ES2061882T3 - Procedimiento para la fabricacion de esteres de acido 1,2-naftoquinona-(2)-diazida-4-sulfonico sustituidos y su uso en una mezcla sensible a radiaciones. - Google Patents
Procedimiento para la fabricacion de esteres de acido 1,2-naftoquinona-(2)-diazida-4-sulfonico sustituidos y su uso en una mezcla sensible a radiaciones.Info
- Publication number
- ES2061882T3 ES2061882T3 ES89119884T ES89119884T ES2061882T3 ES 2061882 T3 ES2061882 T3 ES 2061882T3 ES 89119884 T ES89119884 T ES 89119884T ES 89119884 T ES89119884 T ES 89119884T ES 2061882 T3 ES2061882 T3 ES 2061882T3
- Authority
- ES
- Spain
- Prior art keywords
- substituted
- diazide
- acid esters
- naphthoquinone
- sulfonic acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C303/00—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides
- C07C303/26—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides of esters of sulfonic acids
- C07C303/28—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides of esters of sulfonic acids by reaction of hydroxy compounds with sulfonic acids or derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/01—Sulfonic acids
- C07C309/25—Sulfonic acids having sulfo groups bound to carbon atoms of rings other than six-membered aromatic rings of a carbon skeleton
- C07C309/26—Sulfonic acids having sulfo groups bound to carbon atoms of rings other than six-membered aromatic rings of a carbon skeleton containing nitrogen atoms, not being part of nitro or nitroso groups, bound to the carbon skeleton
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/01—Sulfonic acids
- C07C309/25—Sulfonic acids having sulfo groups bound to carbon atoms of rings other than six-membered aromatic rings of a carbon skeleton
- C07C309/27—Sulfonic acids having sulfo groups bound to carbon atoms of rings other than six-membered aromatic rings of a carbon skeleton containing carboxyl groups bound to the carbon skeleton
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Materials For Photolithography (AREA)
Abstract
EL INVENTO SE REFIERE A UN PROCEDIMIENTO PARA PRODUCIR ESTERES DEL ACIDO 1, 2 - NAFTOQUINONA (2) - DIAZIDA - 4 - SULFONICO DE FORMULA (I) QUE SE SUSTITUYEN EN POSICION 5, 6, 7 U 8 A TRAVES DE R. DICHO PROCEDIMIENTO CONSISTE EN: A) NITRAR EL -NAFTOL SUSTITUIDO; B) SULFONAR EL COMPUESTO DE A) CON SULFUROS ALCALINOS Y ACISOS; C) REDUCIR EL COMPUESTO DE B), PARA OBTENER EL DERIVADO DEL ACIDO NAFTALINOSULFONICO; D) OXIDAR EL DERIVADO DEL ACIDO NAFTALINOSULFONICO; E) TRATAR EL ACIDO 1, 2 - NAFTOQUINONA - 4- SULFONICO CON HIDRACIDO DEL ACIDO TOLMOLSULFONICO EN DISOLVENTES ORGANICOS Y ENTRE 20 Y 100 C; F) TRANSFORMAR EL COMPUESTO NAFTOQUINONA - DIAXIDA CON ACIDO CLOROSULFONICO EN SULFOCLORURO DEL COMPUESTO; Y G) CONDENSAR EL PRODUCTO DE F) CON UN COMPONENTE FENOLICO. UNA DEPURACION DE LOS PRODUCTOS INTERMEDIOS SE REALIZA POR PRECIPITACION O CRISTALICACION. EL PROCEDIMIENTO PERMITE UNA REALIZACION TECNICAMENTE SENCILLA CON BUEN RENDIMIENTO. LOS COMPUESTOS PRODUCIDOS COMO LOS ESTERES DEL ACIDO 1, 2 -NAFTOQUINONA - (2) - DIAZIDA - 4 - SULFONICO SUSTITUIDO MEDIANTE GRUPOS 6 - ALCOXICARBONILO SE EMPLEAN COMO COMPONENTES MEZCLAS SENSIBLES A LA RADIACION.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3837499A DE3837499A1 (de) | 1988-11-04 | 1988-11-04 | Verfahren zur herstellung von substituierten 1,2-naphthochinon-(2)-diazid-4-sulfonsaeureestern und deren verwendung in einem strahlungsempfindlichen gemisch |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2061882T3 true ES2061882T3 (es) | 1994-12-16 |
Family
ID=6366515
