EP3786457B1 - Système de rotor pour une pompe à vide, pompe à vide et procédé de fabrication d'une telle pompe à vide - Google Patents

Système de rotor pour une pompe à vide, pompe à vide et procédé de fabrication d'une telle pompe à vide Download PDF

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Publication number
EP3786457B1
EP3786457B1 EP20195315.5A EP20195315A EP3786457B1 EP 3786457 B1 EP3786457 B1 EP 3786457B1 EP 20195315 A EP20195315 A EP 20195315A EP 3786457 B1 EP3786457 B1 EP 3786457B1
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EP
European Patent Office
Prior art keywords
rotor
rotor body
pump
rotor arrangement
arrangement
Prior art date
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EP20195315.5A
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German (de)
English (en)
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EP3786457A1 (fr
Inventor
Mirko Mekota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
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Pfeiffer Vacuum Technology AG
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Priority to EP20195315.5A priority Critical patent/EP3786457B1/fr
Publication of EP3786457A1 publication Critical patent/EP3786457A1/fr
Priority to JP2021080163A priority patent/JP7311556B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/70—Treatment or modification of materials
    • F05D2300/702—Reinforcement

Definitions

  • the invention relates to a rotor arrangement for a vacuum pump, in particular for a turbomolecular pump, a vacuum pump and a method for producing such a rotor arrangement.
  • Vacuum pumps such as turbomolecular pumps, are used in various areas of technology, such as in semiconductor production, to create a vacuum that is necessary for the respective process.
  • a turbomolecular pump generally comprises a rotor arrangement which, during operation of the turbomolecular pump, rotates at a very high speed, which is typically above 10,000 revolutions per minute, in relation to a stator or a housing of the turbomolecular pump.
  • the rotor arrangement thus has a very high kinetic energy during operation of the turbomolecular pump, in the event of a so-called "rotor crash", in which the rotor arrangement blocks for a short time, for example, an extremely high torque can act on the housing of the turbomolecular pump and, via this, on to the entire vacuum system be transferred, in which the turbomolecular pump is located.
  • rotor crash in which the rotor arrangement blocks for a short time, for example, an extremely high torque can act on the housing of the turbomolecular pump and, via this, on to the entire vacuum system be transferred, in which the turbomolecular pump is located.
  • a rotor crash there is consequently a considerable risk of destruction and injury in the vicinity of the turbomolecular pump.
  • the DE 20 2013 006 436 U1 describes a rotor arrangement for a vacuum pump with a rotor body which is wrapped with an armoring tape on its outer circumference.
  • EP 3 085 964 A1 describes a rotor assembly for a vacuum pump in which a rotor body has reinforcement rings attached thereto by a cross-press connection.
  • An object of the invention is to provide a rotor assembly for a vacuum pump, a vacuum pump and a method of manufacturing a rotor assembly, in which improved strength of the rotor assembly against breakage is easily achieved. Furthermore, the hazard in the vicinity of the vacuum pump should also be reduced in the event of the rotor arrangement breaking apart.
  • a rotor arrangement according to the invention for a vacuum pump, in particular for a turbomolecular pump, has a rotor body which is wrapped at least once completely around the axis of rotation with an armoring strip on its outer circumference.
  • the presence of the armor band on the outer circumference of the rotor body improves the resistance of the rotor assembly to breaking apart. This reduces the risk of danger in the vicinity of the vacuum pump.
  • the armor strip ensures that the individual parts of the rotor assembly are still held together for a certain period of time and the burst is thus extended over a longer period of time.
