EP3754200B1 - Scroll vacuum pump and assembly method - Google Patents
Scroll vacuum pump and assembly method Download PDFInfo
- Publication number
- EP3754200B1 EP3754200B1 EP20200624.3A EP20200624A EP3754200B1 EP 3754200 B1 EP3754200 B1 EP 3754200B1 EP 20200624 A EP20200624 A EP 20200624A EP 3754200 B1 EP3754200 B1 EP 3754200B1
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- European Patent Office
- Prior art keywords
- pump
- scroll pump
- component
- accordance
- spiral
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Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/10—Outer members for co-operation with rotary pistons; Casings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/5813—Cooling the control unit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2230/00—Manufacture
- F04C2230/60—Assembly methods
- F04C2230/605—Balancing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/805—Fastening means, e.g. bolts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/18—Pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/19—Temperature
Definitions
- the present application relates to the improvement of vacuum pumps, in particular scroll pumps, and manufacturing processes for the same.
- a scroll pump is assumed with an electronics housing in which one or more electronic components are arranged. It is an object of the invention to provide good heat dissipation from the electronic components or good cooling. This object is achieved in particular in that a separate chamber, in which the electronic component is encapsulated, is provided within the electronics housing for at least one electronic component.
- the chamber also shields the electronic components, in particular from thermal radiation and electromagnetic influences.
- the separate chamber enables relatively little potting material to be used, which is often expensive.
- the electronics housing can preferably be made of metal.
- the potting material used for potting is designed in particular to be thermally conductive and / or electrically insulating.
- several separate chambers can also be provided.
- At least one electronic component is cast in each of the several chambers.
- At least one separate chamber is provided in which no electronic component is encapsulated.
- an electronics housing can be designed identically, for example, for different pumps, in particular a series, with separate chambers being provided for different electronic components which are or are not built into the chambers depending on the type of pump.
- a kind of modular system can thus be implemented, which enables considerable cost advantages in production.
- a scroll pump is assumed. It is an objective to simplify the application of the scroll pump in a vacuum system. This object is achieved in particular in that the pump comprises an integrated pressure sensor.
- a vacuum system usually already includes a pressure sensor, for example in a vacuum chamber.
- the pressure sensor By integrating the pressure sensor in the scroll pump, it can now be operated largely independently and without a complex connection to the pressure sensor of the vacuum system. Conversely, there is no need for an additional pressure sensor in the vacuum system, for example.
- the integrated pressure sensor enables the scroll pump to monitor itself and this does not have to be carried out using a complex process control system. In particular, a state of wear of the pump can be monitored as a function of a measured pressure.
- the integrated pressure sensor can also ensure increased operational reliability. For example, if the pressure in the scroll pump is too high, the high vacuum pump can be switched off and / or interconnected valves can be closed or similar measures can be taken. The high vacuum pump can thus be reliably protected against operation at excessively high pressure.
- the pressure sensor can preferably be integrated into a controller for the scroll pump and / or a vacuum system.
- the scroll pump or the vacuum system can thus be better controlled or regulated, on the basis of the now known pressure in the scroll pump.
- the pressure sensor is provided for measuring a suction pressure of the pump or a pressure between two pump-active spiral walls or between two spiral walls in a pump-active spiral section. Both allow an even more precise monitoring of the pumping process and a wear condition of the pump, in particular a sealing element such as a tip seal, or the spiral walls.
- the pressure sensor is screwed into a component of the scroll pump.
- a blind plug can simply be provided, for example, if an integrated pressure sensor is not absolutely necessary for the user's process.
- an integrated pressure sensor can easily be retrofitted in this case.
- the component into which the pressure sensor is screwed can be, for example, a housing element and / or a fixed spiral component.
- the pressure sensor can be screwed axially into a fixed spiral component.
- the pressure sensor is arranged in a cooling air flow of a cooling device, for example a fan, of the pump.
- the pressure sensor can thus be cooled directly in an advantageous manner, which improves its service life and measurement accuracy.
- the pressure sensor can preferably be arranged at least essentially at the beginning of the cooling air flow, namely adjacent to a fan and / or within an air guide hood.
- a third aspect of the invention is based on a method for assembling a scroll pump with the structural features of claim 1, which an eccentric shaft for the eccentric
- a movable spiral component of the pump comprises, in which a plurality of counterweights of different types are each provided for attachment to an eccentric shaft of a scroll pump of a certain type. It is a task to be able to carry out the assembly particularly reliably.
- This object is achieved by a method according to claim 14, and in particular in that the eccentric shaft, the counterweights and / or another component of the pump, for example a pump housing, are dimensioned so that only a certain type of counterweight at a certain fastening position can be mounted on the eccentric shaft.
- not mountable includes that a counterweight can be attached, but further mounting, for example inserting the shaft into a pump housing, is not completely possible. So the fitter realizes that something is wrong because he cannot complete the assembly. Correct assembly is hereby ensured in a particularly simple manner. “Not mountable” can also mean that the balance weight cannot lie flat against the eccentric shaft with a contact surface provided on the balance weight, for example because this is prevented by a shoulder on the shaft. In general, for example, a counterweight of the wrong type cannot be brought into full contact with the eccentric shaft. In general, for example, an eccentric shaft with an installed counterweight of the wrong type cannot be completely inserted into a pump housing of the pump.
- the eccentric shaft and / or the further component collide with counterweights of at least one first type when an attempt is made to assemble it.
- the first type is a wrong type for the eccentric shaft in question.
- the eccentric shaft and / or the further component has a projection and / or shoulder which collides with counterweights of at least one first type when an attempt is made to assemble them. This prevents incorrect assembly in a particularly simple manner.
- a fourth aspect of the invention is based on a scroll pump with a pump body, the inside of which delimits a pump chamber and on the outside of which a valve for controlling the supply of a ballast gas is arranged into the pump chamber, the valve having an actuating handle which is rotatably connected via at least one fastening screw to a static element of the valve and / or fixedly connected to a rotatable element of the valve, the fastening screw through a hole in the operating handle is screwed into the static element or the rotatable element. It is an object of the invention to extend the service life and / or a maintenance interval of the valve and / or at least one of its components. This task is achieved in particular by
- the cover prevents or at least reduces the penetration of dirt into the bore and ultimately into function-sensitive areas.
- the valve can for example have an, in particular axially, compressed O-ring as a sealing means.
- O-ring When the valve is actuated, a relative movement is exerted on the O-ring. If dirt, for example particles, gets onto the sliding surface of the O-ring, this can lead to premature failure of the O-ring. This is reliably reduced or prevented by the cover.
- the pump body can be, for example, a static spiral component and / or a housing component.
- the cover can be inserted into the operating handle, for example.
- the cover can be inserted into the or into a bore.
- the cover can be held by an interference fit on the actuating handle, in particular in the bore.
- the cover can, for example, have one or more projections, for example in the form of a pin.
- the cover is inserted into at least two bores and / or that the cover closes at least one bore into which it is not inserted.
- the actuating handle has a base element made of metal and a plastic section at least in an area that can be gripped for the purpose of manual actuation. This ensures good corrosion resistance and, at the same time, low manufacturing costs. Furthermore, the plastic section remains cooler and can be operated better due to the limited heat conduction compared to metal.
- the base element can be made of stainless steel, for example. This can be overmolded with plastic, for example.
- the base element can, for example, comprise a check valve and / or a connection thread.
- a check valve for example, can be integrated in the operating handle.
- the gas ballast valve can be designed in particular in two stages.
- an inlet and / or a connection for the ballast gas can be provided in the actuating handle.
- a fifth aspect of the invention is based on a scroll pump with a fan whose speed is controllable for cooling the pump. It is a task to design the cooling particularly needs-based and / or to reduce the noise emission of the fan. This object is achieved in particular in that it has a temperature sensor and a control device which is designed to regulate the speed of the fan as a function of a power consumption of a drive of the pump and a temperature measured by the temperature sensor.
- the measured temperature can preferably be a temperature in the pump, for example a pump component and / or a space in the pump, for example a suction or pumping space.
- the regulation is performed as a function of a temperature of a motor, a motor winding, a drive or power electronics, a pump body and / or a housing of the pump takes place.
- these temperature values can be measured, for example, by a plurality of temperature sensors, or a plurality of temperature sensors can generally be provided.
- a first threshold value of the temperature is defined, the regulation only taking place at a measured temperature above the first threshold value and / or the speed of the fan being kept constant at zero or a minimum speed below the first threshold value.
- the sound emission of the fan can be kept low when the need for cooling is low, namely when the measured temperature is low.
- this allows the pump to warm up quickly to the desired operating temperature after it has been switched on. This is advantageous, for example, because the gap dimensions between the spirals are dependent on thermal expansion of the components and are therefore only optimal within certain operating temperature ranges.
- the embodiment thus enables an advantageous pump performance to be achieved quickly.
- a rapid increase in temperature improves compatibility with condensing media.
- the first threshold value can preferably be at least 40.degree. C. and / or at most 60.degree. C., in particular about 50.degree.
- the minimum speed is generally lower than a maximum speed, in particular significantly lower, is in particular less than 30%, in particular less than 20%, in particular less than 10% of the maximum speed.
- a second threshold value for the temperature is defined, the fan speed being kept constant at a maximum speed at a measured temperature above the second threshold value. This ensures in a simple way at high temperatures that the maximum cooling capacity is achieved. The cooling can thus be carried out as required in a simple manner.
- the embodiment with the second threshold value is independent of the embodiment with the first threshold value and vice versa. However, these can be advantageously combined.
- the designation “second” threshold value is chosen only for ease of reference and does not require that a “first” threshold value is also defined.
- the threshold values described above can be different for the case that several temperature sensors are provided, for example for the several temperature sensors.
- the control device can, for example, be designed to reduce a drive power of the pump as a function of a temperature of the vacuum pump measured by a temperature sensor. This function can also be referred to as "derating”. It can be provided, for example, that the fan is set to its maximum speed when a derating condition is met and / or when the pump is in a derating state, that is, when the drive power is reduced.
- the speed of the fan can preferably be controlled by means of pulse width modulation (PWM).
- PWM pulse width modulation
- a maximum speed of the fan can be adjustable, for example. For example, to increase water vapor tolerance, it can be advantageous to reduce the maximum speed of the fan.
- a sixth aspect of the invention is based on a scroll pump comprising an electrically driven fan and an air guide hood. It is an object of the invention to provide an electrical connection of the fan to a supply connection particularly reliably, in particular for reliable for a long time. This object is achieved in particular in that a conductor, preferably a cable, leads from the fan, preferably through the air guide hood, to a supply connection for the fan, the conductor being connected to the supply connection via a preferably detachable electrical connector, preferably a plug is connected, wherein the connector is separated from an air flow path defined by the air guide hood by means of a partition.
- the connector can preferably be arranged at least partially within the air guide hood.
- the partition can, for example, be connected in one piece to the air guide hood.
- Ambient air which can also contain dirt and dust, is sucked in via the fan and guided along a defined air flow path.
- the partition wall prevents the sucked-in impurities or dust from being able to penetrate to the connector and, in particular, subsequently not to penetrate into an electronics housing of the pump. Rather, the partition has the effect that the sucked-in air is merely guided past the connector at a distance.
- the fan can preferably be arranged on the air guide hood, in particular fastened to it.
- the connector can preferably be designed to be detachable.
- the conductor in particular the cable, is led from the connector through a recess in the partition.
- the recess can for example be a notch, which can preferably be V-shaped.
- Another embodiment provides that the recess is arranged offset in the circumferential direction relative to the connector. As a result, a path from the recess to the connector is lengthened, so that it passes through the recess Contaminants have to travel a longer distance to the connector and thus the likelihood of them reaching the connector is reduced. In this way, a labyrinth effect is realized in a simple manner.
- a seventh aspect of the invention is based on a scroll pump comprising a spiral component which is stationary during operation and which is detachably connected to a housing element of the pump, for example from FIG US2017 / 211390 A1 known. It is an object of the invention to simplify detachment of the spiral component from the housing element. This object is achieved by a scroll pump according to claim 1, and in particular in that at least one forcing thread is provided on the spiral component and / or on the housing element for releasing the spiral component from the housing element, preferably with two forcing threads arranged radially opposite one another.
- the spiral component By means of the forcing thread, the spiral component can be pressed off the housing element in a simple and defined manner and thus released.
- a flat surface or a countersink of the other component can preferably rest on the forcing thread or be assigned to it.
- forcing threads can also be provided, which are preferably distributed uniformly over the circumference and / or can be arranged radially opposite one another. This allows the spiral component to be released particularly evenly. Thus, for example, tilting can be avoided, as could occur, for example, without a forcing thread when loosening a spiral component which is in contact with the housing element with a transition fit. Any sealants that may be present could also jam or block.
- a component adjacent to the spiral component and / or the housing element is designed in such a way that it would collide with a screw head of a forcing screw possibly screwed into the forcing thread, so that the component would not be completely mountable. In this way, incorrect assembly can be avoided in a simple manner, because it is ensured that no screw is screwed into the forcing thread which, for example, could prevent the spiral component from resting correctly on the housing element.
