EP3762704A1 - Mit laser induzierter inkandeszenz arbeitender partikelsensor mit einer konfokalen anordnung eines laserspots und eines temperaturstrahlungsspots - Google Patents
Mit laser induzierter inkandeszenz arbeitender partikelsensor mit einer konfokalen anordnung eines laserspots und eines temperaturstrahlungsspotsInfo
- Publication number
- EP3762704A1 EP3762704A1 EP19706485.0A EP19706485A EP3762704A1 EP 3762704 A1 EP3762704 A1 EP 3762704A1 EP 19706485 A EP19706485 A EP 19706485A EP 3762704 A1 EP3762704 A1 EP 3762704A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- spot
- particle sensor
- beam splitter
- laser
- radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 96
- 239000002245 particle Substances 0.000 title claims abstract description 87
- 230000003287 optical effect Effects 0.000 claims abstract description 97
- 230000001681 protective effect Effects 0.000 claims description 34
- 230000010287 polarization Effects 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 25
- 238000005259 measurement Methods 0.000 description 15
- 238000001514 detection method Methods 0.000 description 10
- 239000004071 soot Substances 0.000 description 10
- 238000002485 combustion reaction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000010259 detection of temperature stimulus Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
- G01N1/2258—Sampling from a flowing stream of gas in a stack or chimney
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/075—Investigating concentration of particle suspensions by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
- G01N1/2252—Sampling from a flowing stream of gas in a vehicle exhaust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N2015/0042—Investigating dispersion of solids
- G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N2015/1027—Determining speed or velocity of a particle
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
- G01N2021/8557—Special shaping of flow, e.g. using a by-pass line, jet flow, curtain flow
Definitions
- Laser induced incandescence particle sensor with confocal laser spot and temperature beam spot Laser induced incandescence particle sensor with confocal laser spot and temperature beam spot
- the present invention relates to a particle sensor according to the preamble of claim 1.
- a particle sensor comprises a laser module having a laser module and a detector configured for the detection of temperature radiation.
- nanoparticles in air is known from articles B.F. Kock, Two-color time-resolved LII applied to soot particle sizing, Combustion and flame, 2006, as well as S. Schraml, Application of a new soot sensor for exhaust, SAE TECHNICAL PAPER SERIES, 2000, and is known e.g. For the characterization of the combustion process in "glassy" engines in the laboratory or for the exhaust gas characterization intensively applied. The resulting soot particles during combustion are given a nanosecond pulse of
- High-power laser heated to several thousand degrees Celsius and measured the thermal light emission of the particle with a light detector.
- the method allows the detection of very small particles with a diameter of a few 10 nm.
- Example of a photodiode is detectable. Disclosure of the invention
- the present invention provides that the particle sensor has the characteristic features.
- the above-mentioned particle sensor has an optical device which is adapted to focus outgoing laser light from the laser module in a first spot and which is adapted to focus emanating from the first spot temperature radiation in a second spot, wherein a radiation-sensitive surface of the detector in the second spot or in the beam path of the focused on the second spot temperature radiation is behind the second spot.
- the invention is based on the finding that in the detection of measurement signals of a laser-Induced Incandescence, which is generated in the exhaust system of motor vehicles, stray light may occur due to the thermal radiation of the hot environment in the vicinity of the spot (hot exhaust pipe, hotter Sensor head) are conditional. Although the absolute conduction of the stray light on the detector can be very low with some N, it may cause a detector signal that is orders of magnitude stronger than the actual particle to be measured whose measuring signal can be in the Po range. Furthermore, there is a problem in the determination of a particle size distribution on the basis of the detected measurement signals, which are generated by particles that traverse the spot in its edge region. Due to the lower power density of the first spot, there is a lower temperature there than for particles that pass through the center of the first spot. This results in weaker Lll signals that can be easily confused with the Lll signals of smaller signals. Per se are therefore signals of particles on
- the invention solves these problems ultimately by a confocal
- Detection method for the detection of particles Due to this confocal detection method, only temperature radiation directs the light from a sharply delimited spatial area, namely from the first spot or a part of the first spot onto the detector, and temperature radiation originating outside of this sharply delimited spatial area does not reach the radiation-sensitive detector surface. These features can reduce the influence of portions of the temperature radiation that are not directly from the first spot, or better, from the center of the first spot, on the signal generated by the detector.
