EP4024435A1 - Röntgenstrahlenquelle und steuerverfahren dafür - Google Patents

Röntgenstrahlenquelle und steuerverfahren dafür Download PDF

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Publication number
EP4024435A1
EP4024435A1 EP19943133.9A EP19943133A EP4024435A1 EP 4024435 A1 EP4024435 A1 EP 4024435A1 EP 19943133 A EP19943133 A EP 19943133A EP 4024435 A1 EP4024435 A1 EP 4024435A1
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EP
European Patent Office
Prior art keywords
emitters
thin film
ray source
gate electrodes
source apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP19943133.9A
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English (en)
French (fr)
Other versions
EP4024435A4 (de
Inventor
Cheol Jin Lee
Sang Heon Lee
Jun Soo Han
Han Bin Go
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Korea University Research and Business Foundation
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Korea University Research and Business Foundation
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Filing date
Publication date
Application filed by Korea University Research and Business Foundation filed Critical Korea University Research and Business Foundation
Publication of EP4024435A1 publication Critical patent/EP4024435A1/de
Publication of EP4024435A4 publication Critical patent/EP4024435A4/de
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/045—Electrodes for controlling the current of the cathode ray, e.g. control grids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30469—Carbon nanotubes (CNTs)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/062—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/068—Multi-cathode assembly

Definitions

  • the present disclosure relates to an X-ray source apparatus and a control method of the X-ray source apparatus in which a cathode electrode and a gate electrode are arranged in an array form to enable matrix control, and, thus, dose can be controlled depending on the position on a subject.
  • Characteristics of an X-ray source are determined by the dose, energy, and focus of X-rays.
  • a high-brightness and high-current electron emitter is needed.
  • the brightness is measured as characteristics of the electron emitter, and when high-density electrons are emitted in a specific direction, the brightness increases.
  • a cold cathode X-ray source attracts electron beams from a carbon nanotube electron emitter by applying a voltage to a gate electrode and then focuses the electron beams to high density through a focusing electrode and induces them to an anode electrode. Further, if a high voltage is applied between a cathode electrode and the anode electrode, electrons are accelerated toward the anode electrode and collide with the anode electrode, and, thus, X-rays are generated from the anode electrode.
  • a conventional X-ray source operates by thermionic emission and uses a reflective anode electrode.
  • an X-ray is radially emitted from a point light source. Therefore, it is difficult to control the dose of X-rays, and the intensity of X-rays is not uniform.
  • a carbon nanotube has mainly been used as a material of an electron emitter.
  • the electron emitter has been manufactured by mixing the CNT and a conductive organic material to a paste. While the CNT paste electron emitter is manufactured, the CNT which serves as a field emitter can be contaminated by unwanted organic material, and it is very difficult to achieve vertical orientation of the CNT. Further, the CNT paste electron emitter generates a gas caused by the organic material during field emission, and, thus, the vacuum level in the device decreases, which may cause serious problems such as a sharp decrease in the field emission efficiency and a reduction of the lifetime of the field electron emitter.
  • a thermionic emission-based point light source has been used, and, thus, it is difficult to control the dose of X-rays.
  • X-rays are radially generated, and, thus, the energy of X-rays is not uniform.
  • electron beams colliding with the anode electrode have a large-sized focus, and, thus, there is a limit in increasing the resolution of an X-ray image.
  • An exemplary embodiment of the present disclosure provides an X-ray source apparatus and a control method of the X-ray source apparatus in which emitters are formed using a CNT thin film, a graphene thin film, or a nanocarbon thin film to increase the field emission efficiency, a transmission-type anode is used to enable X-rays to be emitted in the form of a surface light source to a subject, and electron beams generated from the emitters are driven by matrix control to irradiate X-rays at an optimum dose for each position on the subject.
  • an X-ray source apparatus that emits X-rays to a subject includes: emitters formed on upper surfaces of cathode electrodes to emit electrons; an anode electrode arranged at a predetermined distance from the cathode electrodes; gate electrodes positioned between the emitters and the anode electrode and formed by transferring a graphene thin film on a metal electrode having at least one or more openings; a focusing lens positioned between the gate electrodes and the anode electrode and configured to focus electron beams emitted from the emitters on the anode electrode; and a control module configured to adjust the dose of X-rays for each position on the subject by performing two-dimensional matrix control to the emitters and the gate electrodes.