  • the kinetic energy of the rotor arrangement or a corresponding torque is also transmitted to a housing of the vacuum pump over a longer period of time, which reduces the total torque exerted on the vacuum pump and reduces the risk of the vacuum pump tearing off, for example pump flange exists.
  • the risk of destruction and injury in the area surrounding the vacuum pump is reduced by the armor strip, even in the event of a rotor crash or burst.
  • the wrapping of the rotor body with the armoring strip can be applied to the outer circumference of the rotor body in a simple manner, and no prefabricated tubes or rings have to be produced, which are shrunk onto the rotor body, for example, as armor.
  • the reinforcement of the rotor body can thus be achieved in a cost-effective manner by means of the reinforcement strip.
  • the rotor assembly includes at least two pumping stages spaced along the axis of rotation and each having active pumping elements located on the outer periphery of the rotor body.
  • the rotor body is also at least once completely circumferential on its outer circumference at a plurality of positions which are different from one another in the axial direction, with respective wrapped in armor strips.
  • the number of windings of the respective armoring tapes is different. This applies generally, ie regardless of whether the armor strips are arranged in different intermediate spaces between individual pumping stages or generally at a number of different axial positions.
  • the rotor body is bell-shaped and has an inner space, the cross section of which increases perpendicularly to the axis of rotation in the axial direction, starting from a high-vacuum side of the rotor arrangement. Since the cross section of the inner space of such a bell-shaped rotor body increases in the axial direction, the outer circumference of the rotor body also increases in the same direction.
  • the wrapping by means of an armoring strip to produce an armoring of the rotor body is particularly advantageous in such a bell-shaped rotor, since otherwise when using armoring tubes or armoring rings, a large number of armorings with different diameters would first have to be produced.
  • the outlay for producing the armoring is consequently reduced in the case of bell-shaped rotor bodies.
  • the rotor body is wrapped with an armoring strip in each case in one or more intermediate spaces between pump stages which are furthest away from the high-vacuum side of the rotor arrangement.
  • the rotor assembly includes more than two pumping stages spaced along the axis of rotation and each having pumping active elements located on the outer periphery of the rotor body.
  • one armoring strip is arranged in at least two intermediate spaces, which extend in the axial direction between the two pumping stages, and is wound around the rotor body.
  • the strength of the rotor assembly can be improved in an efficient manner, since the rotor assembly can initially be manufactured without armoring tape and the spaces between the pumping stages are then accessible for wrapping with the armoring tape.
  • the number of spaces in which the rotor body is to be wrapped with the armoring tape is selected based on a rated speed of the rotor assembly.
  • the reinforcement of the rotor body can thus be flexibly adapted to the conditions during operation of the vacuum pump by wrapping it in a number of intermediate spaces between the pump stages.
  • the number of windings of a respective armoring strip is selected on the basis of the nominal speed of the rotor arrangement.
  • the number of windings or layers of the armoring strip can thus be increased at those points along the outer circumference of the rotor body that are considered to be particularly critical for a burst of the rotor body or when such a burst occurs, for example at points with a large outer circumference of the rotor body or larger Dimensions.
  • the entire thickness of the reinforcement can thus be flexibly varied along the outer circumference of the rotor body or in the axial direction along the axis of rotation and adapted to the expected risk of a burst.
  • the armoring strip can include a carbon fiber reinforced plastic (CFRP).
  • CFRP carbon fiber reinforced plastic