- the component can in particular be an air guide hood.
- a projection and / or a dome can be provided for collision with the screw head.
- the Fig. 1 shows a vacuum pump designed as a scroll pump 20.
- This comprises a first housing element 22 and a second housing element 24, the second housing element 24 having a pump-active structure, namely a spiral wall 26.
- the second housing element 24 thus forms a stationary spiral component of the scroll pump 20.
- the spiral wall 26 acts with a spiral wall 28 a movable spiral component 30 together, the movable spiral component 30 being eccentrically excited via an eccentric shaft 32 to generate a pumping action.
- a gas to be pumped is conveyed from an inlet 31, which is defined in the first housing element 22, to an outlet 33, which is defined in the second housing element 24.
- the eccentric shaft 32 is driven by a motor 34 and supported by two roller bearings 36. It comprises an eccentric pin 38 which is arranged eccentrically to its axis of rotation and which transmits its eccentric deflection to the movable spiral component 30 via a further roller bearing 40.
- an in Fig. 1 The left-hand end of a corrugated bellows 42 is fastened, the right-hand end of which is fastened to the first housing element 22. The left-hand end of the corrugated bellows 42 follows the deflection of the movable spiral component 30.
- the scroll pump 20 comprises a fan 44 for generating a flow of cooling air.
- an air guide hood 46 is provided, to which the fan 44 is also attached.
- the air guide hood 46 and the housing elements 22 and 24 are shaped in such a way that the cooling air flow essentially flows around the entire pump housing and thus achieves a good cooling performance.
- the scroll pump 20 further comprises an electronics housing 48 in which a control device and power electronics components for driving the motor 34 are arranged.
- the electronics housing 48 also forms a base for the pump 20. Between the electronics housing 48 and the first housing element 22, a channel 50 is visible, through which an air flow generated by the fan 44 is guided along the first housing element 22 and also the electronics housing 48, so that both are effectively cooled will.
- the electronics housing 48 is in Fig. 2 illustrated in more detail. It comprises several separate chambers 52. Electronic components can be encapsulated in these chambers 52 and are therefore advantageously shielded. Preferably, the smallest possible amount of the potting material can be used when potting the electronic components. For example, the potting material can first be introduced into the chamber 52 and then the electronic component can be pressed in.
- the chambers 52 can preferably be designed in such a way that different variants of the electronic components, in particular different equipping variants of a circuit board, can be arranged in the electronics housing 48 and / or can be encapsulated. For certain variants, individual chambers 52 can also remain empty, that is to say have no electronic components. In this way, a so-called modular system for different types of pumps can be implemented in a simple manner.
- the potting material can in particular be designed to be thermally conductive and / or electrically insulating.
- a plurality of walls or ribs 54 are formed which define a plurality of channels 50 for guiding a flow of cooling air.
- the chambers 52 also enable particularly good heat dissipation from the electronic components arranged in them, in particular in connection with a heat-conducting potting material, and to the ribs 54. The electronic components can thus be cooled particularly effectively and their service life is improved.
- FIG. 3 the scroll pump 20 is shown in perspective as a whole, but the air guide hood 46 is hidden, so that in particular the fixed spiral component 24 and the fan 44 are visible.
- a plurality of recesses 56 arranged in a star shape are provided on the fixed spiral component 24, each of which defines ribs 58 arranged between the recesses 56.
- the cooling air flow generated by the fan 44 leads through the recesses 56 and past the ribs 58 and thus particularly cools the stationary spiral component 24 effective.
- the cooling air flow first flows around the stationary spiral component 24 and only then the first housing element 22 or the electronics housing 48. This arrangement is particularly advantageous since the active pumping area of the pump 20 generates a lot of heat due to the compression during operation and is therefore primarily cooled here .
- the pump 20 comprises a pressure sensor 60 integrated into it. This is arranged within the air guide hood 46 and screwed into the stationary spiral component 24.
- the pressure sensor 60 is connected to the electronics housing 48 and a control device arranged therein via a cable connection, which is only partially shown.
- the pressure sensor 60 is integrated into the control of the scroll pump 20.
- the motor 34 shown in Fig. 1 is visible, can be controlled as a function of a pressure measured by the pressure sensor 60.
- the high vacuum pump can only be switched on if the pressure sensor 60 measures a sufficiently low pressure. In this way, the high vacuum pump can be protected from damage.
- Fig. 4 shows the pressure sensor 60 and its arrangement on the fixed spiral component 24 in a cross-sectional view.
- a channel 62 is provided for the pressure sensor 60, which in this case opens into a non-pumping external area between the spiral walls 26 and 28 of the stationary or movable spiral components 24 and 30.
- the pressure sensor thus measures a suction pressure of the pump.
- a pressure between the spiral walls 26 and 28 can also be measured in an active pumping area.
- intermediate pressures can also be measured, for example.
- the pressure sensor 60 allows, for example via the determination of a compression, in particular a recognition of a wear condition of the pump-active components, in particular a sealing element 64 also referred to as a tip seal.
- the measured suction pressure can also be used to regulate the pump (including the pump speed).
- a suction pressure can be specified by the software and a suction pressure can be set by varying the pump speed. It is also conceivable that, depending on the measured pressure, an increase in pressure caused by wear can be compensated for by increasing the speed. This means that a tip seal change can be postponed or longer change intervals can be implemented.
- the data from the pressure sensor 60 can therefore generally be used, for example, to determine wear, for situational control of the pump, for process control, etc.
- the pressure sensor 60 can, for example, be provided optionally. Instead of the pressure sensor 60, a blind plug for closing the channel 62 can be provided, for example. A pressure sensor 60 can then be retrofitted, for example, if necessary. Particularly with regard to retrofitting, but also generally advantageous, it can be provided that the pressure sensor 60 is automatically recognized when it is connected to the control device of the pump 20.
- the pressure sensor 60 is arranged in the cooling air flow of the fan 44. As a result, it is also advantageously cooled. This also has the consequence that no special measures have to be taken for a higher temperature resistance of the pressure sensor 60 and consequently a cost-effective sensor can be used.
- the pressure sensor 60 is arranged in particular in such a way that the external dimensions of the pump 20 are not increased by it and the pump 20 consequently remains compact.
- the movable spiral component 30 is shown in different views.
- the spiral structure of the spiral wall 28 is particularly clearly visible.
- the spiral component 30 comprises a base plate 66, from which the spiral wall 28 extends.
- FIG Fig. 6 A side of the base plate 66 facing away from the spiral wall 28 is shown in FIG Fig. 6 visible.
- the base plate includes, among other things, several fastening recesses, for example for fastening the bearing 40 and the corrugated bellows 42, which are shown in FIG Fig. 1 are visible.
- the holding projections 68 are provided on the outside of the base plate 66.
- the holding projections 68 extend radially outward.
- the holding projections 68 all have the same radial height.
- a first intermediate section 70 of the circumference of the base plate 66 extends between two of the holding projections 68.
- This first intermediate section 70 has a greater radial height than a second intermediate section 72 and than a third intermediate section 74.
- the first intermediate section 70 is an outermost 120 ° section the spiral wall 28 arranged opposite.
- the base plate 66 and the spiral wall 28 are preferably manufactured from a solid material so as to be tensioned together, i. H. the spiral wall 28 and the base plate 66 are formed in one piece.
- the spiral component 30 can be clamped directly on the holding projections 68.
- the in Fig. 6 The side shown of the base plate 66 are machined, in particular the fastening recesses are introduced will.
- the spiral wall 28 can also be produced from the solid material by cutting within the framework of this clamping.
- the spiral component 30 can be clamped, for example, with a clamping device 76, as shown in FIG Fig. 7 is shown.
- a clamping device 76 has a hydraulic three-jaw chuck 78 for direct contact with the three retaining projections 68.
- the clamping device 76 has a continuous recess 80 through which a tool access to the spiral component 30, in particular to the in Fig. 6 shown side of the same, is enabled. Machining operations can thus be carried out from both sides during a clamping, in particular at least one finishing machining of the spiral wall 28 and the introduction of fastening recesses.
- the contour of the holding projections 68 and the clamping pressure of the clamping device 76 are preferably selected so that no critical deformations of the spiral component 30 take place.
- the three holding projections 68 are preferably selected in such a way that the outer dimension, that is to say the maximum diameter of the spiral component 30, is not increased. Thus, on the one hand, material and, on the other hand, machining volume can be saved.
- the holding projections 68 are in particular designed and / or arranged in such an angular position that the screw connection of the corrugated bellows 42 is accessible.
- the number of screwing points of the corrugated bellows 42 is preferably not the same as the number of retaining projections 68 on the movable spiral component 30.
- FIG. 9 A similar section of the image is shown in Fig. 9 shown for another scroll pump, which is preferably the same series of pump 20 of the Fig. 1 listened to.
- the the Fig. 9 The underlying pump has, in particular, different dimensions and therefore requires a different balance weight 82.
- the eccentric shafts 32, the counterweights 82 and the housing elements 22 are dimensioned such that only one particular type of the two types of counterweight 82 shown can be mounted on the eccentric shaft 32 at the fastening position shown.
- the balance weights 82 are in the Figures 8 and 9 dimensioned together with certain dimensions of the installation space provided for them in order to make it clear that the balance weight 82 of the Fig. 9 cannot be mounted on the eccentric shaft 32 and vice versa. It goes without saying that the dimensions given are given purely by way of example.
- the balance weight 82 of the Fig. 8 is made shorter in the corresponding direction, namely 9 mm long, so it can be installed without any problems.
- the balance weight 82 of the Fig. 9 each measured from the mounting hole has a longitudinal extension of 11 mm.
- the balance weight 82 is the Fig. 9 not on the eccentric shaft 32 of the Fig. 8 mountable, since the shaft shoulder 86 collides with the balance weight 82 during an attempted installation or since the balance weight 82 of the Fig. 9 not completely in contact with the eccentric shaft 82 of the Fig. 8 can be brought. Because the balance weight 82 of the Fig.
- a distance in the longitudinal direction between the fastening bore 84 and a housing shoulder 88 is 17.5 mm.
- the balance weight 82 of the Fig. 8 with its extension of 21.3 mm when the eccentric shaft 32 is inserted, the Fig. 9 collide with the housing shoulder 88 so that complete assembly would not be possible. Incorrect assembly is initially possible, but is reliably detected.
- the extension of 21.3 mm would collide with the shaft shoulder 86, which is only arranged at a distance of 13.7 mm from the fastening bore 84.
- the balancing weights 82 are generally designed in such a way that confusion of the balancing weight with those of other sizes is avoided during assembly and / or during servicing.
- the counterweights are preferably attached using through bolts. Similar counterweights of different pump sizes are designed in such a way that the wrong counterweight is prevented from being installed due to adjacent shoulders on the shaft, the positions of the thread and through-hole of the counterweight and shoulders within the housing.
- a gas ballast valve 90 of the scroll pump 20 is shown. This is also shown in the overall illustration of the pump 20 in FIG Fig. 3 visible and arranged on the fixed spiral component 24.
- the gas ballast valve 90 comprises an actuating handle 92. This comprises a plastic body 94 and a base element 96, which is preferably made of stainless steel is made.
- the base element 96 comprises a through bore 98 which is provided on the one hand for connecting and introducing a ballast gas and on the other hand comprises a check valve 100.
- the bore 98 is also closed by means of a plug 102 in the illustrations.
- a filter can also be provided, for example, wherein the ballast gas can preferably be air and in particular enters the valve 90 directly via the filter.
- the operating handle 92 is fastened to a rotatable element 106 of the valve 90 with three fastening screws 104, which are arranged in a respective bore 108 and of which in the selected sectional view of FIG Fig. 11 only one is visible.
- the rotatable element 106 is rotatably fastened to the second housing element 24 with a fastening screw (not shown) that extends through a bore 110.
- valve 90 To actuate the valve 90, a torque applied manually to the actuating handle 92 is transmitted to the rotatable element 106 and the latter is thus rotated. Thus, the bore 98 comes into communication with an interior of the housing.
- Three switching positions are provided for the valve 90, namely those in Fig. 10 shown, which is a locking position, and each a right and left rotated position in which the bore 98 is in communication with different areas of the interior of the housing.
- the bores 108 and 110 are closed by a cover 112.
- the sealing effect of the gas ballast valve 90 is based on axially pressed O-rings. When the valve 90 is actuated, a relative movement is exerted on the O-rings. If dirt, such as particles, gets to the surface of an O-ring, this harbors the risk of premature failure.
- the cover 112 prevents dirt and the like from penetrating the screws of the handle 92.
- This cover 112 is attached via an interference fit of three centering elements. Specifically, the cover 112 has an insertion pin, not shown, for each bore 108, with which the cover 112 is held in the bores 108.
- the bores 108 and 110 and the fastening screws arranged therein are thus protected from contamination.
