EP3636879B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP3636879B1
EP3636879B1 EP19210270.5A EP19210270A EP3636879B1 EP 3636879 B1 EP3636879 B1 EP 3636879B1 EP 19210270 A EP19210270 A EP 19210270A EP 3636879 B1 EP3636879 B1 EP 3636879B1
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Prior art keywords
pump
vacuum pump
channel
channel section
accordance
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German (de)
French (fr)
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EP3636879A1 (en
Inventor
Sebastian Oberbeck
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/10—Manufacture by removing material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/13—Noise

Definitions

  • the common channel section can, for example, comprise an orifice channel section which is arranged, for example, transversely, in particular perpendicularly, to at least one separate channel section of one of the channels and / or to another section of the common channel section, in particular a longer section or a main section.
  • the mouth channel section can be defined, for example, by a bore, in particular the other section of the common channel section being defined by a bore running transversely to this bore.
  • the mouth channel section can generally run, for example, at least substantially parallel to an axis of rotation of the pump body.
  • the first channel runs from the gas ballast valve 24 to the orifice 28 and comprises its own channel section 30 and a common channel section 32.
  • the second channel runs from the connection 26 to the orifice 28 and includes its own channel section 34 and the common channel section 32.
  • the wall 21 axially delimiting the pump chamber 20 is formed in one piece with the housing component 14.
  • a separate design would also be possible, for example.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Description

Die vorliegende Erfindung betrifft eine Vakuumpumpe umfassend: einen Pumpraum, in dem mittels eines Pumpkörpers ein zu förderndes Gas von einem Einlass zu einem Auslass förderbar ist; einen ersten Kanal, der in den Pumpraum mündet, zum Zuführen eines Ballastgases in den Pumpraum, und einen zweiten Kanal, der in den Pumpraum mündet, zum Zuführen eines weiteren, insbesondere vom zu fördernden Gas verschiedenen, Gases in den Pumpraum. Derartige Vakuumpumpen sind etwa in der US 2005/0163632 A1 und der EP3 483 448 A1 offenbart.The present invention relates to a vacuum pump comprising: a pump chamber in which a gas to be conveyed can be conveyed from an inlet to an outlet by means of a pump body; a first channel, which opens into the pump chamber, for feeding a ballast gas into the pump chamber, and a second channel, which discharges into the pump chamber, for feeding a further gas, in particular different from the gas to be pumped, into the pump chamber. Such vacuum pumps are about in US 2005/0163632 A1 and the EP3 483 448 A1 disclosed.

Bei gängigen, insbesondere einstufigen, Drehschieberpumpen ist eine Geräuschdämpfungseinrichtung vorgesehen, durch die Luft mit atmosphärischem Druck über einen Kanal, der eine Verengung, insbesondere eine Düse, zur Volumenstromregulierung enthält, zum Pumpraum der Pumpe geführt wird. Ein weiterer Kanal führt ebenfalls Luft oder Gas als Gasballast, z.B. zur Erhöhung der Wasserdampfkapazität, in den Pumpraum.In common, in particular single-stage, rotary vane pumps, a noise dampening device is provided through which air at atmospheric pressure is guided to the pump chamber of the pump via a channel containing a constriction, in particular a nozzle, for volume flow regulation. Another channel also leads air or gas as gas ballast, e.g. to increase the water vapor capacity, into the pump room.

Es ist eine Aufgabe der Erfindung, die Herstellung einer Vakuumpumpe der eingangs genannten Art zu vereinfachen.It is an object of the invention to simplify the production of a vacuum pump of the type mentioned at the beginning.

Diese Aufgabe wird durch eine Vakuumpumpe mit den Merkmalen nach Anspruch 1 gelöst, und insbesondere dadurch, dass die Kanäle eine gemeinsame Mündung in den Pumpraum aufweisen.This object is achieved by a vacuum pump with the features according to claim 1, and in particular in that the channels have a common opening into the pump chamber.

Es muss somit nur eine Mündung hergestellt werden, wodurch sich Bohrungsvorgänge einsparen lassen. Die Herstellung wird hierdurch vereinfacht und kostengünstiger.Only one mouth has to be made, which saves drilling operations. This simplifies production and makes it more cost-effective.

Außerdem hat sich überraschenderweise gezeigt, dass die erfindungsgemäße Pumpe in bestimmten Betriebszuständen leiser arbeitet. Dies wird dadurch erklärt, dass das Ballastgas durch den zweiten Kanal entweichen kann, wenn der Druck des Ballastgases zu groß ist. So wird ein unerwünschter Überdruck im Pumpraum verhindert.In addition, it has surprisingly been shown that the pump according to the invention works more quietly in certain operating states. This is explained by the fact that the ballast gas can escape through the second channel if the pressure of the ballast gas is too high. This prevents undesired overpressure in the pump chamber.