  • the emitters are arranged in an array form in a first direction
  • the gate electrodes are arranged in an array form in a second direction
  • the first direction and the second direction are perpendicular to each other
  • the control module determines the dose of X-rays depending on the size of the array.
  • a control method of an X-ray source apparatus which emits X-rays to a subject and in which emitters are arranged on upper surfaces of cathode electrodes in an array form in a first direction and gate electrodes are arranged between the emitters and an anode electrode in an array form in a second direction perpendicular to the first direction includes: adjusting the dose of X-rays for each position on the subject by performing two-dimensional matrix control to the emitters and the gate electrodes arranged in an array form.
  • the dose of X-rays for each position on the subject is determined depending on the size of the array.
  • two-dimensional matrix control can be performed to the cathode electrodes and the gate electrode, and, thus, it is possible to irradiate X-rays at an optimum dose for each position on the subject. Therefore, it is possible to suppress the irradiation of more X-rays than are needed to the subject. Also, it is possible to obtain a high-resolution and high-quality X-ray image.
  • two-dimensional matrix control makes it easy to control the dose of X-rays and makes it possible to uniformly irradiate X-rays to the subject. Therefore, it is possible to manufacture a high-resolution surface X-ray source with less dependence on the size of the focus of electron beams.
  • a CNT thin film is fabricated using only a CNT material without containing an organic material by vacuum filtration and then processed into a point shape or a line shape to manufacture the emitters or a graphene thin film or a nanocarbon thin film is used to form the emitters. Then, the emitters are arranged in an array form and used as cold cathode electron emitters. Thus, it is possible to generate point or surface electron beams of various sizes. Also, it is possible to adjust the magnitude of current to be emitted. Further, it is possible to manufacture an X-ray source with high transmittance and high density of electron beams.
  • a CNT thin film is used for the emitters instead of a CNT paste cold cathode electron emitter. Therefore, high bonding force in the CNT thin film which is a nanomaterial and high electrical/mechanical adhesion between the CNT emitters and the cathode electrodes can be achieved without using an organic material-containing paste or other adhesives. Accordingly, it is possible to overcome a decrease in vacuum level caused by an organic material. Further, it is possible to manufacture an X-ray source with high field emission efficiency and excellent lifetime.
  • connection or coupling that is used to designate a connection or coupling of one element to another element includes both a case that an element is “directly connected or coupled to” another element and a case that an element is “electronically connected or coupled to” another element via still another element.
  • the term “comprises or includes” and/or “comprising or including” used in the document means that one or more other components, steps, operation and/or existence or addition of elements are not excluded in addition to the described components, steps, operation and/or elements unless context dictates otherwise and is not intended to preclude the possibility that one or more other features, numbers, steps, operations, components, parts, or combinations thereof may exist or may be added.
  • unit or “module” includes a unit implemented by hardware or software and a unit implemented by both of them.
  • One unit may be implemented by two or more pieces of hardware, and two or more units may be implemented by one piece of hardware.
  • FIG. 1 is a diagram illustrating an X-ray source apparatus in accordance with an exemplary embodiment of the present disclosure
  • FIG. 2 is a diagram illustrating the X-ray source apparatus capable of performing two-dimensional matrix control in accordance with an exemplary embodiment of the present disclosure.
  • an X-ray source apparatus 100 configured to emit X-rays to a subject includes cathode electrodes 101, emitters 110, an anode electrode 120, gate electrodes 130, a focusing lens 140, and an electron beam collimator 150.
  • the cathode electrodes 101, the anode electrode 120, and the gate electrodes 130 may be connected to an external power supply (not illustrated) to apply an electric field.
  • the cathode electrodes 101 may be connected to a negative voltage source or a positive voltage source
  • the anode electrode 120 and the gate electrodes 130 may be connected to a voltage source that can apply a higher potential than a potential of the voltage source connected to the cathode electrodes 101.
  • the emitters 110 are formed on the cathode electrodes 101 and used as cold cathode electron emitters that emit electrons. That is, the emitters 110 may emit electrons using an electric field formed by a voltage applied to the cathode electrodes 101, the anode electrodes 120 and the gate electrodes 130.
  • the emitters 110 manufactured using a carbon nanotube (CNT) thin film can emit point or surface electron beams by processing the CNT thin film into a point shape or a line shape.
