EP3867531B1 - Method for controlling the temperature of a vacuum pump, and associated vacuum pump and installation - Google Patents

Method for controlling the temperature of a vacuum pump, and associated vacuum pump and installation Download PDF

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Publication number
EP3867531B1
EP3867531B1 EP19773440.3A EP19773440A EP3867531B1 EP 3867531 B1 EP3867531 B1 EP 3867531B1 EP 19773440 A EP19773440 A EP 19773440A EP 3867531 B1 EP3867531 B1 EP 3867531B1
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EP
European Patent Office
Prior art keywords
temperature
vacuum pump
stator
pumping
cooling element
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EP19773440.3A
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German (de)
French (fr)
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EP3867531A1 (en
Inventor
Yannick GRENIER
Paul DECORDE
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Pfeiffer Vacuum SAS
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Pfeiffer Vacuum SAS
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F04D25/0666—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump a sensor is integrated into the pump/motor design
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/01—Load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/02—Power
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F04C2270/075—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature
    • F04C2270/195—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Definitions

  • the present invention relates to a method for controlling the temperature of a dry-type vacuum pump.
  • the invention also relates to a dry-type vacuum pump comprising means for implementing said control method.
  • the invention also relates to an installation comprising said vacuum pump.
  • Primary vacuum pumps of the dry type comprise several pumping stages in series in which a gas to be pumped circulates between a suction and a discharge.
  • a gas to be pumped circulates between a suction and a discharge.
  • One distinguishes among the known primary vacuum pumps those with rotary lobes also known under the name “Roots” with two lobes or more or those with beak, also known under the name “Claw” or those with screw.
  • Roots Blower type vacuum pumps are also known which are used upstream of the primary vacuum pumps, to increase the pumping capacity in a situation of very high flow.
  • More and more applications require the ability to vary the gas flows to be pumped significantly and quickly, between, on the one hand, process steps for which the vacuum pump must cycle large gas flows, such as of the order of several slm (for "standard liter per minute” in English) or several tens of slm, and on the other hand, waiting stages (or “idle” in English) for which the vacuum pump is in so-called “limit vacuum pressure” operation, the flow of gas to be pumped being zero or very low.
  • the stator is generally cooled by circulating water at ambient temperature in cooling circuits in thermal contact with the stator.
  • This temperature difference between the rotors and the stator can be accentuated by the fact that the temperature measurement point used to control the cooling circuits is not necessarily located at a favorable location allowing a rapid change in temperature due to a change in pumping load.
  • the measured temperature can thus be overestimated and lead to the continuation of the control of the cooling of the stator although at the level of the bearings for example, the temperature has already dropped significantly.
  • the reaction time necessary to actually notice a drop in temperature of the stator can be relatively long, which can lead to the aggravation of the difference between the temperatures.
  • This temperature difference can cause a loss of play between the stator and the rotors due to the different thermomechanical behaviors, and in particular a loss of axial play because the cooling circuits are generally arranged at each axial end of the vacuum pump at the level of the bearings. , as well as a reduction in the center distance due to the retraction of the shaft supports. These clearance losses can lead to the pump seizing or impingement between rotors.
  • WO 2006/082366 A1 and US 6,056,510A describe devices for controlling a pumping installation.
  • One of the aims of the present invention is to propose a vacuum pump of the dry type and a method for controlling the temperature of the vacuum pump making it possible to solve at least one of the aforementioned drawbacks, in particular by limiting the losses of play and the seizing .
  • the change in temperature setpoint thus makes it possible to cut off the cooling of the stator by the cooling element as soon as possible, leaving the stator to heat up close to the cooling element.
  • the increase in the temperature setpoint during low pumping load stages makes it possible to keep the stator as hot as during high load stages, which makes it possible to limit the risks of seizing or contact between rotors.
  • This temperature which is kept high during low load stages, also makes it possible to avoid the creation of cold zones where the polluting condensable species could solidify or condense.
  • the triggering of the temperature setpoint change carried out by monitoring the pumping load also makes it possible to be very reactive.
  • This monitoring can further be carried out from the information already available by the sensors of the vacuum pump, by integrating the thermal behavior of the vacuum pump in the determination of the temperature control, without requiring the addition of temperature sensors. additional, without information of the process taking place in the enclosure and without changing the positioning of the at least one temperature sensor or the structure of the cooling elements.
  • the temperature control method may further comprise one or more characteristics described below, taken alone or in combination.
  • the temperature set point is increased at least for temperature control by means of a cooling element coupled to a so-called low-pressure pumping stage of the vacuum pump.
  • the temperature setpoint after increasing the temperature setpoint, it is monitored whether the value of the parameter representative of the pumping load is greater than the load threshold and, if the value of the parameter representative of the pumping load is greater than the threshold load then an increased temperature setpoint is maintained for a predefined additional period.
  • the predefined additional duration is for example greater than ten minutes.
  • the increase in the temperature setpoint is for example greater than 3°C.
  • the increase in the temperature setpoint is for example less than 20°C.
  • the dry-type vacuum pump can be a multistage primary vacuum pump, ie comprising at least two pumping stages connected in series.
  • the vacuum pump can also be a Roots compressor type vacuum pump comprising one or two pumping stages connected in series.
  • the dry-type vacuum pump comprises two cooling elements coupled to the stator, a cooling element being arranged at each axial end of the vacuum pump.
  • the present invention also relates to an installation comprising an enclosure characterized in that it comprises a vacuum pump of the dry type as described previously, connected to the enclosure for its pumping.
  • the Figure 1 represents a first example of an installation 1 comprising a vacuum pump 2 of the dry type and an enclosure 3 to which the vacuum pump 2 is connected for example via a valve 4, for pumping the enclosure 3.
  • process steps P1, P2 can precede and follow so-called “waiting I” (or “idle”) steps during which the gas flows introduced are low or zero.
  • the vacuum pump 2 is in so-called “limit vacuum pressure” operation for periods longer than several minutes, for example to allow the enclosure 3 to be cleaned.
  • the succession of these steps intervenes for example during semiconductor manufacturing processes, such as so-called “HarpXT” processes.
  • the vacuum pump 2 comprises a stator 5, at least one pumping stage T1-T5, two shafts 6, 7 extending in the at least one pumping stage T1-T5 and respectively carrying at least one rotor 8, at at least one cooling element 11a, 11b coupled to the stator 5, at least one temperature sensor 12a, 12b configured to take a measurement of the temperature of the stator 5 and a control unit 13 configured to control the temperature of the stator 5 by means of at least one at least one cooling element 11a, 11b and at least one temperature sensor 12a, 12b.
  • the rotors 8 are configured to rotate synchronously in the opposite direction in the stator 5 to cause a gas to be pumped G from a suction 9 of the vacuum pump 2 to a discharge 10 of the pump 2.
  • the rotors 8 have, for example, lobes with identical profiles, such as of the “Roots” type (cross-section in the shape of an “eight” or “bean”) or of the “Claw” type. According to another example, the pumping rotors 8 are of the "screw” type.
  • the vacuum pump 2 comprises for example at least two pumping stages, such as five pumping stages.
  • Each pumping stage T1-T5 includes a respective input and output.
  • the successive pumping stages T1-T5 are connected in series one after the other through respective inter-stage channels 14 connecting the outlet (or discharge) of the preceding pumping stage to the inlet (or suction) of the following stage.
  • the gas sucked in from the inlet is trapped in the volume generated by the rotors 8, then is driven by the rotors 8 towards the discharge 10 (the direction of gas circulation is illustrated by the arrows G on the Figures 1 and 2 ).
  • the vacuum pump 2 is in particular called “dry” because in operation, the rotors 8 turn inside the stator 5 without any mechanical contact between them or with the stator 5, which makes it possible not to use oil in the pumping stages T1-T5.
  • the vacuum pump 2 of the dry type is a multistage primary vacuum pump.
  • a primary vacuum pump is a volumetric vacuum pump which, using two rotors, draws in, transfers and then delivers the gas to be pumped at atmospheric pressure.
  • the vacuum pump 2 is of the Roots compressor type and comprises one or two pumping stages. Roots compressor type vacuum pumps are connected in series and upstream of a rough vacuum pump.
  • the cooling element 11a, 11b comprises a hydraulic circuit 16 to allow water to circulate, for example at room temperature ( Figure 2 ).
  • the hydraulic circuit 16 is for example integrated in the stator 5. It has for example a "U" shape surrounding the bearings of the shafts 6, 7 to cool them.
  • the cooling element 11a, 11b further comprises, for example, a controllable valve 17 to authorize or cut off the circulation of water (regulation known as “all or nothing”).
  • the vacuum pump 2 comprises for example two cooling elements 11a, 11b coupled to the stator 5, a cooling element 11a, 11b being arranged at each axial end of the vacuum pump 2 ( Figure 2 ).
  • a cooling element 11a is coupled to a so-called low-pressure pumping stage T1, the inlet of which communicates with the suction 9 of the pump 2.
  • a cooling element 11b is coupled to a so-called high-pressure pumping stage T5, whose the outlet communicates with delivery 10 of pump 2.
  • the vacuum pump 2 comprises for example two temperature sensors 12a, 12b arranged on the stator 5 and spaced apart from each other.
  • a temperature sensor 12a is for example associated with the cooling element 11a located on the suction side 9.
  • the temperature sensor 12a is for example mounted on stator 5 at low pressure pumping stage T1 (suction side 9).
  • a temperature sensor 12b is for example associated with the cooling element 11b located on the discharge side 10.
  • the temperature sensor 12b is for example mounted on the stator 5 at the level of the high pressure pumping stage T5 (discharge side 10) .
  • the temperature sensors 12a, 12b are for example located on the stator 5 at a midpoint between the two shafts 6, 7, aligned on a straight line parallel to the axes of the shafts 6, 7 ( Figure 1 ).
  • the control unit 13 comprises one or more controllers or microcontrollers or processors and a memory for executing sequences of program instructions implementing a method for controlling the temperature 100 of the vacuum pump 2 in which the temperature is controlled of the vacuum pump 2 subjected to variable pumping loads by means of said at least one cooling element 11a, 11b coupled to the stator 5, according to a temperature set point and a measurement of the temperature of the stator 5.
  • control unit 13 is connected to at least one temperature sensor 12a, 12b to receive a measurement of the temperature of the stator 5 and is connected to at least one cooling element 11a, 11b, for example to control the opening/closing of the valve 17 of the associated hydraulic circuit 16.
  • the temperature control can be carried out independently on each cooling element 11a, 11b according to a specific temperature setpoint and an associated specific temperature measurement.
  • the vacuum pump 2 is subjected to variable pumping loads, which can vary between strong or weak gas flows.
  • the control unit 13 monitors whether the value of a parameter representative of the pumping load is lower than a load threshold S (diagnostic step 101, Figure 3 ).
  • the parameter representative of the pumping load is for example the current consumed by the vacuum pump 2 or the power consumed by the vacuum pump 2.
  • the control unit 13 calculates for example an average of the current or of the power consumed over a duration equal to or greater than the duration of a cycle of a process step P1, P2.
  • the control unit 13 is for example connected to an output of a speed variator of the motor of the vacuum pump 2.
  • control unit 13 controls the temperature of the vacuum pump 2 to reach the temperature setpoint by means of the cooling elements 11a, 11b, for example by closing the valves 17 to cut off the circulation of water when the temperature measurement is lower than the temperature setpoint and by opening the valves 17 to authorize the circulation of water when the temperature measurement is equal to or higher than the temperature setpoint (process regulation step 102).
  • the temperature setpoint is for example greater than 70°C.
  • the unit control 13 increases the temperature setpoint for controlling the temperature of the vacuum pump 2 by means of at least one cooling element 11a (standby regulation step 103).
  • the temperature setpoint can be increased for temperature control by means of the two cooling elements 11a, 11b or just one, but preferably at least by means of the cooling element 11a coupled to the pumping stage T1 of low pressure, which is more difficult to regulate in temperature because of the poorer heat exchange capacities between the rotors 8 and the stator 5 at low pressure.
  • the increase in the temperature setpoint corresponds for example to at least 3% of the temperature setpoint, such as for example to more than 3°C.
  • the increase in the temperature setpoint corresponds for example to at most 20% of the temperature setpoint, such as for example at less than 20° C.
  • the increase in the temperature setpoint is for example of the order of 6% of the temperature setpoint, such as 5°C.
  • the control unit 13 controls the temperature of the vacuum pump 2 to reach the increased temperature setpoint as carried out during the process step P1, P2, by means of the cooling elements 11a, 11b, for example by actuating the valves 17 for water circulation.
  • the additional time is predefined, eliminating the need for a sensor. It is for example greater than 10 minutes, such as 15 minutes.
  • This reconditioning step 104 makes it possible to allow time for the stator 5 to heat up due to the higher pumping load of the process step P1, P2. This makes it possible to avoid generating a new temperature difference between the rotors 8 and the stator 5 when returning to the initial temperature set point.
  • a gas flow of 80slm (135.12 Pa.m 3 /s) is introduced cyclically into enclosure 3.
  • the gas flow thus alternates between 80slm for 5 minutes and 0slm for 3 minutes.
  • the power consumed, representative of the pumping load therefore varies in steps between 500 and 2000W (curve A), above a load threshold of, for example, 600W over a period of more than 3 minutes (duration equal to one phase without process step flow).
  • the control unit 13 controls the temperature of the vacuum pump 2 to reach a temperature set point of 83° C. by means of the cooling elements 11a, 11b (process control step 102). It can be seen that the temperature of the stator 5 measured by the temperature sensor 12a thus fluctuates between 81° C. and 86° C. around the set temperature due to the on/off regulation mode (curve B). It can also be seen that the temperature measured at the center of the cooling element 11a (by way of indication), fluctuates between 84 and 87° C. (curves C and D).
  • the control unit 13 concludes from this that a waiting stage I takes place in the enclosure 3.
  • the control unit 13 then increases the setpoint of temperature of 5°C (standby regulation step 103) and controls the temperature of the vacuum pump 2 to 88°C by means of the cooler element 11a of the low pressure pumping stage T1 and to 83°C or 88°C by means of the cooling element 11b of the high pressure pumping stage T5.
  • the change in temperature set point thus makes it possible to cut off the cooling of the stator 5 by the cooling element 11a as soon as possible, leaving the stator 5 to heat up close to the cooling element 11a.
  • the temperature of the stator 5 measured at the level of the cooling element 11a has not, or only slightly, decreased below the temperature of the process step P1.
  • the temperature difference between the stator 5 and the rotors 8 is therefore substantially the same during the process step P1 as during the waiting step I since the rotors 8 remain hot.
  • step reconditioning 104 there is a rise in the temperatures of the stator 5 at the level of the cooling element 11a with the heating of the vacuum pump 2 (curves C and D).
  • the control unit 13 decrements the temperature setpoint which returns to 83° C (process control step 102).
  • the temperatures at the center of the cooling element 11a decrease by the temperature setpoint difference, then rise slowly with the setpoint value at 83°C.
  • the temperature remained above 83° C. at the level of the stator 5 near the cooling element 11a.
  • the increase in the temperature setpoint during the low pumping load waiting step I makes it possible to keep the stator 5 as hot in the center of the cooling element 11a as during the process steps P1, P2 , which makes it possible to limit the risks of seizing or of hits between rotors 8 during the waiting stage I linked to the differences in thermal expansion between the rotors 8 and the stator 5.
  • This temperature which is kept high during the waiting stage I, also makes it possible to avoid the creation of cold zones where the polluting condensable species could solidify or condense.
  • the triggering of the temperature setpoint change carried out by monitoring the pumping load also makes it possible to be very reactive.
  • This monitoring can further be carried out from the information already available by the sensors of the vacuum pump 2, by integrating the thermal behavior of the vacuum pump 2 in the determination of the temperature control, without requiring the addition of sensors additional temperature, without process information taking place in the enclosure 3 and without changing the positioning of at least one temperature sensor 12a, 12b or the structure of the cooling elements 11a, 11b.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Description

