EP4070160A1 - Method and apparatus for removal of a stamp - Google Patents
Method and apparatus for removal of a stampInfo
- Publication number
- EP4070160A1 EP4070160A1 EP19816259.6A EP19816259A EP4070160A1 EP 4070160 A1 EP4070160 A1 EP 4070160A1 EP 19816259 A EP19816259 A EP 19816259A EP 4070160 A1 EP4070160 A1 EP 4070160A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- stamp
- carrier
- compound
- master
- stamping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0015—Production of aperture devices, microporous systems or stamps
Definitions
- the invention describes a method and a device for detaching a stamp.
- the prior art has different systems and processes for the production of stamps and for their use.
- the punches are roughly divided into hard and / or soft punches.
- a special type of soft stamp are the foil stamps, which consist of a relatively thin foil on which embossing structures are applied. The foil and embossing structures form the soft stamp.
- the use of soft punches is particularly preferred. Soft dies wear out faster than hard dies, but they can be replicated very quickly.
- a very expensive and precisely manufactured hard stamp is used as the master stamp and the soft stamp is produced as a negative from the hard stamp. These soft punches are then so-called working punches.
- Hard punches are very durable, but have the disadvantage that demolding is relatively difficult to carry out without risking, at least partially, destruction of the structures in the nanometer and / or micrometer range.
- Soft stamps wear out very quickly. The easy demolding is primarily a result of the elasticity and the very low bending resistance. Both properties make it possible to pull off the soft stamp or at least to bend it so far that it can be pulled off the stamping compound sequentially, i.e. step by step.
- the soft punches however, have extremely low hardness values and therefore wear relatively easily. They must therefore be continuously reshaped from a master stamp.
- PDMS Polydimethylsiloxane
- PFPE Perfluoropolyether
- the master stamp, the stamping compound and the product are also referred to below as the substrate.
- the invention relates to a method for detaching a stamp from a substrate, in particular from a master stamp, from an embossing compound and / or from a product, the stamp being deformed in the direction of the substrate in order to detach the stamp from the substrate.
- the invention further relates, in particular as an independent subject matter of the invention, to a method for producing a stamp on a carrier, with the following steps, in particular with the following sequence:
- the invention further relates, in particular as an independent subject matter of the invention, to a method for producing a product from an embossing compound, with the following steps, in particular with the following sequence:
- the invention further relates, in particular as an independent subject matter of the invention, to a device for detaching a stamp from a substrate, in particular from a master stamp, from an embossing compound and / or from a product, the stamp being deformable in the direction of the substrate by the Detach the stamp from the substrate.
- the invention further relates, in particular as an independent subject matter of the invention, to a device for producing a stamp on a carrier, in particular with a method according to one of the preceding claims, comprising:
- Application means for applying an embossing compound to a master stamp contacting means for contacting the embossing compound with the carrier, curing agent for detaching the master stamp from the hardened stamping compound, the generated stamp remaining on the carrier, the carrier being deformable in the direction of the master stamp, around the master stamp to be detached from the stamp
- the invention further relates, in particular as an independent subject matter of the invention, to a device for producing a product from an embossing compound,
- Release means for releasing the stamp from the stamping mass deformation means for deforming the stamp in the direction of the product in order to release the stamp from the product.
- the stamp and / or the carrier is / are deformed or is / are deformable by overpressure.
- the maximum deformation takes place in the center of the punch and / or the carrier, the deformation in particular taking place symmetrically to the center of the punch and / or the carrier.
- the deformation of the stamp and / or the carrier takes place from the inside out, in particular from the center of the stamp and / or the carrier to the edge of the stamp and / or the carrier.
- the substrate and the stamp and / or the carrier are moved away from one another, in particular at the same time as the stamp and / or the carrier are deformed.
- the stamp is detached from the outside inwards, in particular from the edge of the stamp to the center of the stamp.
