EP3887805A1 - Gassensorvorrichtung sowie verfahren zu ihrer herstellung und zu ihrem betrieb - Google Patents
Gassensorvorrichtung sowie verfahren zu ihrer herstellung und zu ihrem betriebInfo
- Publication number
- EP3887805A1 EP3887805A1 EP19808711.6A EP19808711A EP3887805A1 EP 3887805 A1 EP3887805 A1 EP 3887805A1 EP 19808711 A EP19808711 A EP 19808711A EP 3887805 A1 EP3887805 A1 EP 3887805A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- transducer
- receptor
- sensor device
- gas sensor
- pixels
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 239000002245 particle Substances 0.000 claims abstract description 77
- 239000011159 matrix material Substances 0.000 claims abstract description 24
- 239000000203 mixture Substances 0.000 claims abstract description 13
- 239000002243 precursor Substances 0.000 claims abstract description 3
- 238000005259 measurement Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 8
- 230000035945 sensitivity Effects 0.000 claims description 5
- 102000005962 receptors Human genes 0.000 description 87
- 108020003175 receptors Proteins 0.000 description 87
- 239000007789 gas Substances 0.000 description 60
- 239000000463 material Substances 0.000 description 7
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 6
- 239000000725 suspension Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 230000004044 response Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- OVHDZBAFUMEXCX-UHFFFAOYSA-N benzyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OCC1=CC=CC=C1 OVHDZBAFUMEXCX-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- QHGNHLZPVBIIPX-UHFFFAOYSA-N tin(ii) oxide Chemical compound [Sn]=O QHGNHLZPVBIIPX-UHFFFAOYSA-N 0.000 description 2
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten(VI) oxide Inorganic materials O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 2
- RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical compound [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 102000005801 Rod Opsins Human genes 0.000 description 1
- 108010005063 Rod Opsins Proteins 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000007306 functionalization reaction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 238000004092 self-diagnosis Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/78—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour
- G01N21/783—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour for analysing gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/128—Microapparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N2021/7793—Sensor comprising plural indicators
Definitions
- Gas sensor device and method for its manufacture and its operation
- the present invention relates to a gas sensor device.
- the present invention also relates to a method for producing the
- Gas sensor device and a method for operating the gas sensor device.
- Gas sensors for odor detection are considered electronic
- Substrate are provided. If different receptor materials are used for this purpose, the manufacturing effort increases with each type of material in thin-film processes, since it must be ensured that each material is applied and structured in the desired position.
- the gas sensor device has a multi-transducer matrix
- CCD camera chip charge-coupled device
- Transducer pixels are read out individually, particularly in analog, amplified or digitized form.
- the gas sensor device has receptor particles of different ones
- Receptor types are understood to mean particles which are able to absorb or adsorb gas components.
- Different types of receptors are understood to mean types of receptor particles which have a different absorption or adsorption behavior than the gas components, or whose physical properties are influenced differently by the same gas component. There are therefore several types of receptor particles, each of which can have different selectivities and sensitivities. These receptor particles can be applied to the transducer pixels in a different mixture.
- the transducer pixels can be differentiated into first transducer pixels and second transducer pixels.
- the first transducer pixels each have one or more receptor particles.
- the second transducer pixels have no receptor particles. There are several in the multi-transducer matrix
- Receptor particles arranged from each type of receptor are arranged from each type of receptor.
- the gas sensor device is an integrated solution. It is therefore not necessary to combine many individual sensors with one another, which allows a small space requirement. By covering several transducer pixels with receptor particles of the same receptor type or the same mixture of different receptor types, redundancies result which can be used to increase the quality. If individual transducer pixels cannot be read or do not work, the Gas sensor device still have the desired function. Measured signals can also be averaged via the redundant receptor particle arrangements in order to increase the measurement quality.
- the receptor particles are randomly distributed across the transducer pixels.