La présente invention concerne un procédé de contrôle de la température d'une pompe à vide de type sèche. L'invention concerne également une pompe à vide de type sèche comprenant des moyens de mise en œuvre dudit procédé de contrôle. L'invention concerne aussi une installation comprenant ladite pompe à vide.The present invention relates to a method for controlling the temperature of a dry-type vacuum pump. The invention also relates to a dry-type vacuum pump comprising means for implementing said control method. The invention also relates to an installation comprising said vacuum pump.

Les pompes à vide primaire de type sèche comportent plusieurs étages de pompage en série dans lesquels circule un gaz à pomper entre une aspiration et un refoulement. On distingue parmi les pompes à vide primaire connues, celles à lobes rotatifs également connues sous le nom « Roots » avec deux lobes ou plus ou celles à bec, également connues sous le nom « Claw » ou encore celles à vis. On connait également des pompes à vide de type compresseurs Roots (ou « Roots Blower » en anglais) à un ou deux étages qui sont utilisées en amont des pompes à vide primaire, pour augmenter la capacité de pompage en situation de très fort flux.Primary vacuum pumps of the dry type comprise several pumping stages in series in which a gas to be pumped circulates between a suction and a discharge. One distinguishes among the known primary vacuum pumps, those with rotary lobes also known under the name “Roots” with two lobes or more or those with beak, also known under the name “Claw” or those with screw. One or two-stage Roots Blower type vacuum pumps are also known which are used upstream of the primary vacuum pumps, to increase the pumping capacity in a situation of very high flow.

