EP3685420B1 - Tube mbfex - Google Patents

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Publication number
EP3685420B1
EP3685420B1 EP18779196.7A EP18779196A EP3685420B1 EP 3685420 B1 EP3685420 B1 EP 3685420B1 EP 18779196 A EP18779196 A EP 18779196A EP 3685420 B1 EP3685420 B1 EP 3685420B1
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EP
European Patent Office
Prior art keywords
anode
tube
mbfex
cathodes
mbfex tube
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EP18779196.7A
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German (de)
English (en)
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EP3685420A1 (fr
EP3685420C0 (fr
Inventor
Johannes Ringel
Bo Gao
Houman Jafari
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Cetteen GmbH
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Cetteen GmbH
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H01J35/13—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/064—Details of the emitter, e.g. material or structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/02—Electrical arrangements
    • H01J2235/023—Connecting of signals or tensions to or through the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/062—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/068—Multi-cathode assembly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1204—Cooling of the anode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1262—Circulating fluids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1262—Circulating fluids
    • H01J2235/1275—Circulating fluids characterised by the fluid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures
    • H01J35/106—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control

Definitions

  • MBFEX Multibeam Field Emission X-Ray
  • Such X-ray tubes are, for example, from the treatise: Yang Lu, Hengyong Yu, Guohua Cao, Jun Zhao, Ge Wang, Otto Zhou, Medical Physics 2010, Vol. 37, pp. 3773 - 3781 and the U.S. 7,751,528 B2 known, the cathodes containing carbon nanotubes for the field emission of electrons.
  • the MBFEX tubes described there are intended for use in computer tomographs in which, instead of rotating an x-ray emitter, sequential electrical switching of individual fixed x-ray emitters is carried out.
  • MBFEX tubes which in the U.S. 7,751,528 B2 are described, have fixed X-ray emitters, in each of which a cathode is associated with an anode.
  • a cathode is associated with an anode.
  • DE 10 2010 011661 shows a multifocus X-ray tube which has a fixed anode (A) and a plurality of fixed cathodes (KH, KL) in a vacuum vessel, which are connected to the cathode voltage source (KSV) via a plurality of cathode leads.
  • the cathodes can be designed as CNT field emitters, for example, and are aligned with the anode to generate X-ray sources.
  • the high voltage for beam generation can be applied to the anode while the cathodes are grounded.
  • the object of the invention is to provide an MBFEX tube that is simple to manufacture and structurally compact compared to the prior art and to expose the high-voltage bushings and the cathode leads to only a minimum of radiation from secondary electrons or ions.
  • this object is achieved by the proposed MBFEX tube having the features of claim 1 .
  • the object is also achieved by an arrangement made up of a plurality of MBFEX tubes according to claim 24.
  • the MBFEX tube can be manufactured according to claim 25 and can be operated according to claim 27.
  • the proposed MBFEX tube is intended for an X-ray device and has in a vacuum tube an anode which is fixedly arranged therein and is designed as a cold finger and a plurality of cathodes which are fixedly arranged in rows.
  • the vacuum tube has a plurality of cathode leads and no more than two high-voltage feedthroughs.
  • a coolant tube is arranged in a high-voltage bushing, in which another tube, that is to say the coolant inner tube, is arranged.
  • either the outer or the inner tube can function as a coolant supply tube, with the respective other tube being provided as a coolant discharge tube.
  • the coolant supply pipe and the coolant discharge pipe are provided for cooling the anode with a liquid coolant.
  • the cathodes are provided for the field emission of electrons and are each aligned with respect to their main electron emission direction to the common anode for generating X-ray sources.
  • the X-ray sources on the anode emit X-ray beams each having a main X-ray emission direction.
  • the X-ray sources are preferably arranged in rows on the anode.
  • the proposed MBFEX tube is based on the first idea of designing the anode of the proposed MBFEX tube itself as a cooling device in the form of a cold finger to solve the anode cooling problem that exists with MBFEX tubes according to the prior art.
  • the anode in the proposed MBFEX tube, is designed to be hollow, with the cavity being clamshell designed to allow both coolant supply and exhaust. For example, it acts the inner tube around the coolant supply tube and the outer tube concentrically surrounding the inner tube around the coolant discharge tube.
  • the anode including the coolant tubes is closed at one end.
  • the transition between the coolant supply pipe and the coolant discharge pipe is formed at this end of the elongated anode.
  • low-viscosity silicone oils in particular those with a boiling point of more than 450° C., are suitable as liquid coolants.
  • Insulating oils sold under the "Shell Diala” brand name can also be used as coolants to cool the anode.
  • the design of the anode as a cold finger not only corresponds to a particularly advantageous compact design, but also has the advantage that both the coolant discharge pipe and the coolant supply pipe can be connected to one of the two ends of the anode through a passage through the vacuum tube with a coolant Circulation device is connected.