- the fastening screw (not shown) which is arranged in the bore 110 and which allows a rotary movement, the entry of contamination into the valve mechanism can thus be effectively minimized and the service life of the valve can be improved.
- the plastic handle with an overmolded stainless steel base part ensures good corrosion resistance and low manufacturing costs. Furthermore, the plastic of the handle remains cooler due to the limited heat conduction and is therefore easier to use.
- a speed control is preferably provided.
- the fan is controlled by means of PWM as a function of the power consumption and temperature of the power module, which is accommodated in the electronics housing 48, for example.
- the speed is set in the same way as the power consumption. The regulation is only permitted from a module temperature of 50 ° C. If the pump comes into a temperature range of possible derating (temperature-related power reduction), the maximum fan speed is automatically activated.
- This control enables a minimum noise level to be achieved when the pump is cold, that there is a lower noise level in the final pressure or at low load - corresponding to the pump noise - that optimal cooling of the pump is achieved with a simultaneously low noise level, and that before a temperature-related reduction in output, the maximum cooling output is ensured.
- the maximum fan speed can be adaptable, in particular depending on the situation. For example, to achieve a high level of water vapor tolerance, it can be expedient to reduce the maximum fan speed.
- FIG. 12 the movable scroll member 30 is partial and opposite Fig. 5 shown enlarged.
- the spiral wall 28 At its end facing away from the base plate 66 and facing a base plate of the fixed spiral component 24, not shown here, the spiral wall 28 has a groove 114 for inserting a sealing element 64, also not shown here, namely a so-called tip seal.
- a sealing element 64 also not shown here, namely a so-called tip seal.
- the arrangement in the operating state is, for example, in Fig. 4 clearly visible.
- the groove 114 is delimited outwardly and inwardly by two opposite side walls, namely by an inner side wall 116 and an outer side wall 118.
- the outer side wall 118 is made thicker than the inner side wall 116 in the first spiral section 120 and thicker than both side walls 116 and 118 in a different, second spiral section 122.
- the first spiral portion 120 extends from in Fig. 12 indicated location to the outer end of the spiral wall 28, as it is for example also in Fig. 5 is indicated.
- the first spiral section 120 extends here, for example, over approximately 163 °.
- the first spiral section 120 forms an outer end section of the spiral wall 28.
- the first spiral section 120 is at least partially, in particular completely, arranged in a non-pumping area of the spiral wall 28.
- the first spiral section 120 can at least substantially completely fill the non-pumping active area of the spiral wall 28.
- the first intermediate section 70 can preferably be arranged between two holding projections 68, which has a greater radial height than other intermediate sections 72 and 74, opposite the first spiral section 120. An imbalance introduced by the thicker side wall 118 can thus be compensated for by the greater weight of the first intermediate section 70.
- the movable spiral component should generally preferably have a low dead weight. Therefore, the spiral walls are generally made very thin. Furthermore, with thinner walls, the pump dimensions are smaller (significant outside diameter). As a result, the side walls of the tip seal groove are particularly thin. The ratio of the TipSeal wall thickness to the total spiral wall thickness is, for example, at most 0.17. Due to the tip seal groove, however, the spiral wall tip is very sensitive to impacts during handling, such as during assembly or when changing the tip seal. Light bumps, e.g. B. Also during transport, the side wall of the groove can be pushed inwards so that the tip seal can no longer be fitted.
- the groove has an asymmetrical wall thickness, in particular an outwardly local thickening of the spiral wall.
- This area is preferably not pump-active and can therefore be manufactured with a greater tolerance.
- a thickening of the spiral wall is preferably not necessary at other points of the component, since the wall is protected by protruding elements of the component.
- the air guide hood 46 shown defines an air flow as indicated by a dashed arrow 124.
- the fan 44 is connected to a control device in the electronics housing 48 via a cable (not shown) which runs through the air guide hood 46 and via a plug connection.
- This comprises a socket 126 and a plug 128.
- the socket 126 is mounted on the electronics housing 48 and / or attached to a circuit board arranged in the electronics housing 48.
- the socket 126 is, for example, also in the Fig. 2 and 3 visible.
- the plug 128 is connected to the fan 44 via the cable (not shown).
- the plug connection 126, 128 is separated from the air flow 124 by a partition 130.
- the air flow 124 which may contain dust or similar contaminants, for example, is thus kept away from the plug connection 126, 128.
- the plug connection 126, 128 itself is protected and, on the other hand, it is prevented that the dirt gets through the opening provided for the socket 126 in the electronics housing 48 into the latter and to the control device and / or power electronics.
- the air baffle 46 is in Fig. 14 shown separately and in perspective. Among other things, the partition 130 with the space defined behind it and provided for the plug 128 is visible.
- the partition 130 comprises a recess 132, designed here as a V-shaped notch, for the passage of a cable from the plug 128 to the fan 44.
- the partition 130 ensures that the air that is sucked in does not reach the electronics via the opening in the plug-in connector 126, 128.
- the fan cable is led through the V-shaped notch 132 laterally through the partition wall 130.
- the notch 132 is laterally offset to the connector 126, 128, creating a labyrinth effect and thus a further reduction in the leakage of cooling air to the connector 126, 128 can be achieved.
- a partition 130 within the air guide hood 46 also improves the air guidance in the channel 50 between the electronics housing 48 and the pump housing 22. There is less turbulence and back pressure for the fan 44.
- the Fig. 15 shows a contact area between the first housing element 22 and the second housing element or fixed spiral component 24 in a schematic sectional illustration.
- the second housing element 24 is partially inserted into the first housing element 22 with a transition fit 134. Sealing by means of an O-ring 136 is provided here.
- the transition fit 134 is also used, for example, to center the second housing element 24 with respect to the first housing element 22.
- the second housing element 24 For maintenance purposes, for example to replace the sealing element 64, the second housing element 24 has to be dismantled, for example. It can happen that the transition fit 134 or the O-ring 136 jam if the second housing element 24 is not pulled out just enough.
- a forcing thread 138 is provided to solve this problem.
- a second forcing thread can preferably also be provided at least essentially radially opposite. To loosen the second housing element 24 as straight and guided as possible, a screw can be screwed into the forcing thread 38 until the screw protrudes out of this and comes into contact with the first housing element 22. By screwing in further, the housing elements 22 and 24 are pressed away from one another.
- the fastening screws 142 provided for fastening the second housing element 24 to the first housing element 22 can be used for pressing off, as they are, for example, in FIGS Fig. 1 and 3 are designated.
- the forcing thread 138 preferably has the same thread type on, as provided for the fastening screws 142 fastening threads.
- a countersink 140 is provided on the second housing element 22, which is assigned to the forcing thread 138. If abrasion particles are carried out when the screw is screwed into the forcing thread 138, these collect in the depression 140. This prevents such abrasion particles from preventing the housing elements 22 and 24 from completely abutting one another, for example.
- the air guide hood 46 has at least one, in particular additional, in Fig. 14 The dome 144 shown, which allows the air guide hood 46 to be mounted only when the screws used for pressing, in particular the fastening screws 142, have been removed again.
- the air guide hood 46 with the dome 144 is designed in such a way that it would collide with a screw head of any forcing screw screwed into the forcing thread 138, so that the air guide hood 46 could not be fully assembled.
- the air guide hood 46 can only be installed with the jackscrews completely dismantled.
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Description
Die vorliegende Anmeldung betrifft die Verbesserung von Vakuumpumpen, insbesondere Scrollpumpen, und Herstellungsverfahren für solche.The present application relates to the improvement of vacuum pumps, in particular scroll pumps, and manufacturing processes for the same.
Nach einem ersten Aspekt der Erfindung wird von einer Scrollpumpe, mit einem Elektronikgehäuse ausgegangen, in dem eine oder mehrere Elektronikkomponenten angeordnet sind. Es ist eine Aufgabe der Erfindung, eine gute Wärmeabfuhr von den Elektronikkomponenten bzw. eine gute Kühlung bereitzustellen. Diese Aufgabe wird insbesondere dadurch gelöst, dass innerhalb des Elektronikgehäuses für wenigstens eine Elektronikkomponente eine gesonderte Kammer vorgesehen ist, in der die Elektronikkomponente vergossen ist.According to a first aspect of the invention, a scroll pump is assumed with an electronics housing in which one or more electronic components are arranged. It is an object of the invention to provide good heat dissipation from the electronic components or good cooling. This object is achieved in particular in that a separate chamber, in which the electronic component is encapsulated, is provided within the electronics housing for at least one electronic component.
Neben der besonders guten Wärmeabfuhr schirmt die Kammer die Elektronickomponente zusätzlich ab, insbesondere gegenüber Wärmestrahlung und elektromagnetischen Einflüssen. Zudem ermöglicht die gesonderte Kammer die Verwendung von relativ wenig Vergussmaterial, welches häufig teuer ist. Bevorzugt kann das Elektronikgehäuse aus Metall ausgebildet sein.In addition to particularly good heat dissipation, the chamber also shields the electronic components, in particular from thermal radiation and electromagnetic influences. In addition, the separate chamber enables relatively little potting material to be used, which is often expensive. The electronics housing can preferably be made of metal.
Das zum Vergießen verwendete Vergussmaterial ist insbesondere wärmeleitend und/oder elektrisch isolierend ausgebildet.The potting material used for potting is designed in particular to be thermally conductive and / or electrically insulating.
Es können z.B. auch mehrere gesonderte Kammern vorgesehen sein. Eine Ausführungsform sieht vor, dass in den mehreren Kammern jeweils wenigstens eine Elektronikkomponente vergossen ist. So lassen sich insbesondere verschiedene Elektronikkomponenten zuverlässig voneinander trennen, insbesondere voneinander abschirmen. Gleichzeitig wird eine vorteilhafte Wärmeabfuhr ermöglicht.For example, several separate chambers can also be provided. One embodiment provides that at least one electronic component is cast in each of the several chambers. In particular, different Reliably separate electronic components from one another, especially shield them from one another. At the same time, an advantageous heat dissipation is made possible.
Es kann beispielsweise und mit Vorteil vorgesehen sein, dass wenigstens eine gesonderte Kammer vorgesehen ist, in der keine Elektronikkomponente vergossen ist. Generell kann ein Elektronikgehäuses beispielsweise für verschiedene Pumpen, insbesondere einer Baureihe, identisch ausgelegt werden, wobei gesonderte Kammern für verschiedene Elektronikkomponenten bereitgestellt werden, welche abhängig von der Pumpenart in die Kammern eingebaut sind oder nicht. Insofern ist es vorteilhaft, wenigstens eine gesonderte Kammer bereitzuhalten, in welche eine Elektronikkomponente eingebaut werden kann, insbesondere vergossen werden kann, welche bei einer anderen Pumpenart Verwendung findet. Es lässt sich somit eine Art Baukastensystem realisieren, was erhebliche Kostenvorteile in der Herstellung ermöglicht.It can be provided, for example and advantageously, that at least one separate chamber is provided in which no electronic component is encapsulated. In general, an electronics housing can be designed identically, for example, for different pumps, in particular a series, with separate chambers being provided for different electronic components which are or are not built into the chambers depending on the type of pump. In this respect, it is advantageous to have at least one separate chamber ready in which an electronic component can be installed, in particular encapsulated, which is used in a different type of pump. A kind of modular system can thus be implemented, which enables considerable cost advantages in production.
Nach einem zweiten Aspekt der Erfindung wird von einer Scrollpumpe ausgegangen. Es ist eine Aufgabe, die Anwendung der Scrollpumpe in einem Vakuumsystem zu vereinfachen. Diese Aufgabe wird insbesondere dadurch gelöst, dass die Pumpe einen integrierten Drucksensor umfasst.According to a second aspect of the invention, a scroll pump is assumed. It is an objective to simplify the application of the scroll pump in a vacuum system. This object is achieved in particular in that the pump comprises an integrated pressure sensor.
Ein Vakuumsystem umfasst meist bereits einen Drucksensor, zum Beispiel in einer Vakuumkammer. Durch die Integration des Drucksensors in die Scrollpumpe kann diese nun weitgehend eigenständig und ohne aufwändige Verbindung zum Drucksensor des Vakuumsystems betrieben werden. Umgekehrt kann ein zusätzlicher Drucksensor im Vakuumsystem beispielsweise entfallen. Generell ermöglicht der integrierte Drucksensor, dass sich die Scrollpumpe selbst überwacht und dies nicht aufwendig durch ein Prozessleitsystem durchgeführt werden muss. So kann insbesondere ein Verschleißzustand der Pumpe abhängig von einem gemessenen Druck überwacht werden. Insbesondere für den Fall, dass die Scrollpumpe als Vorpumpe für eine Hochvakuumpumpe vorgesehen ist, kann durch den integrierten Drucksensor außerdem eine erhöhte Betriebssicherheit gewährleistet werden. So kann beispielsweise bei einem zu hohen Druck in der Scrollpumpe die Hochvakuumpumpe abgeschaltet und/oder zwischengeschaltete Ventile geschlossen werden oder ähnliche Maßnahmen ergriffen werden. Die Hockvakuumpumpe kann so zuverlässig vor einen Betrieb bei zu hohem Druck geschützt werden.A vacuum system usually already includes a pressure sensor, for example in a vacuum chamber. By integrating the pressure sensor in the scroll pump, it can now be operated largely independently and without a complex connection to the pressure sensor of the vacuum system. Conversely, there is no need for an additional pressure sensor in the vacuum system, for example. In general, the integrated pressure sensor enables the scroll pump to monitor itself and this does not have to be carried out using a complex process control system. In particular, a state of wear of the pump can be monitored as a function of a measured pressure. Especially in the event that the scroll pump is intended as a backing pump for a high vacuum pump, the integrated pressure sensor can also ensure increased operational reliability. For example, if the pressure in the scroll pump is too high, the high vacuum pump can be switched off and / or interconnected valves can be closed or similar measures can be taken. The high vacuum pump can thus be reliably protected against operation at excessively high pressure.