Gemäß einer Ausführungsform ist vorgesehen, dass die Kanäle einen gemeinsamen Kanalabschnitt aufweisen. Hierdurch wird die Herstellung weiter vereinfacht, da weitere Bohrungsvorgänge eingespart werden können.According to one embodiment it is provided that the channels have a common channel section. This further simplifies production, since further drilling operations can be saved.

Der gemeinsame Kanalabschnitt kann beispielsweise einen Mündungskanalabschnitt umfassen, der beispielsweise quer, insbesondere senkrecht, zu wenigstens einem eigenen Kanalabschnitt eines der Kanäle und/oder zu einem anderen Abschnitt des gemeinsamen Kanalabschnitts, insbesondere einem längeren Abschnitt oder einem Hauptabschnitt, angeordnet ist. Der Mündungskanalabschnitt kann zum Beispiel durch eine Bohrung definiert sein, wobei insbesondere der andere Abschnitt des gemeinsamen Kanalabschnitts durch eine zu dieser Bohrung quer verlaufende Bohrung definiert ist. Der Mündungskanalabschnitt kann generell beispielsweise zumindest im Wesentlichen parallel zu einer Rotationsachse des Pumpkörpers verlaufen.The common channel section can, for example, comprise an orifice channel section which is arranged, for example, transversely, in particular perpendicularly, to at least one separate channel section of one of the channels and / or to another section of the common channel section, in particular a longer section or a main section. The mouth channel section can be defined, for example, by a bore, in particular the other section of the common channel section being defined by a bore running transversely to this bore. The mouth channel section can generally run, for example, at least substantially parallel to an axis of rotation of the pump body.

Bei einer weiteren Ausführungsform mit besonders einfacher Herstellung ist vorgesehen, dass ein eigener Kanalabschnitt wenigstens eines der Kanäle und der gemeinsame Kanalabschnitt jeweils zumindest teilweise zumindest im Wesentlichen in einer Ebene verlaufen. Generell können beide Kanäle einen eigenen Kanalabschnitt aufweisen, insbesondere wobei die eigenen Kanalabschnitte zumindest teilweise zumindest im Wesentlichen in einer Ebene verlaufen. Bevorzugt verlaufen sowohl die eigenen Kanalabschnitte als auch der gemeinsame Kanalabschnitt zumindest teilweise zumindest im Wesentlichen in einer Ebene. Generell bevorzugt können die Kanalabschnitte bei jeder der dargestellten Kombinationen, insbesondere zumindest soweit sie in einem gemeinsamen Bauteil definiert sind, vollständig in einer Ebene verlaufen.In a further embodiment with particularly simple manufacture, it is provided that a separate channel section of at least one of the channels and the common channel section each run at least partially at least essentially in one plane. In general, both channels can have their own channel section, in particular with their own channel sections at least partially running at least essentially in one plane. Both the own channel sections and the common channel section preferably run at least partially at least essentially in one plane. Generally preferred, the channel sections in each of the combinations shown, in particular, at least insofar as they are defined in a common component, run completely in one plane.

Bevorzugt kann wenigstens ein Kanalabschnitt, insbesondere wenigstens ein eigener Kanalabschnitt und/oder ein gemeinsamer Kanalabschnitt, quer, insbesondere senkrecht, zu einer Rotorachse des Pumpkörpers verlaufen. Dies stellt eine in Bezug auf den Bauraum besonders platzsparende Lösung dar.At least one channel section, in particular at least one separate channel section and / or a common channel section, can preferably run transversely, in particular perpendicularly, to a rotor axis of the pump body. This represents a particularly space-saving solution in terms of installation space.

Grundsätzlich kann der erste Kanal und/oder der zweite Kanal zumindest abschnittsweise durch eine Bohrung definiert sein.In principle, the first channel and / or the second channel can be defined at least in sections by a bore.

Bei einer Weiterbildung ist ein eigener Kanalabschnitt eines der Kanäle durch eine Bohrung definiert. Dabei kann insbesondere der gemeinsame Kanalabschnitt zumindest teilweise ebenfalls durch diese Bohrung definiert sein. Hierdurch kann die Herstellung weiter vereinfacht werden. Vorzugsweise kann der erste Kanal durch die Bohrung definiert sein, die den gemeinsamen Kanalabschnitt definiert.In a further development, a separate channel section of one of the channels is defined by a bore. In particular, the common channel section can also be at least partially defined by this bore. This can further simplify production. Preferably, the first channel can be defined by the bore that defines the common channel section.

Ein eigener Kanalabschnitt des anderen Kanals kann beispielsweise in die Bohrung münden, insbesondere in diejenige, die den gemeinsamen Kanalabschnitt definiert. Dabei oder grundsätzlich, d.h. unabhängig von der vorstehenden Ausführungsform, kann der eigene Kanalabschnitt des anderen Kanals selbst durch eine Bohrung definiert sein, die beispielsweise quer zur Bohrung des gemeinsamen Kanalabschnitts verläuft.A separate channel section of the other channel can open into the bore, for example, in particular into the one that defines the common channel section. Here or in principle, i.e. independently of the above embodiment, the own channel section of the other channel itself can be defined by a bore which, for example, runs transversely to the bore of the common channel section.