  • the anode contains, for example, molybdenum and/or tungsten and optionally has a coating on the outer surface which is suitable for the emission of X-rays.
  • surface sections of the anode that are positioned at an angle relative to the elongated basic shape are formed by attachments of the anode.
  • the individual attachments have different angles of inclination in relation to the elongated base body of the anode.
  • This result can also be achieved by producing the surface sections mentioned by grinding the anode.
  • a coating of the anode can be located either on its entire surface or only on sections of the surface, namely on the attachments or in the cuts.
  • the anode of the x-ray tube is preferably designed as a non-rotating anode.
  • the anode can in principle also be rotated about its own axis.
  • the manufacture of small passages through a vacuum tube for X-ray devices can be easily accomplished in terms of manufacturing technology with regard to sealing against the outside atmosphere.
  • the cathode leads of the proposed MBFEX tube are provided as connections for the cathodes to an electrical voltage, typically at a level of a few kV, in particular up to 4 kV, and are designed, for example, as wire leads. If, for example, the vacuum tube is made of glass, cathode feed lines in the form of wires can be simply melted into the vacuum tube, with such feedthroughs having a high and long-lasting seal.
  • Focusing electrodes are fixedly arranged in the vacuum tube between the cathodes and the anode and can be connected to an electrical voltage, for example, via electrical leads in the cathode leads.
  • the focusing electrodes are located in the space between extraction grids, which are closely spaced from the cathodes, and the anode.
  • Structures of the extraction grating can be produced particularly precisely by laser processing.
  • a picosecond or femtosecond laser for structuring suitable for extraction grids The precise manufacture of the extraction grid is an essential prerequisite for the electrons emitted from the cathode to reach the anode with a high degree of transmission.
  • the electron source, including the extraction grid is exposed to thermal stress, among other things.
  • a special design of the extraction grid is preferred:
  • the extraction grid basically has a basic shape adapted to the shape of the associated electron source, ie cathode, in particular a rectangular basic shape.
  • the long sides of this rectangle are formed by so-called edge strips of the extraction grid.
  • the two edge strips are integrally connected to one another by grid strips running transversely to them.
  • the transition areas between the grid strips and the edge strips are of particular importance for the absorption of thermally induced deformations.
  • a curved transition between the grid strip and the edge strip has proven to be particularly advantageous. In this case, the curvatures at the two ends of the grid strip are preferably aligned in opposite directions.
  • each grid strip connects to the edge strip at a non-right angle.
  • an elongated S-shape of the grid strip it can also have any other shape suitable for length compensation.
  • arc-shaped, for example semi-circular, curved sections can be integrated into each grid strip, in particular near the transition areas to the edge strips. It is also possible to design sections of the grid strips with simple or Z-shaped bends, preferably in a rounded shape. In all cases, the distance between adjacent grid strips is preferably constant over the entire length of the grid strips.
  • the distance between each point of the extraction grid and the electron emitter is constant to a very good approximation not only when the MBFEX tube is cold, but also at all times during normal operation.
  • components of the focusing device can also be precisely processed with pulsed laser radiation.
  • the extraction grid can be made of steel, for example, in particular stainless steel.
  • the x-ray beams which can be generated at the x-ray sources on the anode, each have a direction with the maximum intensity of the emitted x-ray radiation, which corresponds to the respective main x-ray emission direction.
  • Such a main x-ray emission direction is present in all x-ray sources that are different from a spherical beam source.
  • the geometry of the X-ray beam detected by the X-ray detector depends not only on the focusing of the electron beam but also on the collimation of the X-ray radiation.
  • an X-ray window in the vacuum tube can be designed as a collimator device and/or a collimator device can be attached in front of an X-ray window on the vacuum tube.
  • fan-shaped X-ray beams fan beam
  • conical X-ray beams cone beam
  • Each individual X-ray source formed on the anode can, for example, be approximately in the form of a point, surface or line.
  • the cross-sectional profile of the X-rays in the isocenter of the X-ray system, in particular a tomography system, depends primarily on the collimation of the X-rays, in addition to the shape of the X-ray source.
  • the cathodes are preferably arranged in a fixed row in such a way that, in cooperation with the focusing electrodes on the anode, a likewise row-like arrangement of X-ray sources is produced.
  • the cathodes are intended for sequential electrical activation.
  • the proposed MBFEX tube can be used in a computer tomograph instead of a rotating X-ray source.
  • the high-voltage bushings and the cathode leads are arranged in a row and opposite the anode on the vacuum tube. This means that - viewed in the cross section of the MBFEX tube - the cathode supply lines and high-voltage bushings on the one hand and the anode on the other hand are diametrically opposed. With such an arrangement, the high voltage feedthroughs and cathode leads are exposed to only a minimum of secondary electron or ion radiation. Particularly advantageously, such an arrangement also allows the proposed MBFEX tube to be easily installed in an X-ray device, for example in the gantry of a computer tomograph.