- the invention thus combines the method of confocal detection with the optical detection of soot particles in the exhaust system by means of laser-induced incandescence. With the help of this combination succeeds, the thermal
- a preferred embodiment is characterized in that the optical device comprises a beam splitter and a first focusing optical element, wherein the beam splitter is arranged in the beam path of the laser light between the laser module and the first focusing optical element.
- the first focusing optical element is set up to direct temperature radiation emanating from the first spot onto the beam splitter and that the detector is arranged in a beam path of the temperature radiation emanating from the beam splitter.
- the same optical elements can partly be used for the beam path leading from the laser module to the first spot and for the beam path leading from the first spot to the second spot.
- the first spot lies in a first focal point of the first focusing optical element and that the second spot lies in a second focal point of the first focusing optical element.
- This embodiment has the advantage of requiring only a few optical elements.
- a further preferred refinement is characterized in that the optical device has a second focusing optical element, wherein the second focusing optical element is arranged in a beam path of the temperature radiation emanating from the beam splitter and is arranged to emit temperature radiation incident from the beam splitter into the second Spot to focus. This embodiment opens in particular more constructive degrees of freedom in the design of the optical system.
- a wavelength-selective optical filter between the beam splitter and the second focusing optical element is arranged in the beam path of the radiation emitted by the beam splitter, which is less transparent to the laser light than for emanating from the spot temperature radiation.
- the radiation-sensitive surface of the detector in the beam path of the focused on the second spot temperature radiation is behind the second spot, the second spot is located in the opening of a pinhole, which is arranged in the beam path of the temperature radiation between the beam splitter and the detector.
- Aperture opening next to the pinhole opening on the opaque part of the pinhole is
- a further preferred embodiment is characterized in that between the pinhole and the detector, a third optical element in the beam path of the temperature radiation is arranged, which of the
- the optical device has a further optical element which is arranged in the beam path of the laser light between the laser module and the beam splitter and is adapted to parallelize outgoing laser light from the laser module and to direct it to the beam splitter.
- a parallelization is here understood to mean a reduction of the opening angle of a bundle of light beams or a bundle of beams, wherein the
- Parallelization does not necessarily have to be complete (zero opening angle).
- the parallelization reduces the beam cross section of the on the
- Beam splitter incident laser light which leads to one that the beam splitter may be smaller than it would be without previous parallelization.
- the laser is a semiconductor laser element, in particular a laser diode.
- This embodiment has the advantage that inexpensive and robust laser diodes are available on the market.
- the beam splitter is a polarizing beam splitter, and that the polarizing beam splitter is oriented so that it is maximally transparent to the incident, a predetermined polarization direction having laser light.
- Laser light often occurs in polarized form. Due to the polarizing beam splitter and its alignment suitable for the polarization of the laser light, the laser light can be used to a large extent for signal generation.
- laser light 10 Since laser light 10 is generally already polarized, it can be
- polarizing beam splitter at the direction of polarization of the polarizing beam splitter suitably chosen arrangement in one direction (way to the first spot 22) pass virtually lossless.
- the transmitted power at that location can be maximized (to nearly 100%) while one has to accept a power loss of about 50% in the transmission through the beam splitter in conventional non-polarizing beam splitters.
- the laser is adapted to emit laser light having wavelengths below 500 nm, in particular 405 nm, 450 nm or 465 nm, and that the optical filter is designed to attenuate light having wavelengths below 500 nm or even blocked.
- a further preferred embodiment is characterized in that the particle sensor has a first part, which is adapted to be exposed to a measurement gas, and which has a second part, which is adapted not to be exposed to the measurement gas and the optical Contains components of the particle sensor, wherein both parts are separated by a gas-impermeable partition wall.
- the optical components can be arranged separately from the sample gas stream, so that the sensor can also be used for measuring particle concentrations in hot and chemically aggressive sample gases, such as exhaust gases of internal combustion engines.
- a window is mounted, which is permeable to both the laser light and emanating from the spot radiation.
- the particle sensor has an arrangement of an outer protective tube and an inner protective tube, both of which have a general cylindrical shape or prism shape, that the protective tubes are arranged coaxially, wherein the axes of the cylinder or prisms form parallel to the direction of irradiation of the laser light are aligned and the spot lies inside the inner protective tube, that the outer protective tube 28 protrudes beyond the inner protective tube 30 at its laser-facing end and that the inner protective tube 30 protrudes beyond the outer protective tube 28 at the opposite end.
