ES2032132T3 - Equipo de medicion dimensional capacitiva de salida lineal. - Google Patents
Equipo de medicion dimensional capacitiva de salida lineal.Info
- Publication number
- ES2032132T3 ES2032132T3 ES198989403422T ES89403422T ES2032132T3 ES 2032132 T3 ES2032132 T3 ES 2032132T3 ES 198989403422 T ES198989403422 T ES 198989403422T ES 89403422 T ES89403422 T ES 89403422T ES 2032132 T3 ES2032132 T3 ES 2032132T3
- Authority
- ES
- Spain
- Prior art keywords
- distance
- detection electrode
- measure
- level
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
UNA CADENA DE MEDICION DIMENSIONAL CAPACITIVA DE SALIDA LINEAL, SEGUN EL INVENTO, CONSTA ESENCIALMENTE DE UN CAPTADOR CAPACITIVO (1A) FORMADO POR UN ELECTRODO DE DETECCION Y UN ELECTRODO DE PROTECCION QUE RODEA AL ELECTRODO DE DETECCION, ALIMENTADOS RESPECTIVAMENTE POR DOS FUENTES DE TENSION DE POLARIZACION (VP,V''P), UN CONDENSADOR DE REFERENCIA (6A) ALIMENTADO POR UNA FUENTE DE TENSION DE REFERENCIA (7A), Y UN CIRCUITO (9) PARA MEDIR LA DISTANCIA (E) ENTRE EL ELECTRODO DE DETECCION Y UNA PIEZA CONDUCTORA (P) SITUADA FRENTE A DICHO ELECTRODO. LAS FUENTES DE TENSION DE POLARIZACION SON DE NIVEL VARIABLE Y MANTENIDAS EN NIVEL POR UNA SEÑAL DE MEDICION DE LA DISTANCIA (VE) SUMINISTRADA POR EL CIRCUITO DE MEDICION. EL CIRCUITO DE MEDICION CONSTA DE ELEMENTOS (90 A 93) PARA AMPLIFICAR Y DESMODULAR UNA SEÑAL DE ERROR QUE ENTRA, REPRESENTATIVA DE UNA DIFERENCIA ENTRE UNA CARGA DE UNA CAPACIDD DE CAPTADOR (CPT) FORMADA ENTRE EL ELECTRODO DE DETECCION (10) Y LA PIEZA (P) ALEJADA DE LA DISTANCIA (E)A MEDIR Y UNA CARGA DEL CONDENSADOR DE REFERENCIA. LA SEÑAL DE MEDICION DE LA DISTANCIA SUMINISTRADA POR EL CIRCUITO DE MEDICION REPRESENTA LINEALMENTE LA DISTANCIA A MEDIR (E), Y, GRACIAS AL MANTENIMIENTO DE NIVEL, ESTABILIZA LAS FUENTES DE POLARIZACION EN CUANTO A TEMPERATURA Y TIEMPO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8816244A FR2640373B1 (fr) | 1988-12-09 | 1988-12-09 | Chaines de mesure dimensionnelle capacitive a sortie lineaire |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2032132T3 true ES2032132T3 (es) | 1993-01-01 |
Family
ID=9372787
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES198989403422T Expired - Lifetime ES2032132T3 (es) | 1988-12-09 | 1989-12-11 | Equipo de medicion dimensional capacitiva de salida lineal. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5065105A (es) |
EP (1) | EP0378017B1 (es) |
JP (1) | JPH02201102A (es) |
KR (1) | KR900010354A (es) |
DE (1) | DE68901259D1 (es) |
ES (1) | ES2032132T3 (es) |
FR (1) | FR2640373B1 (es) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5315259A (en) * | 1992-05-26 | 1994-05-24 | Universities Research Association, Inc. | Omnidirectional capacitive probe for gauge of having a sensing tip formed as a substantially complete sphere |
FR2693555B1 (fr) * | 1992-07-09 | 1994-09-09 | Onera (Off Nat Aerospatiale) | Dispositif de mesure d'impédance. |
DE4313344A1 (de) * | 1993-04-23 | 1994-11-03 | Roch Pierre Ets | Kapazitive Meßeinrichtung |
FR2712690B1 (fr) * | 1993-11-17 | 1995-12-15 | Snecma | Dispositif pour effectuer la mesure dynamique de la distance entre les faces en regard du rotor et du stator d'une machine tournante. |
US5723980A (en) * | 1995-06-07 | 1998-03-03 | Aerogage Corporation | Clearance measurement system |
FR2756048B1 (fr) * | 1996-11-15 | 1999-02-12 | Nanotec Ingenierie | Pont de mesure capacitif flottant et systeme de mesure multi-capacitif associe |
FR2763124B1 (fr) * | 1997-05-09 | 1999-07-23 | Manotec Solution | Systeme et procede de mesure capacitive de niveau d'un liquide dans un conteneur |