  • the carbon fibers or carbon fibers of the CFRP are embedded in a plastic matrix, which can include, for example, epoxy resin, duroplastics or thermoplastics.
  • the fibers can be integrated into the plastic matrix in such a way that a flexible reinforcement band is present overall. which can be unrolled in a similar way to packing tape when the armoring tape is wrapped around the rotor body.
  • the carbon fiber reinforced plastic (CFRP) has a low mass despite high rigidity. The strength of the rotor body and the rotor arrangement can be improved overall by integrating the CFRP into the armoring strip.
  • the armoring strip can also be wound at least once around the outer circumference of the rotor body in a plurality of layers and/or next to one another at a plurality of positions which differ from one another in the axial direction. Different axial positions can be dictated by different clearances between pump stages. But this is not mandatory.
  • a plurality of armoring strips can also be arranged in a single space between two immediately consecutive pumping stages on different axial pumping stages or on a rotor body without pumping stages or on a region of a rotor body comprising no pumping stages.
  • the rotor body is wrapped helically or helically with one or more layers of the armoring strip in one or more axial areas.
  • An armoring strip does not therefore have to be in just one axial position.
  • the rotor body can be designed in one piece.
  • the wrapping with the armoring strip is a simple and cost-effective way of actually attaching an armoring to the rotor body.
  • fitting armor tubes or rings in the spaces between pumping stages of a one-piece rotor is extremely difficult, if not impossible.
  • the armoring strip can be self-adhesive and/or, after being wrapped around it, can be connected to the rotor body by exposure to an elevated temperature that is greater than the ambient temperature.
  • the wrapping of the rotor body involves particularly little effort, since no connecting means, such as adhesive, have to be used between the armoring strip and the rotor body.
  • a particularly strong connection between the armoring strip and the rotor body can also be produced by the effect of an increased temperature, for example by "baking" of the armoring strip with the rotor body in an oven.
  • the type of connection - e.g. self-adhesive or "baking" - can depend on the respective design of the armoring strip.
  • the invention also relates to a vacuum pump, which is in particular a turbomolecular pump and which has a rotor arrangement as described above.
  • a further object of the invention is a method for producing a rotor arrangement for a vacuum pump, in which the outer circumference of the rotor body is wrapped at least once completely around the axis of rotation with an armoring strip.
  • the outer circumference of the rotor body is wrapped at least once completely around the circumference at a plurality of positions which differ from one another in the axial direction with respective armoring strips.
  • the number of windings of the respective armoring tapes is different.
  • a number of windings of a respective armoring strip is selected depending on a nominal speed of the rotor arrangement.
  • the strength of the reinforcement is thus adapted to the rated speed of the rotor arrangement, so that on the one hand the reinforcement is strong enough and on the other hand no unnecessary additional mass is applied to the rotor body by too strong a reinforcement.
  • an armoring strip is wound around the rotor body in at least two and in particular in all intermediate spaces which extend in the axial direction between the pump stages.
  • reinforcement can be produced on the rotor body in a simple and cost-effective manner, so that its resistance to a burst is improved.
  • the effort involved in producing the reinforcement is reduced when the reinforcement tape is wrapped around it, in particular in comparison to reinforcement tubes or reinforcement rings because the diameter of such reinforcement tubes or reinforcement rings has to be precisely adapted to the diameter of the rotor body, and such an adjustment is not necessary when the reinforcement tape is wrapped around it .
  • the armoring strip preferably comprises a carbon fiber reinforced plastic (CFRP).