Vorzugsweise kann der Drucksensor in eine Steuerung der Scrollpumpe und/oder eines Vakuumsystems eingebunden sein. Die Scrollpumpe bzw. das Vakuumsystem können somit besser gesteuert bzw. geregelt werden, und zwar auf Basis des nun bekannten Drucks in der Scrollpumpe.The pressure sensor can preferably be integrated into a controller for the scroll pump and / or a vacuum system. The scroll pump or the vacuum system can thus be better controlled or regulated, on the basis of the now known pressure in the scroll pump.
Gemäß einer Ausführungsform ist vorgesehen, dass der Drucksensor zum Messen eines Ansaugdrucks der Pumpe oder eines Drucks zwischen zwei pumpaktiven Spiralwänden bzw. zwischen zwei Spiralwänden in einem pumpaktiven Spiralabschnitt vorgesehen ist. Beides ermöglicht eine noch genauere Überwachung des Pumpprozesses und eines Verschleißzustandes der Pumpe, insbesondere eines Dichtungselements, wie etwa eines Tip Seals, oder der Spiralwände.According to one embodiment it is provided that the pressure sensor is provided for measuring a suction pressure of the pump or a pressure between two pump-active spiral walls or between two spiral walls in a pump-active spiral section. Both allow an even more precise monitoring of the pumping process and a wear condition of the pump, in particular a sealing element such as a tip seal, or the spiral walls.
Bei einer weiteren vorteilhaften Ausführungsform ist der Drucksensor in ein Bauteil der Scrollpumpe eingeschraubt. Dies ermöglicht einerseits einen einfachen Aufbau und andererseits einen flexiblen Vertrieb der Scrollpumpe. Anstelle des integrierten Drucksensors kann beispielsweise einfach ein Blindstopfen vorgesehen sein, wenn für den Prozess des Anwenders kein integrierter Drucksensor unbedingt nötig ist. Gleichwohl lässt sich in diesem Fall ein integrierter Drucksensor auf einfache Weise nachrüsten. Das Bauteil, in welches der Drucksensor eingeschraubt ist, kann beispielsweise ein Gehäuseelement und/oder festes Spiralbauteil sein. Insbesondere kann der Drucksensor axial in ein festes Spiralbauteil eingeschraubt sein.In a further advantageous embodiment, the pressure sensor is screwed into a component of the scroll pump. This enables, on the one hand, a simple structure and, on the other hand, flexible distribution of the scroll pump. Instead of the integrated pressure sensor, a blind plug can simply be provided, for example, if an integrated pressure sensor is not absolutely necessary for the user's process. At the same time, an integrated pressure sensor can easily be retrofitted in this case. The component into which the pressure sensor is screwed can be, for example, a housing element and / or a fixed spiral component. In particular, the pressure sensor can be screwed axially into a fixed spiral component.
Gemäß einer Weiterbildung kann vorgesehen sein, dass der Drucksensor in einem Kühlluftstrom einer Kühleinrichtung, beispielsweise eines Lüfters, der Pumpe angeordnet ist. Der Drucksensor kann so auf vorteilhafte Weise direkt gekühlt werden, was seine Lebensdauer und Messgenauigkeit verbessert. Vorzugsweise kann der Drucksensor zumindest im Wesentlichen am Anfang des Kühlluftstromes, nämlich benachbart zu einem Lüfter und/oder innerhalb einer Luftleithaube angeordnet sein.According to a further development, it can be provided that the pressure sensor is arranged in a cooling air flow of a cooling device, for example a fan, of the pump. The pressure sensor can thus be cooled directly in an advantageous manner, which improves its service life and measurement accuracy. The pressure sensor can preferably be arranged at least essentially at the beginning of the cooling air flow, namely adjacent to a fan and / or within an air guide hood.
Grundsätzlich können zum Beispiel auch mehrere Drucksensoren vorgesehen sein, die in die Scrollpumpe integriert sind. Hierdurch können insbesondere Steuerung und Verschleißüberwachung noch weiter verbessert werden.In principle, for example, several pressure sensors that are integrated into the scroll pump can also be provided. In this way, control and wear monitoring in particular can be improved even further.
Nach einem dritten Aspekt der Erfindung wird von einem Verfahren zum Montieren einer Scrollpumpe mit den strukturellen Merkmalen von Anspruch 1 ausgegangen, welche eine Exzenterwelle zum exzentrischenAccording to a third aspect of the invention is based on a method for assembling a scroll pump with the structural features of claim 1, which an eccentric shaft for the eccentric
Erregen eines beweglichen Spiralbauteils der Pumpe umfasst, bei dem eine Mehrzahl an Ausgleichsgewichten unterschiedlicher Art jeweils zum Befestigen an einer Exzenterwelle einer Scrollpumpe einer bestimmten Art bereitgestellt werden. Es ist eine Aufgabe, die Montage besonders zuverlässig durchführen zu können. Diese Aufgabe wird durch ein Verfahren nach Anspruch 14 gelöst, und insbesondere dadurch, dass die Exzenterwelle, die Ausgleichsgewichte und/oder ein weiteres Bauteil der Pumpe, zum Beispiel ein Pumpengehäuse, so dimensioniert sind, dass an einer bestimmten Befestigungsposition nur eine bestimmte Art von Ausgleichsgewicht an der Exzenterwelle montierbar ist.Exciting a movable spiral component of the pump comprises, in which a plurality of counterweights of different types are each provided for attachment to an eccentric shaft of a scroll pump of a certain type. It is a task to be able to carry out the assembly particularly reliably. This object is achieved by a method according to claim 14, and in particular in that the eccentric shaft, the counterweights and / or another component of the pump, for example a pump housing, are dimensioned so that only a certain type of counterweight at a certain fastening position can be mounted on the eccentric shaft.
Somit kann eine Fehlmontage von Ausgleichsgewichten einer für die betreffende Pumpe falschen Art zuverlässig vermieden werden. Die Montage wird somit insgesamt zuverlässiger.In this way, incorrect installation of counterweights of the wrong type for the pump in question can be reliably avoided. The assembly is therefore more reliable overall.
Der Begriff "nicht montierbar" umfasst, dass ein Ausgleichsgewicht zwar befestigt werden kann, aber eine weitere Montage, beispielsweise ein Einstecken der Welle in ein Pumpengehäuse, nicht vollständig möglich ist. Der Monteur merkt also, dass etwas falsch ist, weil er die Montage nicht abschließen kann. Hierdurch wird auf besonders einfache Weise eine korrekte Montage sichergestellt. "Nicht montierbar" kann außerdem bedeuten, dass das Ausgleichsgewicht nicht flächig mit einer am Ausgleichsgewicht vorgesehenen Anlagefläche an der Exzenterwelle anliegen kann, beispielsweise weil dies durch einen Absatz an der Welle verhindert ist. Generell kann also zum Beispiel ein Ausgleichsgewicht einer falschen Art nicht mit der Exzenterwelle vollständig in Anlage bringbar sein. Generell kann zum Beispiel eine Exzenterwelle mit montiertem Ausgleichsgewicht einer falschen Art nicht vollständig in ein Pumpengehäuse der Pumpe einsteckbar sein.The term “not mountable” includes that a counterweight can be attached, but further mounting, for example inserting the shaft into a pump housing, is not completely possible. So the fitter realizes that something is wrong because he cannot complete the assembly. Correct assembly is hereby ensured in a particularly simple manner. “Not mountable” can also mean that the balance weight cannot lie flat against the eccentric shaft with a contact surface provided on the balance weight, for example because this is prevented by a shoulder on the shaft. In general, for example, a counterweight of the wrong type cannot be brought into full contact with the eccentric shaft. In general, for example, an eccentric shaft with an installed counterweight of the wrong type cannot be completely inserted into a pump housing of the pump.
Zum Beispiel kann vorgesehen sein, dass die Exzenterwelle und/oder das weitere Bauteil mit Ausgleichsgewichten wenigstens einer ersten Art bei einer versuchten Montage kollidiert. Die erste Art stellt dabei eine falsche Art für die betreffende Exzenterwelle dar.For example, it can be provided that the eccentric shaft and / or the further component collide with counterweights of at least one first type when an attempt is made to assemble it. The first type is a wrong type for the eccentric shaft in question.
Bei einigen Ausführungsformen weist die Exzenterwelle und/oder das weitere Bauteil einen Vorsprung und/oder Absatz auf, der mit Ausgleichsgewichten wenigstens einer ersten Art bei einer versuchten Montage kollidiert. Hierdurch ist eine Fehlmontage auf besonders einfache Weise verhindert.In some embodiments, the eccentric shaft and / or the further component has a projection and / or shoulder which collides with counterweights of at least one first type when an attempt is made to assemble them. This prevents incorrect assembly in a particularly simple manner.
Bei einem vierten Aspekt der Erfindung, der nicht beansprucht wird, wird ausgegangen von einer Scrollpumpe, mit einem Pumpenkörper, dessen Innenseite einen Pumpraum begrenzt und an dessen Außenseite ein Ventil zur Steuerung der Zufuhr eines Ballastgases in den Pumpraum angeordnet ist, wobei das Ventil einen Betätigungsgriff aufweist, der über wenigstens eine Befestigungsschraube mit einem statischen Element des Ventils drehbar und/oder mit einem drehbaren Element des Ventils fest verbunden ist, wobei die Befestigungsschraube durch eine Bohrung im Betätigungsgriff in das statische Element bzw. das drehbare Element eingeschraubt ist. Es ist eine Aufgabe der Erfindung, die Lebensdauer und/oder ein Wartungsintervall des Ventils und/oder wenigstens einer seiner Komponenten zu verlängern. Diese Aufgabe wird insbesondere dadurch gelöst,A fourth aspect of the invention, which is not claimed, is based on a scroll pump with a pump body, the inside of which delimits a pump chamber and on the outside of which a valve for controlling the supply of a ballast gas is arranged into the pump chamber, the valve having an actuating handle which is rotatably connected via at least one fastening screw to a static element of the valve and / or fixedly connected to a rotatable element of the valve, the fastening screw through a hole in the operating handle is screwed into the static element or the rotatable element. It is an object of the invention to extend the service life and / or a maintenance interval of the valve and / or at least one of its components. This task is achieved in particular by
dass ein Deckel vorgesehen ist der die Bohrung verschließt.that a cover is provided which closes the bore.
Durch den Deckel wird das Eindringen von Verschmutzungen in die Bohrung und schlussendlich in funktionssensible Bereiche verhindert oder zumindest verringert.The cover prevents or at least reduces the penetration of dirt into the bore and ultimately into function-sensitive areas.
Das Ventil kann beispielsweise einen, insbesondere axial, verpressten O-Ring als Dichtmittel aufweisen. Bei Betätigung des Ventils wird eine Relativbewegung auf den O-Ring ausgeübt. Gelangen Verschmutzungen, zum Beispiel Partikel, an die Gleitfläche des O-Rings, so kann dies zu einem frühzeitigen Ausfall des O-Rings führen. Durch den Deckel wird dies zuverlässig verringert oder verhindert.The valve can for example have an, in particular axially, compressed O-ring as a sealing means. When the valve is actuated, a relative movement is exerted on the O-ring. If dirt, for example particles, gets onto the sliding surface of the O-ring, this can lead to premature failure of the O-ring. This is reliably reduced or prevented by the cover.
Bei dem Pumpenkörper kann es sich zum Beispiel um ein statisches Spiralbauteil und/oder ein Gehäusebauteil handeln.The pump body can be, for example, a static spiral component and / or a housing component.
Der Deckel kann zum Beispiel in den Betätigungsgriff eingesteckt sein. Beispielsweise kann der Deckel in die oder eine Bohrung eingesteckt sein. Weiter generell beispielsweise kann der Deckel durch eine Übermaßpassung am Betätigungsgriff, insbesondere in der Bohrung, gehalten sein. Zum Einstecken kann der Deckel beispielsweise einen oder mehrere Vorsprünge, zum Beispiel in Form eines Zapfens, aufweisen.The cover can be inserted into the operating handle, for example. For example, the cover can be inserted into the or into a bore. Further generally, for example, the cover can be held by an interference fit on the actuating handle, in particular in the bore. For insertion, the cover can, for example, have one or more projections, for example in the form of a pin.