Die gemeinsame Mündung kann gemäß einem vorteilhaften Beispiel in einem Strukturbauteil, einem Gehäusebauteil, einem Bauteil, welches ein Lagerelement für den Pumpkörper trägt, und/oder in einem den Pumpraum in Bezug auf eine Rotationsachse des Pumpkörpers axial und/oder radial begrenzenden Bauteil definiert sein. Grundsätzlich kann das Bauteil, in dem die Mündung definiert ist, auch mehrere oder alle diese Merkmale erfüllen. Z.B. kann das Bauteil ein sogenannter Lagerschild sein.According to an advantageous example, the common mouth can be defined in a structural component, a housing component, a component that carries a bearing element for the pump body, and / or in a component that axially and / or radially delimits the pump chamber in relation to an axis of rotation of the pump body. In principle, the component in which the mouth is defined can also meet several or all of these characteristics. For example, the component can be a so-called end shield.

Bei einigen Ausführungsformen ist vorgesehen, dass wenigstens ein Kanalabschnitt in einem Strukturbauteil, einem Gehäusebauteil, einem Bauteil, welches ein Lagerelement für den Pumpkörper trägt, und/oder in einem den Pumpraum in Bezug auf eine Rotationsachse des Pumpkörpers axial und/oder radial begrenzenden Bauteil definiert ist. In dem Bauteil kann insbesondere ein eigener Kanalabschnitt des ersten Kanals, ein eigener Kanalabschnitt des zweiten Kanals und/oder ein gemeinsamer Kanalabschnitt definiert sein.In some embodiments, it is provided that at least one channel section defines in a structural component, a housing component, a component that carries a bearing element for the pump body, and / or in a component that axially and / or radially delimits the pump chamber in relation to an axis of rotation of the pump body is. In particular, a separate channel section of the first channel, a separate channel section of the second channel and / or a common channel section can be defined in the component.

Grundsätzlich kann es vorteilhaft sein, wenn eigene Kanalabschnitte der beiden Kanäle in demselben Bauteil definiert sind. Dies stellt eine fertigungstechnisch einfache Lösung dar. Vorzugsweise kann auch ein gemeinsamer Kanalabschnitt in diesem Bauteil definiert sein. Hierdurch wird der Herstellungsprozess noch weiter vereinfacht.In principle, it can be advantageous if separate channel sections of the two channels are defined in the same component. This represents a simple solution in terms of production technology. A common channel section can preferably also be defined in this component. This simplifies the manufacturing process even further.

Beispielsweise kann wenigstens einer der Kanäle, insbesondere in oder an einem eigenen Kanalabschnitt, ein Ventil zum Steuern des Gaseinlasses in den Kanal aufweisen. Für den ersten Kanal kann beispielsweise ein Gasballastventil vorgesehen sein.For example, at least one of the channels, in particular in or on its own channel section, can have a valve for controlling the gas inlet into the channel. For example, a gas ballast valve can be provided for the first channel.

Grundsätzlich kann der zweite Kanal bevorzugt zum Einlassen des weiteren Gases zwecks Geräuschdämpfung vorgesehen sein. Das weitere Gas kann beispielsweise Luft sein, insbesondere Umgebungsluft und/oder atmosphärischen Druck aufweisen.In principle, the second channel can preferably be provided for admitting the further gas for the purpose of noise damping. The further gas can be air, for example, in particular ambient air and / or atmospheric pressure.

Gemäß einer Weiterbildung ist vorgesehen, dass am oder im eigenen Kanalabschnitt zumindest eines der Kanäle, insbesondere des zweiten Kanals, eine Verengung und/oder eine Düse vorgesehen ist. Somit kann die Menge des durch den betreffenden, insbesondere zweiten, Kanal zugeführten Gases auf einfache Weise reguliert werden.According to a further development it is provided that at least one of the channels, in particular the second channel, a constriction and / or a nozzle is provided on or in its own channel section. Thus, the amount of the relevant, in particular second, channel supplied gas can be regulated in a simple manner.

Bei der Vakuumpumpe kann es sich beispielsweise um eine Rotationsverdrängervakuumpumpe handeln. Besonders bevorzugt ist die Vakuumpumpe eine Drehschiebervakuumpumpe, vorzugsweise eine ölgeschmierte Drehschiebervakuumpumpe. Insbesondere kann der Pumpkörper durch eine Rotorwelle und insbesondere wenigstens einen Drehschieber gebildet sein. Die Vakuumpumpe kann einstufig oder mehrstufig, beispielsweise zweistufig, ausgebildet sein.The vacuum pump can be, for example, a rotary displacement vacuum pump. The vacuum pump is particularly preferably a rotary vane vacuum pump, preferably an oil-lubricated rotary vane vacuum pump. In particular, the pump body can be formed by a rotor shaft and in particular at least one rotary slide valve. The vacuum pump can be single-stage or multi-stage, for example two-stage.