- the deformation leads to a convex shape and / or to a bulging of the stamp and / or the carrier. It is also preferred that the master stamp and the carrier are moved away from one another in order to detach them, in particular simultaneously with the deformation of the carrier.
- the carrier is a foil and / or the stamp is a foil stamp.
- the carrier is a very thin and flexible glass plate.
- the glass plate is in particular thinner than 20mm, preferably thinner than 10mm, even more preferably thinner than 5mm, most preferably thinner than 2mm, most preferably thinner than 1mm.
- the device has at least one shaped carrier element for deforming and / or at least one stretching element for stretching the carrier, the carrier in particular being stretched over the shaped carrier element.
- the shaped carrier element has at least one shaped carrier element elevation, wherein the shaped carrier element elevation lifts the carrier from the shaped carrier element and / or stretches the carrier.
- the shaped carrier element has at least one fixing element which is used for, in particular dynamic, fixing of the carrier, with the at least one fixing element preferably being switchable so that a gas and / or gas mixture enters an intermediate space between the at least one fixing element Formed carrier element and the carrier can be brought out.
- the at least one stretching element is a fluid element, wherein a gas and / or gas mixture can be discharged via the fluid element in order to generate an overpressure between the shaped carrier element and the carrier.
- the carrier is held by a frame. If a frame is used, the stretching elements are still located in the usual way on the back of the carrier.
- the fixation is constructed in such a way that an endless film can be used on which several stamps are applied.
- the endless film can be fixed in such a way that, on the one hand, there is no significant distortion of the embossed structures and, on the other hand, the embossed structures or the stamp can be successively removed from the outside inwards.
- the demolding takes place in a controllable manner from the outside to the inside.
- the embodiment with the endless film allows the provision of an embossing system which can produce its soft stamps independently with the help of a single master stamp.
- a particular advantage of the embodiments and processes according to the invention is that the removal of the die from the mold does not depend on the substrate size and, above all, does not depend on the substrate thickness.
- the substrate can remain completely flat during the deformation process, while the The stamp detaches itself from the substrate as a result of the deformation according to the invention, in particular due to a generated convex curvature, in particular is detached from the substrate sequentially from the outside to the inside. This prevents the substrate from breaking.
- Another advantage is the lack of an exclusion zone. Since no objects such as blades, which could destroy components and structures on the edge of the substrate, have to be introduced for the separation, structures can be embossed up to the outermost edge of the substrate.
- the embodiments according to the invention can in principle emboss substrates of any size and shape, provided that they have been designed to be correspondingly large.
- Another advantage according to the invention consists in particular in the reusability of the support of the stamp. Should the structures on the carrier have been destroyed or worn through repeated use, the carrier can be exchanged or moved on in order to produce a new, fault-free work stamp.
- stamp can reach the full area of a wafer to be embossed and that even the exclusion zone can be embossed. This is mainly due to the fact that all shaping and deforming components are located behind the punch or the carrier of the punch and therefore the punch is not laterally limited by any components.
- the substrate to be embossed is no longer solely from the stamp but preferably the stamp is demolded from the substrate.
- the demolding of the stamp from the substrate can be supported by a translational movement of the substrate away from the stamp, the main demolding is based on the curvature of the carrier or stamp according to the invention. This makes it possible according to the invention to emboss on very thin substrates and then to demold the stamp without destroying the substrate, since the substrate can be fixed over its entire surface and does not have to be curved itself.
- Another advantage according to the invention is, in particular, the rigid state of the stamp or carrier in the embossing process and the flexible state of the stamp or carrier in the demolding process.
- the stamp In the embossing process, the stamp can be subjected to pressure because it is stabilized by the carrier and / or components located behind the carrier, while the stamp and the carrier can deform during the demolding process.
- the demolding behavior of the stamp can be influenced and adjusted very easily through the thickness of the carrier.
- the carrier is in particular thinner than 5 mm, preferably thinner than 1 mm, even more preferably thinner than 0.1 mm, most preferably thinner than 0.01 mm, most preferably thinner than 0.001 mm.