Es kann weiter vorgesehen sein, dass der Deckel in wenigstens zwei Bohrungen eingesteckt ist und/oder dass der Deckel wenigstens eine Bohrung verschließt, in die er nicht eingesteckt ist.It can further be provided that the cover is inserted into at least two bores and / or that the cover closes at least one bore into which it is not inserted.
Bei einer weiteren Ausführungsform weist der Betätigungsgriff ein Basiselement aus Metall und zumindest in einem zwecks manueller Betätigung anfassbaren Bereich einen Kunststoffabschnitt auf. Dies sorgt für eine gute Korrosionsbeständigkeit bei gleichzeitig niedrigen Herstellkosten. Des Weiteren bleibt der Kunststoffabschnitt aufgrund der gegenüber Metall eingeschränkten Wärmeleitung kühler bzw. lässt sich besser bedienen. Das Basiselement kann beispielsweise aus Edelstahl hergestellt sein. Dieses kann zum Beispiel mit Kunststoff umspritzt sein. Das Basiselement kann z.B. ein Rückschlagventil und/oder ein Anschlussgewinde umfassen.In a further embodiment, the actuating handle has a base element made of metal and a plastic section at least in an area that can be gripped for the purpose of manual actuation. This ensures good corrosion resistance and, at the same time, low manufacturing costs. Furthermore, the plastic section remains cooler and can be operated better due to the limited heat conduction compared to metal. The base element can be made of stainless steel, for example. This can be overmolded with plastic, for example. The base element can, for example, comprise a check valve and / or a connection thread.
Im Betätigungsgriff kann z.B. ein Rückschlagventil integriert angeordnet sein. Weiter beispielsweise kann das Gasballastventil insbesondere zweistufig ausgebildet sein. Weiter beispielsweise kann im Betätigungsgriff ein Einlass und/oder ein Anschluss für das Ballastgas vorgesehen sein.A check valve, for example, can be integrated in the operating handle. Furthermore, for example, the gas ballast valve can be designed in particular in two stages. Furthermore, for example, an inlet and / or a connection for the ballast gas can be provided in the actuating handle.
Bei einem fünften Aspekt der Erfindung wird ausgegangen von einer Scrollpumpe, mit einem in seiner Drehzahl steuerbaren Lüfter zur Kühlung der Pumpe. Es ist eine Aufgabe, die Kühlung besonders bedarfsgerecht zu gestalten und/oder die Schallemission des Lüfters zu reduzieren. Diese Aufgabe wird insbesondere dadurch gelöst, dass diese einen Temperatursensor und eine Steuerungseinrichtung aufweist, welche dazu ausgebildet ist, die Drehzahl des Lüfters in Abhängigkeit von einer Leistungsaufnahme eines Antriebs der Pumpe und einer vom Temperatursensor gemessenen Temperatur zu regeln.A fifth aspect of the invention is based on a scroll pump with a fan whose speed is controllable for cooling the pump. It is a task to design the cooling particularly needs-based and / or to reduce the noise emission of the fan. This object is achieved in particular in that it has a temperature sensor and a control device which is designed to regulate the speed of the fan as a function of a power consumption of a drive of the pump and a temperature measured by the temperature sensor.
Bei der gemessenen Temperatur kann es sich vorzugsweise um eine Temperatur in der Pumpe, zum Beispiel eines Pumpenbauteils und/oder eines Raumes in der Pumpe, zum Beispiel eines Ansaug- oder Pumpraumes, handeln. Bei einer Ausführungsform ist vorgesehen, dass die Regelung in Abhängigkeit von einer vom Temperatursensor gemessenen Temperatur eines Motors, einer Motorwicklung, einer Antriebs- oder Leistungselektronik, eines Pumpkörpers und/oder eines Gehäuses der Pumpe erfolgt. Grundsätzlich können diese Temperaturwerte beispielsweise von mehreren Temperatursensoren gemessen werden oder es können generell mehrere Temperatursensoren vorgesehen sein.The measured temperature can preferably be a temperature in the pump, for example a pump component and / or a space in the pump, for example a suction or pumping space. In one embodiment it is provided that the regulation is performed as a function of a temperature of a motor, a motor winding, a drive or power electronics, a pump body and / or a housing of the pump takes place. In principle, these temperature values can be measured, for example, by a plurality of temperature sensors, or a plurality of temperature sensors can generally be provided.
Gemäß einer Ausführungsform ist vorgesehen, dass ein erster Schwellwert der Temperatur definiert ist, wobei die Regelung nur bei einer gemessenen Temperatur oberhalb des ersten Schwellwerts erfolgt und/oder wobei unterhalb des ersten Schwellwerts die Drehzahl des Lüfters konstant bei Null oder einer Minimaldrehzahl gehalten wird. Hierdurch kann die Schallemission des Lüfters geringgehalten werden, wenn der Kühlungsbedarf gering ist, nämlich wenn die gemessene Temperatur gering ist. Außerdem kann sich hierdurch die Pumpe nach dem Anschalten schnell auf eine gewünschte Betriebstemperatur erwärmen. Dies ist zum Beispiel vorteilhaft, weil die Spaltmaße zwischen den Spiralen abhängig sind von einer Wärmeausdehnung der Bauteile und daher nur im Rahmen bestimmter Betriebstemperaturbereiche optimal sind. Die Ausführungsform ermöglicht also ein schnelles Erreichen einer vorteilhaften Pumpperformance. Außerdem wird durch eine schnelle Erhöhung der Temperatur eine verbesserte Verträglichkeit gegenüber kondensierenden Medien erreicht.According to one embodiment it is provided that a first threshold value of the temperature is defined, the regulation only taking place at a measured temperature above the first threshold value and / or the speed of the fan being kept constant at zero or a minimum speed below the first threshold value. In this way, the sound emission of the fan can be kept low when the need for cooling is low, namely when the measured temperature is low. In addition, this allows the pump to warm up quickly to the desired operating temperature after it has been switched on. This is advantageous, for example, because the gap dimensions between the spirals are dependent on thermal expansion of the components and are therefore only optimal within certain operating temperature ranges. The embodiment thus enables an advantageous pump performance to be achieved quickly. In addition, a rapid increase in temperature improves compatibility with condensing media.
Der erste Schwellwert kann bevorzugt wenigstens 40°C und/oder höchstens 60°C, insbesondere etwa 50°C, betragen. Die Minimaldrehzahl ist generell niedriger als eine Maximaldrehzahl, insbesondere deutlich niedriger, beträgt insbesondere weniger als 30 %, insbesondere weniger als 20 %, insbesondere weniger als 10 % der Maximaldrehzahl.The first threshold value can preferably be at least 40.degree. C. and / or at most 60.degree. C., in particular about 50.degree. The minimum speed is generally lower than a maximum speed, in particular significantly lower, is in particular less than 30%, in particular less than 20%, in particular less than 10% of the maximum speed.
Gemäß einer weiteren Ausführungsform ist ein zweiter Schwellwert der Temperatur definiert, wobei bei einer gemessenen Temperatur oberhalb des zweiten Schwellwerts die Lüfterdrehzahl konstant auf einer Maximaldrehzahl gehalten wird. Hierdurch wird auf einfache Weise bei hohen Temperaturen sichergestellt, dass die maximale Kühlleistung erreicht wird. Die Kühlung kann somit auf einfache Weise bedarfsgerecht ausgeführt werden. Generell ist die Ausführungsform mit dem zweiten Schwellwert unabhängig von der Ausführungsform mit dem ersten Schwellwert und umgekehrt. Diese sind aber vorteilhaft kombinierbar. Insofern ist die Bezeichnung "zweiter" Schwellwert lediglich zur erleichterten Bezugnahme gewählt und erfordert nicht, dass außerdem ein "erster" Schwellwert definiert ist. Die vorstehend beschriebenen Schwellwerte können für den Fall, dass mehrere Temperatursensoren vorgesehen sind, beispielsweise für die mehreren Temperatursensoren unterschiedlich sein.According to a further embodiment, a second threshold value for the temperature is defined, the fan speed being kept constant at a maximum speed at a measured temperature above the second threshold value. This ensures in a simple way at high temperatures that the maximum cooling capacity is achieved. The cooling can thus be carried out as required in a simple manner. In general, the embodiment with the second threshold value is independent of the embodiment with the first threshold value and vice versa. However, these can be advantageously combined. In this respect, the designation “second” threshold value is chosen only for ease of reference and does not require that a “first” threshold value is also defined. The threshold values described above can be different for the case that several temperature sensors are provided, for example for the several temperature sensors.
Die Steuerungseinrichtung kann beispielsweise dazu ausgebildet sein, in Abhängigkeit von einer von einem Temperatursensor gemessenen Temperatur der Vakuumpumpe eine Antriebsleistung der Pumpe zu reduzieren. Diese Funktion kann auch als "Derating" bezeichnet werden. Es kann beispielsweise vorgesehen sein, dass der Lüfter auf seine Maximaldrehzahl eingestellt wird, wenn eine Derating-Bedingung erfüllt ist und/oder wenn sich die Pumpe in einem Derating-Zustand befindet, wenn also die Antriebsleistung reduziert ist.The control device can, for example, be designed to reduce a drive power of the pump as a function of a temperature of the vacuum pump measured by a temperature sensor. This function can also be referred to as "derating". It can be provided, for example, that the fan is set to its maximum speed when a derating condition is met and / or when the pump is in a derating state, that is, when the drive power is reduced.
Die Drehzahl des Lüfters kann bevorzugt mittel Pulsweitenmodulation (PWM) gesteuert werden.The speed of the fan can preferably be controlled by means of pulse width modulation (PWM).
Eine Maximaldrehzahl des Lüfters kann beispielsweise anpassbar sein. So kann es zum Beispiel zum Zwecke einer erhöhten Wasserdampfverträglichkeit vorteilhaft sein, die Maximaldrehzahl des Lüfters zu reduzieren.A maximum speed of the fan can be adjustable, for example. For example, to increase water vapor tolerance, it can be advantageous to reduce the maximum speed of the fan.
Ein sechster Aspekt der Erfindung geht aus von einer Scrollpumpe, umfassend einen elektrisch angetriebenen Lüfter und eine Luftleithaube, Es ist eine Aufgabe der Erfindung, eine elektrische Verbindung des Lüfters zu einem Versorgungsanschluss besonders zuverlässig, insbesondere für eine lange Zeit verlässlich, herzustellen. Diese Aufgabe wird insbesondere dadurch gelöst, dass ein Leiter, vorzugsweise ein Kabel, vom Lüfter, vorzugsweise durch die Luftleithaube, zu einem Versorgungsanschluss für den Lüfter führt, wobei der Leiter über einen, bevorzugt lösbaren, elektrischen Verbinder, vorzugsweise einen Stecker, mit dem Versorgungsanschluss verbunden ist, wobei der Verbinder von einem durch die Luftleithaube definierten Luftströmungsweg mittels einer Trennwand getrennt ist. Bevorzugt kann der Verbinder zumindest teilweise innerhalb der Luftleithaube angeordnet sein. Die Trennwand kann z.B. mit der Luftleithaube einteilig verbunden sein.A sixth aspect of the invention is based on a scroll pump comprising an electrically driven fan and an air guide hood. It is an object of the invention to provide an electrical connection of the fan to a supply connection particularly reliably, in particular for reliable for a long time. This object is achieved in particular in that a conductor, preferably a cable, leads from the fan, preferably through the air guide hood, to a supply connection for the fan, the conductor being connected to the supply connection via a preferably detachable electrical connector, preferably a plug is connected, wherein the connector is separated from an air flow path defined by the air guide hood by means of a partition. The connector can preferably be arranged at least partially within the air guide hood. The partition can, for example, be connected in one piece to the air guide hood.
Über den Lüfter wird Umgebungsluft angesaugt, die auch Verschmutzungen und Stäube umfassen kann, und entlang eines definierten Luftströmungsweges geleitet. Durch die Trennwand wird verhindert, dass die angesaugten Verunreinigungen bzw. Stäube nicht zu dem Verbinder und insbesondere in der Folge nicht in ein Elektronikgehäuse der Pumpe eindringen können. Vielmehr bewirkt die Trennwand, dass die angesaugte Luft lediglich an dem Verbinder beabstandet vorbeigeleitet wird.Ambient air, which can also contain dirt and dust, is sucked in via the fan and guided along a defined air flow path. The partition wall prevents the sucked-in impurities or dust from being able to penetrate to the connector and, in particular, subsequently not to penetrate into an electronics housing of the pump. Rather, the partition has the effect that the sucked-in air is merely guided past the connector at a distance.