  • CNT carbon nanotube
  • the emitters 110 use the CNT thin film to provide a low threshold field and a high field emission current density, but may also use a graphene thin film or a nanocarbon thin film (e.g., nanographite thin film, etc.) instead of the CNT thin film to form emitters with high field emission properties.
  • a graphene thin film or a nanocarbon thin film e.g., nanographite thin film, etc.
  • the anode electrode 120 is provided away from the cathode electrodes 101 at a predetermined distance in an emission direction of an electron beam.
  • the gate electrodes 130 are positioned between the emitters 110 and the anode electrode 120 and provided away from and above the emitters 110.
  • the gate electrodes 130 are formed by transferring a graphene thin film including at least one or more layers on an upper part of a metal electrode having at least one or more openings.
  • the gate electrodes 130 may be formed by using a metal plate having a hole or a polygonal metal mesh as a metal electrode, attaching a graphene thin film on the metal electrode, or inserting at least one graphene thin film between two metal electrodes.
  • the emitters 110 and the gate electrodes 130 may be arranged in an array form.
  • the plurality of emitters 110 spaced in parallel to each other is arranged in parallel in an array form at an equal distance in a first direction and the gate electrodes 130 are arranged in parallel in an array form at an equal distance in a second direction, and the first direction and the second direction may be perpendicular to each other.
  • the focusing lens 140 is positioned between the gate electrodes 130 and the anode electrode 120 and focuses electron beams emitted from the emitters 110 on the anode electrode 120.
  • the electron beam collimator 150 is positioned between the focusing lens 140 and the anode electrode 120 and allows the electron beams passing through the focusing lens 140 to go straight and be focused on the anode electrode 120.
  • the electron beam collimator 150 can improve the linearity of the electron beams passing through the focusing lens 140.
  • the X-ray source apparatus 100 performs, through a control module 160, two-dimensional matrix control to the emitters 110 and the gate electrodes 130 which are arranged in an array form.
  • the two-dimensional matrix control is to adjust a voltage level between the emitters 110 and the gate electrodes 130 for each position and thus adjust the generation density of electron beams for each body part. Since the density of X-rays generated by the anode electrode 120 changes as the density of electron beams changes, the two-dimensional matrix control makes it possible to adjust the density of X-rays depending on the bone thickness of each body part.
  • the control module 160 adjusts the dose of X-rays to be suitable for each position on a subject 200 to generate X-rays.
  • the size of an X-ray source can be adjusted depending on the size of an array, and, thus, a large-scale X-ray source can be implemented.
  • control module 160 may collect characteristics information of the subject 200 such as gender, age, body information, and the like, and locally specify emission information about the dose of X-rays depending on the area to be imaged, the bone position, the bone thickness, and the like on the basis of the collected characteristics information of the subject 200.
  • the control module 160 collects characteristics information of the subject 200 such as gender, age, body information (height, weight, body type, etc.), and the like or additional information for identifying each subject and anatomical information of each subject 200 such as the bone position or bone thickness and matches them respectively.
  • characteristics information of the subject 200 it is possible to estimate anatomical information such as the bone position or bone thickness based on just characteristics information of the subject 200 such as gender, age, body information, and the like and then, it is possible to determine emission information about a proper dose of X-rays for each position based on the estimated anatomical information such as the bone position or bone thickness.
  • the control module 160 When the emission information about the dose of X-rays for each position is determined, the control module 160 performs two-dimensional matrix control to the emitters 110 and the gate electrodes 130 to perform addressing to the X-ray source apparatus 100 and adjusts voltage levels to be applied to the cathode electrodes 101 and the gate electrodes 130, respectively, to adjust the dose of X-rays from the emitters 110 for each position.
  • control module 160 configured as an intelligent device that supports communication, auto-control, data processing, image data processing, and the like may include all kinds of handheld wireless communication devices, such as a smartphone and a tablet PCT, in which multiple application programs (i.e., applications) desired by a user may be installed and executed, or may include wired communication devices, such as a PC, which can access another device or server via a network.
  • handheld wireless communication devices such as a smartphone and a tablet PCT
  • application programs i.e., applications
  • wired communication devices such as a PC, which can access another device or server via a network.
  • the emitters 110 arranged in an array form on the cathode electrodes 101, the gate electrodes 130 arranged in an array form, the focusing lens 140, the electron beam collimator 150, and the anode electrode 120 are placed sequentially and vacuum packaged within a vacuum container made of any one of a glass material, a ceramic material, or a metal material to implement a cold cathode X-ray source that irradiates X-rays optimized for each position on the subject 200.