  • CFRP carbon fiber reinforced plastic
  • the armoring strip can be wound at least once around the outer circumference of the rotor body in a plurality of layers and/or next to one another at a plurality of positions that differ from one another in the axial direction.
  • the wrapping of the rotor body with several layers and/or at different points in the axial direction along the rotor body enables flexible adaptation of the reinforcement with regard to its position and thickness to the operating properties of the rotor arrangement and the vacuum pump.
  • the armoring strip can be wrapped around the rotor body as a self-adhesive strip and/or, after wrapping, can be connected to the rotor body by exposure to an elevated temperature that is greater than the ambient temperature. If the armoring strip is self-adhesive, there is no additional effort to connect the armoring strip to the rotor body, for example by means of adhesive, while the connection between the armoring strip and the rotor body can be made alternatively or additionally strengthened after the wrapping by the effect of an increased temperature.
  • FIG 1A shows a possible example of a rotor arrangement 11 according to the invention for a turbomolecular pump.
  • the rotor assembly 11 rotates at a speed that is greater than 10,000 revolutions per minute, for example, about an axis of rotation 13.
  • the rotor assembly 11 has a rotor body 15, which is bell-shaped, so that the rotor assembly 11 includes an interior 17 , whose cross section perpendicular to the axis of rotation 13 in the axial direction starting from a high-vacuum side of the rotor assembly 11 - in Figure 1A so from top to bottom - increases.
  • the high-vacuum side of the turbomolecular pump, for which the rotor assembly 11 is intended, is located in Figure 1A above. Due to the bell-shaped design of the rotor body 15, the rotor assembly 11 is also referred to as a bell-shaped rotor.
  • the rotor arrangement 11 On the outside of the rotor body 15, the rotor arrangement 11 comprises a plurality of pump stages 19, which comprise rotor disks 21 as active pumping elements.
  • a reinforcement 27 is attached to an outer circumference 25 of the rotor body 15 in the intermediate space 23 between the two lowest rotor disks 21 .
  • the reinforcement 27 comprises three layers of a reinforcement strip 29 which is wound around the outer circumference 25 of the rotor body 15 three times completely around the axis of rotation 13 .
  • Figure 1B shows an enlarged section of Figure 1A , in which the three layers of the armoring strip 29 in the intermediate space 23 between the two lowest rotor disks 21 can be seen.
  • the three layers of the armoring strip 29 form the armoring 27 on the outer circumference 25 of the rotor body 15 between those two rotor disks 21 which are furthest away from the high-vacuum side of the rotor arrangement 11 and in their intermediate space 23 the outer diameter of the rotor body 15 is larger than in all other intermediate spaces 23 is.
  • the reinforcement 27 is thus located in a region of the rotor body 15 in which it has a greater moment of inertia in relation to the other intermediate spaces 23 . It is advantageous to provide the reinforcement 27 between the two lowest rotor discs 21, since the reinforcement 27 at this point improves the strength of the rotor body 15 against breaking apart or a burst the most.
  • the reinforcement tape 29 consists of a flexible plastic material that is self-adhesive and is unrolled in a manner similar to a package adhesive tape.
  • the armoring strip 29 comprises a carbon fiber reinforced plastic (CFRP) in which fibers are embedded in a plastic matrix in order to increase the strength of the armoring strip 29 .
  • CFRP reinforcement strip 29 is wound three times completely around the axis of rotation 13 around the outer circumference 25 of the rotor body 15 .
  • the strength of the rotor arrangement 11 is improved by the reinforcement 27 by means of the reinforcement strip 29, and there is less elongation under the centrifugal force at high speeds. As a result, the rotor arrangement 11 can achieve a higher nominal speed than a corresponding rotor arrangement without the reinforcement 27 .