Als Ballastgas kann zum Beispiel ein Inertgas oder beispielsweise auch Luft vorgesehen sein. Im Betrieb ist es unter bestimmten Umständen erforderlich, zusätzliches Gas, hier allgemein als Ballastgas bezeichnet, als Schleppgas, Spülgas oder Sperrgas in den Pumpraum einzuführen. Beispielsweise wird bei der Förderung von korrosiven Gasen Ballastgas in der Form eines inerten Sperrgases in den Pumpraum eingeführt, um empfindliche Bauteile der Vakuumpumpe zu schützen. Das Ballastgas kann auch zur Kühlung eingesetzt werden, beispielsweise bei einer durch eine Verschiebung des Betriebspunkts erfolgten Erwärmung der Vakuumpumpe. Sogenanntes Schleppgas wird eingeleitet, um besonders leichte Gase wie Wasserstoff oder Helium besser pumpen zu können. Schleppgas kann auch genutzt werden, um unerwünschte Ansammlungen, z.B. Kondensation von flüssigen Stoffen oder Ablagerungen von festen Stoffen innerhalb des Pumpsystems in Richtung eines Auslasses der Vakuumpumpe zu transportieren. Nach dem Abschalten der Vakuumpumpe kann Ballastgas als Spülgas eingebracht werden, um eine Kondensation von, insbesondere korrosiven, Gasen im Pumpraum zu verhindern. Als Ballastgas kommt für diese Anwendung beispielweise Stickstoff infrage.For example, an inert gas or, for example, air can be provided as ballast gas. During operation it is necessary under certain circumstances to introduce additional gas, here generally referred to as ballast gas, as drag gas, flushing gas or sealing gas into the pump chamber. For example, when corrosive gases are conveyed, ballast gas in the form of an inert sealing gas is introduced into the pump chamber in order to protect sensitive components of the vacuum pump. The ballast gas can also be used for cooling, for example when the vacuum pump is heated up due to a shift in the operating point. So-called drag gas is introduced in order to be able to pump particularly light gases such as hydrogen or helium better. Towing gas can also be used to transport undesired accumulations, e.g. condensation of liquid substances or deposits of solid substances within the pump system in the direction of an outlet of the vacuum pump. After the vacuum pump has been switched off, ballast gas can be introduced as flushing gas in order to prevent condensation of, in particular corrosive, gases in the pump chamber. A suitable ballast gas for this application is nitrogen, for example.

Weitere Anwendungsbereiche betreffen die Verdünnung eines gepumpten gasförmigen Mediums ("Passivbeigabe"), um beispielsweise eine zündfähige Gaskonzentration zu vermeiden, die durch eine Kompression des Mediums während des Pumpvorgangs in verschiedenen Stellen im Pumpsystem entstehen kann. Dagegen wird das gepumpte Medium bei einer "Aktivbeigabe" zu einer unschädlicheren Art verändert, wobei beispielsweise durch Beigabe von geeigneten Reaktionspartnern bzw. Katalysatoren korrosive oder auf eine andere Art schädliche Bestandteile des gepumpten Mediums ausgefällt und entfernt werden können.Further areas of application concern the dilution of a pumped gaseous medium ("passive addition"), for example to achieve an ignitable gas concentration to avoid, which can result from a compression of the medium during the pumping process in different places in the pumping system. In contrast, when "active addition" is used, the pumped medium is changed to a more harmless type, in which case, for example, by adding suitable reactants or catalysts, corrosive or otherwise harmful components of the pumped medium can be precipitated and removed.

Die Zufuhr von Ballastgas in den Pumpraum wird beispielsweise durch ein Ventil gesteuert, dessen Einlassöffnung mittels eines Verbindungsschlauches mit einem Ballastgasbehälter verbunden ist und dessen Auslassöffnung mit dem Pumpraum in Verbindung steht.The supply of ballast gas into the pump chamber is controlled, for example, by a valve whose inlet opening is connected to a ballast gas container by means of a connecting hose and whose outlet opening is connected to the pump chamber.

Die gemeinsame Mündung ist bevorzugt in einem Bereich des Pumpraums angeordnet, in dem ein im Betrieb höherer Druck als am Einlass herrscht. Insbesondere kann die gemeinsame Mündung in einem Bereich des Pumpraums mit einem Druck zwischen 50 und 300 mbar im Betrieb angeordnet sein.The common orifice is preferably arranged in a region of the pump chamber in which a higher pressure prevails during operation than at the inlet. In particular, the common orifice can be arranged in an area of the pump chamber with a pressure between 50 and 300 mbar during operation.