- the embodiment according to the invention can be used on the one hand for producing the stamp and on the other hand for using the stamp for stamping processes. In contrast to the prior art, two separate embodiments are therefore no longer necessary.
- a back plane is very often used, which has to be coated before the stamp is produced, in particular in order to ensure the adhesive strength to the working stamp embossing compound.
- the carriers preferably used according to the invention can already have a corresponding coating upon delivery, so that the There is no coating process for the stamp manufacturer, which leads to cost and time savings.
- the embodiment according to the invention relates in particular to a device by means of which a stamp can be produced on a carrier.
- the devices according to the invention have in particular at least one shaped carrier element over which a carrier can be stretched.
- the shaped carrier element preferably has at least one shaped carrier element elevation which lifts the carrier stamp side of the tensioned carrier from the remaining part of the shaped carrier element.
- the shaped carrier element has in particular at least one fixing element which is used to fix the carrier, in particular dynamically.
- the fixing element of the shaped carrier element can in particular be switched on and off.
- the fixing element serves to hold the carrier in place, in particular with as little tension as possible.
- the fixing element or the fixing elements can be any fixing element or the fixing elements.
- Vacuum fixings in particular with o individually controllable vacuum tracks o interconnected vacuum tracks
- the at least one fixing element can in particular be controlled electronically.
- Vacuum fixation is the preferred type for the fixation element.
- the vacuum fixation preferably consists of several vacuum paths which emerge on the surface of the shaped carrier element.
- the vacuum tracks can preferably be controlled individually.
- vacuum paths are combined to form vacuum path segments that can be individually controlled and therefore evacuated or flooded.
- each vacuum segment is independent of the other vacuum segments. This gives you the option of building individually controllable vacuum segments.
- the vacuum segments are preferably constructed in the shape of a ring. This enables a targeted, radially symmetrical fixation and / or detachment of the substrate from the sample holder, in particular carried out from the inside to the outside. Another preferred shape of the vacuum segments is rectangular.
- the shaped carrier element has in particular at least one element for lifting the carrier off the shaped carrier element.
- the lifting of the carrier is also referred to as stretching in the following; the element or elements which cause the stretching are also referred to as the stretching element (s).
- the at least one stretching element is preferably a fluid element through which a gas and / or gas mixture can flow out to generate an overpressure between the carrier molded element and the carrier.
- the aforementioned at least one vacuum segment which serves as a fixation, can be switched so that a gas and / or gas mixture can be pumped into the space between the shaped support element and the support.
- the at least one fixing element can then be used as a stretching element at the same time. If other fixing elements are used, the stretching elements are provided separately and independently of the fixing elements.
- the at least one shaped carrier element preferably has rounded edges which deflect the carrier as gently as possible.
- the radii of the rounded edges are greater than 0.1 mm, preferably greater than 1 mm, even more preferably greater than 5 mm, most preferably greater than 10 mm, most preferably greater than 30 mm.
- the carrier is preferably fixed on at least two, in particular opposite, sides with fixing units that act from the outside and that are independent of the shaped carrier element, in particular mechanical fixing units.
- load cells are built into the fixing units in order to measure and monitor the force with which the carrier is fixed to the carrier molded element.
- the fixing units are used in particular to roughly fix the carrier.
- the power which can be exerted on the carrier by the fixing units is preferably adjustable.
- the force used is between 0.001 N and 1000 N, preferably between 0.01 N and 500 N, more preferably between 0.1 N and 100 N, most preferably between 1 N and 50 N, most preferably between 1 N and 25 N.
- the force values mentioned are normalized to one square meter and then result in corresponding pressure values.
- the pressure is between 0.001 MPa and 1000 MPa, preferably between 0.01 MPa and 500 MPa, more preferably between 0.1 MPa and 100 MPa, most preferably between 1 MPa and 50 MPa, most preferably between 1 MPa and 25 MPa.