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES89119884T Expired - Lifetime ES2061882T3 (es) | 1988-11-04 | 1989-10-26 | Procedimiento para la fabricacion de esteres de acido 1,2-naftoquinona-(2)-diazida-4-sulfonico sustituidos y su uso en una mezcla sensible a radiaciones. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5082932A (es) |
EP (1) | EP0368085B1 (es) |
JP (1) | JPH0825986B2 (es) |
KR (1) | KR900007796A (es) |
AT (1) | ATE98226T1 (es) |
DE (2) | DE3837499A1 (es) |
ES (1) | ES2061882T3 (es) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3926776A1 (de) * | 1989-08-12 | 1991-02-14 | Hoechst Ag | Substituierte 1,2-naphthochinon-(2)-diazid-4-sulfonsaeuren, verfahren zu ihrer herstellung und ihre verwendung |
DE3926774A1 (de) * | 1989-08-12 | 1991-02-14 | Hoechst Ag | 7-hydroxy-1,2-naphthochinon -(2)-diazid-4-sulfonsaeure oder ihre salze, verfahren zu ihrer herstellung und ihre verwendung |
US5300396A (en) * | 1990-11-28 | 1994-04-05 | Hoechst Celanese Corporation | Process of making naphthoquinone diazide esters using lactone solvents |
DE602005027413D1 (de) * | 2005-09-01 | 2011-05-19 | Ministry Of Information Technology | Eintopfverfahren zur darstellung von diazonaphthochinonsulfonylester |
PL2137140T3 (pl) * | 2007-03-23 | 2011-04-29 | Council Scient Ind Res | Nowe pochodne bisfenolowe kwasu diazonaftochinono-sulfonowego użyteczne w submikronowym odwzorowywaniu fotolitograficznym oraz proces ich otrzymywania |
JP2019174793A (ja) * | 2018-03-26 | 2019-10-10 | Jsr株式会社 | 感放射線性組成物および1,2−ナフトキノン−2−ジアジドスルホン酸誘導体 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE500222A (es) * | 1949-07-23 | |||
US3046121A (en) * | 1949-07-23 | 1962-07-24 | Azoplate Corp | Process for the manufacture of printing plates and light-sensitive material suttablefor use therein |
GB1375461A (es) * | 1972-05-05 | 1974-11-27 | ||
US4439516A (en) * | 1982-03-15 | 1984-03-27 | Shipley Company Inc. | High temperature positive diazo photoresist processing using polyvinyl phenol |
DE3629122A1 (de) * | 1986-08-27 | 1988-03-10 | Hoechst Ag | Verfahren zur herstellung eines o-naphthochinondiazidsulfonsaeureesters und diesen enthaltendes lichtempfindliches gemisch |
US4931549A (en) * | 1987-03-24 | 1990-06-05 | Hoechst Celanese Corporation | Process for aryl-quinone and aryl-naphthoquinone diazide sulfonic acids |
US4818658A (en) * | 1987-04-17 | 1989-04-04 | Shipley Company Inc. | Photoactive esterification product of a diazooxide compound and a curcumin dye and photoresist materials with product |
DD269846A1 (de) * | 1988-01-12 | 1989-07-12 | Bitterfeld Chemie | Verfahren zur herstellung von 1,2-naphthochinondiazid(2)-sulfochlorid(4) |
-
1988
- 1988-11-04 DE DE3837499A patent/DE3837499A1/de not_active Withdrawn
-
1989
- 1989-10-26 EP EP89119884A patent/EP0368085B1/de not_active Expired - Lifetime
- 1989-10-26 AT AT89119884T patent/ATE98226T1/de not_active IP Right Cessation
- 1989-10-26 ES ES89119884T patent/ES2061882T3/es not_active Expired - Lifetime
- 1989-10-26 DE DE89119884T patent/DE58906373D1/de not_active Expired - Fee Related
- 1989-11-02 KR KR1019890015845A patent/KR900007796A/ko not_active Application Discontinuation
- 1989-11-03 US US07/431,182 patent/US5082932A/en not_active Expired - Lifetime
- 1989-11-04 JP JP1287776A patent/JPH0825986B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ATE98226T1 (de) | 1993-12-15 |
US5082932A (en) | 1992-01-21 |
DE3837499A1 (de) | 1990-05-23 |
JPH0825986B2 (ja) | 1996-03-13 |
JPH02172963A (ja) | 1990-07-04 |
EP0368085A1 (de) | 1990-05-16 |
DE58906373D1 (de) | 1994-01-20 |
KR900007796A (ko) | 1990-06-02 |
EP0368085B1 (de) | 1993-12-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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