 (es) | Articulos absorbentes que tienen graficos indicadores de humedad y que emplean tecnicas de enmascarado | |
JP2017513570A (ja) | 電子ビーム放出機 | |
BR0012837A (pt) | Bomba de tubulação em linha de rotor protegido sem eixo | |
ES2041020T3 (es) | Dispositivo de conexion rapida de una caja de fluido de intercambiador de calor. | |
ES2138818T3 (es) | Bastidor de sobreelevacion. | |
UY24719A1 (es) | Camara de cebo venenoso para insectos rastreros | |
ES2133199T3 (es) | Valvula de bola para grifo. | |
ES2116560T3 (es) | Procedimiento y dispositivo de regulacion de la seccion de una entrada de aire de ventilacion en un local. | |
EP1348443A4 (en) | COMBINED MEDICINES |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
Ref document number: 657563 Country of ref document: ES |