ES2043944T3 - Sensor de presion o de fuerza de pelicula gruesa. - Google Patents

Sensor de presion o de fuerza de pelicula gruesa.

Info

Publication number
ES2043944T3
ES2043944T3 ES89108894T ES89108894T ES2043944T3 ES 2043944 T3 ES2043944 T3 ES 2043944T3 ES 89108894 T ES89108894 T ES 89108894T ES 89108894 T ES89108894 T ES 89108894T ES 2043944 T3 ES2043944 T3 ES 2043944T3
Authority
ES
Spain
Prior art keywords
thick layer
pressure
layer resistance
force sensor
thick film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES89108894T
Other languages
English (en)
Inventor
Kurt Schmid
Rudolf Dr Dipl-Ing Heinz
Ulrich Schoor
Jurgen Wendel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Application granted granted Critical
Publication of ES2043944T3 publication Critical patent/ES2043944T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0002—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Force In General (AREA)
  • Pressure Sensors (AREA)

Abstract

EN UN SENSOR (12) PARA DETERMINACION DE LA PRESION O DE LA FUERZA SE PRESIONA EN UN SOPORTE (10) UNA RESISTENCIA DE CAPA GRUESA (11). EN EL ESTADO AUN BLANDO DE LA RESISTENCIA DE CAPA GRUESA (11) SE ESTABLECE UNA PIEZA DE CONDUCCION DE FUERZA (13) EN LA RESISTENCIA DE CAPA GRUESA Y SE ENDURECE LA PIEZA DE MONTAJE ASI ENGENDRADA. ASI SE PRODUCE UN SENSOR (12) CON UNA DISTRIBUCION REGULAR DE CARGA SOBRE LA TOTAL RESISTENCIA DE CAPA GRUESA DE MODO QUE SUS CURVAS DE TOMA TRANSCURREN LINEALMENTE SIN TENSION PREVIA EN LA ZONA DE COMIENZO.
ES89108894T 1988-05-28 1989-05-18 Sensor de presion o de fuerza de pelicula gruesa. Expired - Lifetime ES2043944T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3818189A DE3818189A1 (de) 1988-05-28 1988-05-28 Sensor

Publications (1)

Publication Number Publication Date
ES2043944T3 true ES2043944T3 (es) 1994-01-01

Family

ID=6355338

Family Applications (1)

Application Number Title Priority Date Filing Date
ES89108894T Expired - Lifetime ES2043944T3 (es) 1988-05-28 1989-05-18 Sensor de presion o de fuerza de pelicula gruesa.

Country Status (3)

Country Link
EP (1) EP0348658B1 (es)
DE (2) DE3818189A1 (es)
ES (1) ES2043944T3 (es)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4300995C2 (de) * 1993-01-15 1994-10-27 Lucas Ind Plc Kraftsensor und Verfahren zu seiner Herstellung
RU2451270C1 (ru) * 2011-04-05 2012-05-20 Валерий Анатольевич Васильев Полупроводниковый датчик абсолютного давления повышенной точности
RU2554083C1 (ru) * 2014-04-22 2015-06-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" (ФГБОУ ВПО "ПГУ") Способ изготовления нано- и микроразмерной системы датчика физических величин с заданным положительным температурным коэффициентом сопротивления резистивных элементов
RU2584341C1 (ru) * 2015-03-30 2016-05-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Уфимский государственный нефтяной технический университет" Многоточечное частотное устройство измерения давления, массы и деформаций
RU2750503C1 (ru) * 2020-12-07 2021-06-29 Акционерное общество "Научно-исследовательский институт физических измерений" Способ изготовления многослойной тонкопленочной гетероструктуры с заданной величиной удельного поверхностного сопротивления

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1932899A1 (de) * 1969-06-28 1971-01-07 Rohrbach Dr Christof Messwertgeber zum Umwandeln von Kraeften,mechanischen Spannungen oder Druecken in elektrische Widerstandsaenderungen
US4493219A (en) * 1982-08-02 1985-01-15 Illinois Tool Works, Inc. Force transducer
DE8326488U1 (de) * 1983-09-15 1985-02-28 Robert Bosch Gmbh, 7000 Stuttgart Kraft- bzw. druckmessgeber
IT206925Z2 (it) * 1986-03-10 1987-10-19 Marelli Autronica Sensore a filo spesso in particolare sensore di pressione

Also Published As

Publication number Publication date
EP0348658A3 (de) 1991-05-08
DE58905511D1 (de) 1993-10-14
EP0348658B1 (de) 1993-09-08
EP0348658A2 (de) 1990-01-03
DE3818189A1 (de) 1989-11-30

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