Die Erfindung betrifft grundsätzlich auch ein System umfassend eine Vakuumpumpe nach vorstehend beschriebener Art, wobei eine Ballastgas-Zuführeinrichtung an den ersten Kanal angeschlossen ist und ein Lufteinlass am zweiten Kanal vorgesehen oder angeschlossen ist. Dieses System wird hier zum Beispiel zum Zwecke einer späteren Beanspruchung offenbart. Es versteht sich, dass das System im Sinne der hier bezüglich der Vakuumpumpe beschriebenen Merkmale und Ausführungsformen vorteilhaft weitergebildet werden kann.The invention basically also relates to a system comprising a vacuum pump according to the type described above, a ballast gas supply device being connected to the first channel and an air inlet being provided or connected to the second channel. This system is disclosed here, for example, for the purpose of a later claim. It goes without saying that the system can advantageously be developed further in the sense of the features and embodiments described here with regard to the vacuum pump.

Die Erfindung wird nachfolgend lediglich beispielhaft anhand der schematischen Zeichnung erläutert.

Fig. 1
zeigt eine beispielhafte Vakuumpumpe.
Fig. 2
zeigt die Vakuumpumpe der Fig. 1 in einer Schnittansicht.
Fig. 3
zeigt die Vakuumpumpe der Fig. 1 in einer weiteren Schnittansicht.
Fig. 4
zeigt die Vakuumpumpe der Fig. 1 in einer weiteren Schnittansicht.
The invention is explained below by way of example only with reference to the schematic drawing.
Fig. 1
shows an exemplary vacuum pump.
Fig. 2
shows the vacuum pump of the Fig. 1 in a sectional view.
Fig. 3
shows the vacuum pump of the Fig. 1 in a further sectional view.
Fig. 4
shows the vacuum pump of the Fig. 1 in a further sectional view.

In Fig. 1 ist eine Vakuumpumpe 10 in einer Seitenansicht gezeigt. Die Vakuumpumpe 10 ist als Drehschiebervakuumpumpe ausgebildet und ist dazu eingerichtet, ein zu förderndes Gas von einem Einlass 12 zu einem in Fig. 1 nicht dargestellten Auslass zu fördern.In Fig. 1 a vacuum pump 10 is shown in a side view. The vacuum pump 10 is designed as a rotary vane vacuum pump and is set up to convey a gas to be conveyed from an inlet 12 to an in Fig. 1 to promote outlet not shown.

Die Vakuumpumpe 10 umfasst ein Gehäusebauteil 14, in dem die pumpaktiven Komponenten der Pumpe untergebracht sind. Dies ist in Fig. 2 veranschaulicht, die eine Schnittansicht der Vakuumpumpe 10 mit Schnittebene im Bereich des Einlasses 12 zeigt. Im Gehäusebauteil 14 ist insbesondere eine Rotorwelle 16 mit verschieblich an der Rotorwelle 16 gelagerten Drehschiebern 18 angeordnet, die zur Rotation in einem Pumpraum 20 vorgesehen sind und bei Drehung der Rotorwelle 16 das zu fördernde Gas vom Einlass 12 zu einem Auslass 22 fördern. Der im Pumpraum 20 angeordnete Teilabschnitt der Rotorwelle 16 bildet zusammen mit den Drehschiebern 18 einen Pumpkörper der Pumpe 10.The vacuum pump 10 comprises a housing component 14 in which the pump-active components of the pump are accommodated. This is in Fig. 2 which shows a sectional view of the vacuum pump 10 with a sectional plane in the region of the inlet 12. In particular, a rotor shaft 16 with rotary slides 18 mounted displaceably on the rotor shaft 16, which are provided for rotation in a pump chamber 20 and which convey the gas to be conveyed from the inlet 12 to an outlet 22 when the rotor shaft 16 rotates, is arranged in the housing component 14. The subsection of the rotor shaft 16 arranged in the pump chamber 20 forms, together with the rotary valves 18, a pump body of the pump 10.

In Fig. 3 ist die Vakuumpumpe 10 in einer Schnittansicht gezeigt, wobei die Schnittebene in Fig. 1 durch die Linie A-A angedeutet ist. Dabei ist insbesondere die Rotorwelle 16 sichtbar, wie sie im Gehäusebauteil 14 gelagert ist. Die Schnittebene verläuft durch eine den Pumpraum 20 axial begrenzende Wand 21 des Gehäusebauteils 14, weshalb der Pumpraum 20 hier nicht sichtbar ist. Die Rotorwelle 16 ist an dieser Wand 21 mittels eines Lagerelements 23, hier ein Gleitlager, gelagert.In Fig. 3 the vacuum pump 10 is shown in a sectional view, the sectional plane in FIG Fig. 1 indicated by the line AA. In particular, the rotor shaft 16 can be seen as it is supported in the housing component 14. The sectional plane runs through a wall 21 of the housing component 14 which axially delimits the pump chamber 20, which is why the pump chamber 20 is not visible here. The rotor shaft 16 is mounted on this wall 21 by means of a bearing element 23, here a plain bearing.