Ces pompes à vide sont dites « sèches » car en fonctionnement, les rotors tournent à l'intérieur du stator sans aucun contact mécanique entre eux ou avec le stator, ce qui permet de ne pas utiliser d'huile dans l'étage de pompage.These vacuum pumps are called "dry" because in operation, the rotors turn inside the stator without any mechanical contact between them or with the stator, which means that no oil is used in the pumping stage.

De plus en plus d'applications requièrent de pouvoir faire varier les flux de gaz à pomper de manière importante et rapide, entre d'une part, des étapes de procédé pour lesquelles la pompe à vide doit cycler des flux de gaz importants, tel que de l'ordre de plusieurs slm (pour « standard litre par minute » en anglais) ou plusieurs dizaines de slm, et d'autre part, des étapes d'attente (ou « idle » en anglais) pour laquelle la pompe à vide est en fonctionnement dit de « pression de vide limite », le flux de gaz à pomper étant nul ou très faible.More and more applications require the ability to vary the gas flows to be pumped significantly and quickly, between, on the one hand, process steps for which the vacuum pump must cycle large gas flows, such as of the order of several slm (for "standard liter per minute" in English) or several tens of slm, and on the other hand, waiting stages (or "idle" in English) for which the vacuum pump is in so-called “limit vacuum pressure” operation, the flow of gas to be pumped being zero or very low.

Le pompage de flux forts de gaz entraine un échauffement important de la pompe à vide du fait de la compression. Cette élévation de la température permet d'éviter la condensation ou la solidification en poudre d'espèces gazeuses polluantes à l'intérieur de la pompe à vide. Cependant, il est nécessaire de refroidir les paliers des pompes à vide pour éviter tout dysfonctionnement. En outre dans certaines applications, la température du stator doit être contrôlée de manière à ne pas dépasser un maximum prédéfini au-delà duquel les espèces gazeuses pompées pourraient s'agglomérer dans la pompe et provoquer son grippage.Pumping strong gas flows leads to significant heating of the vacuum pump due to compression. This rise in temperature makes it possible to avoid the condensation or the solidification into powder of polluting gaseous species inside the vacuum pump. However, it is necessary to cool the bearings of the vacuum pumps to avoid any malfunction. In addition, in certain applications, the temperature of the stator must be controlled so as not to exceed a predefined maximum beyond which the gaseous species pumped could agglomerate in the pump and cause it to seize.

Le refroidissement du stator est généralement réalisé par circulation d'eau à température ambiante dans des circuits refroidisseurs en contact thermique avec le stator.The stator is generally cooled by circulating water at ambient temperature in cooling circuits in thermal contact with the stator.

Toutefois dans les situations décrites précédemment pour lesquelles le flux de gaz à pomper chute brutalement, la pompe à vide alors sans échauffement propre, peut refroidir tout aussi brusquement. Le stator en contact avec les circuits refroidisseurs voit alors sa température chuter tandis que les rotors qui ne sont pas directement refroidis, restent chauds.However, in the situations described previously for which the flow of gas to be pumped drops suddenly, the vacuum pump then, without its own heating, can cool down just as suddenly. The stator in contact with the cooling circuits then sees its temperature drop while the rotors, which are not directly cooled, remain hot.

Cette différence de température entre les rotors et le stator peut être accentuée par le fait que le point de mesure de la température permettant de contrôler les circuits refroidisseurs n'est pas forcément situé à un endroit propice permettant de déceler un changement rapide de température dû à un changement de charge de pompage. La température mesurée peut ainsi être surestimée et entrainer la poursuite de la commande du refroidissement du stator bien qu'au niveau des paliers par exemple, la température a déjà chuté de manière importante. Le temps de réaction nécessaire pour effectivement constater une baisse de température du stator peut être relativement long, ce qui peut entrainer l'aggravation de l'écart entre les températures.This temperature difference between the rotors and the stator can be accentuated by the fact that the temperature measurement point used to control the cooling circuits is not necessarily located at a favorable location allowing a rapid change in temperature due to a change in pumping load. The measured temperature can thus be overestimated and lead to the continuation of the control of the cooling of the stator although at the level of the bearings for example, the temperature has already dropped significantly. The reaction time necessary to actually notice a drop in temperature of the stator can be relatively long, which can lead to the aggravation of the difference between the temperatures.

Cet écart de température peut provoquer une perte de jeu entre le stator et les rotors du fait des différents comportements thermomécaniques, et notamment une perte du jeu axial car les circuits refroidisseurs sont généralement agencés à chaque extrémité axiale de la pompe à vide au niveau des paliers, ainsi qu'une diminution de l'entraxe du fait de la rétraction des supports des arbres. Ces pertes de jeu peuvent conduire au grippage de la pompe ou à des touches entre rotors.This temperature difference can cause a loss of play between the stator and the rotors due to the different thermomechanical behaviors, and in particular a loss of axial play because the cooling circuits are generally arranged at each axial end of the vacuum pump at the level of the bearings. , as well as a reduction in the center distance due to the retraction of the shaft supports. These clearance losses can lead to the pump seizing or impingement between rotors.

Les documents US 2006/0269424 A1 et EP 0 362 757 A2 divulguent un procédé de contrôle de la température d'une pompe à vide selon le préambule de la revendication 1.The documents US 2006/0269424 A1 and EP 0 362 757 A2 disclose a method of controlling the temperature of a vacuum pump according to the preamble of claim 1.

WO 2006/082366 A1 et US 6,056,510 A décrivent des dispositifs de contrôle d'une installation de pompage. WO 2006/082366 A1 and US 6,056,510A describe devices for controlling a pumping installation.

Un des buts de la présente invention est de proposer une pompe à vide de type sèche et un procédé de contrôle de la température de la pompe à vide permettant de résoudre au moins un des inconvénients précités, notamment en limitant les pertes de jeu et le grippage.One of the aims of the present invention is to propose a vacuum pump of the dry type and a method for controlling the temperature of the vacuum pump making it possible to solve at least one of the aforementioned drawbacks, in particular by limiting the losses of play and the seizing .

A cet effet, l'invention a pour objet un procédé de contrôle de la température d'une pompe à vide de type sèche soumise à des charges de pompage variables, la pompe à vide comportant :

  • un stator,
  • au moins un étage de pompage,
  • deux arbres s'étendant dans le au moins un étage de pompage et portant respectivement au moins un rotor, les rotors étant configurés pour tourner de façon synchronisée en sens inverse dans le stator pour entrainer un gaz à pomper depuis une aspiration de la pompe à vide vers un refoulement,
  • au moins un élément refroidisseur couplé au stator,
  • au moins un capteur de température configuré pour prendre une mesure de la température du stator, et
  • une unité de contrôle configurée pour contrôler la température du stator au moyen du au moins un élément refroidisseur et du au moins un capteur de température,
  • dans lequel on contrôle la température de la pompe à vide au moyen du au moins un élément refroidisseur couplé au stator en fonction d'une consigne de température et d'une mesure de la température du stator,
  • caractérisé en ce qu'on surveille si la valeur d'un paramètre représentatif de la charge de pompage choisi parmi un courant consommé ou une puissance consommée par la pompe à vide est inférieure à un seuil de charge et, si la valeur du paramètre représentatif de la charge de pompage est inférieure au seuil de charge alors on augmente la consigne de température.
To this end, the subject of the invention is a method for controlling the temperature of a vacuum pump of the dry type subjected to variable pumping loads, the vacuum pump comprising:
  • a stator,
  • at least one pumping stage,
  • two shafts extending in the at least one pumping stage and respectively carrying at least one rotor, the rotors being configured to rotate synchronously in opposite directions in the stator to drive a gas to be pumped from a suction of the vacuum pump towards a repression,
  • at least one cooling element coupled to the stator,
  • at least one temperature sensor configured to take a measurement of the temperature of the stator, and
  • a control unit configured to control the temperature of the stator by means of the at least one cooling element and the at least one temperature sensor,
  • in which the temperature of the vacuum pump is controlled by means of the at least one cooling element coupled to the stator according to a temperature setpoint and a measurement of the temperature of the stator,
  • characterized in that it is monitored whether the value of a parameter representative of the pumping load chosen from among a current consumed or a power consumed by the vacuum pump is lower than a load threshold and, if the value of the parameter representative of the pumping load is lower than the load threshold then the temperature setpoint is increased.

Le changement de consigne de température permet ainsi de couper au plus tôt le refroidissement du stator par l'élément refroidisseur, laissant le stator se réchauffer à proximité de l'élément refroidisseur. L'augmentation de la consigne de température au cours d'étapes de faible charge de pompage permet de garder le stator aussi chaud qu'au cours des étapes de forte charge, ce qui permet de limiter les risques de grippage ou de touches entre rotors.The change in temperature setpoint thus makes it possible to cut off the cooling of the stator by the cooling element as soon as possible, leaving the stator to heat up close to the cooling element. The increase in the temperature setpoint during low pumping load stages makes it possible to keep the stator as hot as during high load stages, which makes it possible to limit the risks of seizing or contact between rotors.

