EP3701728A1 - Sound transducer arrangement - Google Patents
Sound transducer arrangementInfo
- Publication number
- EP3701728A1 EP3701728A1 EP18786303.0A EP18786303A EP3701728A1 EP 3701728 A1 EP3701728 A1 EP 3701728A1 EP 18786303 A EP18786303 A EP 18786303A EP 3701728 A1 EP3701728 A1 EP 3701728A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- sound transducer
- membrane
- mems
- mems sound
- cantilever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008878 coupling Effects 0.000 claims abstract description 77
- 238000010168 coupling process Methods 0.000 claims abstract description 77
- 238000005859 coupling reaction Methods 0.000 claims abstract description 77
- 238000001228 spectrum Methods 0.000 claims abstract description 6
- 239000012528 membrane Substances 0.000 claims description 80
- 239000000463 material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 4
- 125000006850 spacer group Chemical group 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/02—Loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Definitions
- the present invention relates to a MEMS sound transducer, in particular for generating and / or detecting sound waves in the audible wavelength spectrum, with a carrier, a membrane which is connected to the carrier and with respect to this along a lifting axis is deflected, at least one in the direction of the lifting axis of the diaphragm spaced piezo element for generating and / or detecting a deflection of the membrane, which comprises a first end connected to the carrier and a second end deflectable in the direction of the lifting axis, and a coupling element extending in the direction of the lifting axis between the Piezoelement and the membrane extends and connects the second end of the piezoelectric element with the membrane.
- a MEMS which has a membrane, a lifting structure which is coupled to the membrane, and at least two piezoelectric actuators, which have a plurality of mutually spaced connecting elements with a plurality of spaced-apart contact points Lifting structure are connected, wherein the at least two piezoelectric actuators are designed to cause a lifting movement of the lifting structure to deflect the membrane.
- a disadvantage of this MEMS is that a performance is limited.
- the object of the present invention is to improve the state of the art.
- a proposed MEMS sound transducer which can be operated, for example, to generate and / or detect sound waves in the audible wavelength spectrum.
- the MEMS sound transducer can be arranged, for example, in a smartphone, a headphone or another electrical device.
- the MEMS transducer can also be operated for generating and / or detecting ultrasonic waves.
- the MEMS sound transducer can then be arranged, for example, in medical and / or technical diagnostic devices, in distance sensors or the like.
- the MEMS sound transducer further comprises a carrier and a membrane, which is connected to the carrier and with respect to this along a lifting axis is deflectable.
- the membrane can be connected in its entire edge region with the carrier. With the help of the membrane, sound waves can be generated on the one hand.
- the membrane may be vibrated to vibrate the air overlying the membrane.
- the propagating vibrations are the sound waves that carry a sound.
- the membrane can also be set in vibration. When sound waves hit the membrane, it also begins to vibrate.
- the MEMS sound transducer has at least one piezo element spaced apart from the diaphragm in the direction of the stroke axis for generating and / or detecting a deflection of the membrane.
- the piezoelectric element can be deflected by means of an electrical voltage. If the piezoelectric element itself is deflected by a force acting on the piezoelectric element, it generates an electrical voltage.
- the piezo element comprises a first end connected to the carrier.
- the piezoelectric element has a deflectable in the direction of the Hubachse second end.
- the MEMS transducer In order to connect the second end of the piezoelectric element with the membrane, the MEMS transducer has a coupling element which extends in the direction the lifting axis extends between the piezoelectric element and the membrane.
- the coupling element By means of the coupling element, the deflection of the piezo element generated by the electrical voltage can be transmitted to the membrane for generating sound waves.
- the membrane By means of an electrical signal, the membrane can be offset by the coupling element in corresponding vibrations, so that, for example, a sound can be generated.
- the vibrations of the sound waves can also be transmitted from the diaphragm to the piezo element with the aid of the coupling element, which converts it into the electrical signal.
- the at least one piezoelectric element and the coupling element together form a cantilevered cantilever arm which has a clamped end formed by the first end of the piezoelectric element and a free end formed by the coupling element.
- the piezoelectric element can experience a high deflection along the stroke axis. For example, it can be used to generate sound waves with a high amplitude.
- the MEMS transducer has a high linearity.