- Microcracks that arise in the carrier are preferably completely closed by the working stamp stamping compound during the manufacturing process of the working stamp.
- the product stamping compound is the stamping compound which is embossed by the work stamp in order to produce the desired products.
- Stamp and product embossing materials can be different.
- work stamp stamping compound and product stamping compound differ in their hydrophobicity or hydrophilicity.
- a measure of the hydrophobicity or hydrophilicity is the contact angle that is between a
- Test liquid droplets in particular water, and the surface to be measured forms.
- Hydrophilic surfaces flatten the liquid droplet, since the adhesive forces between the liquid and the surface dominate over the cohesive forces of the liquid and therefore form low contact angles.
- Hydrophobic surfaces lead to a more spherical shape of the liquid drop, since the cohesive forces of the liquid dominate over the adhesive forces between the liquid and the surface.
- a common method for determining the hydrophobicity or hydrophilicity is the contact angle method.
- the contact angle method is used together with Young's equation to obtain a statement about the surface energy of a solid through the use of a test liquid. This qualifies the surface energy of a surface using a certain test liquid, mostly water. Corresponding measurement methods and evaluation methods are known to the person skilled in the art.
- the contact angle determined using the contact angle method can be converted to a surface energy in N / m or in J / m 2 . For relative comparisons of different surfaces with the same test liquid, however, the details of the contact angle are sufficient to obtain a relative estimate of the surface's adhesiveness.
- water it can be said that wetted surfaces which create a contact angle on the water droplet of approx. 30 ° have a higher degree of adhesion than surfaces whose contact angle on the water droplet is approx. 120 °.
- the Adhesiveness of the work stamp materials due to a surface energy of less than 0.1 J / m 2 , in particular less than 0.01 J / m 2 , preferably less than 0.001 J / m 2 , even more preferably less than 0.0001 J / m 2 , ideally less than 0.00001 J / m 2 is defined.
- the adhesiveness of the contact surface is defined with a contact angle greater than 20 °, in particular greater than 50 °, preferably greater than 90 °, even more preferably greater than 150 °.
- the ability of a surface to adhere to another material can be determined using the contact angle method mentioned above.
- a drop of a known liquid, preferably water (values according to the invention based on water), (alternatively glycerine or hexadecane) is deposited on the surface to be measured. With the help of a microscope, the angle is measured exactly from the side, namely the angle between the tangent on the drop and the surface.
- the embossing compositions used according to the invention preferably have a viscosity between 1cp and 25000cp, preferably between 10 and 25000cp, more preferably between 10Ocp and 25000cp, most preferably between 10000cp and 25000cp, most preferably between 10000 and 25000cp.
- a carrier is placed over a shaped carrier element.
- the carrier is preferably a film.
- the film is first pre-fixed with a dynamic carrier fixation, preferably vacuum elements. Then the lateral fixation takes place with a static carrier fixation.
- This embodiment is designed to accommodate trimmed foils or limited, rigid supports. Especially the size of the girder is just designed so that the static girder fixation can fix the girder.
- This embodiment has at least one stretching element that can be used to stretch the carrier.
- the dynamic fixations preferably serve as stretching elements at the same time.
- a stamp carrier device which uses an endless film in order to be able to produce a plurality of stamps along the carrier.
- the endless film is preferably delivered as a roll and mounted on a first shaft.
- a second shaft allows a protective film to be rolled up and removed from the continuous film.
- the endless film can be guided over further elements and is guided between a first static carrier fixation and the carrier shaped element.
- the endless film passes the static carrier fixation and the second static carrier fixation and is finally rolled up on a third shaft.
- the static support fixings consist of fixation units that are movable and can clamp the endless film, in particular on the support molded element. This prevents the endless film from shifting. In this state, the part of the endless film can now be provided with corresponding embossed structures.