Cette température qui est maintenue élevée au cours d'étapes de faible charge permet en outre d'éviter la création de zones froides où les espèces condensables polluantes pourraient se solidifier ou se condenser.This temperature, which is kept high during low load stages, also makes it possible to avoid the creation of cold zones where the polluting condensable species could solidify or condense.

Le déclenchement de changement de consigne de température réalisée par surveillance de la charge de pompage permet de plus d'être très réactif.The triggering of the temperature setpoint change carried out by monitoring the pumping load also makes it possible to be very reactive.

Cette surveillance peut en outre être réalisée à partir des informations déjà disponibles par les capteurs de la pompe à vide, en intégrant le comportement thermique de la pompe à vide dans la détermination du contrôle de la température, sans nécessiter l'ajout de capteurs de température supplémentaires, sans informations du procédé ayant lieu dans l'enceinte et sans changer le positionnement du au moins un capteur de température ou la structure des éléments refroidisseurs.This monitoring can further be carried out from the information already available by the sensors of the vacuum pump, by integrating the thermal behavior of the vacuum pump in the determination of the temperature control, without requiring the addition of temperature sensors. additional, without information of the process taking place in the enclosure and without changing the positioning of the at least one temperature sensor or the structure of the cooling elements.

Le procédé de contrôle de la température peut en outre comporter une ou plusieurs caractéristiques décrite ci-après, prise seule ou en combinaison.The temperature control method may further comprise one or more characteristics described below, taken alone or in combination.

Selon un exemple de réalisation, la consigne de température est augmentée au moins pour le contrôle de la température au moyen d'un élément refroidisseur couplé à un étage de pompage dit de basse pression de la pompe à vide.According to an exemplary embodiment, the temperature set point is increased at least for temperature control by means of a cooling element coupled to a so-called low-pressure pumping stage of the vacuum pump.

Selon un exemple de réalisation, après augmentation de la consigne de température, on surveille si la valeur du paramètre représentatif de la charge de pompage est supérieure au seuil de charge et, si la valeur du paramètre représentatif de la charge de pompage est supérieure au seuil de charge alors on conserve une consigne de température augmentée pendant une durée supplémentaire prédéfinie.According to an exemplary embodiment, after increasing the temperature setpoint, it is monitored whether the value of the parameter representative of the pumping load is greater than the load threshold and, if the value of the parameter representative of the pumping load is greater than the threshold load then an increased temperature setpoint is maintained for a predefined additional period.

La durée supplémentaire prédéfinie est par exemple supérieure à dix minutes.The predefined additional duration is for example greater than ten minutes.

L'augmentation de la consigne de température est par exemple supérieure à 3°C.The increase in the temperature setpoint is for example greater than 3°C.

L'augmentation de la consigne de température est par exemple inférieure à 20°C.The increase in the temperature setpoint is for example less than 20°C.

L'invention a aussi pour objet une pompe à vide de type sèche comportant :

  • un stator,
  • au moins un étage de pompage,
  • deux arbres s'étendant dans le au moins un étage de pompage et portant respectivement au moins un rotor, les rotors étant configurés pour tourner de façon synchronisée en sens inverse dans le stator pour entrainer un gaz à pomper depuis une aspiration de la pompe à vide vers un refoulement,
  • au moins un élément refroidisseur couplé au stator,
  • au moins un capteur de température configuré pour prendre une mesure de la température du stator, et
  • une unité de contrôle configurée pour contrôler la température du stator au moyen du au moins un élément refroidisseur et du au moins un capteur de température,
    caractérisée en ce que l'unité de contrôle est configurée pour mettre en oeuvre un procédé de contrôle de la température tel que décrit précédemment.
The invention also relates to a vacuum pump of the dry type comprising:
  • a stator,
  • at least one pumping stage,
  • two shafts extending in the at least one pumping stage and respectively carrying at least one rotor, the rotors being configured to rotate synchronously in opposite directions in the stator to drive a gas to be pumped from a suction of the vacuum pump towards a repression,
  • at least one cooling element coupled to the stator,
  • at least one temperature sensor configured to take a measurement of the temperature of the stator, and
  • a control unit configured to control the temperature of the stator by means of the at least one cooling element and the at least one temperature sensor,
    characterized in that the control unit is configured to implement a temperature control method as described above.

La pompe à vide de type sèche peut être une pompe à vide primaire multiétagée, c'est à dire comportant au moins deux étages de pompage montés en série. La pompe à vide peut également être une pompe à vide de type compresseur Roots comportant un ou deux étages de pompage montés en série.The dry-type vacuum pump can be a multistage primary vacuum pump, ie comprising at least two pumping stages connected in series. The vacuum pump can also be a Roots compressor type vacuum pump comprising one or two pumping stages connected in series.

Selon un exemple de réalisation, la pompe à vide de type sèche comporte deux éléments refroidisseurs couplés au stator, un élément refroidisseur étant agencé à chaque extrémité axiale de la pompe à vide.According to an exemplary embodiment, the dry-type vacuum pump comprises two cooling elements coupled to the stator, a cooling element being arranged at each axial end of the vacuum pump.

La présente invention a aussi pour objet une installation comprenant une enceinte caractérisée en ce qu'elle comporte une pompe à vide de type sèche telle que décrite précédemment, reliée à l'enceinte pour son pompage.The present invention also relates to an installation comprising an enclosure characterized in that it comprises a vacuum pump of the dry type as described previously, connected to the enclosure for its pumping.

D'autres caractéristiques et avantages de l'invention ressortiront de la description suivante, donnée à titre d'exemple, sans caractère limitatif, en regard des dessins annexés sur lesquels:

  • La Figure 1 montre une vue schématique d'une installation selon l'invention.
  • La Figure 2 montre une vue schématique partielle et partiellement en coupe d'une pompe à vide de l'installation de la Figure 1, à l'état désassemblée, où seuls les éléments nécessaires au fonctionnement sont représentés.
  • La Figure 3 est une vue schématique montrant différentes étapes d'un procédé de contrôle de la température de la pompe à vide de la Figure 2.
  • La Figure 4 est un graphique montrant un exemple de courbes obtenues en fonction du temps (minutes) pour :
    • la puissance consommée (en Watt, ordonnée de droite) par la pompe à vide de la Figure 2 (courbe A),
    • la température du stator (en °C, ordonnée de gauche) mesurée par un capteur de température de la pompe à vide (courbe B), et
    • la température du stator mesurée à titre indicatif par deux capteurs de température de test fixés au centre d'un élément refroidisseur de la pompe à vide (courbes C et D).
Other characteristics and advantages of the invention will emerge from the following description, given by way of example, without limitation, with reference to the appended drawings in which:
  • The Figure 1 shows a schematic view of an installation according to the invention.
  • The Figure 2 shows a partial and partially sectional schematic view of a vacuum pump of the installation of the Figure 1 , in the disassembled state, where only the elements necessary for operation are represented.
  • The Figure 3 is a schematic view showing different steps of a method of controlling the temperature of the vacuum pump of the Figure 2 .
  • The Figure 4 is a graph showing an example of curves obtained as a function of time (minutes) for:
    • the power consumed (in Watt, right-hand order) by the vacuum pump of the Figure 2 (curve A),
    • the stator temperature (in °C, left ordinate) measured by a vacuum pump temperature sensor (curve B), and
    • the stator temperature measured as an indication by two test temperature sensors fixed to the center of a cooling element of the vacuum pump (curves C and D).

Sur ces figures, les éléments identiques portent les mêmes numéros de référence. Les réalisations suivantes sont des exemples. Bien que la description se réfère à un ou plusieurs modes de réalisation, ceci ne signifie pas nécessairement que chaque référence concerne le même mode de réalisation, ou que les caractéristiques s'appliquent seulement à un seul mode de réalisation. De simples caractéristiques de différents modes de réalisation peuvent également être combinées ou interchangées pour fournir d'autres réalisations.In these figures, identical elements bear the same reference numbers. The following achievements are examples. Although the description refers to one or more embodiments, this does not necessarily mean that each reference relates to the same embodiment, or that the characteristics only apply to a single embodiment. Simple features of different embodiments can also be combined or interchanged to provide other embodiments.

La Figure 1 représente un premier exemple d'une installation 1 comportant une pompe à vide 2 de type sèche et une enceinte 3 à laquelle la pompe à vide 2 est raccordée par exemple via une vanne 4, pour le pompage de l'enceinte 3.The Figure 1 represents a first example of an installation 1 comprising a vacuum pump 2 of the dry type and an enclosure 3 to which the vacuum pump 2 is connected for example via a valve 4, for pumping the enclosure 3.