- the piezoelectric element When the piezoelectric element is acted on by the electrical signal, the free end deflects. Characterized in that the piezoelectric element and the coupling element are designed as cantilever, the deflection of the free end is linearly proportional to the instantaneous amplitude of the electrical signal. The sound waves generated thereby also have a sound amplitude which is linearly proportional to the deflection of the free end.
- the sound waves generated from the electrical signal using the MEMS transducer according to the invention thus have a high linearity.
- the membrane Due to the design of the piezoelectric element and the coupling element as a cantilever, the membrane can be acted upon by the piezoelectric element with a high force. As a result, the membrane can advantageously be deflected or vibrated. Furthermore, the MEMS transducer has several cantilevers.
- the membrane to be deflected with a higher force.
- at least two cantilevers are arranged one behind the other in a plan view.
- the at least two cantilevers can thus be arranged in alignment one behind the other.
- the at least two cantilevers may be arranged to each other so that they extend on a common line.
- the MEMS sound transducer can be made space-saving, since the arrangement of the cantilevers one behind the other, a width of the MEMS transducer can be kept low.
- this allows the membrane to be linear, i. linear to the deflection of the two cantilevers, be deflected.
- the cantilever is connected in the region of its free end exclusively with the membrane. This allows the free end to swing freely without being affected by anything else in the vibration. The free end, for example, is not inhibited or braked by another component in the vibration.
- the high linearity of the MEMS transducer is possible.
- a high deflection of the membrane can be achieved with a high force.
- the free space in a plan view has a U-shape, so that the cantilever is spaced at its free end and its two longitudinal sides of the carrier.
- the clamped end of the cantilever arm makes contact with the carrier, so that the Long sides and the free end can swing freely relative to the carrier.
- the carrier has at least one recess in which the cantilever is arranged.
- the recess can be completely surrounded by the carrier.
- the recess may also extend completely in the direction of the lifting axis through the carrier, so that the recess has an upper and a lower opening.
- One of the two openings can be covered by the membrane.
- cantilevers which are arranged side by side in the plan view side. This can increase the force on the membrane.
- the membrane can be deflected evenly and in particular areally. As a result, the sound waves can be generated and / or recorded in a planar manner.
- cantilevers can be arranged in a square, a rectangle or another planar geometric figure or polygon. In each case a cantilever can be arranged in a corner of the said figure or the polygon.
- At least two cantilevers are oriented the same. Additionally or alternatively, at least two cantilevers may be oriented opposite to each other. As a result, the membrane can be advantageously deflected.
- Kragarme are arranged side by side, their longitudinal sides facing each other. By connecting the two cantilever arms by means of the coupling element, the force of the two cantilevers during the deflection can be combined.
- the coupling element is connected by means of a hinge connection with the piezoelectric element, so that the coupling element is rotatable relative to the piezoelectric element.
- the articulated connection can be, for example, an elastic or a flexible articulated connection.
- the piezoelectric element and the coupling element are formed centreintalaya.
- the piezoelectric element with the coupling element arranged thereon can be produced.
- the MEMS sound transducer is a MEMS loudspeaker. Additionally or alternatively, the MEMS sound transducer may also be a MEMS microphone. Further advantages of the invention are described in the following exemplary embodiments. Show it:
- FIG. 1 shows a perspective view of a MEMS sound transducer with a carrier, a piezoelement and a coupling element
- FIG. 2 shows a side sectional view of a MEMS sound transducer with a cantilever
- 3 is a side sectional view of a MEMS transducer with two oppositely oriented cantilevers
- FIG. 4 is a side sectional view of a MEMS transducer with two equally oriented cantilevers.
- Figure 5 is a plan view of a MEMS transducer with two
- Figure 6 is a plan view of a MEMS transducer with a
- Figure 7 is a side sectional view of a MEMS transducer with two cantilevers and a coupling plate and
- Figure 8 is a side sectional view of a MEMS transducer with a spacer element between the membrane and coupling elements.
- FIG. 1 shows a perspective view of a MEMS sound transducer 1.
- sound waves in the audible wavelength spectrum can be generated by means of the MEMS sound transducer 1 so that it can be operated as a MEMS loudspeaker.
- sound waves in the audible wavelength spectrum can additionally or alternatively also be detected so that it can be operated as a MEMS microphone.