- This embodiment has at least one stretching element that can be used to stretch the carrier.
- the dynamic fixations preferably serve as stretching elements at the same time.
- the film according to the invention can be pretensioned with a force between IN and 1000N, preferably between 2N and 800N, more preferably between 5N and 600N, most preferably between 8N and 400N, most preferably between ION and 100N.
- the device according to the invention can be part of a cluster as a module.
- a cluster is understood to be a set of interconnected modules which, in particular, are all connected to one another in a vacuum-tight manner so that a substrate can be transported between the modules without coming into contact with an outside atmosphere.
- Each module can preferably be evacuated individually.
- the entire cluster can be evacuated.
- the pressure in each module and / or the entire cluster can be set to less than 1 bar, preferably less than 10 1 mbar, more preferably less than 10 3 mbar, most preferably less than 10 5 , most preferably less than 10 7 mbar.
- the modules and / or the cluster can in particular also be flushed with gases and / or gas mixtures.
- the modules and / or the cluster can in particular also be placed under excess pressure.
- a pressure between 1 bar and 5 bar, more preferably between 1 bar and 4.5 bar, even more preferably between 1 bar and 4 bar, most preferably between 1 bar and 3.5 bar, most preferably between 1 bar and 3 bar is set.
- the modules in the cluster are connected to one another in particular by a central module in which there is preferably a robot which can move the substrates between the loading containers (Foups) and / or the modules.
- a carrier is fixed on a device according to the invention.
- a working stamp stamping compound is deposited on a master stamp with the aid of a deposition device.
- the work stamp stamping compound is already distributed as evenly and over the entire surface as possible.
- the device according to the invention is aligned relative to the master stamp.
- the movement of the device according to the invention and / or of the master stamp is conceivable.
- the master stamp is preferably moved.
- the alignment can be done either mechanically and / or optically.
- a pure rough positioning of the master stamp relative to the device according to the invention is conceivable.
- both objects are preferably aligned using alignment marks.
- the alignment marks can be located on the carrier molded element and / or the carrier. However, they are preferably located on the carrier.
- a third process step the contact between the carrier and the work stamp stamping compound takes place.
- the working stamp compound is planarized along the carrier, while the master stamp structure is molded as a negative in the working stamp compound.
- the work stamp stamping compound can be cured either thermally and / or by means of electromagnetic radiation.
- Thermal curing takes place between 0 ° C and 500 ° C, preferably between 50 ° C and 450 ° C, even more preferably between 100 ° C and 400 ° C, most preferably between 150 ° C and 350 ° C, most preferably between 200 ° C and 300 ° C.
- the electromagnetic radiation preferably has a wavelength in the range between 10nm and 2000nm, preferably between 50nm and 1500nm, more preferably between 10onm and 100nm, with the greatest preference between 150nm and 500nm, with the greatest preference between 200nm and 370nm.
- the carrier with the hardened working stamp embossing compound is detached from the master stamp, in that the stretching element ensures that the carrier is stretched.
- a gas or gas mixture preferably flows over the dynamic carrier fixation, which consists of vacuum elements, between the carrier molded element and the carrier and thus produces a carrier that is convexly curved when viewed from the outside. The carrier is released from the outside to the inside.
- the carrier is fixed again via the dynamic carrier fixation.
- an endless film is fixed as a carrier on the device according to the invention.
- the first six process steps of the second method are essentially identical to the first six process steps of the first method.
- a seventh process step the fixing of the endless film is canceled by moving back the static carrier fixation of the fixing units in order to release the endless film. Thereafter or at the same time, the endless film is rolled up on a third roll.
- the working stamp stamping compound produced is removed from the shaped carrier element and a new area of the continuous film is ready for stamping. It is therefore very easy to produce several work stamps on one continuous film.
- the work stamp which was produced by one of the preceding methods, is used for embossing a product embossing compound.
- the actual products to be produced are manufactured from the product stamping compounds.