Des flux de gaz importants, de l'ordre de plusieurs slm ou plusieurs dizaines de slm, peuvent être introduits dans l'enceinte 3, par exemple de manière cyclique, au cours d'étapes dites « de procédé » P1, P2 (Figure 3). Ces étapes de procédé P1, P2 peuvent précéder et suivre des étapes dites « d'attente I » (ou « idle » en anglais) au cours desquelles les flux de gaz introduits sont faibles ou nuls. Au cours des étapes d'attente I, la pompe à vide 2 est en fonctionnement dit de « pression de vide limite » sur des durées supérieures à plusieurs minutes, par exemple pour permettre un nettoyage de l'enceinte 3. La succession de ces étapes intervient par exemple lors de procédés de fabrication de semi-conducteurs, tels que des procédés dits « HarpXT ».Large gas flows, of the order of several slm or several tens of slm, can be introduced into the enclosure 3, for example cyclically, during so-called “process” steps P1, P2 ( Figure 3 ). These process steps P1, P2 can precede and follow so-called “waiting I” (or “idle”) steps during which the gas flows introduced are low or zero. During the waiting steps I, the vacuum pump 2 is in so-called “limit vacuum pressure” operation for periods longer than several minutes, for example to allow the enclosure 3 to be cleaned. The succession of these steps intervenes for example during semiconductor manufacturing processes, such as so-called “HarpXT” processes.

Comme on peut mieux le voir sur les Figures 1 et 2, la pompe à vide 2 comporte un stator 5, au moins un étage de pompage T1-T5, deux arbres 6, 7 s'étendant dans le au moins un étage de pompage T1-T5 et portant respectivement au moins un rotor 8, au moins un élément refroidisseur 11a, 11b couplé au stator 5, au moins un capteur de température 12a, 12b configuré pour prendre une mesure de la température du stator 5 et une unité de contrôle 13 configurée pour contrôler la température du stator 5 au moyen du au moins un élément refroidisseur 11a, 11b et du au moins un capteur de température 12a, 12b.As can best be seen on the Figures 1 and 2 , the vacuum pump 2 comprises a stator 5, at least one pumping stage T1-T5, two shafts 6, 7 extending in the at least one pumping stage T1-T5 and respectively carrying at least one rotor 8, at at least one cooling element 11a, 11b coupled to the stator 5, at least one temperature sensor 12a, 12b configured to take a measurement of the temperature of the stator 5 and a control unit 13 configured to control the temperature of the stator 5 by means of at least one at least one cooling element 11a, 11b and at least one temperature sensor 12a, 12b.

Les rotors 8 sont configurés pour tourner de façon synchronisée en sens inverse dans le stator 5 pour entrainer un gaz à pomper G depuis une aspiration 9 de la pompe à vide 2 vers un refoulement 10 de la pompe 2.The rotors 8 are configured to rotate synchronously in the opposite direction in the stator 5 to cause a gas to be pumped G from a suction 9 of the vacuum pump 2 to a discharge 10 of the pump 2.

Les rotors 8 présentent par exemple des lobes de profils identiques, tels que de type « Roots » (section transversale en forme de « huit » ou de « haricot ») ou de type « Claw ». Selon un autre exemple, les rotors de pompage 8 sont de type « à vis ».The rotors 8 have, for example, lobes with identical profiles, such as of the “Roots” type (cross-section in the shape of an “eight” or “bean”) or of the “Claw” type. According to another example, the pumping rotors 8 are of the "screw" type.

La pompe à vide 2 comporte par exemple au moins deux étages de pompage, tel que cinq étages de pompage. Chaque étage de pompage T1-T5 comprend une entrée et une sortie respectives. Les étages de pompage successifs T1-T5 sont raccordés en série les uns à la suite des autres par des canaux inter-étages 14 respectifs raccordant la sortie (ou le refoulement) de l'étage de pompage qui précède à l'entrée (ou l'aspiration) de l'étage qui suit.The vacuum pump 2 comprises for example at least two pumping stages, such as five pumping stages. Each pumping stage T1-T5 includes a respective input and output. The successive pumping stages T1-T5 are connected in series one after the other through respective inter-stage channels 14 connecting the outlet (or discharge) of the preceding pumping stage to the inlet (or suction) of the following stage.

Lors de la rotation, le gaz aspiré depuis l'entrée est emprisonné dans le volume engendré par les rotors 8, puis est entraîné par les rotors 8 vers le refoulement 10 (le sens de circulation des gaz est illustré par les flèches G sur les Figures 1 et 2). La pompe à vide 2 est notamment dite « sèche » car en fonctionnement, les rotors 8 tournent à l'intérieur du stator 5 sans aucun contact mécanique entre eux ou avec le stator 5, ce qui permet de ne pas utiliser d'huile dans les étages de pompage T1-T5.During rotation, the gas sucked in from the inlet is trapped in the volume generated by the rotors 8, then is driven by the rotors 8 towards the discharge 10 (the direction of gas circulation is illustrated by the arrows G on the Figures 1 and 2 ). The vacuum pump 2 is in particular called "dry" because in operation, the rotors 8 turn inside the stator 5 without any mechanical contact between them or with the stator 5, which makes it possible not to use oil in the pumping stages T1-T5.

Dans cet exemple de réalisation, la pompe à vide 2 de type sèche est une pompe à vide primaire multiétagée. Une pompe à vide primaire est une pompe à vide volumétrique, qui, à l'aide de deux rotors aspire, transfère puis refoule le gaz à pomper à la pression atmosphérique. Selon un autre exemple, la pompe à vide 2 est de type compresseur Roots et comprend un ou deux étages de pompage. Les pompes à vide de type compresseur Roots sont montées en série et en amont d'une pompe à vide primaire.In this exemplary embodiment, the vacuum pump 2 of the dry type is a multistage primary vacuum pump. A primary vacuum pump is a volumetric vacuum pump which, using two rotors, draws in, transfers and then delivers the gas to be pumped at atmospheric pressure. According to another example, the vacuum pump 2 is of the Roots compressor type and comprises one or two pumping stages. Roots compressor type vacuum pumps are connected in series and upstream of a rough vacuum pump.

Selon un exemple de réalisation, l'élément refroidisseur 11a, 11b comporte un circuit hydraulique 16 pour permettre une circulation d'eau, par exemple à température ambiante (Figure 2).According to an exemplary embodiment, the cooling element 11a, 11b comprises a hydraulic circuit 16 to allow water to circulate, for example at room temperature ( Figure 2 ).

Le circuit hydraulique 16 est par exemple intégré dans le stator 5. Il présente par exemple une forme en « U » entourant les paliers des arbres 6, 7 pour les refroidir.The hydraulic circuit 16 is for example integrated in the stator 5. It has for example a "U" shape surrounding the bearings of the shafts 6, 7 to cool them.

L'élément refroidisseur 11a, 11b comporte en outre par exemple une vanne 17 pilotable pour autoriser ou couper la circulation d'eau (régulation dite « tout ou rien »).The cooling element 11a, 11b further comprises, for example, a controllable valve 17 to authorize or cut off the circulation of water (regulation known as “all or nothing”).

La pompe à vide 2 comporte par exemple deux éléments refroidisseurs 11a, 11b couplés au stator 5, un élément refroidisseur 11a, 11b étant agencé à chaque extrémité axiale de la pompe à vide 2 (Figure 2). Un élément refroidisseur 11a est couplé à un étage de pompage T1 dit de basse pression, dont l'entrée communique avec l'aspiration 9 de la pompe 2. Un élément refroidisseur 11b est couplé à un étage de pompage T5 dit de haute pression, dont la sortie communique avec le refoulement 10 de la pompe 2.The vacuum pump 2 comprises for example two cooling elements 11a, 11b coupled to the stator 5, a cooling element 11a, 11b being arranged at each axial end of the vacuum pump 2 ( Figure 2 ). A cooling element 11a is coupled to a so-called low-pressure pumping stage T1, the inlet of which communicates with the suction 9 of the pump 2. A cooling element 11b is coupled to a so-called high-pressure pumping stage T5, whose the outlet communicates with delivery 10 of pump 2.

La pompe à vide 2 comporte par exemple deux capteurs de température 12a, 12b agencés sur le stator 5 et espacés l'un de l'autre. Un capteur de température 12a est par exemple associé à l'élément refroidisseur 11a situé côté aspiration 9. Le capteur de température 12a est par exemple monté sur le stator 5 au niveau de l'étage de pompage T1 de basse pression (côté aspiration 9). Un capteur de température 12b est par exemple associé à l'élément refroidisseur 11b situé côté refoulement 10. Le capteur de température 12b est par exemple monté sur le stator 5 au niveau de l'étage de pompage T5 de haute pression (côté refoulement 10).The vacuum pump 2 comprises for example two temperature sensors 12a, 12b arranged on the stator 5 and spaced apart from each other. A temperature sensor 12a is for example associated with the cooling element 11a located on the suction side 9. The temperature sensor 12a is for example mounted on stator 5 at low pressure pumping stage T1 (suction side 9). A temperature sensor 12b is for example associated with the cooling element 11b located on the discharge side 10. The temperature sensor 12b is for example mounted on the stator 5 at the level of the high pressure pumping stage T5 (discharge side 10) .