- the particle sensor according to the invention can be used as a soot particle sensor for the measurement of soot particle concentrations-masses and velocities in the exhaust gas of internal combustion engines. But it can also be used to measure other particle concentrations in a gas, for example to measure particulate matter in indoor air or outdoors.
- Fig. 1 is a laser-induced incandescence-based measuring principle used in the invention
- FIG. 2 shows a basic structure of a laser induced incandescence particle sensor
- Fig. 3 shows a first embodiment of an inventive
- FIG. 4 shows an embodiment of an optical part of a particle sensor according to the invention, which operates with non-parallel beam paths;
- Figure 5 shows an embodiment of an optical part of a particle sensor according to the invention, which operates with parallel beam paths;
- Figure 6 shows another embodiment of an optical part of a particle sensor according to the invention, with non-parallel
- Figure 7 shows another embodiment of an optical part of a
- Particle sensor with arranged between a second spot and a detector optical elements
- Figure 8 shows another embodiment in which a detector and a
- FIG. 1 illustrates the measuring principle based on laser-induced incandescence (LII).
- Laser light 10 of high intensity strikes a particle 12.
- the intensity of the laser light 10 is so high that the energy absorbed by the particle 12 of the laser light 10 heats the particle 12 to several thousand degrees Celsius. As a result of the heating, the particle 12 emits spontaneously and in the
- the particle sensor 16 here has a CW laser module 18 (CW: continuous wave, continuous wave) whose preferably parallel laser light 10 with at least one arranged in the beam path of the CW laser module 18 first focusing optical Element 20 is focused on a very small first spot 22.
- the first focusing optical element 20 is preferably a first lens 24. Only in the volume of the first spot 22 does the intensity of the laser light 10 reach the high values necessary for LII.
- the invention is not limited to the use of a CW laser. It is also conceivable to use pulsed-powered lasers.
- the dimensions of the first spot 22 are in the range of a few pm, in particular in the range of at most 200 pm, so that the particles 12 passing through the first spot 22 are excited to emit evaluable radiation powers, be it by laser-induced incandescence or by chemical reactions (especially oxidation).
- the measurement signal is generated by a detector 26 which is arranged in the particle sensor 16 so that it detects radiation 14, in particular temperature radiation, which emanates from a particle 12, which passes through the first spot 22.
- the detector 26 preferably has at least one photodiode 26.1
- the laser of the laser module 18 is modulated or switched on and off (duty cycle ⁇ 100%).
- the laser of the laser module 18 is a CW laser. This allows the use of low-cost semiconductor laser elements (laser diodes), which reduces the cost of the entire particle sensor 16 and greatly simplifies the control of the laser module 18 and the evaluation of the measurement signal. The use of pulsed lasers is not excluded.
- FIG. 3 shows an advantageous exemplary embodiment of a particle sensor 16 according to the invention, which is suitable for use as a soot particle sensor in the exhaust gas of a combustion process.
- the particle sensor 16 has a first part 16. 1, which is set up to be exposed to a measurement gas, and has a second part 16. 2, which contains the optical components of the particle sensor 16 and is not exposed to the measurement gas. Both parts are separated by a measuring gas impermeable partition 16.3. In the dividing wall, a window 34 is mounted in the beam path of the laser light 10, which is permeable to both the laser light 10 and radiation emanating from the first spot 22.
- the first part 16. 1 of the particle sensor 16 has an arrangement of an outer protective tube 28 and an inner protective tube 30.
- the two protective tubes 28, 30 preferably have a general cylindrical shape or
- the bases of the cylindrical shapes are preferably circular, elliptical or polygonal.
- the cylinders are preferably arranged coaxially, the axes of the cylinders being oriented transversely to the flow of exhaust gas 32.
- the inner protective tube 30 protrudes in the direction of the axes over the outer protective tube 28 out into the flowing exhaust 32.
- the outer protective tube 28 protrudes beyond the inner protective tube 30.
- Protective tube 28 is preferably so much larger than the outer diameter of the inner protective tube 30 that results in a first flow cross section between the two protective tubes 28, 30.