- the MEMS sound transducer 1 may further be arranged, for example, in a smartphone, for example, to allow the phone or listening to music.
- the MEMS sound transducer 1 may for example also be arranged in a headphone.
- another field of application of the MEMS sound transducer 1 can also be the generation and / or detection of ultrasonic waves.
- the MEMS sound transducer 1 can be arranged, for example, in an ultrasonic sensor, for example a distance sensor.
- the MEMS sound transducer 1 further comprises a support 2, which can form a skeleton of the MEMS sound transducer 1.
- the carrier 2 may comprise, for example, a semiconductor substrate which may be made by an etching process.
- a membrane 3, not shown here may be arranged, which is for example fully connected to the carrier 2.
- the membrane 3 is deflectable along a lifting axis 4. With the help of the deflection of the membrane 3, the air arranged above it can be set in vibration, so that the sound waves are generated. However, the membrane 3 can also be vibrated by the oscillating air itself and thus deflected. The membrane 3 can thus detect the sound waves.
- the MEMS sound transducer 1 For detecting and / or generating the deflection of the diaphragm 3, the MEMS sound transducer 1 comprises at least one in the direction of the stroke axis 4 spaced from the diaphragm 3 piezoelectric element 5.
- the piezoelectric element 5 can be deflected by means of an electrical signal, which includes, for example, music, wherein the deflection is transmitted to the membrane 3, so that the sound waves are generated.
- the piezoelectric element 5 thus acts as a piezoelectric actuator.
- the MEMS sound transducer 1 is in this case as MEMS
- the piezoelectric element 5 If, in contrast, the piezoelectric element 5 is deflected by the membrane 3, the piezoelectric element 5 generates an electrical signal which corresponds to the sound waves received by the membrane 3. The piezoelectric element 5 thus acts as a piezoelectric sensor. The MEMS sound transducer 1 is then operated as a MEMS microphone. The piezoelectric element 5 also has a first end 6 which is connected to the carrier 2. Furthermore, the piezoelectric element 5 comprises a second end 7 which can be deflected in the direction of the lifting axis 4.
- the MEMS transducer 1 has a coupling element 8 which extends in the direction of the lifting axis 4 between the piezoelectric element 5 and the diaphragm 3 and connects the second end 7 of the piezoelectric element 5 to the diaphragm 3.
- the coupling element 8 thus transmits the deflection of the piezoelectric element 5 to the membrane 3 when the MEMS sound transducer 1 is operated as a loudspeaker.
- the coupling element 8 transmits the deflection of the diaphragm 3 to the piezoelectric element 5 when the MEMS sound transducer 1 is operated as a microphone.
- the carrier 2 and the coupling element 8 may be formed of a same material, such as a semiconductor material.
- the carrier 2 and the coupling element 8 in the direction of the lifting axis 4 may have the same thickness.
- the carrier 2 and the coupling element 8 may be formed together in a layer process, the cavities around the carrier 2 and / or around the coupling element 8 being removed by means of an etching process.
- the piezo element 5 may also be formed by means of the layer method with the carrier 2 and / or the coupling element 8.
- the at least one piezoelectric element 5 and the coupling element 8 together form a cantilevered cantilever 9.
- the cantilever 9 has a formed by the first end 6 of the piezoelectric element 5 clamped end 10 and a formed by the coupling element 8 free end 1 1.
- the piezoelectric element 5 can form a boom with the coupling element 8, which is connected to the carrier 2 at the clamped end 10.
- the free end 1 1 of the cantilever 9 can swing freely when it is connected exclusively to the diaphragm 3.
- the free end 1 1 has no connection to the carrier 2 and / or to a first opposite piezoelectric element 5.
- the free end 1 1 is decoupled from the carrier 2. As a result, the free end 1 1 swing freely.
- the free end 1 1 is not hindered in the vibration.
- the free end 1 1 can be deflected far, so that sound waves can be generated and / or detected with a high amplitude.
- the amplitude of the electrical signal can be converted into a linearly proportional amplitude of the sound waves.
- the MEMS sound transducer 1 is operated as a microphone.
- the amplitude of the sound waves can be converted into a linearly proportional electrical signal.
- the membrane 3 can be deflected with a high force, since the free end 1 1 can move without restriction.