  • the proposed MBFEX tube its cathodes have carbon nanotubes.
  • the very high electrical and thermal conductivity of carbon nanotubes enables a high current carrying capacity without significant heat development on the individual carbon nanotubes themselves.
  • Carbon nanotubes have a low field strength threshold of less than 2 V/m for the field emission of electrons.
  • the field strength threshold value for cathodes for emitting electrons, which have carbon nanotubes can be reduced even further by arranging the carbon nanotubes in the preferred vertical direction on the cathode surface. Since single-wall carbon nanotubes are semiconductors and multi-wall carbon nanotubes are metallic conductors, multi-wall carbon nanotubes are particularly suitable for applications as electron emitters on the cathodes of the proposed MBFEX tube. It is therefore particularly advantageous to operate the proposed MBFEX tube, which has cathodes containing carbon nanotubes, with a relatively low-power power supply.
  • nanorods also known generally as nanosticks
  • field emission cathodes are formed from such nanosticks as cathodes of the x-ray tube.
  • the nanosticks of the cathode are preferably made of a material which, with regard to the quantum mechanical field emission effect, has the lowest possible electron work function for the field emission of electrons.
  • the nanosticks here have a uniform or non-uniform composition and are designed either as hollow bodies, ie tubes, or solid.
  • the cathodes can have nanosticks of the same type or a mixture of different types of nanosticks, the type of nanosticks relating to their material composition and material modification.
  • Suitable materials in pure or doped form for the field emission of electrons are, in addition to single- or multi-walled carbon nanotubes, single- or multi-walled hetero-nitrogen-carbon nanotubes, rare earth borides, in particular lanthanum hexaboride and cerium hexaboride, metal oxides, in particular TiO 2 , MnO, ZnO and Al 2 O 3 , metal sulfides, in particular molybdenum sulfide, nitrides, in particular boron nitride, aluminum nitride, carbon nitride, gallium nitride, carbides, in particular silicon carbide, silicon.
  • Rod-shaped, optionally hollow, elements made of polymeric materials are also suitable as starting products for the production of the nanosticks, which emit electrons when the cathodes are in operation.
  • the nanosticks of the cathodes are optionally made from starting products which only partially, in particular in the form of a coating, have polymer materials.
  • the cathodes have nanosticks on the surface in a preferred vertical direction, ie in the direction of the anode.
  • a preferred vertical direction ie in the direction of the anode.
  • cathodes of the same and different types can be sequentially electrically controlled in any desired manner.
  • there may also be differences in focus. Together with properties such as the surface geometry of the individual cathodes, different electron beams and ultimately different X-ray beams can thus be generated.
  • the nanorods of the cathode have, for example, a length of less than 20 ⁇ m and a diameter of less than 10 nm, with a density of at least 10 6 nanorods per cm 2 being given, based on the area of the cathode.
  • a screen printing process is suitable for producing the cathode containing nanorods.
  • a particularly uniform layer thickness and a relatively smooth surface of the emitter can thus be achieved.
  • a layer designed for the emission of electrons with a thickness of less than 20 ⁇ m and a mean roughness value (Ra) of less than 2.5 ⁇ m is preferably formed by at least one type of cathode.
  • the high quality of the emitter layer, together with a constant distance to the extraction grid, contributes to a high transmission rate of the electron source of the X-ray tube of up to 90% and more.
  • the high transmission rate is also favored by the fact that the nanorods are mainly aligned in the vertical direction, caused by the screen printing process, in relation to the substrate surface on which the emitter layer is located.
  • cathodes with carbon nanotubes and completely different types of cathodes for example cathodes with tungsten tips, which work in a different, fundamentally known manner.
  • Dispenser cathodes can also be used within the MBFEX tube.
  • the complete emitter arrangement preferably has the following layer structure:
  • a flat carrier element in particular in the form of a ceramic circuit board, is provided as the bottom layer of the emitter arrangement.
  • the ceramic circuit board is made of corundum, for example.
  • the emitter layer is on the ceramic circuit board.
  • the ceramic circuit board is covered by a metal intermediate plate, which is also known as a spacer.
  • a grid plate including the extraction grid assigned to the individual emitters.
  • the grid plate in turn is covered by a plate made of electrically insulating material, in particular ceramic, which is generally referred to as the upper insulating layer.
  • upper layer has no connection with the orientation of the electron emitter in space, but simply means that the named layer is arranged closest to the anode of the X-ray tube.
  • the layer structure described is also suitable for other X-ray tubes that are not claimed as a whole.
  • the anode at least partially encloses a designated examination area.
  • the x-ray sources and the main x-ray emission directions also at least partially enclose the examination area.
  • the examination area is provided for positioning an examination object in an X-ray device.