Der Lüfter kann vorzugsweise an der Luftleithaube angeordnet, insbesondere an dieser befestigt, sein. Der Verbinder kann bevorzugt lösbar ausgebildet sein.The fan can preferably be arranged on the air guide hood, in particular fastened to it. The connector can preferably be designed to be detachable.
Bei einer Ausführungsform ist vorgesehen, dass der Leiter, insbesondere das Kabel, vom Verbinder durch eine Ausnehmung in der Trennwand geführt ist. So kann auf einfache Weise der Leiter vom Verbinder zum Lüfter geführt werden. Die Ausnehmung kann beispielsweise eine Kerbe sein, die bevorzugt V-förmig ausgebildet sein kann.In one embodiment it is provided that the conductor, in particular the cable, is led from the connector through a recess in the partition. In this way, the conductor can be led from the connector to the fan in a simple manner. The recess can for example be a notch, which can preferably be V-shaped.
Eine weitere Ausführungsform sieht vor, dass die Ausnehmung in Umfangsrichtung versetzt zum Verbinder angeordnet ist. Hierdurch wird ein Weg von der Ausnehmung zum Verbinder verlängert, sodass durch die Ausnehmung durchtretende Verunreinigungen einen längeren Weg zum Verbinder zurücklegen müssen und somit die Wahrscheinlichkeit verringert ist, dass diese den Verbinder erreichen. Hierdurch ist auf einfache Weise ein Labyrintheffekt realisiert.Another embodiment provides that the recess is arranged offset in the circumferential direction relative to the connector. As a result, a path from the recess to the connector is lengthened, so that it passes through the recess Contaminants have to travel a longer distance to the connector and thus the likelihood of them reaching the connector is reduced. In this way, a labyrinth effect is realized in a simple manner.
Bei einem siebten Aspekt der Erfindung wird ausgegangen von einer Scrollpumpe umfassend ein im Betrieb feststehendes Spiralbauteil, welches mit einem Gehäuseelement der Pumpe lösbar verbunden ist, wie zum Beispiel aus der
Durch das Abdrückgewinde kann das Spiralbauteil auf einfache und definierte Art vom Gehäuseelement abgedrückt und somit gelöst werden.By means of the forcing thread, the spiral component can be pressed off the housing element in a simple and defined manner and thus released.
Generell bevorzugt ist axial fluchtend zum Abdrückgewinde am jeweils anderen Bauteil keine zugeordnete Durchgangsbohrung vorhanden. Vielmehr kann bevorzugt am Abdrückgewinde eine ebene Fläche oder eine Senkung des anderen Bauteils anliegen bzw. dieser zugeordnet sein.Generally preferred, there is no associated through-hole on the respective other component, axially aligned with the forcing thread. Rather, a flat surface or a countersink of the other component can preferably rest on the forcing thread or be assigned to it.
Generell können auch mehrere, insbesondere wenigstens zwei Abdrückgewinde vorgesehen sein, die vorzugsweise über den Umfang gleichmäßig verteilt und/oder radial gegenüberliegend angeordnet sein können. Hierdurch lässt sich das Spiralbauteil besonders gleichmäßig lösen. So kann zum Beispiel ein Verkanten vermieden werden, wie es beispielsweise ohne Abdrückgewinde beim Lösen eines Spiralbauteils auftreten könnte, welches mit einer Übergangspassung am Gehäuseelement anliegt. Auch könnten etwaig vorhandene Dichtmittel verkanten oder blockieren. Durch die, insbesondere mehreren, Abdrückgewinde können diese Probleme der ungleichmäßigen Beaufschlagung vermieden oder zumindest verringert werden.In general, several, in particular at least two, forcing threads can also be provided, which are preferably distributed uniformly over the circumference and / or can be arranged radially opposite one another. This allows the spiral component to be released particularly evenly. Thus, for example, tilting can be avoided, as could occur, for example, without a forcing thread when loosening a spiral component which is in contact with the housing element with a transition fit. Any sealants that may be present could also jam or block. By means of the, in particular several, forcing threads, these Problems of uneven loading can be avoided or at least reduced.
Gemäß einer weiteren Ausführungsform ist vorgesehen, dass ein zum Spiralbauteil und/oder zum Gehäuseelement benachbartes Bauteil derart ausgebildet ist, dass es mit einem Schraubenkopf einer etwaig in das Abdrückgewinde eingeschraubten Abdrückschraube kollidieren würde, sodass das Bauteil nicht vollständig montierbar wäre. Hierdurch kann auf einfache Weise eine Fehlmontage vermieden werden, denn es ist sichergestellt, dass keine Schraube in das Abdrückgewinde eingeschraubt ist, die zum Beispiel eine korrekte Anlage des Spiralbauteils am Gehäuseelement verhindern könnte. Bei dem Bauteil kann es sich insbesondere um eine Luftleithaube handeln. Zur Kollision mit dem Schraubenkopf kann beispielsweise ein Vorsprung und/oder ein Dom vorgesehen sein.According to a further embodiment, it is provided that a component adjacent to the spiral component and / or the housing element is designed in such a way that it would collide with a screw head of a forcing screw possibly screwed into the forcing thread, so that the component would not be completely mountable. In this way, incorrect assembly can be avoided in a simple manner, because it is ensured that no screw is screwed into the forcing thread which, for example, could prevent the spiral component from resting correctly on the housing element. The component can in particular be an air guide hood. For example, a projection and / or a dome can be provided for collision with the screw head.
Es versteht sich, dass die einzelnen Aspekte der Erfindung, und zwar auch diejenigen Aspekte, die nachstehend anhand der Figuren beschrieben werden, jeweils untereinander vorteilhaft kombinierbar sind.It goes without saying that the individual aspects of the invention, including those aspects that are described below with reference to the figures, can each be advantageously combined with one another.
Die Erfindung wird nachfolgend lediglich beispielhaft anhand der schematischen Zeichnung erläutert.
- Fig. 1
- zeigt eine Scrollpumpe in einer Schnittansicht.
- Fig. 2
- zeigt ein Elektronikgehäuse der Scrollpumpe.
- Fig. 3
- zeigt die Scrollpumpe in perspektivischer Ansicht, wobei ausgewählte Elemente freigestellt sind.
- Fig. 4
- zeigt einen in die Pumpe integrierten Drucksensor.
- Fig. 5
- zeigt ein bewegliches Spiralbauteil der Pumpe.
- Fig. 6
- zeigt das Spiralbauteil von einer anderen, der in
Fig. 5 sichtbaren Seite gegenüberliegenden Seite. - Fig. 7
- zeigt eine Einspannvorrichtung für ein Spiralbauteil.
- Fig. 8 und 9
- zeigen jeweils eine Exzenterwelle mit einem Ausgleichsgewicht von unterschiedlichen Scrollpumpen.
- Fig. 10
- zeigt ein Gasballastventil mit einem Betätigungsgriff in perspektivischer Ansicht.
- Fig. 11
- zeigt das Ventil der
Fig. 10 in einer Schnittansicht. - Fig. 12
- zeigt einen Teilbereich des Spiralbauteils der
Fig. 5 und 6 . - Fig. 13
- zeigt einen Querschnitt des Spiralbauteils durch die Spiralwand in einem äußeren Endbereich.
- Fig. 14
- zeigt eine Luftleithaube der Scrollpumpe der
Fig. 1 in perspektivischer Ansicht. - Fig. 15
- zeigt ein Abdrückgewinde in einer Schnittdarstellung.
- Fig. 1
- shows a scroll pump in a sectional view.
- Fig. 2
- shows an electronics housing of the scroll pump.
- Fig. 3
- shows the scroll pump in a perspective view, with selected elements being exposed.
- Fig. 4
- shows a pressure sensor integrated in the pump.
- Fig. 5
- Figure 10 shows a movable scroll member of the pump.
- Fig. 6
- shows the spiral member of another shown in
Fig. 5 visible side opposite side. - Fig. 7
- shows a clamping device for a spiral component.
- Figures 8 and 9
- each show an eccentric shaft with a counterweight of different scroll pumps.
- Fig. 10
- shows a gas ballast valve with an actuating handle in a perspective view.
- Fig. 11
- shows the valve of the
Fig. 10 in a sectional view. - Fig. 12
- FIG. 13 shows a portion of the spiral component of FIG
Figures 5 and 6 . - Fig. 13
- shows a cross section of the spiral component through the spiral wall in an outer end region.
- Fig. 14
- shows an air guide hood of the scroll pump of
Fig. 1 in perspective view. - Fig. 15
- shows a forcing thread in a sectional view.
Die
Die Exzenterwelle 32 ist durch einen Motor 34 angetrieben und durch zwei Wälzlager 36 gelagert. Sie umfasst einen exzentrisch zu ihrer Rotationsachse angeordneten Exzenterzapfen 38, der über ein weiteres Wälzlager 40 seine exzentrische Auslenkung an das bewegliche Spiralbauteil 30 überträgt. An dem beweglichen Spiralbauteil 30 ist zwecks Abdichtung außerdem ein in
Die Scrollpumpe 20 umfasst einen Lüfter 44 zur Erzeugung eines Kühlluftstromes. Für diesen Kühlluftstrom ist eine Luftleithaube 46 vorgesehen, an der der Lüfter 44 auch befestigt ist. Die Luftleithaube 46 und die Gehäuseelemente 22 und 24 sind derart geformt, dass der Kühlluftstrom im Wesentlichen das gesamte Pumpengehäuse umströmt und somit eine gute Kühlleistung erreicht.The
Die Scrollpumpe 20 umfasst ferner ein Elektronikgehäuse 48, in dem eine Steuerungseinrichtung und Leistungselektronikkomponenten zum Antrieb des Motors 34 angeordnet sind. Das Elektronikgehäuse 48 bildet außerdem einen Standfuß der Pumpe 20. Zwischen dem Elektronikgehäuse 48 und dem ersten Gehäuseelement 22 ist ein Kanal 50 sichtbar, durch den ein vom Lüfter 44 erzeugter Luftstrom am ersten Gehäuseelement 22 und auch am Elektronikgehäuse 48 entlanggeführt ist, sodass beide wirksam gekühlt werden.The
Das Elektronikgehäuse 48 ist in
An einer in Bezug auf
In
Die Pumpe 20 umfasst einen in diese integrierten Drucksensor 60. Dieser ist innerhalb der Luftleithaube 46 angeordnet und in das feststehende Spiralbauteil 24 eingeschraubt. Der Drucksensor 60 ist über eine nur teilweise dargestellte Kabelverbindung mit dem Elektronikgehäuse 48 und einer darin angeordneten Steuerungseinrichtung verbunden. Dabei ist der Drucksensor 60 in die Steuerung der Scrollpumpe 20 eingebunden. Zum Beispiel kann der Motor 34, der in
Der Drucksensor 60 erlaubt, zum Beispiel über die Ermittlung einer Kompression, insbesondere eine Erkennung eines Verschleißzustandes der pumpaktiven Komponenten, insbesondere eines auch als Tip Seal bezeichneten Dichteelements 64. Weiterhin kann der gemessene Ansaugdruck auch zu einer Regelung der Pumpe verwendet werden (u. a. Pumpendrehzahl). So kann beispielsweise ein Ansaugdruck softwareseitig vorgegeben werden und durch Variation der Pumpendrehzahl ein Ansaugdruck eingestellt werden. Auch ist denkbar, dass abhängig vom gemessenen Druck ein verschleißbedingter Druckanstieg durch Drehzahlsteigerung kompensiert werden kann. Somit kann ein Tip Seal-Wechsel verschoben werden bzw. größere Wechselintervalle realisiert werden. Die Daten des Drucksensors 60 können also generell z.B. zur Verschleißbestimmung, zur situativen Steuerung der Pumpe, zur Prozesskontrolle, etc. verwendet werden.The