- the coupling element 8 may further be arranged by means of a hinge connection 14a, 14b on the piezoelectric element 5, which may be formed elastically. Additionally or alternatively, the hinge connection 14a, 14b may also be flexible.
- the articulated connection 14a, 14b is preferably formed by at least one flexible and / or elastic connecting element.
- the piezoelectric element 5 is formed from a plurality of layers, in particular at least one piezoelectric layer, a carrier layer and / or an electrode layer.
- the at least one connecting element is preferably formed by one of these layers, in particular by the carrier layer.
- the MEMS sound transducer 1 may further according to the present embodiment of Figure 1 in a side view between the piezoelectric element 5 facing away from the side of the coupling element 8 and the carrier 2 a Free space 12 have. With the help of the free space 12 of the cantilever 9 can swing freely.
- the carrier 2 has a recess 13 in which the cantilever 9 is arranged.
- the recess 13 is completely surrounded by the carrier 2 in the present embodiment. Furthermore, the recess 13 extends completely in the direction of the lifting axis 4 through the carrier. 2
- FIG. 2 shows a side sectional view of the MEMS transducer 1, as shown for example in Figure 1.
- the membrane 3 is arranged here.
- the membrane 3 is arranged in the present embodiment on a support member 15 which is connected to the carrier 2.
- the membrane 3 can also be clamped on the carrier element 15.
- the carrier element 15 can thereby form a frame for the membrane 3.
- the membrane 3 may further in the region of an upper side 21 of the
- the MEMS sound transducer 1 can be arranged.
- the MEMS sound transducer 1 further has an underside 20 opposite the upper side 21.
- the piezoelectric element 5 may be arranged in the region of the underside 20.
- the coupling element 8 extends from the piezoelectric element 5 from the lower side 20 to the diaphragm 3 at the upper side 21.
- the MEMS sound transducer 1 has a coupling plate 16, which is arranged between the coupling element 8 and the membrane 3 and couples them to one another.
- the coupling plate 16 is arranged in the region of the upper side 21 of the MEMS sound transducer 1. With the help of the coupling plate 16, a flat power transmission between the coupling element 8 and the membrane 3 is given.
- FIG. 3 shows a further exemplary embodiment of a MEMS sound transducer 1 with two cantilever arms 9a, 9b.
- Each of the two cantilevers 9a, 9b has a coupling element 8a, 8b and a piezo element 5a, 5b. Between the two Koppelementen 8a, 8b of the free space 12 is arranged.
- the two cantilevers 9a, 9b are decoupled from each other.
- the two cantilevers 9a, 9b are connected only to the membrane 3.
- each coupling element 8a, 8b is assigned a coupling plate 16a, 16b, which connects the respective coupling element 8a, 8b to the membrane 3.
- the two cantilevers 9a, 9b are also oriented opposite to each other.
- the two free ends 11a, 11b of the two cantilever arms 9a, 9b face one another.
- the two cantilevers 9a, 9b are connected to each other only via the membrane 3.
- the two cantilevers 9a, 9b are arranged one behind the other here. Arranged one behind the other can mean that the at least two cantilevers 9a, 9b are offset in translation only in a transverse direction of the MEMS sound transducer 1.
- the at least two cantilevers 9a, 9b can be arranged for example on a line.
- the MEMS sound transducer 1 of the embodiment of the present Figure 3 has the recess 13 in which both cantilevers 9a, 9b are arranged.
- FIG. 4 shows a further exemplary embodiment of a MEMS sound transducer 1 with two similarly oriented cantilevers 9a, 9b.
- the MEMS sound transducer 1 may have two recesses 13a, 13b, wherein in each case a recess 13a, 13b, a cantilever 9a, 9b is arranged.
- the two recesses 13a, 13b are separated from one another by a center piece 17 of the carrier 2.
- At the center piece 17 of the second cantilever 9b is arranged.
- the first cantilever 9a and the second cantilever 9b are aligned identically to one another and / or oriented identically to one another.
- first cantilever 9a and the second cantilever 9b are offset in translation in the transverse direction of the MEMS transducer 1.
- the two cantilevers 9a, 9b are arranged one behind the other here. Arranged one behind the other can mean that the at least two cantilevers 9a, 9b are offset in translation only in a transverse direction of the MEMS sound transducer 1.