- the inside width of the inner protective tube 30 forms a second flow cross section.
- Flow cross-section in the arrangement of the two protective tubes 28, 30 enters, then at the end of the protective tubes 28, 30 facing away from the exhaust gas 32, changes its direction, enters the inner protective tube 30 and is sucked out of it by the flowing exhaust gas 32. This results in the inner protective tube 30, a laminar flow.
- This arrangement of protective tubes 28, 30 is attached to the particle sensor 16 transversely to the exhaust gas flow, or in an exhaust pipe.
- Such a first part 16.1 of a particle sensor is a component of a preferred embodiment. Its features are not essential to the invention features. The features essential to the invention are part of the second part 16.2 of the particle sensor 16.
- the second part 16. 2 has a laser module 18, an optical device 36 and a detector 26.
- FIG. 4 shows an exemplary embodiment of the optical device 36 together with the laser module 18 and the detector 26, that is to say an embodiment of the second part 16. 2 of the particle sensor 16.
- the optical device 36 has in particular a beam splitter 38 and a first focusing optical element 20.
- the laser light 10 of the laser module 18 is focused into the first spot 22 via the beam splitter 38, which may be, for example, a dichroic mirror or a beam splitter cube, and a first focusing optical element 20.
- the first focusing optical element 20 is preferably a lens 24.
- a particle 12 flying through the first spot is heated by the laser light and emits temperature radiation as a result.
- the particle 12 may be considered a point source of light due to its small size.
- the first spot 22 lies inside the inner protective tube 30. In this first spot 22, the laser light intensity is high enough to heat the soot particles 12 transported with the exhaust gas 32 to several thousand degrees Celsius, so that the heated particles 12 significantly absorb radiation 14 in FIG Form of
- the radiation 14 is, for example, in the near-infrared and visible spectral range, without the invention being restricted to radiation 14 from this spectral range.
- Radiation 14 is incident on the first focusing optical element 20 and propagates via the beam splitter 38 to the detector 26, this part being focused by the first focusing optical element 20 onto a second spot 40.
- the second spot 40 is located in a focal point of the first focusing optical element 20, or vice versa, the focus is in the second spot 40. Detached from the special
- Embodiment of Figure 4 is that the second spot 40 in a
- Focus of the optical device 36 is or vice versa
- Focus of the optical device 36 in the second spot 40 is located.
- the detector 26 is arranged in the beam path of the beam 14 emanating from the beam splitter 38 so that its radiation-sensitive surface is located in the second spot 40 or in the beam path of the focused on the second spot 40 radiation 14 behind the second spot 40.
- the detector 26 is located behind the second spot 40 in the beam path of the radiation 14.
- the second spot 40 is shown in FIG.
- Embodiment on the opening of a pinhole 42, so that the detector 26 registers only radiation 14, which falls through the opening on its radiation-sensitive surface.
- Aperture opening is directed. This temperature radiation can the
- the beam splitter 38 causes in the optical device 36, the particularly important advantage that only an optical access to the exhaust gas 32 is required because the same optics, in particular the same first focusing optical element 20 for the production of the first spot 22 and for detecting the used by the particle 12 outgoing radiation 14 is used.
- the exhaust gas 32 is an example of a measurement gas.
- the sample gas can also be another gas or gas mixture, for example room air.
- Figure 5 shows a second embodiment of the second part 16.2 of
- the second embodiment differs from the first embodiment initially in that the optical device 36 illuminates the beam splitter 38 with collided laser light 10. In this case
- the optical device 36 a further optical element 44 which in the beam path of the laser light 10 between the
- Laser module 18 and the beam splitter 38 is arranged and is adapted to parallel outgoing from the laser module 18 laser light 10 and directed to the beam splitter 38.
- the further optical element 44 is preferably a lens 46.
- the laser light 10 emanating from the laser module 18 is parallelized with the further optical element 44 and propagates through the beam splitter 38 to the first focusing optical element 20.
- the first focusing optical element 20 focuses the laser light 10 into the first spot 22.
- the heated particle In the first spot 22 outgoing radiation 14 is also directed here via the beam splitter 38 in the beam path leading to the detector 26.
- the optical device 36 has in this embodiment, a second focusing optical element 48 which is arranged in an emanating from the beam splitter 38 beam path of the radiation 14 and is adapted to incident from the beam splitter 38 forth radiation 14 in to focus the second spot 40.