Les capteurs de température 12a, 12b sont par exemple situés sur le stator 5 à un point milieu entre les deux arbres 6, 7, alignés sur une droite parallèle aux axes des arbres 6, 7 (Figure 1).The temperature sensors 12a, 12b are for example located on the stator 5 at a midpoint between the two shafts 6, 7, aligned on a straight line parallel to the axes of the shafts 6, 7 ( Figure 1 ).

L'unité de contrôle 13 comporte un ou plusieurs contrôleurs ou microcontrôleurs ou processeurs et une mémoire pour exécuter des suites d'instructions de programmes mettant en œuvre un procédé de contrôle de la température 100 de la pompe à vide 2 dans lequel on contrôle la température de la pompe à vide 2 soumise à des charges de pompage variables au moyen dudit au moins un élément refroidisseur 11a, 11b couplé au stator 5, en fonction d'une consigne de température et d'une mesure de la température du stator 5.The control unit 13 comprises one or more controllers or microcontrollers or processors and a memory for executing sequences of program instructions implementing a method for controlling the temperature 100 of the vacuum pump 2 in which the temperature is controlled of the vacuum pump 2 subjected to variable pumping loads by means of said at least one cooling element 11a, 11b coupled to the stator 5, according to a temperature set point and a measurement of the temperature of the stator 5.

Pour cela, l'unité de contrôle 13 est reliée à au moins un capteur de température 12a, 12b pour recevoir une mesure de la température du stator 5 et est reliée à au moins un élément refroidisseur 11a, 11b, par exemple pour piloter l'ouverture/fermeture de la vanne 17 du circuit hydraulique 16 associée. Le contrôle de température peut être réalisé indépendamment sur chaque élément refroidisseur 11a, 11b en fonction d'une consigne de température propre et d'une mesure de température propre associée.For this, the control unit 13 is connected to at least one temperature sensor 12a, 12b to receive a measurement of the temperature of the stator 5 and is connected to at least one cooling element 11a, 11b, for example to control the opening/closing of the valve 17 of the associated hydraulic circuit 16. The temperature control can be carried out independently on each cooling element 11a, 11b according to a specific temperature setpoint and an associated specific temperature measurement.

En fonctionnement, la pompe à vide 2 est soumise à des charges de pompage variables, pouvant varier entre des flux de gaz forts ou faibles.In operation, the vacuum pump 2 is subjected to variable pumping loads, which can vary between strong or weak gas flows.

L'unité de contrôle 13 surveille si la valeur d'un paramètre représentatif de la charge de pompage est inférieure à un seuil de charge S (étape de diagnostic 101, Figure 3).The control unit 13 monitors whether the value of a parameter representative of the pumping load is lower than a load threshold S (diagnostic step 101, Figure 3 ).

Le paramètre représentatif de la charge de pompage est par exemple le courant consommé par la pompe à vide 2 ou la puissance consommée par la pompe à vide 2. L'unité de contrôle 13 calcule par exemple une moyenne du courant ou de la puissance consommée sur une durée égale ou supérieure à la durée d'un cycle d'une étape de procédé P1, P2. Pour cela, l'unité de contrôle 13 est par exemple reliée à une sortie d'un variateur de vitesse du moteur de la pompe à vide 2.The parameter representative of the pumping load is for example the current consumed by the vacuum pump 2 or the power consumed by the vacuum pump 2. The control unit 13 calculates for example an average of the current or of the power consumed over a duration equal to or greater than the duration of a cycle of a process step P1, P2. For this, the control unit 13 is for example connected to an output of a speed variator of the motor of the vacuum pump 2.

Si, et tant que, la valeur du paramètre représentatif de la charge de pompage est supérieure au seuil de charge S alors on considère qu'une étape de procédé P1, P2 a lieu dans l'enceinte 3.If, and as long as, the value of the parameter representative of the pumping load is greater than the load threshold S then it is considered that a process step P1, P2 takes place in the enclosure 3.

Dans ce cas, l'unité de contrôle 13 contrôle la température de la pompe à vide 2 pour atteindre la consigne de température au moyen des éléments refroidisseurs 11a, 11b, par exemple en fermant les vannes 17 pour couper la circulation d'eau lorsque la mesure de température est inférieure à la consigne de température et en ouvrant les vannes 17 pour autoriser la circulation d'eau lorsque la mesure de la température est égale ou supérieure à la consigne de température (étape de régulation de procédé 102).In this case, the control unit 13 controls the temperature of the vacuum pump 2 to reach the temperature setpoint by means of the cooling elements 11a, 11b, for example by closing the valves 17 to cut off the circulation of water when the temperature measurement is lower than the temperature setpoint and by opening the valves 17 to authorize the circulation of water when the temperature measurement is equal to or higher than the temperature setpoint (process regulation step 102).

La consigne de température est par exemple supérieure à 70°C.The temperature setpoint is for example greater than 70°C.

Si, et tant que, la valeur du paramètre représentatif de la charge de pompage est inférieure au seuil de charge S, alors on considère qu'une étape d'attente I a lieu dans l'enceinte 3. Dans ce cas, l'unité de contrôle 13 augmente la consigne de température pour le contrôle de la température de la pompe à vide 2 au moyen d'au moins un élément refroidisseur 11a (étape de régulation en attente 103).If, and as long as, the value of the parameter representative of the pumping load is lower than the load threshold S, then it is considered that a waiting stage I takes place in the enclosure 3. In this case, the unit control 13 increases the temperature setpoint for controlling the temperature of the vacuum pump 2 by means of at least one cooling element 11a (standby regulation step 103).

La consigne de température peut être augmentée pour le contrôle de la température au moyen des deux éléments refroidisseurs 11a, 11b ou d'un seul mais de préférence, au moins au moyen de l'élément refroidisseur 11a couplé à l'étage de pompage T1 de basse pression, qui est plus difficile à réguler en température du fait des moins bonnes capacités d'échanges thermiques entre les rotors 8 et le stator 5 à basse pression.The temperature setpoint can be increased for temperature control by means of the two cooling elements 11a, 11b or just one, but preferably at least by means of the cooling element 11a coupled to the pumping stage T1 of low pressure, which is more difficult to regulate in temperature because of the poorer heat exchange capacities between the rotors 8 and the stator 5 at low pressure.

L'augmentation de la consigne de température correspond par exemple à au moins 3% de la consigne de température, comme par exemple à plus de 3°C. L'augmentation de la consigne de température correspond par exemple à au plus 20% de la consigne de température, comme par exemple à moins de 20°C. L'augmentation de la consigne de température est par exemple de l'ordre de 6% de la consigne de température, tel que 5°C.The increase in the temperature setpoint corresponds for example to at least 3% of the temperature setpoint, such as for example to more than 3°C. The increase in the temperature setpoint corresponds for example to at most 20% of the temperature setpoint, such as for example at less than 20° C. The increase in the temperature setpoint is for example of the order of 6% of the temperature setpoint, such as 5°C.

L'unité de contrôle 13 contrôle la température de la pompe à vide 2 pour atteindre la consigne de température augmentée comme réalisé au cours de l'étape de procédé P1, P2, au moyen des éléments refroidisseurs 11a, 11b, par exemple en actionnant les vannes 17 de circulation d'eau.The control unit 13 controls the temperature of the vacuum pump 2 to reach the increased temperature setpoint as carried out during the process step P1, P2, by means of the cooling elements 11a, 11b, for example by actuating the valves 17 for water circulation.

Lorsque le paramètre représentatif de la charge de pompage a augmenté au-delà du seuil de charge S, on considère qu'une nouvelle étape de procédé P1, P2 a lieu dans l'enceinte 3.When the parameter representative of the pumping load has increased beyond the load threshold S, it is considered that a new process step P1, P2 takes place in the enclosure 3.

On peut alors prévoir de conserver une consigne de température augmentée pendant une durée supplémentaire prédéfinie (étape de reconditionnement 104) avant de rebasculer la consigne de température augmentée à la consigne de température initiale.Provision can then be made to maintain an increased temperature setpoint for an additional predefined period (reconditioning step 104) before switching the increased temperature setpoint back to the initial temperature setpoint.