  • the MBFEX tube is curved as a whole, which means that even as a single X-ray tube it partially encloses the examination area.
  • a more extensive enclosing of the examination area can be realized in various ways:
  • the MBFEX tube can extend over a very large angle, in extreme cases up to almost 360°, ie it can have an almost closed ring shape.
  • the individual MBFEX tubes can either be curved or straight. In the latter case, the arrangement of all MBFEX tubes has a polygonal shape. Incomplete polygon shapes or ring shapes, such as L-shapes, U-shapes or semicircular shapes, can also be produced by combining several MBFEX tubes, with not all MBFEX tubes of such arrangements necessarily having the same shape.
  • the focal spot blur can be reduced in a computer tomograph compared to conventional designs and a higher and more constant image resolution can be achieved, especially if the anode is designed as a circular arc. If the anode is in the form of an arc of a circle, then all of the X-rays are aligned equally to an examination object. Among other things, by minimizing the number of high-voltage bushings, the examination object can be X-rayed from practically all circumferential positions using a single MBFEX tube.
  • the proposed MBFEX tube is characterized by a compact and robust design that is particularly easy to produce compared to the prior art and is particularly suitable for computer tomographs to replace a rotating X-ray source.
  • the vacuum tube in which the X-rays are generated is preferably made of metal.
  • successive X-ray pulses of different wavelengths can be generated by the MBFEX tube in a preferred process.
  • different materials within the examination volume can be distinguished from one another with a particularly high degree of reliability and at the same time a short recording time.
  • All the exemplary embodiments of the proposed MBFEX tube 1 explained below are intended for a computer tomograph and have a vacuum tube 20 with an X-ray window 21 .
  • An anode 30 designed as a cold finger is fixedly arranged in the vacuum tube 20 of all exemplary embodiments.
  • the anode 30 contains tungsten.
  • the first two exemplary embodiments of the proposed MBFEX tube show in the vacuum tube 20 a plurality of cathodes 40 of a uniform type arranged in a fixed manner and the exemplary embodiment 21 such cathodes 41 , 42 of two different types, the cathodes 40 , 41 , 42 being provided for the field emission of electrons.
  • the cathodes 40, 41, 42 are each aligned with the common anode 30 for generating X-ray sources Q with respect to the electron main emission direction e of the electron beams E that can be generated.
  • the cathodes 40, 41, 42 are fixed in rows in such a way that on the anode 30 an arrangement of X-ray sources Q can also be produced in rows.
  • the cathodes 40, 41, 42 are provided for sequential electrical control.
  • the x-ray bundles X each have a main x-ray emission direction x .
  • a grating device 43 is aligned with each x-ray source Q in each of the exemplary embodiments.
  • the grid devices 43 are fixedly arranged in the vacuum tube 20 between the cathodes 40, 41, 42 and the anode 30.
  • FIG. Each grating device 43 has an extraction grating.
  • the extraction grids are arranged at a short distance in front of the cathodes 40, 41, 42 and are provided for the extraction of electrons in the form of an electron beam E from the cathodes 40, 41, 42 .
  • the extraction grids are in the Figures 1 to 4 not marked.
  • the vacuum tube 20 of all exemplary embodiments in turn has a plurality of cathode feed lines 50 and two high-voltage bushings 51, 52 .
  • the cathode leads 50 are provided as connections for the cathodes and the grid devices 43 to an electrical voltage of a few kV and are designed as wire leads.
  • the high-voltage bushings 51, 52 are provided for the end connection of the anode to an electrical high voltage of several 10 kV. Typically, the high voltage is in the range of 10 kV to 420 kV. Values in the upper range of this interval are selected, for example, in X-ray systems for examining larger objects in the non-medical field.
  • a coolant discharge pipe 31 with an internal coolant supply pipe 32 is guided through a high-voltage bushing 52 .
  • the coolant discharge pipe 31 and the coolant supply pipe 32 are provided for cooling the anode 30 with a liquid, electrically non-conductive coolant by means of a circulating device.
  • the cathodes 40, 41, 42 in cooperation with the anode 30 can generate X-ray pulses of uniform or alternating energy.
  • An example is in 29 the time course of an emitter current EC, an anode current AC, and the grid-emitter voltage GEV are recorded.
  • the diagram after 29 shows actual measurement data.
  • the high transmittance of approx. 90%, which indicates the ratio of anode current AC to emitter current EC, should be emphasized.
  • the anode current AC 52.2 mA and the emitter current EC 58.2 mA determined from the measured voltage values. This extremely favorable ratio between the anode current AC and the emitter current EC results primarily from the high quality of the emitter arrangement 44 of the x-ray tube 1, which is described in more detail below.
  • the first embodiment of the proposed MBFEX tube 1 is based on the 1 and the 2 explained in more detail.
  • the anode 30 is designed as an arc of a circle.