Die Vakuumpumpe 10 umfasst ein Gasballastventil 24, welches zum Anschluss an eine Ballastgas-Zuführeinrichtung (nicht dargestellt), beispielsweise ein Ballastgasbehälter, vorgesehen ist. Außerdem umfasst die Vakuumpumpe 10 einen Anschluss 26 zum Einlassen von Luft, vorzugsweise zwecks Geräuschdämpfung. Sowohl das Ballastgas als auch die Luft zur Geräuschdämpfung werden dem Pumpraum 20 zugeführt.The vacuum pump 10 comprises a gas ballast valve 24, which is provided for connection to a ballast gas supply device (not shown), for example a ballast gas container. In addition, the vacuum pump 10 comprises a connection 26 for admitting air, preferably for the purpose of noise damping. Both the ballast gas and the air for noise damping are fed to the pump chamber 20.

Zu diesem Zweck sind ein erster und ein zweiter Kanal vorgesehen, nämlich jeweils vom Gasballastventil 24 bzw. vom Anschluss 26 zum Pumpraum 20. Die Kanäle weisen eine gemeinsame Mündung 28 in den Pumpraum 20 auf.For this purpose, a first and a second channel are provided, namely each from the gas ballast valve 24 and from the connection 26 to the pump chamber 20. The channels have a common opening 28 into the pump chamber 20.

Der erste Kanal verläuft vom Gasballastventil 24 zur Mündung 28 und umfasst einen eigenen Kanalabschnitt 30 und einen gemeinsamen Kanalabschnitt 32. Der zweite Kanal verläuft vom Anschluss 26 zur Mündung 28 und umfasst einen eigenen Kanalabschnitt 34 und den gemeinsamen Kanalabschnitt 32.The first channel runs from the gas ballast valve 24 to the orifice 28 and comprises its own channel section 30 and a common channel section 32. The second channel runs from the connection 26 to the orifice 28 and includes its own channel section 34 and the common channel section 32.

In dieser Ausführungsform sind alle Kanalabschnitte als Bohrungen ausgebildet, die in das Gehäusebauteil 14 bzw. in die den Pumpraum 20 axial begrenzende Wand 21 eingebracht sind. Der eigene Kanalabschnitt 30 des ersten Kanals und der gemeinsame Kanalabschnitt 32 sind hier durch dieselbe Bohrung gebildet, wobei ein erster Längsabschnitt der Bohrung den Kanalabschnitt 30 und ein zweiter Längsabschnitt der Bohrung den Kanalabschnitt 32 bildet. Der eigene Kanalabschnitt 34 des zweiten Kanals ist als weitere Bohrung ausgebildet, die quer zur ersten Bohrung verläuft und in diese hineinmündet. Die beiden Bohrungen liegen in diesem Beispiel in einer Ebene, die senkrecht zur Rotationsachse der Rotorwelle 16 verläuft.In this embodiment, all channel sections are designed as bores which are introduced into the housing component 14 or into the wall 21 axially delimiting the pump chamber 20. The own channel section 30 of the first channel and the common channel section 32 are formed here by the same bore, a first longitudinal section of the bore forming the channel section 30 and a second longitudinal section of the bore forming the channel section 32. The own channel section 34 of the second channel is designed as a further bore which runs transversely to the first bore and opens into it. In this example, the two bores lie in a plane which runs perpendicular to the axis of rotation of the rotor shaft 16.

Die Fig. 4 zeigt eine weitere Schnittansicht der Vakuumpumpe 10 der Fig. 1, wobei die Schnittebene entlang einer in Fig. 1 angedeuteten Linie B-B verläuft. Dabei sind insbesondere ein Querschnitt des gemeinsamen Kanalabschnitts 32 und die gemeinsame Mündung 28 in den Pumpraum 20 sichtbar. Die Mündung 28 ist mit dem gemeinsamen Kanalabschnitt 32 über einen Mündungskanalabschnitt 36 verbunden, der ebenfalls als Bohrung ausgebildet ist. Der Mündungskanalabschnitt 36 verläuft quer zum gemeinsamen Kanalabschnitt 32 und hier insbesondere parallel zur Rotorwelle 16.the Fig. 4 FIG. 10 shows a further sectional view of the vacuum pump 10 of FIG Fig. 1 , the cutting plane along an in Fig. 1 indicated line BB runs. In particular, a cross section of the common channel section 32 and the common opening 28 into the pump chamber 20 is visible. The mouth 28 is connected to the common channel section 32 via a mouth channel section 36, which is also designed as a bore. The mouth channel section 36 runs transversely to the common channel section 32 and here in particular parallel to the rotor shaft 16.