- a product embossing compound is preferably applied to a substrate and the substrate is aligned relative to the working stamp. This is followed by the embossing and curing process as well as the demolding process.
- Figure la shows a first embodiment according to the invention in a side view
- FIG. 1b shows the first embodiment according to the invention in a bottom view
- FIG. 2a a first process step of the first process according to the invention
- FIG. 2b a second process step of the first process according to the invention
- FIG. 2c a third process step of the first process according to the invention
- FIG. 2d a fourth process step of the first process according to the invention
- FIG. 2e shows a fifth process step of the first process according to the invention
- FIG. 2f a sixth process step of the first process according to the invention
- FIG. 3a shows a second process step of the second process according to the invention
- FIG. 3b shows a third process step of the second process according to the invention
- FIG. 3c shows a fourth process step of the second process according to the invention
- Figure 3d shows a fifth process step of the second process according to the invention
- FIG. 3e a sixth process step of the first process according to the invention
- FIG. 3f a seventh process step of the second process according to the invention
- FIG. 1 a shows a side view of a manual, first stamp device 1 according to the invention, which is provided from at least two fixing units 4, with the aid of which a carrier 3 can be fixed, in particular on two opposite sides.
- the two fixing units 4 are preferably connected to a shaped carrier element 2.
- the shaped carrier element 2 preferably has a shaped carrier element elevation 2e, over which the carrier 3 can be stretched.
- the fixing unit 4 consists, for example, of a static support fixation 5, a spacer 7, and an attachment 8.
- the components 5, 7 and 8 can be releasably fixed to one another by fixing elements 9, in particular screws.
- the shaped carrier element 2 is preferably transparent to a wavelength range of electromagnetic radiation which is used for curing a work stamp embossing compound.
- the shaped support element 2 has dynamic fixation elements 6 that can be switched on and off (hereinafter also referred to as dynamic support fixation).
- the fixing elements 6 can be distributed as desired over a shaped carrier element surface 2o.
- the number of fixing elements 6 used is in particular greater than 2, preferably greater than 5, even more preferably greater than 10, most preferably greater than 50, most preferably greater than 100.
- the fixing elements 6 can be controlled individually.
- the fixing elements 6 can preferably be controlled in such a way that they can lead to a convex deformation of the carrier 3 viewed from the outside. This is made possible particularly simply by designing the fixing elements 6 as channels which not only serve to evacuate the intermediate area between the carrier 3 and the carrier molded element 2, but can also be used to generate an overpressure.
- the fixing elements 6 are therefore preferably channels through which a vacuum or overpressure can be built up. Another use according to the invention of the fixing elements 6 is that they can be used to fix the carrier 3 without distortion before a fixation, which is relatively prone to distortion, takes place via the static fixation 5 of the fixing units 4. As a result, the carrier 3 is not or only very slightly distorted in the area on which the stamp is applied in a later embossing process.
- the carrier 3 is clamped on the left and right between the outer part of the shaped carrier element 2 and the static carrier fixation 5.
- alignment marks 14 are arranged on the carrier form element surface.
- FIG. 1b shows a view from below of the manual, first device 1 according to the invention.
- the fixing elements 9, in particular screws, which are used for the detachable screw connection of the components 5, 7 and 8, can be seen.
- the dynamic support fixation 6 becomes a single, full-circumference, more rectangular Vacuum channel shown.
- the circular area 16 represents the stamp area 16 in which the later stamp will be embossed.
- the stamp area can of course assume any size and shape, but is shown as circular with reference to the circular, standardized wafer shape in the semiconductor industry.
- FIG. 2a shows a first process step according to the invention of a first method according to the invention, in which a working stamp embossing compound 11 is applied via a separation device 10 to a master stamp surface 12o of a master stamp 12 with a plurality of master stamp structures 13.
- FIG. 2b shows a second process step according to the invention of the first method according to the invention, in which a manual, inventive, first stamp device 1 is aligned relative to the master stamp 12 with the aid of the alignment marks 14.