  • the 1 Figure 12 shows a schematic top view of the anode 30 with the vacuum tube 20, the grid devices 43 and the high voltage feedthroughs 51, 52 not visible.
  • the 1 is not to scale.
  • the anode 30, the cathodes 40 and the grid devices 43 are arranged within the vacuum tube 20.
  • the cathodes 40 are located on a carrier 6 made of metallized ceramic.
  • the anode 30 is fixed in the vacuum tube 20 independently of the cathodes 40 .
  • the x-ray sources Q are arranged in such a way that the x-ray beams X generated are aligned with an examination region U in their respective main x-ray emission directions x .
  • the examination area U is provided for the positioning of an examination object, in particular a patient.
  • the 2 shows the proposed MBFEX tube 1 in its first embodiment in a cross-sectional side view.
  • the coolant supply pipe 32 the cathode leads 50 and the high-voltage bushings 51, 52 are not visible.
  • the cathodes 40 have multi-walled carbon nanotubes on their surface in a preferred vertical direction. In this context, "perpendicular" is to be understood as meaning an orientation directed towards the anode 30 .
  • the second embodiment of the proposed MBFEX tube 1 is based on the 3 and the 4 explained in more detail.
  • the second exemplary embodiment differs from the first exemplary embodiment only in that the anode 30 is linear.
  • the 3 shows a partially sectioned view of the MBFEX tube 1 of the second embodiment.
  • the coolant supply tube 32 the cathodes 40 and the grid devices 43 are not visible.
  • the cathode leads 50 and the high-voltage bushings 51, 52 are arranged in a row on the vacuum tube 20 and the anode 30 opposite.
  • the 4 shows the proposed MBFEX tube 1 in its second embodiment with a sectional view of the anode 30.
  • the cathodes 40 and grid devices 43 are also not visible.
  • Individual features of the high voltage bushing 52 are running out figure 5 out.
  • the grating device 43 includes by definition at least one extraction grid electrode 71, 73, 74 and at least one form of focusing electrodes 72, 75, 76.
  • the extraction grid electrodes 71,73,74 are fixed directly above the cathodes 40,41,42 and are provided for field extraction of electrons from the cathodes 40,41,42 .
  • the focusing electrodes 72, 75, 76 are also fixed directly above each extraction grid electrode 71, 73, 74 , facing the anode 6 and provided for focusing the extracted electrons as an electron beam E onto the respective X-ray source Q to be generated.
  • Extraction grid electrodes 71, 73, 74 are independently grounded from focusing electrodes 72, 75, 76 .
  • the focusing electrodes 72, 75, 76 can be operated as passive or active focusing electrodes.
  • the grid device 43 has an extraction grid electrode 71 common to all cathodes 40 , with each individual cathode 40 being separately associated with an individual focusing electrode 72 .
  • the grid device 43 has an extraction grid electrode 73 of a first form common to the cathodes 41 of the first kind and an extraction grid electrode 74 of a second form common to the cathodes 42 of the second kind, each individual cathode 41 of the first kind separately having a single focusing electrode 75 of a first form and each individual cathode 42 of the second type is separately associated with an individual focusing electrode 76 of a second form.
  • the extraction grid electrodes 71, 73, 74 and the focusing electrodes 72, 75, 76 are shown in FIGS Figures 1 to 4 not marked.
  • a time-constant potential of typically 40 KV is applied to the anode 6 , with a uniformly pulsed electrical direct current of 30 mA flowing between the anode 6 and the respectively connected cathode 40, 41 .
  • a potential of typically 120 kV which is constant over time is present on the relevant anode, with a uniformly pulsed electrical direct current of the order of 0.5 mA flowing between the anode 6 and the respective switched cathode 40, 42 .
  • ECS Electronic Control System
  • CPS Cathode Power Supply
  • APS Anode Power Supply
  • the current regulator, the device control, the electronic control system, the cathode high-voltage source, the anode high-voltage source and the device control are part of an electronic control device.
  • the current regulator, the device control and the electronic control system constitute an electronic control system.
  • the electronic control device has a main electric circuit and a control circuit, the main circuit and the control circuit being integrated in a DC circuit.
  • the main circuit the anode high-voltage source with the anode 6 and the current regulator, the current regulator with the device controller, the device controller with the electronic control system, the electronic control system with the cathode high-voltage source and the cathode high-voltage source in parallel connection with the cathode 40, 41, 42 as well as with the respective grid device 43 electrically connected.
  • the anode high-voltage source is electrically linked to the control system via feedback.
  • control system is provided both for the sequential switching of the cathodes 40, 41, 42, for the regulation of the extraction grid electrodes 71, 73, 74 and the focusing electrodes 72, 76, 56 of the respective grid device 43 and for the regulation of the main circuit current, whereby on The electrical voltage of the cathode high-voltage source can be adapted to the main circuit current specified with the control system.