Wie es insbesondere aus Fig. 4 hervorgeht, ist die den Pumpraum 20 axial begrenzende Wand 21 einteilig mit dem Gehäusebauteil 14 ausgebildet. Alternativ wäre beispielsweise auch eine separate Ausführung möglich.How it looks in particular Fig. 4 As can be seen, the wall 21 axially delimiting the pump chamber 20 is formed in one piece with the housing component 14. Alternatively, a separate design would also be possible, for example.

In der gezeigten Ausführungsform sind folglich die gemeinsame Mündung 28 und die eigenen und gemeinsamen Kanalabschnitte 30, 32, 34 in einem Bauteil definiert, welches den Pumpraum 20 axial begrenzt, nämlich im Gehäusebauteil 14. Alternativ oder zusätzlich wäre beispielweise auch eine Position der Mündung in radialer Anordnung denkbar, insbesondere in der den Pumpraum 20 radial begrenzenden Zylinderwand des Gehäuseteils 14. Dabei könnten etwa Lage und Form der Kanalabschnitte 32 und 36 sowie der Mündung 28 anders als gezeigt sein. Die Mündung verliefe dann nicht parallel zur Rotationsachse und/oder nicht axial zum Kanalabschnitt 36, sondern insbesondere rechtwinklig zur Rotationsachse und/oder in einem geeigneten Winkel zum Kanalabschnitt 36.In the embodiment shown, the common opening 28 and the own and common channel sections 30, 32, 34 are consequently defined in a component which axially delimits the pump chamber 20, namely in the housing component 14. Alternatively or additionally, a position of the opening in a radial direction would also be, for example Arrangement is conceivable, in particular in the cylinder wall of the housing part 14 which radially delimits the pump chamber 20. The position and shape of the channel sections 32 and 36 and the opening 28 could be different from what is shown. The mouth would then not run parallel to the axis of rotation and / or not axially to the channel section 36, but in particular at right angles to the axis of rotation and / or at a suitable angle to the channel section 36.

Die dargestellte Lösung integriert letztlich die Kanalführung und Bedüsung der Geräuschdämpfung in den Gasballastkanal (oder umgekehrt). Damit sind an der Pumpe weniger Bohrungen vorzusehen. Die Pumpe wird kompakter und günstiger in den Herstellkosten. Im Gegensatz zu anderen Pumpen ähnlicher Bauweise, die bei geöffnetem Gasballast ein höheres Geräuschniveau aufweisen, kann in der beschriebenen Erfindung das Geräuschniveau bei geöffnetem Gasballast sogar sinken.The solution shown ultimately integrates the duct routing and spraying of the noise dampening in the gas ballast duct (or vice versa). This means that fewer holes have to be provided on the pump. The pump becomes more compact and cheaper to manufacture. In contrast to other pumps of a similar design, which have a higher noise level when the gas ballast is open, in the described invention the noise level can even decrease when the gas ballast is open.

Grundsätzlich kann die in den Figuren dargestellte Pumpe 10 auch weitere Kanalabschnitte, z.B. für ähnliche oder andere Zwecke, umfassen, die beispielsweise im Gehäusebauteil 14 und/oder anderen Gehäusebauteilen ausgebildet sein können. Insbesondere weist die den Zeichnungen zugrundeliegende Pumpe 10 weitere Kanalabschnitte auf, die in den Figuren der Übersichtlichkeit halber ausgeblendet sind.In principle, the pump 10 shown in the figures can also comprise further channel sections, for example for similar or different purposes, which can be formed, for example, in the housing component 14 and / or other housing components. In particular, the pump 10 on which the drawings are based has further channel sections which are hidden in the figures for the sake of clarity.

BezugszeichenlisteList of reference symbols

1010
VakuumpumpeVacuum pump
1212th
Einlassinlet
1414th
GehäusebauteilHousing component
1616
RotorwelleRotor shaft
1818th
DrehschieberRotary valve
2020th
PumpraumPumping room
2121
WandWall
2222nd
AuslassOutlet
2323
LagerelementBearing element
2424
GasballastventilGas ballast valve
2626th
Anschlussconnection
2828
Mündungmouth
3030th
eigener Kanalabschnittown canal section
3232
gemeinsamer Kanalabschnittcommon channel section
3434
eigener Kanalabschnittown canal section
3636
MündungskanalabschnittMouth channel section

Claims (15)