- the alignment marks 14 of the master stamp 12 and the stamp device 1 are preferably aligned with one another by means of optical alignment elements 15.
- a purely mechanical, rough alignment of the stamp device 1 relative to the master stamp 12, in particular without an alignment element 15 and alignment marks 14, is also conceivable.
- FIG. 2c shows a third process step according to the invention of the first method according to the invention, in which the carrier 3 is contacted via a carrier stamp side 3s with the working stamp stamping compound 11.
- the work stamp stamping compound 11 is planarized by the contacting.
- FIG. 2d shows a fourth process step according to the invention of the first method according to the invention, in which the work stamp embossing compound 11 is cured.
- the curing can be thermal, but preferably be carried out electromagnetically, in particular by means of UV light.
- the hardening is preferably carried out by the shaped carrier element 2.
- the shaped carrier element 2 When using electromagnetic-safe radiation, the shaped carrier element 2 must be transparent enough in the corresponding wavelength range in order to achieve a corresponding hardening of the stamping stamping compound 11.
- FIG. 2e shows a fifth process step according to the invention of the first method according to the invention, in which the inventive detachment of the stamp 17 produced according to the invention (also called working stamp in the following) takes place.
- the carrier 3 is removed from the shaped carrier element 2.
- the removal takes place in particular through an overpressure of a fluid which exits through the dynamic support fixation 6, which is designed as a vacuum path.
- the dynamic support fixation 6 which is designed as a vacuum path.
- the carrier 3 is electrostatically charged and a second, equally polarized potential through elements in the carrier molded element 2 leads to a repulsion of the carrier 3 from the carrier molded element 2.
- the hardened working stamp stamping compound 11 is released from the master stamp 12 from the outside inwards, in particular sequentially. This type of demolding results in a particularly gentle dissolution of the cured stamping compound 11 from
- FIG. 2f shows a sixth process step according to the invention in which the carrier 3, which forms the stamp 17 with the cured embossing compound 11, is again completely fixed on the carrier molded element 2.
- the fixation takes place again via the dynamic carrier fixation 6.
- the stamp 17 thus generated can now be used for an embossing process of an embossing compound.
- the demolding of the stamp 17 from an embossing compound in a subsequent stamping process can take place in exactly the same way as the demolding of the stamp 17 from the master stamp 12 according to FIG. 2e.
- FIG. 3a shows a second process step according to the invention with a second stamp device 1 'according to the invention.
- the first process step according to the invention is analogous to the process step from FIG. 2a and is therefore not shown again here.
- the second stamp device 1 ‘according to the invention is a device with a roller system.
- a carrier 3 ′ which can be coated with a protective film 19, is located on a roll 18 a.
- the carrier 3 is an“ endless film ”.
- the carrier 3 is stretched over the shaped carrier element 2 and rolled up on a roller 18c.
- the protective film 19 can be peeled off and rolled up on a roll 18b.
- the fixing units 4 are designed so that they can clamp the carrier 3‘, in particular laterally.
- the carrier 3 ‘ is preferably clamped by an angled static carrier fixation 5‘, the clamping surface 5k of which is parallel to a carrier shaped element clamping surface 2k opposite it.
- the angle a between the shaped carrier element clamping surface 2k and a shaped carrier element rear side 2r is between 0 ° and 90 °, preferably between 5 ° and 85 °, more preferably between 10 ° and 80 °, most preferably between 15 ° and 75 °, most preferably between 20 ° and 70 °.
- the master stamp 12 is preferably moved under the stamp device.
- FIG. 3b shows a third process step according to the invention with the second stamp device 1 'according to the invention. Since the stamp device 1 'is preferably constructed in such a way that it rests as a whole, the master stamp 12 moves towards the carrier 3' in order to move the working stamp stamping compound 11 with it to bring the carrier 3 'into contact.