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  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
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Claims (14)

  1. Ensemble de rotor (11) pour une pompe à vide, en particulier pour une pompe turbomoléculaire, comprenant un corps de rotor (15) qui tourne autour d'un axe de rotation (13) pendant le fonctionnement de la pompe à vide,
    dans lequel
    le corps de rotor (15) est réalisé en forme de cloche et présente un espace intérieur (17) dont la section transversale augmente à angle droit par rapport à l'axe de rotation (13) dans la direction axiale à partir d'un côté à vide poussé de l'ensemble de rotor (11),
    l'ensemble de rotor (11) comprend au moins deux étages de pompage (19) espacés l'un de l'autre le long de l'axe de rotation (13) et comprenant chacun des éléments (21) actifs en pompage situés sur la périphérie extérieure (25) du corps de rotor (15), et
    sur sa périphérie extérieure (25), en plusieurs positions différentes les unes des autres dans la direction axiale, le corps de rotor (15) est entouré au moins une fois complètement autour de l'axe de rotation (13) par des bandes d'armature respectives (29),
    caractérisé en ce que
    dans un ou dans plusieurs espaces intermédiaires (23) entre les étages de pompage qui sont les plus éloignés du côté à vide poussé de l'ensemble de rotor (11), le corps de rotor (15) est entouré par une bande d'armature respective (29), et
    le nombre d'enroulements des bandes d'armature respectives (29) est différent.
  2. Ensemble de rotor (11) selon la revendication 1,
    dans lequel le nombre d'enroulements de la bande d'armature respective (29) est choisi en fonction d'une vitesse nominale de l'ensemble de rotor (11).
  3. Ensemble de rotor (11) pour une pompe à vide, en particulier pour une pompe turbomoléculaire, comprenant un corps de rotor (15) qui tourne autour d'un axe de rotation (13) pendant le fonctionnement de la pompe à vide,
    dans lequel
    sur sa périphérie extérieure (25), le corps de rotor (15) est entouré au moins une fois complètement autour de l'axe de rotation (13) par une bande d'armature (29), et
    l'ensemble de rotor (11) comprend plus de deux étages de pompage (19) espacés les uns des autres le long de l'axe de rotation (13) et comprenant chacun des éléments (21) actifs en pompage situés sur la périphérie extérieure (25) du corps de rotor (15),
    caractérisé en ce que
    dans au moins deux espaces intermédiaires (23) s'étendant dans la direction axiale entre les étages de pompage (19), une bande d'armature respective (29) est enroulée autour du corps de rotor (15),
    un nombre d'enroulements de la bande d'armature respective (29) est choisi en fonction d'une vitesse nominale de l'ensemble de rotor (11), et
    le nombre d'espaces intermédiaires (23) dans lesquels le corps de rotor (15) est entouré par la bande d'armature respective (29) est choisi en fonction de la vitesse nominale.
  4. Ensemble de rotor (11) selon la revendication 3,
    dans lequel le corps de rotor (15) est réalisé en forme de cloche et présente un espace intérieur (17) dont la section transversale augmente à angle droit par rapport à l'axe de rotation (13) dans la direction axiale à partir d'un côté à vide poussé de l'ensemble de rotor (11).
  5. Ensemble de rotor (11) selon l'une des revendications précédentes, dans lequel, dans tous les espaces intermédiaires (23), une bande d'armature respective (29) est enroulée autour du corps de rotor (15).
  6. Ensemble de rotor (11) selon l'une des revendications précédentes, dans lequel les bandes d'armature respectives (29) sont enroulées en plusieurs couches et/ou les unes à côté des autres en plusieurs positions différentes les unes des autres dans la direction axiale, respectivement au moins une fois complètement autour de la périphérie extérieure (25) du corps de rotor (15).
  7. Ensemble de rotor (11) selon l'une des revendications précédentes, dans lequel la bande d'armature respective (29) est autocollante et/ou, après avoir été enroulée, est liée au corps de rotor (15) sous l'effet d'une température accrue, supérieure à la température ambiante.
  8. Pompe à vide, en particulier pompe turbomoléculaire, comportant un ensemble de rotor (11) selon l'une des revendications précédentes.
  9. Procédé de fabrication d'un ensemble de rotor (11), réalisé en particulier selon l'une des revendications 1 à 7, pour une pompe à vide, en particulier pour une pompe turbomoléculaire,
    dans lequel
    l'ensemble de rotor (11) comprend un corps de rotor (15) qui tourne autour d'un axe de rotation (13) pendant le fonctionnement de la pompe à vide, le corps de rotor (15) est réalisé en forme de cloche et présente un espace intérieur (17) dont la section transversale augmente à angle droit par rapport à l'axe de rotation (13) dans la direction axiale à partir d'un côté à vide poussé de l'ensemble de rotor (11), et