  • cathodes 41, 42 of the MBFEX tube 1 are outlined as an example. Both the cathodes 41 of the first type and the cathodes 42 of the second type have Carbon nanotubes, but differ in terms of their geometry.
  • the cathodes 41, 42 are arranged in rows and alternately offset in the vacuum tube 20 , the number of cathodes 41 of the first type being equal to the number of cathodes 42 of the second type.
  • a grating device 43 and thus an x-ray source Q can each be assigned a cathode 41 of the first form and a cathode 42 of the second form.
  • the cathodes 41 of the first type or the cathodes 42 of the second type can be sequentially controlled in any way. In this way, dual-dose X-ray images can be taken with the MBFEX tube 1 .
  • MBFEX tubes 1 can be combined to form a rigid, ring-shaped or polygonal arrangement, which replaces a rotating arrangement in a computer tomograph. This applies to any configuration of MBFEX tubes 1 that has already been described and that will be explained below.
  • FIGS Figures 12 to 20 A layered structure of an emitter arrangement 44 of an MBFEX tube 1 is shown in FIGS Figures 12 to 20 illustrated.
  • the emitter arrangement 44 comprises a ceramic circuit board 45 made of corundum as the bottom layer.
  • the cathodes 40 are located on a conductive coating of the ceramic circuit board 45 and are produced with high geometric precision using the screen printing process.
  • Conductor structures 66 can be seen on the back of the ceramic circuit board 45 .
  • a metal intermediate plate 46 is placed on the ceramic circuit board 45 .
  • This intermediate metal plate 46 has rectangular openings 61 for the cathodes 40 .
  • the metal intermediate plate 46 has strip-shaped openings 62 that are narrower and longer than the openings 61 on the longitudinal sides of the openings 61.
  • the strip-shaped openings 62 have a function in degassing the vacuum tube 20. This applies both to the preparation for operation as well as for the ongoing operation of the X-ray tube 1, each in cooperation with the ceramic circuit board 45.
  • the internal openings 64 which are very close to the cathodes 40 , contribute to the fact that during the emission of electrons, gas can also be discharged in an extremely low concentration down to individual particles to the rear of the emitter arrangement 44 . This makes a significant contribution to avoiding flashovers within the vacuum tube 20 .
  • the relatively large strip-shaped openings 65 are required to a greater extent for sucking off gas during the production of the X-ray tube 1, in particular during baking.
  • the metal intermediate plate 46 has, as an integral part, a connection strip 63 as an electrical connection led from the emitter arrangement 44 to the outside.
  • a grid sheet 47 which includes the extraction grid electrodes 71 , each of which corresponds to a cathode with a precisely defined distance of 0.224 mm (in the example according to 12 ) are superior.
  • the extraction grid electrode 71 has a rectangular shape, the long sides of which are formed by completely straight edge strips 78 .
  • the two edge strips are connected to one another by a large number of lattice strips 77 , so that the lattice structure results overall.
  • the grid strips 77 are not completely straight. Rather, a rounded transition area 79 is formed at the two ends of each grid strip 77, ie at the transition to the edge strip 78 .
  • the rounded transition areas 79 ensure that thermally induced deformations do not occur a change in the spacing between the cathode 40 and the extraction grid 71 , but are accommodated within the in-plane extraction grid 71 without affecting the emission characteristics of the emitter assembly 44 .
  • the grid plate 47 is covered by an upper insulating layer 48 in the form of a plate made of a ceramic material, with which the emitter arrangement 44 is completed.
  • the upper insulating layer 48 has, as shown in FIG 12 shows openings 49 , which are adapted to the shape of the cathodes 40 to allow the passage of electrons.
  • Geometric features of the cathode 40 are shown in 28 shown. To a good approximation, the cathode 40 has a cuboid structure. Over the entire electron-emitting surface of the cathode 40 , there are hardly any fluctuations in the distance between the cathode 40 and the 28 not shown extraction grid electrode 71 given. For comparison is in 28 the surface structure of a conventional cathode produced by the process of electrophoretic deposition (EPD) is indicated by dashed lines. There is no question of a smooth surface in this comparison example. Rather, there are pronounced peaks within the surface of the emission cathode, particularly at the edges of the cathode produced using the EPD process.
  • EPD electrophoretic deposition
  • the electrons are mainly emitted at these tips. On the one hand, this limits the service life and, on the other hand, the transmission rate of electrons.
  • the cathode 40 used in the X-ray tube 1 according to the invention emits electrons in every area section of its surface with an almost constant release rate.
  • FIGS Figures 26 and 27 An exemplary embodiment of an anode 30 which cooperates with the emitter arrangement 44 is shown in FIGS Figures 26 and 27 illustrated.
  • Each of these attachments 33 has a surface 34 which is inclined relative to the base body and is coated with tungsten or another material suitable for X-ray sources.