  1. A vacuum pump (10) comprising:
    a pump space (20) in which a gas to be conveyed can be conveyed from an inlet (12) to an outlet (22) by means of a pump body (16, 18);
    a first channel (30, 32), which opens into the pump space (20), for feeding a ballast gas into the pump space (20);
    a second channel (34, 32), which opens into the pump space (20), for feeding a further gas into the pump space (20);
    characterized in that
    the channels have a common opening (28) into the pump space (20).
  2. A vacuum pump (10) in accordance with claim 1,
    wherein the channels have a common channel section (32).
  3. A vacuum pump (10) in accordance with claim 1 or claim 2,
    wherein a separate channel section (30, 34) of at least one of the channels and the common channel section (32) each at least partly extend at least substantially in one plane.
  4. A vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein at least one channel section (30, 32, 34) extends transversely to an axis of rotation of the pump body (16).
  5. A vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein a separate channel section (30) of one of the channels is defined by a bore and the common channel section (32) is likewise defined by this bore.
  6. A vacuum pump (10) in accordance with claim 5,
    wherein the first channel (30, 32) is defined by the bore.
  7. A vacuum pump (10) in accordance with claim 5 or claim 6,
    wherein a separate channel section (34) of the other channel opens into the bore.
  8. A vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein the common opening (28) is defined in a structural component (14), a housing component (14), a component (14) which supports a bearing element (23) for the pump body (16, 18), and/or in a component (14) which axially and/or radially bounds the pump space (20) with respect to an axis of rotation of the pump body (16, 18).
  9. A vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein at least one channel section (30, 32, 34, 36) is defined in a structural component (14), a housing component (14), a component (14) which supports a bearing element (23) for the pump body (16, 18), and/or in a component (14) which axially and/or radially bounds the pump space (20) with respect to an axis of rotation of the pump body (16, 18).
  10. A vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein separate channel sections (30, 34) of the two channels are defined in the same component (14).
  11. A vacuum pump (10) in accordance with claim 10,
    wherein a common channel section (32) is also defined in this component (14).
  12. A vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein at least one of the channels has a valve for controlling the admission of gas into the channel.
  13. A vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein the second channel is provided for admitting the further gas for the purpose of noise damping.
  14. A vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein a nozzle is provided at or in the separate channel section (34) of the second channel.
  15. A vacuum pump (10) in accordance with at least one of the preceding claims,
    the vacuum pump (10) is a rotary vane pump.
EP19210270.5A 2019-11-20 2019-11-20 Vacuum pump Active EP3636879B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19210270.5A EP3636879B1 (en) 2019-11-20 2019-11-20 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19210270.5A EP3636879B1 (en) 2019-11-20 2019-11-20 Vacuum pump

Publications (2)

Publication Number Publication Date
EP3636879A1 EP3636879A1 (en) 2020-04-15
EP3636879B1 true EP3636879B1 (en) 2022-01-05

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE951884C (en) 1953-12-23 1956-11-08 Leybold S Nachfolger E Vacuum pump
US3301474A (en) 1965-09-24 1967-01-31 Bendix Balzers Vacuum Inc Oil sealed mechanical rotary vacuum pump
DE2401177A1 (en) 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Noise suppression type rotary piston vacuum pump - has connecting outlet chamber above oil level with compression chamber
US4268230A (en) 1979-04-26 1981-05-19 Varian Associates, Inc. Gas ballast for oil sealed mechanical vacuum vane pump
EP3470678A1 (en) 2017-10-13 2019-04-17 D.V.P. Vacuum Technology S.r.l. Lubricated vacuum pump
CN109915377A (en) 2019-04-16 2019-06-21 成都中科唯实仪器有限责任公司 A kind of novel two stage rotary-vane vaccum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH353117A (en) * 1956-03-12 1961-03-31 Leybolds Nachfolger E Rotating gas ballast pump
DE10212940A1 (en) * 2002-03-22 2003-10-02 Leybold Vakuum Gmbh Eccentric pump and method for operating this pump
DE102008030788A1 (en) * 2008-06-28 2009-12-31 Oerlikon Leybold Vacuum Gmbh Method for cleaning vacuum pumps
EP3483448B1 (en) * 2017-11-13 2020-05-13 Pfeiffer Vacuum Gmbh Vacuum pump with ballast gas valve

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE951884C (en) 1953-12-23 1956-11-08 Leybold S Nachfolger E Vacuum pump
US3301474A (en) 1965-09-24 1967-01-31 Bendix Balzers Vacuum Inc Oil sealed mechanical rotary vacuum pump
DE2401177A1 (en) 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Noise suppression type rotary piston vacuum pump - has connecting outlet chamber above oil level with compression chamber
US4268230A (en) 1979-04-26 1981-05-19 Varian Associates, Inc. Gas ballast for oil sealed mechanical vacuum vane pump
EP3470678A1 (en) 2017-10-13 2019-04-17 D.V.P. Vacuum Technology S.r.l. Lubricated vacuum pump
CN109915377A (en) 2019-04-16 2019-06-21 成都中科唯实仪器有限责任公司 A kind of novel two stage rotary-vane vaccum pump

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