    l'ensemble de rotor (11) comprend au moins deux étages de pompage (19) espacés l'un de l'autre le long de l'axe de rotation (13) et comprenant chacun des éléments (21) actifs en pompage situés sur la périphérie extérieure (25) du corps de rotor (15),
    le procédé incluant que sur la périphérie extérieure (25), en plusieurs positions différentes les unes des autres dans la direction axiale, le corps de rotor (15) est entouré au moins une fois complètement par des bandes d'armature respectives (29),
    caractérisé en ce que
    dans un ou dans plusieurs espaces intermédiaires (23) entre les étages de pompage qui sont les plus éloignés du côté à vide poussé de l'ensemble de rotor (11), le corps de rotor (15) est entouré par une bande d'armature respective (29), et
    le nombre d'enroulements des bandes d'armature respectives (29) est différent.
  10. Procédé selon la revendication 9,
    dans lequel le nombre d'enroulements de la bande d'armature respective (29) est choisi en fonction d'une vitesse nominale de l'ensemble de rotor (11).
  11. Procédé de fabrication d'un ensemble de rotor (11), réalisé en particulier selon l'une des revendications 1 à 7, pour une pompe à vide, en particulier pour une pompe turbomoléculaire,
    dans lequel
    l'ensemble de rotor (11) comprend un corps de rotor (15) qui tourne autour d'un axe de rotation (13) pendant le fonctionnement de la pompe à vide, et l'ensemble de rotor (11) comprend plus de deux étages de pompage (19) espacés les uns des autres le long de l'axe de rotation (13) et comprenant chacun des éléments (21) actifs rn pompage disposés sur la périphérie extérieure (25) du corps de rotor (15),
    le procédé incluant que
    sur sa périphérie extérieure (25), le corps de rotor (15) est entouré au moins une fois complètement autour de l'axe de rotation (13) par une bande d'armature (29),
    caractérisé en ce que
    dans au moins deux espaces intermédiaires (23) s'étendant dans la direction axiale entre les étages de pompage (19), une bande d'armature respective (29) est enroulée autour du corps de rotor (15),
    un nombre d'enroulements de la bande d'armature respective (29) est choisi en fonction d'une vitesse nominale de l'ensemble de rotor (11), et le nombre d'espaces intermédiaires (23) dans lesquels le corps de rotor (15) est entouré par la bande d'armature respective (29) est choisi en fonction de la vitesse nominale.
  12. Procédé selon l'une des revendications 9 à 11,
    dans lequel les bandes d'armature respectives (29) sont enroulées en plusieurs couches et/ou les unes à côté des autres en plusieurs positions différentes les unes des autres dans la direction axiale, respectivement au moins une fois complètement autour de la périphérie extérieure (25) du corps de rotor (15).
  13. Procédé selon l'une des revendications 9 à 12,
    dans lequel, dans tous les espaces intermédiaires (23), une bande d'armature respective (29) est enroulée autour du corps de rotor (15).
  14. Procédé selon l'une des revendications 9 à 13,
    dans lequel la bande d'armature respective (29) est enroulée sous forme de bande autocollante autour du corps de rotor (15) et/ou, après avoir été enroulée, est liée au corps de rotor (15) sous l'effet d'une température accrue, supérieure à la température ambiante.
EP20195315.5A 2020-09-09 2020-09-09 Système de rotor pour une pompe à vide, pompe à vide et procédé de fabrication d'une telle pompe à vide Active EP3786457B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP20195315.5A EP3786457B1 (fr) 2020-09-09 2020-09-09 Système de rotor pour une pompe à vide, pompe à vide et procédé de fabrication d'une telle pompe à vide
JP2021080163A JP7311556B2 (ja) 2020-09-09 2021-05-11 真空ポンプ用のロータアセンブリ、真空ポンプ及びロータアセンブリを製造する方法

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EP20195315.5A EP3786457B1 (fr) 2020-09-09 2020-09-09 Système de rotor pour une pompe à vide, pompe à vide et procédé de fabrication d'une telle pompe à vide

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EP3786457A1 EP3786457A1 (fr) 2021-03-03
EP3786457B1 true EP3786457B1 (fr) 2022-09-07

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Citations (1)

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JPH0444498U (fr) * 1990-08-16 1992-04-15
JP3160039B2 (ja) * 1991-08-22 2001-04-23 エヌティエヌ株式会社 ターボ分子ポンプと動翼の加工方法
DE19525829A1 (de) * 1995-07-15 1997-01-16 Abb Research Ltd Lüfter
JP5664253B2 (ja) * 2011-01-12 2015-02-04 株式会社島津製作所 高真空ポンプ
DE202013006436U1 (de) * 2013-07-17 2014-10-22 Oerlikon Leybold Vacuum Gmbh Rotorelement für eine Vakuumpumpe
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EP3786457A1 (fr) 2021-03-03
JP7311556B2 (ja) 2023-07-19

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