- the at least two cantilevers 9a, 9b can be arranged for example on a line. Thus, they have the same freedom of movement relative to one another, but engage the membrane 3 in different regions that are displaced in translation relative to one another.
- the membrane 3 extends away.
- a gap 18 is formed between the center piece 17 of the carrier 2 and the membrane 3 in the neutral position of the membrane 3.
- the membrane 3 is thus spaced from the center piece 17 of the carrier 2.
- the membrane 3 is decoupled from the middle piece 17.
- the carrier 2 in the region of the center piece 17 is formed as thick as in its edge region.
- the center piece 17 could also be formed thinner than the edge region, so that the gap 18 or the distance between the diaphragm 3 and centerpiece 17 is increased (see FIG. Alternatively, the membrane 3 could rest loosely on the center piece 17 in its neutral position.
- FIG. 5 shows a further exemplary embodiment of a MEMS sound transducer 1 in a top view with two cantilevers 9a, 9b.
- the two cantilevers 9a, 9b are arranged side by side and the same orientation.
- the two cantilever arms 9a, 9b furthermore have longitudinal sides 19a-19d, which are mutually parallel to each other.
- the first longitudinal side 19a of the first cantilever 9a and the second longitudinal side 19d of the second cantilever 9b face the carrier 2 and are spaced therefrom.
- the second longitudinal side 19b of the first cantilever 9a and the first longitudinal side 19c of the second cantilever 9b face each other and are spaced from each other.
- the free space 12 is thus arranged in a U-shape around the respective cantilever 9a, 9b.
- the free space 12 thus has in this plan view of Figure 5 is a U-shape by a respective cantilever 9a, 9b.
- the free space 12 around both cantilevers 9a, 9b has a W-shape.
- the two cantilever arms 9a, 9b have no direct connection to one another.
- the two cantilevers 9a, 9b are decoupled from each other.
- the two cantilevers 9a, 9b are only two connected to the membrane 3.
- the plurality of cantilever arms 9a, 9b can be arranged in a planar manner.
- at least three cantilevers 9 are necessary.
- two cantilever arms 9a, 9b may be arranged according to the embodiment shown here, and at least one further cantilever arm may be arranged behind one of the two cantilever arms 9a, 9b.
- at least two cantilevers 9 are arranged one behind the other.
- the three cantilevers 9 can then be arranged in the geometric figure of a right triangle, with each one cantilever 9 in a corner of the right triangle.
- the membrane 3 can be deflected flat.
- the three cantilevers 9 can also be arranged in an isosceles or equilateral triangle.
- cantilevers may also be arranged in another geometric figure, the number of corners of the geometric figure corresponding to the number of cantilevers.
- four cantilevers may be arranged in a square, a rectangle, a trapezoid, a rhombus or an irregular quadrangle.
- FIG. 6 shows a further exemplary embodiment of a MEMS sound transducer 1 with a cantilever 9 which comprises two piezo elements 5a, 5b and a coupling element 8.
- the two piezo elements 5a, 5b are arranged next to each other and oriented in the same direction. In the region of their second ends 7a, 7b, the two piezo elements 5a, 5b are interconnected by means of a coupling element 8.
- the membrane 3 can be deflected with a high force.
- the first longitudinal side 19 a and the second longitudinal side 19 b of the cantilever 9 are each spaced from the carrier 2.
- the free space 12 is U-shaped here and extends around the cantilever 9 around. As a result, the free end 1 1 of the cantilever 9 can deflect freely along the lifting axis 4.
- FIG. 7 shows a further exemplary embodiment of a MEMS sound transducer 1, which comprises two cantilevers 9a, 9b.
- the two cantilever arms 9a, 9b are oriented identically to one another, with the second cantilever 9b being arranged on the center piece 17 of the carrier 2.
- the two coupling elements 8a, 8b of the two cantilevers 9a, 9b are connected in the present embodiment by means of the same, in particular single, coupling plate 16 of the membrane 3.
- the coupling plate 16 extends in the transverse direction of the MEMS sound transducer 1 both via the first coupling element 8a and via the second coupling element 8b.
- the gap 18 is formed larger than the gap 18 of Figure 4 according to the present embodiment.
- the middle piece 17 is made thinner than the edge region of the carrier 2.