- a random distribution enables a particularly simple production of the gas sensor device. This is especially true before
- the gas sensor device preferably has more than 50 transducer pixels, particularly preferably more than 100 transducer pixels. Especially with such a high number of transducer pixels, there is a clear advantage of this integrated solution over an equal number of individual pixels.
- the number of transducer pixels is at least ten times as large as the number of receptor types. It is particularly preferably at least twenty times as large. In this way it can be produced in such a way that it is highly likely that all types of receptors in the
- receptor particles can be produced in one, two, three, four or even up to ten or more types of receptors if the number of transducer pixels is large enough to provide redundancies.
- the multi-transducer matrix is arranged on an array that is set up around each
- the array is an array, which uses the measurement of electrical, optical or thermal properties as an active principle of sensitivity and selectivity for the detection of one or more variables, in particular an electrical, an optical or a thermal array.
- An electric one Array can determine the presence of a gas adsorbed on the receptor particles in particular via a resistance measurement, for example via
- the receptor particles are preferably selected from metal oxide semiconductor particles, graphene and phthalocyanines.
- Metal oxide semiconductors are preferably selected from the group consisting of tin (IV) oxide, tungsten (VI) oxide, zinc (II) oxide, tin (IV) oxide, copper (II) oxide or mixtures of these materials.
- An optical array measures the change in the color and / or the brightness of the receptor particles when gas components are absorbed or adsorbed.
- it can have diodes or a camera chip. If the array is an optical array, then the receptor particles are
- chemochromic materials preferably selected from chemochromic materials, organometallic networks, quantum dots and materials which are gas-dependent
- a thermal array can preferably be implemented by bimetallic contacts and the measurement of the thermal voltage.
- Thermal voltage can be caused by the heat of reaction of a chemical reaction taking place on receptor particles. Therefore, if the array is a thermal array, then the receptor particles are
- catalytically active particles in particular around metal particles which have at least one of the metals nickel, palladium, platinum, silver or gold.
- the transducer pixels are designed as troughs. Due to the presence and size of the troughs, the arrangement of the
- Receptor particles in terms of their position to match the location of the
- Transducer pixels are aligned. For example, a
- Access receptor particles if this lies exactly in the middle between two metal fingers of an interdigital electrode.
- each well is so large that it can receive a receptor particle. This ensures that each transducer pixel has only one type of receptor and that the receptor particle of this type of receptor is precisely positioned.
- each well is so large that it can accommodate several receptor particles.
- Receptor particles In this way, different types of receptor particles can also be located in one well, so that different gas selectivities can be realized on a single transducer pixel or one transducer pixel is then sensitive to several gases to be detected.
- the troughs can also have different sizes.
- the transducer pixels each have a plurality of depressions, which are then together from the transducer element of the
- Transducerpixels can be measured. If its array is designed, for example, as an electrical array, then several troughs can be located between the electrode fingers of an interdigital electrode, so that the electrical resistance between the electrode fingers is created by applying several
- Receptor particles can be reduced.
- the troughs can be realized by depressions. However, structuring should also be understood as wells that are caused by chemical
- auxiliary materials such as a structured intermediate layer locally improve the adhesion of receptor particles on the substrate of the transducer pixels.
- the method for manufacturing the gas sensor device comprises a
- a multi-transducer matrix with transducer pixels Provide a multi-transducer matrix with transducer pixels.
- a mixture is applied to these, which contains receptor particles from different receptor types and / or precursors of these receptor particles. These are then converted to sensitive receptor particles on the sensor by heating or another treatment.
- the mixture is a suspension such as an ink or a paste, which is dropped onto the multitransducer matrix and then dried. This allows a random distribution of the
- Receptor particles can be reached on the transducer pixels.
- the method for operating the gas sensor device comprises a calibration step in which the
- Gas sensor device is exposed to a reference atmosphere.