Der Drucksensor 60 kann zum Beispiel optional vorgesehen sein. Anstelle des Drucksensors 60 kann beispielsweise ein Blindstopfen zum Verschließen des Kanals 62 vorgesehen sein. Ein Drucksensor 60 kann dann beispielsweise bei Bedarf nachgerüstet werden. Insbesondere im Hinblick auf die Nachrüstung, aber auch generell vorteilhaft, kann vorgesehen sein, dass der Drucksensor 60 beim Anschließen an die Steuerungseinrichtung der Pumpe 20 automatisch erkannt wird.The
Der Drucksensor 60 ist im Kühlluftstrom des Lüfters 44 angeordnet. Hierdurch wird auch er vorteilhaft gekühlt. Dies hat außerdem zur Folge, dass keine besonderen Maßnahmen für eine höhere Temperaturbeständigkeit des Drucksensors 60 zu treffen sind und folglich ein kostengünstiger Sensor eingesetzt werden kann.The
Außerdem ist der Drucksensor 60 insbesondere derart angeordnet, dass die äußeren Abmessungen der Pumpe 20 durch ihn nicht vergrößert sind und die Pumpe 20 folglich kompakt bleibt.In addition, the
In den
Eine der Spiralwand 28 abgewandte Seite der Grundplatte 66 ist in
Außen an der Grundplatte 66 sind drei über den Umfang der Grundplatte 66 beabstandete und gleichmäßig über den Umfang verteilte Haltevorsprünge 68 vorgesehen. Die Haltevorsprünge 68 erstrecken sich dabei radial nach außen. Die Haltevorsprünge 68 weisen insbesondere alle die gleiche radiale Höhe auf.On the outside of the
Zwischen zwei der Haltevorsprünge 68 erstreckt sich ein erster Zwischenabschnitt 70 des Umfangs der Grundplatte 66. Dieser erste Zwischenabschnitt 70 weist eine größere radiale Höhe auf als ein zweiter Zwischenabschnitt 72 und als ein dritter Zwischenabschnitt 74. Der erste Zwischenabschnitt 70 ist einem äußersten 120°-Abschnitt der Spiralwand 28 gegenüberliegend angeordnet.A first
Bei der Herstellung des beweglichen Spiralbauteils 30 werden bevorzugt die Grundplatte 66 und die Spiralwand 28 aus einem Vollmaterial gemeinsam spannend hergestellt, d. h. die Spiralwand 28 und die Grundplatte 66 sind einteilig ausgebildet.In the manufacture of the
Zum Beispiel bei einer Schlichtbearbeitung kann das Spiralbauteil 30 an den Haltevorsprüngen 68 direkt eingespannt sein. Im Rahmen ein und derselben Einspannung kann zum Beispiel auch die in
Das Spiralbauteil 30 kann zu diesem Zweck beispielsweise mit einer Einspannvorrichtung 76 eingespannt sein, wie sie in
Die Kontur der Haltevorsprünge 68 und der Spanndruck der Einspannvorrichtung 76 sind bevorzugt so gewählt, dass keine kritischen Verformungen des Spiralbauteils 30 stattfinden. Die drei Haltevorsprünge 68 sind bevorzugt so gewählt, dass die äußere Dimension, also der maximale Durchmesser des Spiralbauteils 30 nicht vergrößert werden. Somit kann zum einen Material und zum anderen Zerspanungsvolumen eingespart werden. Die Haltevorsprünge 68 sind insbesondere so ausgeführt und/oder an einer solchen Winkelposition angeordnet, dass die Zugänglichkeit der Verschraubung des Wellbalgs 42 gegeben ist. Die Anzahl der Verschraubungspunkte des Wellbalgs 42 ist bevorzugt ungleich der Anzahl der Haltevorsprünge 68 am beweglichen Spiralbauteil 30.The contour of the holding
An der Exzenterwelle 32 der
Ein ähnlicher Bildausschnitt ist in
Die Exzenterwellen 32, die Ausgleichsgewichte 82 und die Gehäuseelemente 22 sind so dimensioniert, dass an der jeweils gezeigten Befestigungsposition nur eine bestimmte Art der zwei gezeigten Arten von Ausgleichsgewichten 82 an der Exzenterwelle 32 montierbar ist.The
Die Ausgleichsgewichte 82 sind in den
So beträgt in
In
Die Ausgleichsgewichte 82, insbesondere ein motorseitiges Ausgleichsgewicht 82, sind allgemein so ausgeführt, dass eine Verwechslung des Ausgleichsgewichts mit solchen anderer Baugrößen bei der Montage und/oder beim Service vermieden wird. Die Ausgleichsgewichte werden bevorzugt mittels Durchgangsschrauben befestigt. Ähnliche Ausgleichsgewichte verschiedener Pumpengrößen sind insbesondere so ausgeführt, dass aufgrund angrenzender Absätze auf der Welle, der Positionen von Gewinde und Durchgangsbohrung des Ausgleichsgewichts sowie von Absätzen innerhalb des Gehäuses eine Montage des falschen Ausgleichsgewichts verhindert wird.The balancing
In den
Das Gasballastventil 90 umfasst einen Betätigungsgriff 92. Dieser umfasst einen Kunststoffkörper 94 und ein Basiselement 96, welches bevorzugt aus Edelstahl hergestellt ist. Das Basiselement 96 umfasst eine durchgehende Bohrung 98, die einerseits zum Anschluss und Einleiten eines Ballastgases vorgesehen ist und andererseits ein Rückschlagventil 100 umfasst. Die Bohrung 98 ist außerdem in den Darstellungen mittels eines Stopfens 102 verschlossen. Anstelle des Stopfens 102 kann beispielsweise auch ein Filter vorgesehen sein, wobei das Ballastgas bevorzugt Luft sein kann und über den Filter insbesondere direkt in das Ventil 90 eintritt.The
Der Betätigungsgriff 92 ist mit drei Befestigungsschrauben 104 an einem drehbaren Element 106 des Ventils 90 befestigt, die in einer jeweiligen Bohrung 108 angeordnet sind und von denen in der gewählten Schnittdarstellung der
Zur Betätigung des Ventils 90 wird ein manuell am Betätigungsgriff 92 angelegtes Drehmoment an das drehbare Element 106 übertragen und dieses somit gedreht. Somit gelangt die Bohrung 98 in Kommunikation mit einem Inneren des Gehäuses. Für das Ventil 90 sind dabei drei Schaltstellungen vorgesehen, nämlich die in
Die Bohrungen 108 und 110 sind durch einen Deckel 112 verschlossen. Die Dichtwirkung des Gasballastventiles 90 beruht auf axial verpressten O-Ringen. Bei Betätigung des Ventils 90 wird eine Relativbewegung auf die O-Ringe ausgeübt. Gelangen Verschmutzungen, wie etwa Partikel, an die Oberfläche eines O-Rings, so birgt dies die Gefahr eines frühzeitigen Ausfalls. Der Deckel 112 verhindert ein Eindringen von Verschmutzungen und ähnlichem an die Schrauben des Griffes 92.The
Dieser Deckel 112 wird über eine Übermaßpassung dreier Zentrierelemente befestigt. Konkret weist der Deckel 112 für jede Bohrung 108 einen nicht dargestellten Einsteckzapfen auf, mit denen der Deckel 112 in den Bohrungen 108 gehalten ist. Die Bohrungen 108 und 110 sowie die darin angeordneten Befestigungsschrauben sind somit vor Verschmutzungen geschützt. Insbesondere bei der in der Bohrung 110 angeordneten, nicht dargestellten Befestigungsschraube, die eine Drehbewegung erlaubt, kann so ein Verschmutzungseintrag in die Ventilmechanik wirksam minimiert werden und so die Lebensdauer des Ventils verbessert werden.This
Der Kunststoff-Griff mit umspritzem Edelstahl-Basisteil sorgt für eine gute Korrosionsbeständigkeit bei gleichzeitig niedrigen Herstellkosten. Weiterhin bleibt der Kunststoff des Griffs aufgrund der eingeschränkten Wärmeleitung kühler und lässt sich dadurch besser bedienen.The plastic handle with an overmolded stainless steel base part ensures good corrosion resistance and low manufacturing costs. Furthermore, the plastic of the handle remains cooler due to the limited heat conduction and is therefore easier to use.
Für den Lüfter 44, wie er beispielsweise in den
Die maximale Lüfterdrehzahl kann, insbesondere situativ, anpassbar sein. Z. B. kann es für eine hohe Wasserdampfverträglichkeit zielführend sein, die maximale Lüfterdrehzahl herabzusetzen.The maximum fan speed can be adaptable, in particular depending on the situation. For example, to achieve a high level of water vapor tolerance, it can be expedient to reduce the maximum fan speed.
In
Die Spiralwand 28 weist an ihrem der Grundplatte 66 abgewandten und einer Grundplatte des hier nicht dargestellten, festen Spiralbauteils 24 zugewandten Ende eine Nut 114 zur Einlage eines hier ebenfalls nicht dargestellten Dichtungselements 64 auf, nämlich eines sogenannten Tip Seals. Die Anordnung im Betriebszustand ist z.B. in
Die Nut 114 ist nach außen und nach innen durch zwei gegenüberliegende Seitenwände begrenzt, nämlich durch eine innere Seitenwand 116 und eine äußere Seitenwand 118. In einem ersten Spiralabschnitt 120 ist die äußere Seitenwand 118 dicker ausgeführt als die innere Seitenwand 116 im ersten Spiralabschnitt 120 und dicker als beide Seitenwände 116 und 118 in einem anderen, zweiten Spiralabschnitt 122.The
Der erste Spiralabschnitt 120 erstreckt sich vom in
Der erste Spiralabschnitt 120 bildet einen äußeren Endabschnitt der Spiralwand 28. Dabei ist der erste Spiralabschnitt 120 zumindest teilweise, insbesondere vollständig in einem nicht pumpaktiven Bereich der Spiralwand 28 angeordnet. Insbesondere kann der erste Spiralabschnitt 120 den nicht pumpaktiven Bereich der Spiralwand 28 zumindest im Wesentlichen vollständig ausfüllen.The
Wie es in
Für eine geringe Systembelastung der Lager und anderer Bauteile sollte das bewegliche Spiralbauteil allgemein bevorzugt ein geringes Eigengewicht besitzen. Daher werden die Spiralwände generell sehr dünn ausgeführt. Weiterhin ergeben sich bei dünneren Wänden geringere Pumpenabmessungen (signifikanter Außendurchmesser). Die Seitenwände der Tip Seal-Nut sind in der Folge besonders dünn. Das Verhältnis der TipSeal-Wanddicke zur gesamten Spiralwanddicke beträgt z.B. höchstens 0,17. Aufgrund der Tip Seal-Nut ist jedoch die Spiralwandspitze sehr empfindlich gegenüber Stößen beim Handling, wie etwa bei der Montage oder beim Wechseln des Tip Seal. Durch leichte Stöße, z. B. auch beim Transport, kann die Seitenwand der Nut nach innen gedrückt werden, sodass sich das Tip Seal nicht mehr montieren lässt. Zur Lösung dieses Problems umfasst die Nut eine unsymmetrische Wanddicke, insbesondere eine nach außen lokale Aufdickung der Spiralwand. Dieser Bereich ist bevorzugt nicht pumpaktiv und kann daher mit einer größeren Toleranz gefertigt werden. Durch die einseitige Aufdickung an der, insbesondere letzten halben, Windung werden Schädigungen deutlich reduziert. An übrigen Stellen des Bauteils ist bevorzugt eine Aufdickung der Spiralwand nicht notwendig, da die Wand durch überstehende Elemente des Bauteils geschützt ist.For a low system load on the bearings and other components, the movable spiral component should generally preferably have a low dead weight. Therefore, the spiral walls are generally made very thin. Furthermore, with thinner walls, the pump dimensions are smaller (significant outside diameter). As a result, the side walls of the tip seal groove are particularly thin. The ratio of the TipSeal wall thickness to the total spiral wall thickness is, for example, at most 0.17. Due to the tip seal groove, however, the spiral wall tip is very sensitive to impacts during handling, such as during assembly or when changing the tip seal. Light bumps, e.g. B. Also during transport, the side wall of the groove can be pushed inwards so that the tip seal can no longer be fitted. To solve this problem, the groove has an asymmetrical wall thickness, in particular an outwardly local thickening of the spiral wall. This area is preferably not pump-active and can therefore be manufactured with a greater tolerance. The one-sided thickening on the, in particular the last half, turn significantly reduces damage. A thickening of the spiral wall is preferably not necessary at other points of the component, since the wall is protected by protruding elements of the component.