- the gap 18 is preferably about half of a thickness of the edge region of the carrier 2 in the direction of the lifting axis 4.
- the membrane 3 can deflect far in the direction of the center piece 17 without abutting on this.
- the middle piece 17 can reach as far as the coupling plate 16 so that the coupling plate 16 loosely rests on the middle piece 17 in the neutral position of the membrane 3.
- the middle piece 17 can therefore also be just as thick as the edge region of the carrier 2.
- the rigid coupling plate 16 extending over the middle piece 17 is decoupled from the middle piece 17, in particular in the neutral position of the membrane 3 spaced therefrom.
- the two cantilevers 9a, 9b may also have the joint connections 14a-d or connecting elements, which are not shown here.
- the coupling elements 8a, 8b of the cantilever arms 9a, 9b can rotate relative to the corresponding piezo elements 5a, 5b, so that the coupling elements 8a, 8b remain aligned parallel to this during the deflection of the diaphragm 3.
- the cantilevers 9a, 9b are arranged one behind the other here.
- the at least two cantilevers 9a, 9b can thus be arranged on a line.
- a plurality, for example three, four, cantilevers 9 can be arranged one behind the other, in particular on a line.
- at least one cantilever 9 can be arranged in addition to at least one of the cantilever arms 9a, 9b shown here.
- Two adjacently arranged cantilevers 9a, 9b are shown for example in FIG.
- FIG. 8 shows a further exemplary embodiment of a MEMS sound transducer 1. Between the membrane 3 and the two coupling elements 8a, 8b of this embodiment, a spacer element 22a, 22b is arranged in each case.
- the spacing elements 22a, 22b can have a thickness comparable to the carrier 2 and / or the carrier element 15 in the direction of the lifting axis 4.
- a sum of the thicknesses of the spacer elements 22a, 22b and a thickness of the coupling plate 16 may correspond to the thickness of the carrier element 15.
- the spacer elements 22a, 22b may, for example, be glued to them after a manufacturing process of the coupling elements 8a, 8b.
- the spacer elements 22a, 22b for example, the volume of the free spaces 12a, 12b and the recesses 13a, 13b may be increased. As a result, acoustic properties of the MEMS sound transducer 1 can be set.
- cantilever arms 9a, 9b can be arranged next to one another again, as shown for example in FIG. 5 and described therefor.
- the two cantilever arms 9a, 9b shown here are again arranged one behind the other.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102017125117.0A DE102017125117A1 (en) | 2017-10-26 | 2017-10-26 | Transducer array |
PCT/EP2018/077821 WO2019081220A1 (en) | 2017-10-26 | 2018-10-12 | Sound transducer arrangement |
Publications (1)
Publication Number | Publication Date |
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EP3701728A1 true EP3701728A1 (en) | 2020-09-02 |
Family
ID=63857937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP18786303.0A Pending EP3701728A1 (en) | 2017-10-26 | 2018-10-12 | Sound transducer arrangement |
Country Status (9)
Country | Link |
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US (1) | US11202155B2 (en) |
EP (1) | EP3701728A1 (en) |
KR (1) | KR20200090774A (en) |
CN (1) | CN111567063B (en) |
CA (1) | CA3080268A1 (en) |
DE (1) | DE102017125117A1 (en) |
SG (1) | SG11202003643VA (en) |
TW (1) | TW201924365A (en) |
WO (1) | WO2019081220A1 (en) |
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IT201800004758A1 (en) * | 2018-04-20 | 2019-10-20 | PIEZOELECTRIC MEMS ACOUSTIC TRANSDUCER AND RELATED MANUFACTURING PROCEDURE | |
IT201900007317A1 (en) | 2019-05-27 | 2020-11-27 | St Microelectronics Srl | MICROELECTROMECHANICAL PIEZOELECTRIC ACOUSTIC TRANSDUCER WITH IMPROVED CHARACTERISTICS AND RELATED MANUFACTURING PROCESS |