  • the inclinations of the various surfaces 34 differ from one another in such a way that - as in 27 is indicated - the emitted X-ray radiation X is focused in the direction of the isocenter of the X-ray emitter arrangement 10 lying in the examination area U.

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • X-Ray Techniques (AREA)

Claims (27)

  1. Tube émetteur de rayon X à faisceau multiple (Multibeam Field Emission X-Ray tube), tube MBFEX (1), pour un appareil radiologique, qui dans un tube à vide (20) comporte une anode (30), placée de manière fixe dans celui-ci, également conçue sous la forme d'un doigt froid et une pluralité de cathodes (40, 41, 42) placées de manière fixe, le tube à vide (20) comportant une pluralité de conducteurs de cathodes (50) et pas plus de deux traversées à haute-tension (51,52), à travers une traversée à haute-tension (52) étant guidé un tube (31) d'agent de refroidissement pourvu d'un tube intérieur (32) d'agent de refroidissement à placement interne, le tube (31) d'agent de refroidissement et le tube intérieur (32) d'agent de refroidissement étant prévus pour refroidir l'anode (30) à l'aide d'un agent de refroidissement liquide, les cathodes (40, 41, 42) étant prévues pour l'émission par effet de champ d'électrons et étant respectivement orientées vers l'anode (30), pour générer des sources de rayons X (Q), les conducteurs de cathodes (50) et les traversées à haute-tension (51,52) étant placés sur une rangée et au vis-à-vis de l'anode (30) sur le tube à vide (20).
  2. Tube MBFEX (1) selon la revendication 1, caractérisé en ce que les sources de rayons X (Q.) sont disposées en rangée sur l'anode (30).
  3. Tube MBFEX (1) selon la revendication 2, caractérisé en ce que les sources de rayons X (Q) se trouvent chaque fois sur une partie de surface de l'anode (30) placée en oblique par apport à l'axe médian de l'anode (30) .
  4. Tube MBFEX (1) selon la revendication 3, caractérisé en ce que les parties de surface placées en oblique sont formées d'embouts de l'anode (30).
  5. Tube MBFEX (1) selon la revendication 3, caractérisé en ce que les parties de surface placées en oblique sont formées par des meulages dans l'anode (30).
  6. Tube MBFEX (1) selon la revendication 4 ou 5, caractérisé en ce que les parties de surface placées en oblique de l'anode (30) sont revêtues.
  7. Tube MBFEX (1) selon l'une quelconque des revendications 1 à 6, caractérisé en ce que les cathodes (40, 41, 42) comportent des nanotiges.
  8. Tube MBFEX (1) selon la revendication 7, caractérisé en ce qu'au moins une partie des nanotiges est formée de nanotubes en carbone, à parois simples ou multiples ou d'hétéro-nanotubes carbone/azote à parois simples ou multiples.
  9. Tube MBFEX (1) selon la revendication 7 ou 8, caractérisé en ce qu'au moins une partie des nanotiges contient des borures de terres rares, des oxydes métalliques, des sulfures métalliques, des nitrures, des carbures ou du silicium.
  10. Tube MBFEX (1) selon l'une quelconque des revendications 7 à 9, caractérisé en ce que les nanotiges présentent une longueur de moins de 20 µm et un diamètre de moins de 10 nm, une densité rapportée à la surface de la cathode (40, 41, 42) d'au moins 106 nanotiges par cm2 étant donnée.
  11. Tube MBFEX (1) selon l'une quelconque des revendications 1 à 10, caractérisé en ce qu'entre au moins une grille d'extraction (71) se trouvant au-dessus des cathodes (40,41,42) et l'anode (30) sont placées des électrodes de focalisation (72).
  12. Tube MBFEX (1) selon la revendication 11, caractérisé en ce que les électrodes de focalisation (72) sont mises à la terre séparément de la grille d'extraction (71) .
  13. Tube MBFEX (1) selon l'une quelconque des revendications 11 ou 12, caractérisé en ce que la grille d'extraction (71) décrit une forme rectangulaire, avec deux bandes marginales (78) parallèles l'une à l'autre, qui sont assemblées l'une à l'autre en monobloc par des bandes de grille (77), aux passages entre les bandes de grille (77) et les bandes marginales (78) étant conçues des zones de passage (79) arrondies, avec lesquelles les bandes de grille (77) décrivent respectivement une forme de S allongée.
  14. Tube MBFEX (1) selon l'une quelconque des revendications 1 à 13, caractérisé en ce que le tube à vide (20) comporte différentes sortes de cathodes (40, 41, 42) qui se différencient au niveau d'au moins un paramètre d'un groupe de paramètres, le groupe de paramètres comprenant des paramètres géométriques et des paramètres de matières.