- Reference atmosphere contains gas components that are known to interact with the receptor particles of the gas sensor device. If transducer pixels behave in the same way in the reference atmosphere, it is concluded that they are coated with receptor particles of the same receptor type.
- the calibration step is preferably used to:
- transducer pixels that are not occupied by at least one receptor particle. These second transducer pixels are then determined to be invalid and are no longer activated or read out in later measuring steps carried out by means of the gas device.
- transducer pixels can also be determined in the calibration step which do not function properly because, for example, several receptor particles undesirably touch and occupy the same transducer pixel or because a receptor particle does not lie optimally on a transducer pixel. If, however, for the
- the gas sensor device provides that touching receptor particles of different compositions may be arranged in a group of receptors on a transducer pixel
- the composition of the receptor particle group is stored on the transducer pixel. This can be done, for example, in a computer with a data memory, the composition then being processed in a computer program.
- the assignment between transducer pixels and receptor type is also saved for all other transducer pixels.
- the calibration step can in particular provide for the transducer pixels to be subdivided into a group of selective or sensitive transducer pixels and into a group of nonsensitive or non-selective transducer pixels.
- the group of selective or sensitive transducer pixels is then preferably used in measurement steps for the analysis of a gas mixture, while the non-sensitive or non-selective ones
- Transducer pixels can be used for self-diagnosis of the measurement process.
- the gas sensor device can be trained in a manner that is also used for known nasal devices.
- the concentration of gas components in reference gases is compared with the sensor response and the sensor response for gas mixtures that correspond to certain human perceptions, such as a good or bad smell, is recorded.
- the result of the training can be stored in a computer unit using characteristic maps and used to output the measurement result in an HMI (Human Machine Interface) such as a display.
- HMI Human Machine Interface
- the gas sensor device is exposed to a measuring atmosphere and the transducer pixels that are not found to be invalid are read out electrically, optically or thermally.
- the type of reading depends on the array of the multi-transducer matrix. It is further preferred that the transducer pixels are optically and / or thermally modulated in the measuring step.
- the gas sensor device can be excited in particular by light in a suitable wavelength range in order to achieve a predetermined balance between adsorption and
- regeneration can take place in a regeneration step in which the gas components are also excited optically or thermally.
- the wavelength range or temperature are selected so that the gas components are desorbed or oxidized.
- Figure 1 shows a multi-transducer matrix of a gas sensor device according to an embodiment of the invention.
- FIG. 2 shows a multi-transducer matrix of a gas sensor device according to another exemplary embodiment of the invention.
- Figure 3 shows a plan view of a trough of a gas sensor device according to an embodiment of the invention.
- Figure 4 shows a sectional view of the trough according to Figure 3 along the line IV-IV.
- Figure 5 shows a plan view of a trough of a gas sensor device according to another embodiment of the invention.
- a multi-transducer matrix 10a with 16x16 transducer pixels in 20 is shown in FIG. In the present case, these have an electrical array
- a suspension of receptor particles 30 is dropped onto the transducer matrix 10a consist of five different types of receptors 1 to 5.
- the receptor types are tin (IV) oxide (receptor type 1), tungsten (VI) oxide (receptor type 2), zinc (II) oxide (receptor type 3), tin (II) oxide (receptor type 4) ) and copper (II) oxide (receptor type 5).
- the receptor particles 30 are suspended in a volatile organic solvent. After its evaporation, the random arrangement of the receptor particles 30 results, which is shown in FIG. 1.
- the suspension contains the same types of receptors 1 to 5. Their concentration in the suspension was chosen such that it was to be expected that after evaporation of the solvent every second transducer pixel 20 would be coated with a receptor particle 30. This results in the expected values listed in Table 1 for the assignment of the 256 transducer pixels 20. Furthermore, the random distribution actually achieved is on the
- the arrangement of the receptor particles 30 in the transducer pixels 20 is shown in Figures 3 and 4.