DE102019116080A1 (en) * | 2019-06-13 | 2020-12-17 | USound GmbH | MEMS sound transducer with a membrane made of polymer |
CN110289785B (en) * | 2019-07-12 | 2021-01-29 | 哈尔滨工业大学 | Three-degree-of-freedom piezoelectric directional adjustment device for power failure maintenance and platform control method |
IT202000015073A1 (en) | 2020-06-23 | 2021-12-23 | St Microelectronics Srl | MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER |
US11716576B2 (en) | 2021-02-19 | 2023-08-01 | Skyworks Solutions, Inc. | Dummy electrodes for performance improvement of piezoelectric microelectromechanical system microphones |
WO2022210606A1 (en) | 2021-03-29 | 2022-10-06 | 味の素株式会社 | Method for evaluating future risk of developing dementia |
US20220332568A1 (en) * | 2021-04-19 | 2022-10-20 | Skyworks Solutions, Inc. | Dual membrane piezoelectric microelectromechanical system microphone |
US11979712B2 (en) | 2021-07-01 | 2024-05-07 | Skyworks Solutions, Inc. | Extension structures in piezoelectric microelectromechanical system microphones |
EP4161098A4 (en) * | 2021-08-11 | 2023-05-10 | Shenzhen Shokz Co., Ltd. | Microphone |
DE102022212004A1 (en) * | 2022-11-11 | 2024-05-16 | Robert Bosch Gesellschaft mit beschränkter Haftung | Microelectromechanical loudspeaker |
Family Cites Families (10)
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NL1015280C2 (en) * | 2000-05-23 | 2001-11-26 | Cats Beheer B V | Drip dosing device and drip dosing system designed therewith. |
CN101112119B (en) | 2005-02-17 | 2011-11-30 | 松下电器产业株式会社 | Piezoelectric speaker and method for manufacturing the same |
US8139280B2 (en) * | 2009-07-17 | 2012-03-20 | Xingtao Wu | MEMS hierarchically-dimensioned deformable mirror |
TW201125372A (en) * | 2010-01-15 | 2011-07-16 | Univ Nat Chiao Tung | Piezoelectric panel speaker and optimal design method of the same |
JP2014160915A (en) * | 2013-02-19 | 2014-09-04 | Nec Casio Mobile Communications Ltd | Piezoelectric type electroacoustic transducer and electronic apparatus using the same |
US10603690B2 (en) | 2013-03-11 | 2020-03-31 | Apple Inc. | Portable electronic device using a tactile vibrator |
DE102014217798A1 (en) | 2014-09-05 | 2016-03-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Micromechanical piezoelectric actuators for realizing high forces and deflections |
DE102015116640A1 (en) | 2015-10-01 | 2017-04-06 | USound GmbH | MEMS printed circuit board module with integrated piezoelectric structure and sound transducer arrangement |
DE102015116707A1 (en) | 2015-10-01 | 2017-04-06 | USound GmbH | Flexible MEMS printed circuit board unit and sound transducer arrangement |
CN105721996B (en) | 2016-04-08 | 2020-01-14 | 深圳精拓创新科技有限公司 | Sound production structure unit, earphone comprising sound production structure unit and driving sound production method |
-
2017
- 2017-10-26 DE DE102017125117.0A patent/DE102017125117A1/en active Pending
-
2018
- 2018-10-12 WO PCT/EP2018/077821 patent/WO2019081220A1/en unknown
- 2018-10-12 KR KR1020207014316A patent/KR20200090774A/en active Search and Examination
- 2018-10-12 EP EP18786303.0A patent/EP3701728A1/en active Pending
- 2018-10-12 US US16/758,631 patent/US11202155B2/en active Active
- 2018-10-12 SG SG11202003643VA patent/SG11202003643VA/en unknown
- 2018-10-12 CN CN201880067116.3A patent/CN111567063B/en active Active
- 2018-10-12 CA CA3080268A patent/CA3080268A1/en not_active Abandoned
- 2018-10-19 TW TW107136941A patent/TW201924365A/en unknown
Also Published As
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SG11202003643VA (en) | 2020-05-28 |
CN111567063A (en) | 2020-08-21 |
CN111567063B (en) | 2022-06-28 |
DE102017125117A1 (en) | 2019-05-02 |
WO2019081220A1 (en) | 2019-05-02 |
US11202155B2 (en) | 2021-12-14 |
KR20200090774A (en) | 2020-07-29 |
TW201924365A (en) | 2019-06-16 |
CA3080268A1 (en) | 2019-05-02 |
US20200351595A1 (en) | 2020-11-05 |
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