- the second focusing optical element 48 is preferably a lens 50.
- a wavelength-selective optical filter 52 may be arranged, which for the
- FIG. 6 shows a further embodiment of one with not completely parallelized
- This further embodiment has an optical device 36 which operates with a not completely parallel aligned beam path.
- the further optical element 44 which is arranged between the laser module 18 and the beam splitter 38, reduces the aperture angle of the laser light 10 without aligning the laser light completely parallel thereto.
- focussing optical element 20 focuses laser light 10 emanating from the beam splitter 38 into the first spot 22 and is directed from the first spot 22 incident radiation 14 on the beam splitter 38. It reduces the
- the beam splitter 38 directs incident radiation 14 from the first focusing optical element 20 onto the second focusing optical element 48.
- the second focusing optical element 48 introduces the temperature radiation incident from the beam splitter 38 into the second spot 40.
- FIG. 7 shows, as already shown in FIG. 4, an exemplary embodiment of a second part 16.2 of a particle sensor 16 which operates with beam paths that are not completely parallelized.
- a third optical element 53 in the beam path behind the second spot 40, ie between the pinhole and the detector 26, a third optical element 53 in the beam path of the radiation 14.
- a fourth optical element 54 is arranged which focuses the radiation 14 incident from the third optical element 53 on the detector 26.
- the two optical elements 53 and 54 are preferably realized as lenses.
- the third optical element 53 re-parallelizes the radiation 14 emanating from the second spot 40, while the fourth optical element 54 finally focuses the radiation 14 onto the detector 26, which is now arranged a total of some distance behind the aperture plate.
- optical device can be constructed with only one, with two or also with more than two focusing optical elements such as lenses or mirrors.
- FIG. 8 shows a further exemplary embodiment. This embodiment corresponds largely with respect to its parallel beam path
- Embodiments is that the second spot 40 is not limited here by a pinhole. Instead, the detector 26 is arranged directly in the second spot 40, or arranged so that the second spot 40 is located on the radiation-sensitive detector surface and is limited by this. In this case, the radiation-sensitive detector surface has the function of the pinhole. Temperature radiation that is not sensitive to this radiation Detector surface falls, does not contribute to the measurement signal and is spatially filtered out in this way. For efficient signal filtering, the
- Laser module 18 and detector 26 are reversed.
- the beam splitter 38, or the dichroic mirror, must then correspondingly have a reverse functionality. He should then have full reflection for the exciting laser light 10 and full transmission for the Lll signal forming temperature radiation.
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
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- Biomedical Technology (AREA)
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- Investigating Or Analysing Materials By Optical Means (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018203301.3A DE102018203301A1 (de) | 2018-03-06 | 2018-03-06 | Mit Laser induzierter Inkandeszenz arbeitender Partikelsensor mit einer konfokalen Anordnung eines Laserspots und eines Temperaturstrahlungsspots |
PCT/EP2019/053810 WO2019170393A1 (de) | 2018-03-06 | 2019-02-15 | Mit laser induzierter inkandeszenz arbeitender partikelsensor mit einer konfokalen anordnung eines laserspots und eines temperaturstrahlungsspots |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3762704A1 true EP3762704A1 (de) | 2021-01-13 |
Family
ID=65516534
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP19706485.0A Pending EP3762704A1 (de) | 2018-03-06 | 2019-02-15 | Mit laser induzierter inkandeszenz arbeitender partikelsensor mit einer konfokalen anordnung eines laserspots und eines temperaturstrahlungsspots |