DE19821188A1 (de) * | 1998-05-12 | 1999-11-18 | Itt Mfg Enterprises Inc | Verfahren und elektrische Schaltung zur Verarbeitung eines analogen elektrischen Signals |
FR2784179B1 (fr) * | 1998-10-01 | 2000-11-17 | Onera (Off Nat Aerospatiale) | Chaine de mesure capacitive |
US6480007B1 (en) | 2000-04-05 | 2002-11-12 | Trw Inc. | Capacitive sensor excitation techniques |
JP2002157671A (ja) * | 2000-11-16 | 2002-05-31 | Sumitomo Metal Ind Ltd | センシングシステム |
US7687045B2 (en) | 2001-11-26 | 2010-03-30 | Biodefense Corporation | Article processing apparatus and related method |
US6692222B2 (en) | 2002-05-14 | 2004-02-17 | The Board Of Trustees Of The Leland Stanford Junior University | Micro gas turbine engine with active tip clearance control |
FR2844349B1 (fr) | 2002-09-06 | 2005-06-24 | Nanotec Solution | Detecteur de proximite par capteur capacitif |
NL2004052C2 (en) * | 2010-01-05 | 2011-07-06 | Mapper Lithography Ip Bv | Capacitive sensing system. |
DE102011002447B4 (de) * | 2011-01-04 | 2014-07-10 | Ident Technology Ag | Kapazitiver Annäherungsensor sowie Verfahren zur kapazitiven Annäherungsdetektion |
US9285207B2 (en) | 2013-03-13 | 2016-03-15 | Invensense, Inc. | Linear capacitive displacement sensor |
LU92918B1 (en) * | 2015-12-18 | 2017-07-13 | Iee Sa | Capacitive loading mode measurement circuit with compensation of measurement errors due to parasitic sensor impedances |
FR3072176B1 (fr) * | 2017-10-10 | 2022-03-04 | Fogale Nanotech | Dispositif de mesure d'impedance |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1047600A (en) * | 1962-10-12 | 1966-11-09 | Ass Elect Ind | Improvements relating to capacitive clearance measurements in turbines |
US3628136A (en) * | 1969-09-05 | 1971-12-14 | Garrett Corp | Means for measuring clearances in a gas turbine including a coaxial cable capacitor |
US4071820A (en) * | 1976-04-05 | 1978-01-31 | Alton Corporation | Measurement system |
US4067225A (en) * | 1977-03-21 | 1978-01-10 | Mechanical Technology Incorporated | Capacitance type non-contact displacement and vibration measuring device and method of maintaining calibration |
US4176555A (en) * | 1978-08-07 | 1979-12-04 | Mechanical Technology Incorporated | Signal amplifier system for controlled carrier signal measuring sensor/transducer of the variable impedance type |
US4539835A (en) * | 1983-10-28 | 1985-09-10 | Control Data Corporation | Calibration apparatus for capacitance height gauges |
FR2608751B1 (fr) * | 1986-12-19 | 1990-11-30 | Onera (Off Nat Aerospatiale) | Chaine de mesure dimensionnelle capacitive |
-
1988
- 1988-12-09 FR FR8816244A patent/FR2640373B1/fr not_active Expired - Lifetime
-
1989
- 1989-12-01 US US07/445,034 patent/US5065105A/en not_active Expired - Fee Related
- 1989-12-08 KR KR1019890018136A patent/KR900010354A/ko not_active Application Discontinuation
- 1989-12-11 EP EP89403422A patent/EP0378017B1/fr not_active Expired - Lifetime
- 1989-12-11 DE DE8989403422T patent/DE68901259D1/de not_active Expired - Lifetime
- 1989-12-11 ES ES198989403422T patent/ES2032132T3/es not_active Expired - Lifetime
- 1989-12-11 JP JP1321261A patent/JPH02201102A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0378017A1 (fr) | 1990-07-18 |
JPH02201102A (ja) | 1990-08-09 |
FR2640373A1 (fr) | 1990-06-15 |
EP0378017B1 (fr) | 1992-04-15 |
FR2640373B1 (fr) | 1992-12-11 |
DE68901259D1 (de) | 1992-05-21 |
US5065105A (en) | 1991-11-12 |
KR900010354A (ko) | 1990-07-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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