La durée supplémentaire est prédéfinie, ce qui permet de s'affranchir de la nécessité d'un capteur. Elle est par exemple supérieure à 10 minutes, tel que 15 minutes. Cette étape de reconditionnement 104 permet de laisser le temps au stator 5 de s'échauffer du fait de plus haute charge de pompage de l'étape de procédé P1, P2. Cela permet d'éviter de générer un nouvel écart des températures entre les rotors 8 et le stator 5 au moment du retour à la consigne de température initiale.The additional time is predefined, eliminating the need for a sensor. It is for example greater than 10 minutes, such as 15 minutes. This reconditioning step 104 makes it possible to allow time for the stator 5 to heat up due to the higher pumping load of the process step P1, P2. This makes it possible to avoid generating a new temperature difference between the rotors 8 and the stator 5 when returning to the initial temperature set point.

Ceci peut être mieux compris en visualisant le graphique de la Figure 4 montrant un exemple d'une courbe de puissance consommée par la pompe à vide 2 soumise à une charge de pompage (courbe A), une courbe de la température du stator 5 mesurée par le capteur de température 12a à proximité de l'étage de pompage T1 de basse pression (courbe B) et deux courbes de la température du stator 5 mesurées à titre indicatif pour la compréhension de l'invention, au centre de l'élément refroidisseur 11a couplé au stator 5 de l'étage de pompage T1 de basse pression (courbes C et D).This can be better understood by viewing the graph of the Figure 4 showing an example of a curve of power consumed by the vacuum pump 2 subjected to a pumping load (curve A), a curve of the temperature of the stator 5 measured by the temperature sensor 12a near the pumping stage T1 of low pressure (curve B) and two curves of the temperature of the stator 5 measured as an indication for the understanding of the invention, at the center of the cooling element 11a coupled to the stator 5 of the pumping stage T1 of low pressure (curves C and D).

Au cours des deux premières heures, un flux de gaz de 80slm (135,12 Pa.m3/s) est introduit de manière cyclique dans l'enceinte 3. Le flux de gaz alterne ainsi entre 80slm pendant 5 minutes et 0slm pendant 3 minutes. La puissance consommée, représentative de la charge de pompage, varie en conséquence en créneaux entre 500 et 2000W (courbe A), au-dessus d'un seuil de charge par exemple de 600W sur une durée supérieure 3 minutes (durée égale à une phase sans flux d'étape de procédé).During the first two hours, a gas flow of 80slm (135.12 Pa.m 3 /s) is introduced cyclically into enclosure 3. The gas flow thus alternates between 80slm for 5 minutes and 0slm for 3 minutes. The power consumed, representative of the pumping load, therefore varies in steps between 500 and 2000W (curve A), above a load threshold of, for example, 600W over a period of more than 3 minutes (duration equal to one phase without process step flow).

L'unité de contrôle 13 contrôle la température de la pompe à vide 2 pour atteindre une consigne de température de 83°C au moyen des éléments refroidisseurs 11a, 11b (étape de régulation de procédé 102). On voit que la température du stator 5 mesurée par le capteur de température 12a fluctue ainsi entre 81°C et 86°C autour de la température de consigne du fait du mode de régulation tout ou rien (courbe B). On voit également que la température mesurée au centre de l'élément refroidisseur 11a (à titre indicatif), fluctue entre 84 et 87°C (courbes C et D).The control unit 13 controls the temperature of the vacuum pump 2 to reach a temperature set point of 83° C. by means of the cooling elements 11a, 11b (process control step 102). It can be seen that the temperature of the stator 5 measured by the temperature sensor 12a thus fluctuates between 81° C. and 86° C. around the set temperature due to the on/off regulation mode (curve B). It can also be seen that the temperature measured at the center of the cooling element 11a (by way of indication), fluctuates between 84 and 87° C. (curves C and D).

Puis, la puissance consommée passe au-dessous du seuil de charge S. L'unité de contrôle 13 en conclut qu'une étape d'attente I a lieu dans l'enceinte 3. L'unité de contrôle 13 augmente alors la consigne de température de 5°C (étape de régulation en attente 103) et contrôle la température de la pompe à vide 2 à 88°C au moyen de l'élément refroidisseur 11a de l'étage de pompage T1 de basse pression et à 83°C ou 88°C au moyen de l'élément refroidisseur 11b de l'étage de pompage T5 de haute pression.Then, the power consumed falls below the load threshold S. The control unit 13 concludes from this that a waiting stage I takes place in the enclosure 3. The control unit 13 then increases the setpoint of temperature of 5°C (standby regulation step 103) and controls the temperature of the vacuum pump 2 to 88°C by means of the cooler element 11a of the low pressure pumping stage T1 and to 83°C or 88°C by means of the cooling element 11b of the high pressure pumping stage T5.

On constate que la température du stator 5 mesurée par le capteur de température 12a associé à l'élément refroidisseur 11a fait un saut d'environ 5°C pour fluctuer entre 86°C et 90°C (courbe B).It can be seen that the temperature of the stator 5 measured by the temperature sensor 12a associated with the cooling element 11a makes a jump of approximately 5° C. to fluctuate between 86° C. and 90° C. (curve B).

On voit également que la température mesurée au centre de l'élément refroidisseur 11a augmente rapidement du fait de l'augmentation de la consigne de température puis diminue du fait de la réduction de la charge de pompage jusqu'à tendre vers une stabilisation à une température proche de celle de l'étape de procédé P1 (courbes C et D).It can also be seen that the temperature measured at the center of the cooling element 11a increases rapidly due to the increase in the temperature set point then decreases due to the reduction in the pumping load until it tends towards stabilization at a temperature close to that of process step P1 (curves C and D).

Le changement de consigne de température permet ainsi de couper au plus tôt le refroidissement du stator 5 par l'élément refroidisseur 11a, laissant le stator 5 se réchauffer à proximité de l'élément refroidisseur 11a. Malgré la baisse de température, la température du stator 5 mesurée au niveau de l'élément refroidisseur 11a n'a pas, ou peu, diminué en dessous de la température de l'étape de procédé P1. L'écart de température entre le stator 5 et les rotors 8 est donc sensiblement le même au cours de l'étape de procédé P1 qu'au cours de l'étape d'attente I étant donné que les rotors 8 restent chauds.The change in temperature set point thus makes it possible to cut off the cooling of the stator 5 by the cooling element 11a as soon as possible, leaving the stator 5 to heat up close to the cooling element 11a. Despite the drop in temperature, the temperature of the stator 5 measured at the level of the cooling element 11a has not, or only slightly, decreased below the temperature of the process step P1. The temperature difference between the stator 5 and the rotors 8 is therefore substantially the same during the process step P1 as during the waiting step I since the rotors 8 remain hot.

Puis la puissance consommée augmente au-delà du seuil de charge S (courbe A), indiquant qu'une nouvelle étape de procédé P2 a lieu dans l'enceinte 3. La consigne de température reste augmentée à 88°C pendant 15 minutes (étape de reconditionnement 104) : on constate une remontée des températures du stator 5 au niveau de l'élément refroidisseur 11a avec l'échauffement de la pompe à vide 2 (courbes C et D).Then the power consumed increases beyond the load threshold S (curve A), indicating that a new process step P2 takes place in the enclosure 3. The temperature set point remains increased to 88° C. for 15 minutes (step reconditioning 104): there is a rise in the temperatures of the stator 5 at the level of the cooling element 11a with the heating of the vacuum pump 2 (curves C and D).

Après l'écoulement de la durée supplémentaire prédéfinie, les températures au centre de l'élément refroidisseur 11a étant sensiblement revenues aux valeurs précédentes de l'étape de procédé P1, l'unité de contrôle 13 décrémente la consigne de température qui retourne à 83°C (étape de régulation de procédé 102). Les températures au centre de l'élément refroidisseur 11a diminuent de la différence de consigne de température, puis remontent lentement avec la valeur de la consigne à 83°C. Au cours de l'étape d'attente I et de l'étape de procédé P2 qui suit, la température est restée au-dessus de 83°C au niveau du stator 5 près de l'élément refroidisseur 11a.After the expiry of the predefined additional time, the temperatures at the center of the cooling element 11a having substantially returned to the previous values of the process step P1, the control unit 13 decrements the temperature setpoint which returns to 83° C (process control step 102). The temperatures at the center of the cooling element 11a decrease by the temperature setpoint difference, then rise slowly with the setpoint value at 83°C. During the waiting step I and the following process step P2, the temperature remained above 83° C. at the level of the stator 5 near the cooling element 11a.

L'augmentation de la consigne de température au cours de l'étape d'attente I de faible charge de pompage permet de garder le stator 5 aussi chaud au centre de l'élément refroidisseur 11a qu'au cours des étapes de procédé P1, P2, ce qui permet de limiter les risques de grippage ou de touches entre rotors 8 au cours de l'étape d'attente I liés aux différences de dilatation thermique entre les rotors 8 et le stator 5.The increase in the temperature setpoint during the low pumping load waiting step I makes it possible to keep the stator 5 as hot in the center of the cooling element 11a as during the process steps P1, P2 , which makes it possible to limit the risks of seizing or of hits between rotors 8 during the waiting stage I linked to the differences in thermal expansion between the rotors 8 and the stator 5.