- FIG. 3c shows a fourth process step according to the invention with the second stamp device 1 ′ according to the invention, analogous to the process step of FIG. 2d.
- FIG. 3d shows a fifth process step according to the invention with the second stamp device 1 ′ according to the invention, analogous to the process step of FIG. 2e.
- FIG. 3e shows a sixth process step according to the invention with the second stamp device 1 ′ according to the invention, analogous to the process step of FIG. 2f.
- FIG. 3f shows a seventh process step according to the invention with the second stamp device 1 'according to the invention, in which the fixing units 4' are opened so that the carrier 3 can be moved on by the rollers 18a, 18c.
- the working stamp 17 is removed from the shaped carrier element 2.
- a new, unused section 3u of the carrier 3 passes under the shaped carrier element 2 and can be provided again with an embossing compound according to process steps 3a-3d .
- Molded carrier element e Molded carrier element elevation o Molded carrier element surface r Molded carrier rear side k Molded carrier clamping surface, 3 ‘carrier u Unused carrier section s stamp side carrier, 4‘ fixing unit, 5 ‘static carrier fixing k‘ clamping surface
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2019/083339 WO2021110237A1 (en) | 2019-12-02 | 2019-12-02 | Method and apparatus for removal of a stamp |
Publications (1)
Publication Number | Publication Date |
---|---|
EP4070160A1 true EP4070160A1 (en) | 2022-10-12 |
Family
ID=68806738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19816259.6A Pending EP4070160A1 (en) | 2019-12-02 | 2019-12-02 | Method and apparatus for removal of a stamp |
Country Status (7)
Country | Link |
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US (1) | US20220339825A1 (en) |
EP (1) | EP4070160A1 (en) |
JP (1) | JP2023510449A (en) |
KR (1) | KR20220098346A (en) |
CN (1) | CN114556211A (en) |
TW (1) | TW202141177A (en) |
WO (1) | WO2021110237A1 (en) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6004738B2 (en) * | 2011-09-07 | 2016-10-12 | キヤノン株式会社 | Imprint apparatus and article manufacturing method using the same |
US10620532B2 (en) * | 2014-11-11 | 2020-04-14 | Canon Kabushiki Kaisha | Imprint method, imprint apparatus, mold, and article manufacturing method |
CN105137714B (en) * | 2015-10-10 | 2019-08-13 | 兰红波 | A kind of device and its method for stamping of large scale wafer full wafer nano impression |
JP6774178B2 (en) * | 2015-11-16 | 2020-10-21 | キヤノン株式会社 | Equipment for processing substrates and manufacturing methods for articles |
US10627715B2 (en) * | 2016-10-31 | 2020-04-21 | Canon Kabushiki Kaisha | Method for separating a nanoimprint template from a substrate |
JP7037729B2 (en) * | 2018-09-21 | 2022-03-17 | 日本電気硝子株式会社 | Manufacturing method of flexible mold, base material for flexible mold, and manufacturing method of optical parts |
-
2019
- 2019-12-02 KR KR1020227013156A patent/KR20220098346A/en active Search and Examination
- 2019-12-02 US US17/762,411 patent/US20220339825A1/en active Pending
- 2019-12-02 JP JP2022523346A patent/JP2023510449A/en active Pending
- 2019-12-02 CN CN201980101542.9A patent/CN114556211A/en active Pending
- 2019-12-02 EP EP19816259.6A patent/EP4070160A1/en active Pending
- 2019-12-02 WO PCT/EP2019/083339 patent/WO2021110237A1/en unknown
-
2020
- 2020-11-25 TW TW109141247A patent/TW202141177A/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR20220098346A (en) | 2022-07-12 |
US20220339825A1 (en) | 2022-10-27 |
WO2021110237A1 (en) | 2021-06-10 |
CN114556211A (en) | 2022-05-27 |
JP2023510449A (en) | 2023-03-14 |
TW202141177A (en) | 2021-11-01 |
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