- the transducer pixels 20 are designed such that the electrode fingers 41, 42 of the interdigital electrode of each transducer pixel 20 each form a trough 51 which can receive exactly one receptor particle.
- the receptor particles 30 of all receptor types 1 to 5 have an essentially identical number-average particle size. This design of the wells 51 ensures that each transducer pixel 20 has only one
- Receptor particles 30 can accommodate a type of receptor.
- Figure 5 shows the execution of a trough 52 in a second
- Embodiment of the gas sensor device This well is so large that it can hold several receptor particles 30 of the different receptor types 1 to 5. This means that one transducer pixel 20 can have several
- the gas sensor device After the gas sensor device has been manufactured, it is first calibrated. For this purpose, it is exposed to a reference atmosphere, the gas components of which are adsorbed on the receptor particles 30 and thus change their electrical resistance. This change in resistance can be measured for each transducer pixel 20 by means of the interdigital electrodes 41, 42. Transducer pixels 20 which have no change in resistance in the reference atmosphere are not covered with receptor particles 30 and are found to be invalid. If an unfavorable positioning of a receptor particle 30 on the
- Interdigital electrodes 41, 42 gives a measured value that is outside of a
- the respective transducer pixel 20 is also determined to be invalid. All other transducer pixels 20 are divided into five groups, each with the same change in resistance, which is the five
- the gas sensor device is then trained using the transducer pixels 20 which are not found to be invalid
- Transducer pixels 20 of the same group each form the basis for the generation of a redundant measurement signal.
- the gas sensor device If the gas sensor device has been trained, it is exposed to a measuring atmosphere in a measuring operation and, based on the electrical response of the transducer pixels 20, it is concluded which gas components in the each sample gas are included.
- the temperature of the transducer pixels 20 can be modulated in each case in order to obtain a plurality of measuring points for the measuring gas at each transducer pixel 20. This takes advantage of the fact that different gases desorb from the receptor particles 30 at different temperatures, which can be measured as an electrical resistance change.
- the multi-transducer matrix 10a, 10b is then heated to such an extent that any eventual adsorb on the receptor particles 30
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Nanotechnology (AREA)
- Power Engineering (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Plasma & Fusion (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018220607.4A DE102018220607A1 (de) | 2018-11-29 | 2018-11-29 | Gassensorvorrichtung sowie Verfahren zu ihrer Herstellung und zu ihrem Betrieb |
PCT/EP2019/081258 WO2020109008A1 (de) | 2018-11-29 | 2019-11-14 | Gassensorvorrichtung sowie verfahren zu ihrer herstellung und zu ihrem betrieb |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3887805A1 true EP3887805A1 (de) | 2021-10-06 |
Family
ID=68654442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19808711.6A Withdrawn EP3887805A1 (de) | 2018-11-29 | 2019-11-14 | Gassensorvorrichtung sowie verfahren zu ihrer herstellung und zu ihrem betrieb |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP3887805A1 (de) |
DE (1) | DE102018220607A1 (de) |
WO (1) | WO2020109008A1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112014439B (zh) * | 2020-08-31 | 2022-05-31 | 南京信息工程大学 | 一种基于石墨烯量子点功能化的复合纳米薄膜材料及气敏传感元件 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202013005433U1 (de) | 2013-06-14 | 2014-09-15 | Sony Corporation | Elektronische Nasenvorrichtung |