Cette température qui est maintenue élevée au cours de l'étape d'attente I permet en outre d'éviter la création de zones froides où les espèces condensables polluantes pourraient se solidifier ou se condenser.This temperature, which is kept high during the waiting stage I, also makes it possible to avoid the creation of cold zones where the polluting condensable species could solidify or condense.

Le déclenchement de changement de consigne de température réalisée par surveillance de la charge de pompage permet de plus d'être très réactif.The triggering of the temperature setpoint change carried out by monitoring the pumping load also makes it possible to be very reactive.

Cette surveillance peut en outre être réalisée à partir des informations déjà disponibles par les capteurs de la pompe à vide 2, en intégrant le comportement thermique de la pompe à vide 2 dans la détermination du contrôle de la température, sans nécessiter l'ajout de capteurs de température supplémentaires, sans informations du procédé ayant lieu dans l'enceinte 3 et sans changer le positionnement du au moins un capteur de température 12a, 12b ou la structure des éléments refroidisseurs 11a, 11b.This monitoring can further be carried out from the information already available by the sensors of the vacuum pump 2, by integrating the thermal behavior of the vacuum pump 2 in the determination of the temperature control, without requiring the addition of sensors additional temperature, without process information taking place in the enclosure 3 and without changing the positioning of at least one temperature sensor 12a, 12b or the structure of the cooling elements 11a, 11b.

Claims (10)

  1. Method (100) for controlling the temperature of a vacuum pump (2) of the dry vacuum pump type subjected to variable pumping loads, the vacuum pump (2) comprising:
    o a stator (5),
    o at least one pumping stage (T1-T5),
    o two shafts (6, 7) extending into the at least one pumping stage (T1-T5) and respectively bearing at least one rotor (8), the rotors (8) being configured to rotate synchronously in opposite directions in the stator (5) in order to drive a gas (G) that is to be pumped from a suction inlet (9) of the vacuum pump (2) to a delivery outlet (10),
    o at least one cooling element (11a, 11b) coupled to the stator (5),
    o at least one temperature sensor (12a, 12b) configured to take a measurement of the temperature of the stator (5), and
    o a control unit (13) configured to control the temperature of the stator (5) by means of the at least one cooling element (11a, 11b) and of the at least one temperature sensor (12a, 12b),
    in which the temperature of the vacuum pump (2) is controlled by means of the at least one cooling element (11a, 11b) coupled to the stator (5) on the basis of a temperature setpoint and of a measurement of the temperature of the stator (5), characterized in that monitoring monitors whether the value of a parameter indicative of the pumping load, chosen from either a current drawn or a power consumed by the vacuum pump (2), is below a load threshold (101) and, if the value of the parameter indicative of the pumping load is below the load threshold (S), then the temperature setpoint is increased (103).
  2. Temperature control method (100) according to the preceding claim, characterized in that the temperature setpoint is increased at least for control of the temperature by means of a cooling element (11a) coupled to a pumping stage (T1), referred to as a low-pressure pumping stage, of the vacuum pump (2).
  3. Temperature control method (100) according to either of the preceding claims, in which, after the temperature setpoint has been increased, monitoring monitors whether the value of the parameter indicative of the pumping load is above the load threshold (S) and, if the value of the parameter indicative of the pumping load is above the load threshold (S), then an increased temperature setpoint is maintained for a predefined additional length of time (104).
  4. Temperature control method (100) according to the preceding claim, in which the predefined additional length of time is greater than ten minutes.
  5. Temperature control method (100) according to one of the preceding claims, in which the increase in the temperature setpoint is greater than 3°C.
  6. Temperature control method (100) according to one of the preceding claims, in which the increase in the temperature setpoint is less than 20°C.
  7. Vacuum pump (2) of the dry vacuum pump type, comprising:
    - a stator (5),
    - at least one pumping stage (T1-T5),
    - two shafts (6, 7) extending into the at least one pumping stage (T1-T5) and respectively bearing at least one rotor (8), the rotors (8) being configured to rotate synchronously in opposite directions in the stator (5) in order to drive a gas (G) that is to be pumped from a suction inlet (9) of the vacuum pump (2) to a delivery outlet (10),
    - at least one cooling element (11a, 11b) coupled to the stator (5),
    - at least one temperature sensor (12a, 12b) configured to take a measurement of the temperature of the stator (5), and
    - a control unit (13) configured to control the temperature of the stator (5) by means of the at least one cooling element (11a, 11b) and of the at least one temperature sensor (12a, 12b),
    characterized in that the control unit (13) is configured to implement a temperature control method (100) according to one of the preceding claims.
  8. Vacuum pump (2) of the dry vacuum pump type according to the preceding claim, characterized in that it is a rough vacuum pump.
  9. Vacuum pump (2) of the dry vacuum pump type according to either of Claims 7 and 8, characterized in that it comprises two cooling elements (11a, 11b) coupled to the stator (5), one cooling element (11a, 11b) being arranged at each axial end of the vacuum pump (2).
  10. Installation (1) comprising a chamber (3), characterized in that it comprises a vacuum pump (2) of the dry vacuum pump type according to one of Claims 7 to 9, connected to the chamber (3) for pumping in the chamber (3).
EP19773440.3A 2018-10-17 2019-09-26 Method for controlling the temperature of a vacuum pump, and associated vacuum pump and installation Active EP3867531B1 (en)

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FR1859617A FR3087504B1 (en) 2018-10-17 2018-10-17 PROCESS FOR CONTROLLING THE TEMPERATURE OF A VACUUM PUMP, VACUUM PUMP AND ASSOCIATED INSTALLATION
PCT/EP2019/076111 WO2020078689A1 (en) 2018-10-17 2019-09-26 Method for controlling the temperature of a vacuum pump, and associated vacuum pump and installation

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI815109B (en) * 2021-04-28 2023-09-11 華碩電腦股份有限公司 Heat dissipation validation method and electronic device using the same
FR3128745A1 (en) * 2021-10-29 2023-05-05 Pfeiffer Vacuum Dry vacuum pump
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060269424A1 (en) 2005-05-27 2006-11-30 Michael Henry North Vacuum pump
JP4673011B2 (en) 2004-07-05 2011-04-20 株式会社島津製作所 Temperature control device for turbo molecular pump
JP2014118929A (en) 2012-12-19 2014-06-30 Ebara Corp Dry pump device

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2637655B1 (en) * 1988-10-07 1994-01-28 Alcatel Cit SCREW PUMP TYPE ROTARY MACHINE
CN1103872C (en) * 1995-11-29 2003-03-26 日本真空技术株式会社 Cooling device for oil-sealed rotary vacuum pump
JP3767052B2 (en) * 1996-11-30 2006-04-19 アイシン精機株式会社 Multistage vacuum pump
JP2003083273A (en) * 2001-09-12 2003-03-19 Ebara Corp Dry vacuum pump
GB0326061D0 (en) * 2003-11-10 2003-12-10 Boc Group Plc Improvements in screw pumps
KR100497982B1 (en) * 2004-10-01 2005-07-01 (주)엘오티베큠 Composite dry vacuum pump having roots and screw rotor
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
TW200905079A (en) * 2007-07-18 2009-02-01 Shanorm Tech Co Ltd Dry vacuum pump device and cooling method thereof
DE102009053268A1 (en) * 2009-11-13 2011-05-26 Bayerische Motoren Werke Aktiengesellschaft Air conditioning system for motor vehicle, has air-conditioning compressor controlled with predetermined compressor stroke in thrust phase when actual speed of vehicle is lesser than predetermined speed limit value
GB2498807A (en) * 2012-01-30 2013-07-31 Edwards Ltd Multi-stage vacuum pump with solid stator
WO2017031807A1 (en) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 Non-coaxial vacuum pump with multiple driving chambers
KR101712962B1 (en) * 2015-09-24 2017-03-07 이인철 Vacuum pump with cooling device
DE202015007606U1 (en) * 2015-11-03 2017-02-06 Leybold Gmbh Dry vacuum pump
US10590955B2 (en) * 2017-02-23 2020-03-17 Shimadzu Corporation Turbo-molecular pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4673011B2 (en) 2004-07-05 2011-04-20 株式会社島津製作所 Temperature control device for turbo molecular pump
US20060269424A1 (en) 2005-05-27 2006-11-30 Michael Henry North Vacuum pump
JP2014118929A (en) 2012-12-19 2014-06-30 Ebara Corp Dry pump device

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WO2020078689A1 (en) 2020-04-23
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CN112805472A (en) 2021-05-14
CN112805472B (en) 2023-01-24
EP3867531A1 (en) 2021-08-25
TWI798487B (en) 2023-04-11
US20210404476A1 (en) 2021-12-30
JP2022505202A (en) 2022-01-14
KR20210074368A (en) 2021-06-21
FR3087504A1 (en) 2020-04-24

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