Country Status (7)
Country | Link |
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US (1) | US11467078B2 (ko) |
EP (1) | EP3762704A1 (ko) |
JP (1) | JP6997336B2 (ko) |
KR (1) | KR20200126384A (ko) |
CN (1) | CN111819431A (ko) |
DE (1) | DE102018203301A1 (ko) |
WO (1) | WO2019170393A1 (ko) |
Families Citing this family (3)
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DE102020206921A1 (de) | 2020-06-03 | 2021-12-09 | Robert Bosch Gesellschaft mit beschränkter Haftung | Partikelzahlsensor |
CN113552042A (zh) * | 2021-07-21 | 2021-10-26 | 乐金显示光电科技(中国)有限公司 | 一种湿法刻蚀设备及其管理方法 |
DE102022210612A1 (de) | 2022-10-07 | 2024-04-18 | Robert Bosch Gesellschaft mit beschränkter Haftung | Partikelsensor |
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US5920388A (en) * | 1996-10-15 | 1999-07-06 | Research Electro-Optics, Inc. | Small particle characteristic determination |
CA2272255C (en) * | 1998-05-22 | 2005-05-10 | David R. Snelling | Absolute light intensity measurements in laser induced incandescence |
JP4204045B2 (ja) * | 2003-11-21 | 2009-01-07 | 三井造船株式会社 | 粒子分布測定装置 |
US10386283B2 (en) * | 2004-03-06 | 2019-08-20 | Michael Trainer | Methods and apparatus for determining particle characteristics by utilizing force on particles |
GB2429058B (en) * | 2004-03-06 | 2008-12-03 | Michael Trainer | Method and apparatus for determining the size and shape of particles |
CN100447555C (zh) * | 2004-04-07 | 2008-12-31 | 中国科学院安徽光学精密机械研究所 | 大气悬浮颗粒物的激光信号实时连续提取方法 |
CN101438146B (zh) * | 2006-04-04 | 2014-12-10 | 神谷来克斯公司 | 高灵敏标志物分析和分子检测的方法和组合物 |
GB0801375D0 (en) * | 2008-01-25 | 2008-03-05 | Secr Defence | Fluid-borne particle detector |
GB2459452A (en) | 2008-04-22 | 2009-10-28 | Rolls Royce Plc | Continuous wave laser induced incandescence detector |
TW201017149A (en) * | 2008-08-06 | 2010-05-01 | Invitrox Inc | Use of focused light scattering techniques in biological applications |
JP2010085352A (ja) * | 2008-10-02 | 2010-04-15 | Sonac Kk | 微粒子の計測方法 |
US20100220315A1 (en) * | 2009-02-27 | 2010-09-02 | Beckman Coulter, Inc. | Stabilized Optical System for Flow Cytometry |
TW201222009A (en) * | 2010-05-21 | 2012-06-01 | Corning Inc | Systems and methods for reducing speckle using diffusing surfaces |
DE102011017772A1 (de) * | 2011-04-29 | 2012-10-31 | Robert Bosch Gmbh | Sensorvorrichtung zur Erfassung eines Parameters eines strömenden fluiden Mediums |
DE102013004371B3 (de) * | 2013-03-12 | 2013-12-05 | Rwth Aachen | Verfahren und Vorrichtung zur laserunterstützten Bearbeitung mit dynamischer Kompensation feldvarianter lateraler chromatischer Aberration bei der Prozessbeobachtung |
US9377400B2 (en) * | 2014-03-31 | 2016-06-28 | Redshift Systems Corporation | Motion modulation fluidic analyzer system |
JP6373486B2 (ja) * | 2015-12-28 | 2018-08-15 | 株式会社プロジェクトKbf | ゲル粒子測定方法及びその装置 |
US10024260B2 (en) * | 2016-05-31 | 2018-07-17 | Ford Global Technologies, Llc | System for sensing particulate matter |
-
2018
- 2018-03-06 DE DE102018203301.3A patent/DE102018203301A1/de active Pending
-
2019
- 2019-02-15 JP JP2020546411A patent/JP6997336B2/ja active Active
- 2019-02-15 KR KR1020207025712A patent/KR20200126384A/ko not_active Application Discontinuation
- 2019-02-15 WO PCT/EP2019/053810 patent/WO2019170393A1/de unknown
- 2019-02-15 EP EP19706485.0A patent/EP3762704A1/de active Pending
- 2019-02-15 CN CN201980017136.4A patent/CN111819431A/zh active Pending
- 2019-02-15 US US16/966,374 patent/US11467078B2/en active Active
Also Published As
Publication number | Publication date |
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CN111819431A (zh) | 2020-10-23 |
DE102018203301A1 (de) | 2019-09-12 |
JP2021515891A (ja) | 2021-06-24 |
US20200371009A1 (en) | 2020-11-26 |
WO2019170393A1 (de) | 2019-09-12 |
US11467078B2 (en) | 2022-10-11 |
JP6997336B2 (ja) | 2022-01-17 |
KR20200126384A (ko) | 2020-11-06 |
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