Die in
Die Steckverbindung 126, 128 ist durch eine Trennwand 130 von dem Luftstrom 124 getrennt. Der Luftstrom 124, der zum Beispiel Stäube oder ähnliche Verschmutzungen enthalten kann, wird somit von der Steckverbindung 126, 128 ferngehalten. Somit wird einerseits die Steckverbindung 126, 128 selbst geschützt und es wird andererseits verhindert, dass die Verschmutzungen durch die für die Buchse 126 vorgesehene Öffnung im Elektronikgehäuse 48 in dieses hinein und zur Steuerungseinrichtung und/oder Leistungselektronik gelangen.The
Die Luftleithaube 46 ist in
Z.B. zur Kostenersparnis können kostengünstige Steckverbinder ohne Abdichtung (z.B. kein IP-Schutz) zum Einsatz kommen, da die Trennwand 130 dafür sorgt, dass die angesaugte Luft nicht über den Durchbruch des Steckverbinders 126, 128 an die Elektronik gelangt. Das Kabel des Lüfters wird durch die V-förmige Kerbe 132 seitlich durch die Trennwand 130 geführt. Die Kerbe 132 weist einen seitlichen Versatz zu dem Steckverbinder 126, 128 auf, wodurch eine Labyrinth-Wirkung und somit eine weitere Verringerung der Leckage von Kühlluft zu dem Steckverbinder 126, 128 erreicht werden. Durch eine Trennwand 130 innerhalb der Luftleithaube 46 wird außerdem die Luftführung in den Kanal 50 zwischen Elektronikgehäuse 48 und Pumpengehäuse 22 verbessert. Es entsteht weniger Verwirbelung und Gegendruck für den Lüfter 44.For example, to save costs, inexpensive plug-in connectors without a seal (eg no IP protection) can be used, since the
Die
Zu Wartungszwecken, zum Beispiel zum Austausch des Dichtungselements 64, muss das zweite Gehäuseelement 24 zum Beispiel demontiert werden. Dabei kann es vorkommen, dass die Übergangspassung 134 oder der O-Ring 136 klemmen, wenn das zweite Gehäuseelement 24 nicht gerade genug herausgezogen wird. Zur Lösung dieses Problems ist ein Abdrückgewinde 138 vorgesehen. Bevorzugt kann auch zumindest im Wesentlichen radial gegenüberliegend ein zweites Abdrückgewinde vorgesehen sein. Zum möglichst geraden und geführten Lösen des zweiten Gehäuseelements 24 kann eine Schraube in das Abdrückgewinde 38 eingeschraubt werden, bis die Schraube aus diesem heraus hervorsteht und in Anlage mit dem ersten Gehäuseelement 22 gelangt. Durch weiteres Einschrauben werden die Gehäuseelemente 22 und 24 voneinander weggedrückt.For maintenance purposes, for example to replace the sealing
Zum Abdrücken können zum Beispiel die zur Befestigung des zweiten Gehäuseelements 24 am ersten Gehäuseelement 22 vorgesehenen Befestigungsschrauben 142 verwendet werden, wie sie beispielsweise in den
Am zweiten Gehäuseelement 22 ist eine Senkung 140 vorgesehen, die dem Abdrückgewinde 138 zugeordnet ist. Falls beim Einschrauben der Schraube in das Abdrückgewinde 138 Abriebpartikel ausgetragen werden, sammeln sich diese in der Senkung 140. Somit wird verhindert, dass derartige Abriebpartikel zum Beispiel eine vollständige Anlage der Gehäuseelemente 22 und 24 aneinander verhindern.A
Bei der Montage des festen Spiralbauteils 24 müssen die Schrauben wieder herausgedreht werden, da sonst ein vollständiges Verschrauben (Richtiger Sitz auf der Planfläche des Gehäuses) des feststehenden Spiralbauteils 24 am ersten Gehäuseelement 22 womöglich verhindert ist. Leckage, Schiefstellung und Verringerung der Pumpperformance können die Folge sein. Zur Vermeidung dieses Montagefehlers verfügt die Luftleithaube 46 über wenigstens einen, insbesondere zusätzlichen, in
- 2020th
- ScrollpumpeScroll pump
- 2222nd
- erstes Gehäuseelementfirst housing element
- 2424
- zweites Gehäuseelement/feststehendes Spiralbauteilsecond housing element / fixed spiral component
- 2626th
- SpiralwandSpiral wall
- 2828
- SpiralwandSpiral wall
- 3030th
- bewegliches Spiralbauteilmovable spiral component
- 3232
- ExzenterwelleEccentric shaft
- 3434
- Motorengine
- 3636
- Wälzlagerroller bearing
- 3838
- ExzenterzapfenEccentric pin
- 4040
- Wälzlagerroller bearing
- 4242
- WellbalgBellows
- 4444
- LüfterFan
- 4646
- LuftleithaubeAir duct hood
- 4848
- ElektronikgehäuseElectronics housing
- 5050
- Kanalchannel
- 5252
- Kammerchamber
- 5454
- Ripperib
- 5656
- AusnehmungRecess
- 5858
- Ripperib
- 6060
- DrucksensorPressure sensor
- 6262
- Kanalchannel
- 6464
- DichtungselementSealing element
- 6666
- GrundplatteBase plate
- 6868
- HaltevorsprungRetaining protrusion
- 7070
- erster Zwischenabschnittfirst intermediate section
- 7272
- zweiter Zwischenabschnittsecond intermediate section
- 7474
- dritter Zwischenabschnittthird intermediate section
- 7676
- EinspannvorrichtungJig
- 7878
- DreibackenfutterThree-jaw chuck
- 8080
- AusnehmungRecess
- 8282
- AusgleichsgewichtCounterweight
- 8484
- BefestigungsbohrungMounting hole
- 8686
- WellenabsatzWave heel
- 8888
- GehäuseschulterHousing shoulder
- 9090
- GasballastventilGas ballast valve
- 9292
- BetätigungsgriffOperating handle
- 9494
- KunststoffkörperPlastic body
- 9696
- BasiselementBase element
- 9898
- Bohrungdrilling
- 100100
- Rückschlagventilcheck valve
- 102102
- StopfenPlug
- 104104
- BefestigungsschraubeFastening screw
- 106106
- drehbares Elementrotatable element
- 108108
- Bohrungdrilling
- 110110
- Bohrungdrilling
- 112112
- Deckellid
- 114114
- NutGroove
- 116116
- innere Seitenwandinner side wall
- 118118
- äußere Seitenwandouter sidewall
- 120120
- erster Spiralabschnittfirst spiral section
- 122122
- zweiter Spiralabschnittsecond spiral section
- 124124
- LuftstromAirflow
- 126126
- BuchseRifle
- 128128
- Steckerplug
- 130130
- Trennwandpartition wall
- 132132
- AusnehmungRecess
- 134134
- ÜbergangspassungTransition fit
- 136136
- O-RingO-ring
- 138138
- AbdrückgewindeExtraction thread
- 140140
- SenkungLowering
- 142142
- BefestigungsschraubeFastening screw
- 144144
- DomDom
Claims (14)
- A scroll pump (20) comprising a spiral component (24) which is in a fixed position in operation and which is releasably connected to a housing element (22) of the scroll pump (20), wherein at least one forcing-off thread (138) is provided at the spiral component (24) and/or at the housing element (22) for releasing the spiral component (24) from the housing element (22).
- A scroll pump in accordance with claim 1,
wherein a plurality of forcing-off threads are provided which are preferably arranged uniformly distributed over the periphery and/or are arranged in a radially oppositely disposed manner. - A scroll pump in accordance with claim 1 or claim 2,
wherein two forcing-off threads (138) are provided which are arranged in a radially oppositely disposed manner. - A scroll pump in accordance with any one of the preceding claims,
wherein in axial alignment with the forcing-off thread (138) an associated passage bore is not present at the respective other component, wherein preferably a planar surface or a depression of the other component contacts or is associated with the forcing-off thread (138). - A scroll pump (20) in accordance with any one of the preceding claims, wherein a component (46) adjacent to the spiral component (24) and/or to the housing element (22) is configured such that it would collide with a screw head of a forcing-off screw possibly screwed into the forcing-off thread (138) so that the component (146) could not be completely assembled.
- A scroll pump in accordance with claim 5,
wherein the component (46) is an air guide hood. - A scroll pump in accordance with claim 5 or claim 6,
wherein a projection and/or a dome is/are provided for a collision with the screw head. - A scroll pump in accordance with any one of the preceding claims, further comprising an electronics housing (48) in which one or more electronic components are arranged,wherein a separate chamber (52), in which the electronic component is cast, is provided within the electronics housing (48) for at least one electronic component,in particular wherein a plurality of separate chambers (52) are provided in each of which at least one electronic component is cast, and/or wherein at least one separate chamber (52) is provided in which no electronic component is cast.
- A scroll pump (20) in accordance with any one of the preceding claims, further comprising a pressure sensor (60) integrated into the scroll pump (20), preferably wherein the pressure sensor (60) is integrated into a control of the scroll pump (20) and/or of a vacuum system, and/or preferably wherein the pressure sensor (60) is provided for measuring a suction pressure of the scroll pump (20) or a pressure between two pump-active spiral walls (26, 28),
in particular wherein the pressure sensor (60) is screwed into a component (24) of the scroll pump (20), and/or wherein the pressure sensor (60) is arranged in a cooling air flow of a cooling device (44) of the scroll pump (20). - A scroll pump in accordance with any one of the preceding claims, further comprising a fan (44) controllable in its rotational speed for cooling the vacuum pump (20);a temperature sensor; anda control device which is configured to regulate the rotational speed of the fan (44) in dependence on a power consumption of a drive of the vacuum pump (20) and on a temperature measured by the temperature sensor, preferably wherein the regulation takes place in dependence on a temperature of a motor (34), in particular of a winding, of drive electronics, of a pump body and/or of a housing (22, 24) of the vacuum pump (20), measured by the temperature sensor.
- A scroll pump in accordance with claim 10,wherein a first threshold value of the temperature is defined, and wherein the regulation only takes place at a measured temperature above the first threshold value, and/or wherein the rotational speed of the fan (44) is kept constant at zero or at a minimum rotational speed below the first threshold value, and/orwherein a second threshold value of the temperature is defined, and wherein the rotational speed of the fan is kept constant at a maximum rotational speed at a measured temperature above the second threshold value.
- A scroll pump in accordance with any one of the preceding claims, further comprising an electrically driven fan (44) and an air guide hood (46), wherein a conductor, preferably a cable, leads from the fan (44), preferably through the air guide hood (46), to a supply connection (128) for the fan (44), wherein the conductor is connected to the supply connection (128) via an electrical connector (126), preferably a plug, and wherein the connector (126) is separated from an air flow path (124), defined by the air guide hood (46), by means of a partition wall (130), preferably wherein the connector (126) is at least partly arranged within the air guide hood (46).
- A scroll pump (20) in accordance with claim 12,
wherein the conductor is led from the connector (126) through a recess (132) in the partition wall (130), preferably wherein the recess (132) is arranged offset from the connector (126) in a peripheral direction. - A method of assembling a scroll pump (20) in accordance with any one of the preceding claims, wherein the scroll pump comprises an eccentric shaft (32) for eccentrically exciting a movable spiral component (30) of the scroll pump (20),in which a plurality of balance weights (82) of different kinds are each provided for fastening to an eccentric shaft (32) of a scroll pump (20) of a specific kind,wherein the eccentric shaft (32), the balance weights (82) and/or a further component (22) of the scroll pump (20), for example a housing element (22), are dimensioned such that only a specific kind of balance weight (82) can be assembled at the eccentric shaft (32) at a specific fastening position, in particular wherein the eccentric shaft (32) and/or the further component (22) has/have a projection (86, 88) and/or a step (86, 88) which collides with balance weights (82) of at least a first kind on an attempted assembly.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP20200624.3A EP3754200B1 (en) | 2019-10-07 | 2019-10-07 | Scroll vacuum pump and assembly method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP20200624.3A EP3754200B1 (en) | 2019-10-07 | 2019-10-07 | Scroll vacuum pump and assembly method |
EP19201749.9A EP3647599B1 (en) | 2019-10-07 | 2019-10-07 | Vacuum pump, scroll pump and method of manufacturing same |
Related Parent Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19201749.9A Division EP3647599B1 (en) | 2019-10-07 | 2019-10-07 | Vacuum pump, scroll pump and method of manufacturing same |
EP19201749.9A Division-Into EP3647599B1 (en) | 2019-10-07 | 2019-10-07 | Vacuum pump, scroll pump and method of manufacturing same |
Publications (3)
Publication Number | Publication Date |
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EP3754200A2 EP3754200A2 (en) | 2020-12-23 |
EP3754200A3 EP3754200A3 (en) | 2021-02-17 |
EP3754200B1 true EP3754200B1 (en) | 2021-12-08 |
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EP20200624.3A Active EP3754200B1 (en) | 2019-10-07 | 2019-10-07 | Scroll vacuum pump and assembly method |
EP19201749.9A Active EP3647599B1 (en) | 2019-10-07 | 2019-10-07 | Vacuum pump, scroll pump and method of manufacturing same |
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EP19201749.9A Active EP3647599B1 (en) | 2019-10-07 | 2019-10-07 | Vacuum pump, scroll pump and method of manufacturing same |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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EP3708840A3 (en) * | 2020-07-22 | 2021-03-10 | Pfeiffer Vacuum Technology AG | Check valve, vacuum apparatus and vacuum pump |
DE102020128369A1 (en) * | 2020-10-28 | 2022-04-28 | Leybold Gmbh | Process for operating a scroll pump and scroll pump |
EP4234932A3 (en) | 2023-06-15 | 2024-01-17 | Pfeiffer Vacuum Technology AG | Scroll pump with improved access to suction area for mounting purposes |
EP4219947A3 (en) | 2023-06-15 | 2024-02-07 | Pfeiffer Vacuum Technology AG | Scroll pump with optimized scroll geometry |
EP4253720A3 (en) | 2023-08-08 | 2024-06-19 | Pfeiffer Vacuum Technology AG | Scroll vacuum pump and scroll vacuum pump system |
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-
2019
- 2019-10-07 EP EP20200624.3A patent/EP3754200B1/en active Active
- 2019-10-07 EP EP19201749.9A patent/EP3647599B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP3647599A2 (en) | 2020-05-06 |
EP3754200A2 (en) | 2020-12-23 |
EP3647599A3 (en) | 2020-07-22 |
EP3647599B1 (en) | 2021-12-22 |
EP3754200A3 (en) | 2021-02-17 |
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