US9857243B2 (en) * | 2014-03-18 | 2018-01-02 | Matrix Sensors, Inc. | Self-correcting chemical sensor |
CN107966478A (zh) * | 2016-10-19 | 2018-04-27 | 华邦电子股份有限公司 | 感测器阵列、其制造方法及感测方法 |
AT519492B1 (de) * | 2016-12-22 | 2019-03-15 | Mat Center Leoben Forschung Gmbh | Sensoranordnung zur Bestimmung und gegebenenfalls Messung einer Konzentration von mehreren Gasen und Verfahren zur Herstellung einer Sensoranordnung |
-
2018
- 2018-11-29 DE DE102018220607.4A patent/DE102018220607A1/de active Pending
-
2019
- 2019-11-14 WO PCT/EP2019/081258 patent/WO2020109008A1/de unknown
- 2019-11-14 EP EP19808711.6A patent/EP3887805A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
DE102018220607A1 (de) | 2020-06-04 |
WO2020109008A1 (de) | 2020-06-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE4424342C1 (de) | Sensorarray | |
EP3105571B1 (de) | Verfahren und sensorsystem zur messung der konzentration von gasen | |
DE10359173B4 (de) | Messvorrichtung mit mehreren auf einem Substrat angeordneten potentiometrischen Elektrodenpaaren | |
DE2947050C2 (de) | Anordnung zum Nachweis von Ionen, Atomen und Molekülen in Gasen oder Lösungen | |
DE1805624B2 (de) | Elektronischer gasanalysator | |
DE4445243A1 (de) | Temperaturfühler | |
WO2014206618A1 (de) | Verfahren zum betreiben einer sensoranordnung | |
DE10210819B4 (de) | Mikrostrukturierter Gassensor mit Steuerung der gassensitiven Eigenschaften durch Anlegen eines elektrischen Feldes | |
DE102007059652A1 (de) | Gassensor mit einer verbesserten Selektivität | |
DE2824609A1 (de) | Vorrichtung zur feuchtigkeitsmessung durch kapazitaetsaenderung | |
EP3887805A1 (de) | Gassensorvorrichtung sowie verfahren zu ihrer herstellung und zu ihrem betrieb | |
WO2016142080A1 (de) | Herstellungsverfahren für einen gassensor und entsprechender gassensor | |
DE102017200952B4 (de) | Halbleitervorrichtung und Verfahren zur Herstellung einer Halbleitervorrichtung | |
DE3743399A1 (de) | Sensor zum nachweis von gasen durch exotherme katalytische reaktionen | |
DE102013204663A1 (de) | Feuchtesensor zum Bestimmen einer Feuchtigkeit eines Messmediums in einer Umgebung des Feuchtesensors und Verfahren zum Schützen eines Feuchtesensors | |
DE19831313A1 (de) | Thermosorptionssensor | |
DE102014016712B4 (de) | Transportables Chipmesssystem und Verfahren zum Betrieb eines transportablen Chipmesssystems | |
EP1602924B1 (de) | Vorrichtung und Verfahren zur Detektion von leichtflüchtigen Organischen Verbindungen | |
DE102015200217A1 (de) | Sensorvorrichtung und Verfahren zum Erfassen zumindest eines gasförmigen Analyten sowie Verfahren zum Herstellen einer Sensorvorrichtung | |
DE102018102034A1 (de) | Verfahren zum Testen mehrerer Sensorvorrichtungen, Platte zur Verwendung in dem Verfahren und durch das Verfahren hergestellte Sensorkomponente | |
DE102004025580A1 (de) | Sensor-Anordnung, Sensor-Array und Verfahren zum Herstellen einer Sensor-Anordnung | |
DE4334410C3 (de) | Dünnschicht-Gassensor | |
DE3217883A1 (de) | Gassensor | |
WO2007104483A2 (de) | Epitaktischer stoffsensitiver sensor | |
DE10019010B4 (de) | Verwendung eines chemisch sensitiven Halbleitermaterials zum Nachweis von gas- und/oder dampfförmigen Analyten in Gasen |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: UNKNOWN |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
|
17P | Request for examination filed |
Effective date: 20210629 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
DAV | Request for validation of the european patent (deleted) | ||
DAX | Request for extension of the european patent (deleted) | ||
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: EXAMINATION IS IN PROGRESS |
|
17Q | First examination report despatched |
Effective date: 20231026 |
|
18D | Application deemed to be withdrawn |
Effective date: 20240306 |