  • FIG. 3 is a flowchart showing a control method of the X-ray source apparatus in accordance with an exemplary embodiment of the present disclosure.
  • the control method of the X-ray source apparatus is to generate X-rays with an adjusted dose for each position on a subject by performing two-dimensional matrix control to emitters and gate electrodes arranged in an array form.
  • the X-ray source apparatus arranges the emitters in an array form in a first direction.
  • CNT emitters manufactured using a CNT thin film but also emitters formed using any one of a graphene thin film or a nanocarbon thin film may be used.
  • An anode electrode is formed away from the cathode electrodes at a predetermined distance (S120), and gate electrodes are formed using a graphene thin film including at least one or more layers between the emitters and the anode electrode in a second direction perpendicular to the first direction (S130).
  • the anode electrode is manufactured into a transmission type by depositing a tungsten thin film on a beryllium metal plate.
  • the manufactured transmission-type anode electrode can generate surface X-rays.
  • a focusing lens provided between the gate electrodes and the anode electrode focuses electron beams emitted from the emitters on the anode electrode (S140) and an electron beam collimator is further provided between the focusing lens and the anode electrode to improve the linearity of the electron beams passing through the focusing lens (S150).
  • the focusing lens may be manufactured into a hole shape or may be manufactured by transferring one or more graphene layers on a lens. Further, one or two focusing lenses may be used.
  • the X-ray source apparatus includes the emitters and the gate electrodes arranged in an array form to cross perpendicular to each other, and the emitters and the gate electrodes may be a large-size emitter and a large-size gate electrode, respectively, to which two-dimensional matrix control can be performed.
  • the X-ray source apparatus collects characteristics information of the subject such as gender, age, body information, and the like, and locally specifies emission information about the dose of X-rays depending on the area to be imaged, the bone position, the bone thickness, and the like on the basis of the collected characteristics information of the subject and then outputs the emission information (S160).
  • characteristics information of the subject such as gender, age, body information, and the like
  • emission information about the dose of X-rays depending on the area to be imaged, the bone position, the bone thickness, and the like on the basis of the collected characteristics information of the subject and then outputs the emission information (S160).
  • the X-ray source apparatus when the emission information about the dose of X-rays for each position is determined, the X-ray source apparatus performs two-dimensional matrix control to the emitters and the gate electrodes arranged in an array form to perform addressing, adjusts voltage levels to be applied to the cathode electrodes and the gate electrodes, respectively, to adjust the dose of X-rays from the emitters for each position, and emits X-rays (S170).
  • FIG. 4 is a flowchart showing a method of forming CNT emitters illustrated in FIG. 3
  • FIG. 5 is a diagram illustrating a CNT thin film including a CNT network therein by the method shown in FIG. 4
  • FIG. 6 is a diagram illustrating a CNT thin film processed into a polygonal shape by the method shown in FIG. 4
  • FIG. 7 is a diagram illustrating various examples of the CNT emitters processed into a point or surface shape by the method shown in FIG. 4
  • FIG. 8 is a diagram illustrating the arrangement of the CNT emitter array formed by the method shown in FIG. 7 .
  • a CNT-dispersed aqueous solution is prepared by dispersing 200 mg of sodium dodecyl sulfate (SDS) and 4 mg of single-walled carbon nanotube in 200 ml of distilled (DI) water (S410). After a sonication process for 65 minutes (S420) and a centrifugation process for 40 minutes (S430), the CNT-dispersed aqueous solution is filtered through an anodic aluminum oxide (AAO) membrane to allow only the DI water to pass through. Then, CNTs remain unfiltered and deposited on the AAO membrane (S440).
  • SDS sodium dodecyl sulfate
  • DI distilled
  • the CNTs unfiltered on the AAO are strongly entangled to one another by van der Waals forces.
  • a CNT thin film including a CNT network therein is prepared (S450).
  • the CNT thin film is dipped in an isopropyl alcohol solution (IPA) and then dried to make the CNTs more entangled to one another.
  • IPA isopropyl alcohol solution
  • the CNT thin film 111 is cut into a polygonal shape such as a triangle or a quadrangle and pressed into a flat plate to manufacture an electron emitter, and the CNT emitters 110 are formed on upper surfaces of the cathode electrodes 101 (S460).