  15. Tube MBFEX (1) selon l'une quelconque des revendications 1 à 14, caractérisé en ce qu'au moins par une sorte de cathodes (40,41,42) est formée une couche conçue pour l'émission d'électrons, d'une épaisseur de moins de 20 µm et d'une rugosité moyenne Ra de moins de 2,5 pm.
  16. Tube MBFEX (1) selon l'une quelconque des revendications 1 à 15, caractérisé en ce qu'une pluralité de cathodes (40,41,42) sont placées sur un élément de support (45) plan.
  17. Tube MBFEX (1) selon la revendication 16, caractérisé en ce que l'élément de support plan comporte des orifices (64) en forme de bandes d'un premier type et des orifices (65) en forme de bandes d'un deuxième type, un groupe d'orifices (64) en forme de bandes du premier type étant placé plus près à côté d'une cathode (40) qu'un groupe d'orifices (65) en forme de bandes du deuxième type, et les orifices (64) en formes de bandes du premier type étant plus étroits que les orifices (65) en forme de bandes du deuxième type.
  18. Tube MBFEX (1) selon l'une quelconque des revendications 16 ou 17, caractérisé en ce que l'élément de support (45) plan est une partie d'un ensemble émetteur (44) de forme stratifiée, lequel comporte par ailleurs une plaque intermédiaire (46) métallique, une tôle grillagée (47) incluant la grille d'extraction (71), ainsi qu'une couche isolante (48) supérieure.
  19. Tube MBFEX (1) selon la revendication 18, caractérisé en ce que des orifices (64,65) en forme de bandes de l'élément de support (45) sont alignés au moins en partie avec des orifices (62) dans la plaque intermédiaire (46) métallique.
  20. Tube MBFEX (1) selon l'une quelconque des revendications 1 à 19, caractérisé en ce que l'anode (30) est conçue pour alimenter et évacuer de part et d'autre de l'agent de refroidissement, sur les deux extrémités de l'anode (30) étant placée chaque fois une alimentation d'agent de refroidissement et une évacuation d'agent de refroidissement.
  21. Tube MBFEX (1) selon l'une quelconque des revendications 1 à 20, caractérisé en ce que l'anode (30) entoure au moins en partie une zone d'examen (U), les sources de rayons X (Q) entourant également au moins en partie la zone d'examen (U).
  22. Tube MBFEX (1) selon la revendication 21, caractérisé en ce que l'anode (30) est conçue de forme curviligne.
  23. Tube MBFEX (1) selon l'une quelconque des revendications 1 à 21, caractérisé en ce que l'anode (30) est conçue sous la forme d'une anode rotative.
  24. Ensemble de plusieurs tubes MBFEX (1) conçus selon l'une quelconque des revendications 1 à 23, par la totalité des tubes MBFEX (1) étant créée une forme annulaire, arquée, polygonale, une forme de L ou une forme de U entourant au moins en partie la zone d'examen (U)
  25. Procédé, destiné à fabriquer un tube MBFEX (1) selon l'une quelconque des revendications 1 à 23, un tube à vide (20), une anode (30) à placer dans le tube à vide (20) et des cathodes (40, 41, 42) conçues pour l'émission par effet de champ d'électrons, à placer également dans le tube à vide (20) étant mis à disposition, et au moins un élément, à placer entre les cathodes (40, 41, 42) et l'anode (30), lequel est sélectionné dans le groupe d'éléments qui comprend une grille d'extraction (71) et une électrode de focalisation (72) étant usiné au laser.
  26. Procédé selon la revendication 25, caractérisé en ce que l'usinage au laser de l'élément (71, 72) s'effectue par un cadencement en picosecondes ou en femtosecondes du laser.
  27. Procédé opérationnel d'un tube MBFEX (1) selon l'une quelconque des revendications 1 à 23, l'anode (30) étant utilisée pour l'émission d'impulsions successives de rayons X de différentes longueurs d'onde.
EP18779196.7A 2017-09-20 2018-09-20 Tube mbfex Active EP3685420B1 (fr)

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DE102017008810.1A DE102017008810A1 (de) 2017-09-20 2017-09-20 MBFEX-Röhre
PCT/EP2018/025239 WO2019057338A1 (fr) 2017-09-20 2018-09-20 Tube mbfex

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EP3685420B1 true EP3685420B1 (fr) 2023-06-28
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JP (1) JP7015383B2 (fr)
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DE (1) DE102017008810A1 (fr)
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ES2957611T3 (es) 2024-01-23
EP3685420A1 (fr) 2020-07-29
JP7015383B2 (ja) 2022-02-02
US20200312601A1 (en) 2020-10-01
CN111448637A (zh) 2020-07-24
CN111448637B (zh) 2023-07-04
JP2020533767A (ja) 2020-11-19
DE102017008810A1 (de) 2019-03-21
EP3685420C0 (fr) 2023-06-28
US11183357B2 (en) 2021-11-23
WO2019057338A1 (fr) 2019-03-28

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