  • a carbonization process is performed for the CNT emitters 110 to more stably operate.
  • an organic polymer material i.e., carbon-based material
  • the carbon-based material is inserted into an empty space between the CNTs in the CNT network. Through this process, the bonding force between the CNTs can be further increased.
  • the CNT thin film may be manufactured into a point- or line-shaped CNT emitters 110 depending on the cutting method. If the CNT thin film 111 is cut into a fan shape or a triangular shape, an upper part of the cut portion may converge on a point, and if the CNT thin film 111 is cut into a quadrangular shape, an upper part of the cut portion may converge on a line.
  • the CNT emitters can generate point or two dimensional electron beams of various sizes depending on the cutting method of the CNT thin film.
  • FIG. 9 is a flowchart showing a method of forming gate electrodes illustrated in FIG. 3
  • FIG. 10 is a diagram provided to explain a process of transferring a graphene thin film on a metal electrode as illustrated in FIG. 9
  • FIG. 11 is a diagram illustrating an example of gate electrodes arranged in an array form by the method shown in FIG. 9 .
  • the method of forming gate electrodes includes synthesizing graphene on a copper foil by thermal chemical vapor deposition (CVD) and coating polymethylmethacrylate (PMMA) on the graphene with a spin coater (1).
  • CVD thermal chemical vapor deposition
  • PMMA polymethylmethacrylate
  • the copper foil is etched using a copper etching solution (2), followed by washing with DI water to remove the remaining copper foil (3).
  • a graphene thin film including multiple laminated layers is prepared.
  • a graphene thin film including one or more layers is transferred onto a metal electrode (4, 5, 6, 7).
  • the metal electrode may be a metal plate having circular holes or a metal mesh having a quadrangular, circular, or hexagonal shape.
  • the graphene thin film 131 is transferred onto the metal electrode and then dipped in an acetone solution and dried to remove the PMMA remaining on the graphene thin film 131 and annealed at 300°C in a vacuum atmosphere of 10 -5 Torr or less to manufacture the gate electrodes 130 on which the graphene thin film is stably transferred (8, 9).
  • the gate electrodes 130 arranged in an array form may be manufactured into a large-size gate electrode, in which two-dimensional matrix control can be performed.
  • the gate electrodes may be manufactured by inserting a graphene thin film including one or more layers between two metal electrodes.
  • the gate electrodes manufactured using the graphene thin film including at least one layer can uniformly apply an electric field, and, thus, the linearity of electron beams can be improved.
  • the graphene is an atomic scale mesh, and, thus, the transmission efficiency of electron beams can be increased. Furthermore, due to the graphene with very high heat transfer efficiency, heat caused by the collision of electron beams can be effectively dispersed, and, thus, the thermal stability of the gate electrodes can be improved.
  • the focusing lens may be manufactured by transferring graphene including one or more layers onto a metal plate or a metal mesh or inserting at least one graphene thin film into two focusing lens.
  • the X-ray source apparatus and the control method thereof uses cold cathode electron emitters using a CNT thin film and can irradiate X-rays with a two-dimensional area to a subject through a transmission-type anode electrode and drive electron beams generated from the CNT emitters by matrix control to irradiate X-rays at an optimum dose for each position on the subject.
  • the fabricating method of the above-described X-ray source apparatus and the matrix control method implemented by the X-ray source apparatus according to the exemplary embodiments of the present disclosure can be embodied in a storage medium including instruction codes executable by a computer such as a program module executed by the computer.
  • the storage medium includes a computer-readable medium, and the computer-readable medium can be any usable medium which can be accessed by the computer and includes all volatile/non-volatile and removable/non-removable media.
  • the computer-readable medium may include all computer storage media.
  • the computer storage media include all volatile/non-volatile and removable/non-removable media embodied by a certain method or technology for storing information such as computer-readable instruction code, a data structure, a program module or other data.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • X-Ray Techniques (AREA)
EP19943133.9A 2019-08-28 2019-08-28 Röntgenstrahlenquelle und steuerverfahren dafür Pending EP4024435A4 (de)

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JP (1) JP7407476B2 (de)
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CN114303220A (zh) 2022-04-08
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EP4024435A4 (de) 2023-08-09
JP7407476B2 (ja) 2024-01-04

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