EP3617511A3 - Scroll pump and method of manufacturing same - Google Patents

Scroll pump and method of manufacturing same Download PDF

Info

Publication number
EP3617511A3
EP3617511A3 EP19201745.7A EP19201745A EP3617511A3 EP 3617511 A3 EP3617511 A3 EP 3617511A3 EP 19201745 A EP19201745 A EP 19201745A EP 3617511 A3 EP3617511 A3 EP 3617511A3
Authority
EP
European Patent Office
Prior art keywords
base plate
spiral
side walls
scroll pump
manufacturing same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19201745.7A
Other languages
German (de)
French (fr)
Other versions
EP3617511B1 (en
EP3617511A2 (en
Inventor
Erhard Harapat
Lars Pauli
Wolfgang Söhngen
Jan Hofmann
Becker Jonas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19201745.7A priority Critical patent/EP3617511B1/en
Publication of EP3617511A2 publication Critical patent/EP3617511A2/en
Publication of EP3617511A3 publication Critical patent/EP3617511A3/en
Priority to JP2020160698A priority patent/JP7220692B2/en
Priority to EP22156933.8A priority patent/EP3974655B1/en
Priority to EP20198997.7A priority patent/EP3739166B1/en
Priority to EP22199874.3A priority patent/EP4095387A3/en
Priority to US17/063,912 priority patent/US11773849B2/en
Application granted granted Critical
Publication of EP3617511B1 publication Critical patent/EP3617511B1/en
Priority to JP2022178824A priority patent/JP2023025010A/en
Priority to US18/449,111 priority patent/US20230383750A1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0269—Details concerning the involute wraps
    • F04C18/0284—Details of the wrap tips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/10—Manufacture by removing material

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Rotary Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Scrollpumpe umfassend ein bewegliches, zum Erzeugen einer Pumpwirkung exzentrisch erregbares Spiralbauteil (30), wobei das Spiralbauteil eine Grundplatte (66) und eine sich ausgehend von der Grundplatte erstreckende Spiralwand (28) aufweist, wobei:- außen an der Grundplatte wenigstens zwei über den Umfang der Grundplatte beabstandete Haltevorsprünge (68) vorgesehen sindund/oder- die Spiralwand (28) an ihrem der Grundplatte (66) abgewandten Ende eine Nut (114) aufweist, in der ein Dichtungselement (64) aufgenommen ist, wobei die Nut (114) durch zwei gegenüberliegende Seitenwände (116, 118) begrenzt ist, und wobei in einem ersten Spiralabschnitt (120) eine erste der Seitenwände (118) dicker ist als eine zweite der Seitenwände (116) im ersten Spiralabschnitt (120) und/oder als eine oder beide Seitenwände (116, 118) in einem zweiten Spiralabschnitt (122).Verfahren zur Herstellung einer Scrollpumpe.Scroll pump comprising a movable spiral component (30) which can be excentrically excited to produce a pumping effect, the spiral component having a base plate (66) and a spiral wall (28) extending from the base plate, wherein: - at least two on the outside of the base plate over the circumference retaining projections (68) spaced apart from the base plate and / or- the spiral wall (28) has at its end remote from the base plate (66) a groove (114) in which a sealing element (64) is received, the groove (114) being through two opposite side walls (116, 118) is delimited, and wherein in a first spiral section (120) a first one of the side walls (118) is thicker than a second one of the side walls (116) in the first spiral section (120) and / or as one or both Side walls (116, 118) in a second spiral section (122) .Method for producing a scroll pump.

EP19201745.7A 2019-10-07 2019-10-07 Scroll pump and method of manufacturing same Active EP3617511B1 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
EP19201745.7A EP3617511B1 (en) 2019-10-07 2019-10-07 Scroll pump and method of manufacturing same
JP2020160698A JP7220692B2 (en) 2019-10-07 2020-09-25 Vacuum pump, scroll pump and manufacturing method thereof
EP22199874.3A EP4095387A3 (en) 2019-10-07 2020-09-29 Scroll vacuum pump with integrated pressure sensor
EP20198997.7A EP3739166B1 (en) 2019-10-07 2020-09-29 Vacuum pump, scroll pump and method of manufacturing same and check valve
EP22156933.8A EP3974655B1 (en) 2019-10-07 2020-09-29 Scroll vacuum pump and its method of production
US17/063,912 US11773849B2 (en) 2019-10-07 2020-10-06 Vacuum pump, scroll pump, and manufacturing method for such
JP2022178824A JP2023025010A (en) 2019-10-07 2022-11-08 Vacuum pump, scroll pump and method for manufacturing the same
US18/449,111 US20230383750A1 (en) 2019-10-07 2023-08-14 Vacuum pump, scroll pump, and manufacturing method for such

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19201745.7A EP3617511B1 (en) 2019-10-07 2019-10-07 Scroll pump and method of manufacturing same

Publications (3)

Publication Number Publication Date
EP3617511A2 EP3617511A2 (en) 2020-03-04
EP3617511A3 true EP3617511A3 (en) 2020-07-15
EP3617511B1 EP3617511B1 (en) 2021-12-08

Family

ID=68172125

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19201745.7A Active EP3617511B1 (en) 2019-10-07 2019-10-07 Scroll pump and method of manufacturing same

Country Status (1)

Country Link
EP (1) EP3617511B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4253720A2 (en) 2023-08-08 2023-10-04 Pfeiffer Vacuum Technology AG Scroll vacuum pump and scroll vacuum pump system

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029975A (en) * 1988-06-27 1990-01-12 Toshiba Corp Scroll type compressor
US6074185A (en) * 1998-11-27 2000-06-13 General Motors Corporation Scroll compressor with improved tip seal
US20080181801A1 (en) * 2007-01-26 2008-07-31 Christopher Stover Powder metal scroll hub joint
US20120134862A1 (en) * 2009-08-14 2012-05-31 Edwards Limited Scroll pump
CN103084887A (en) * 2012-11-14 2013-05-08 柳州易舟汽车空调有限公司 Clamp for machining molded line of scroll plate
US20130251543A1 (en) * 2012-03-23 2013-09-26 Bitzer Kuehlmaschinenbau Gmbh Compressor with Oil Return Passage Formed Between Motor and Shell
CN206010470U (en) * 2016-08-10 2017-03-15 鞍山新磁电子有限公司 A kind of can pinpoint orbiter structure frock clamp

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59300185D1 (en) * 1992-11-07 1995-06-14 Aginfor Ag Displacement machine based on the spiral principle.

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH029975A (en) * 1988-06-27 1990-01-12 Toshiba Corp Scroll type compressor
US6074185A (en) * 1998-11-27 2000-06-13 General Motors Corporation Scroll compressor with improved tip seal
US20080181801A1 (en) * 2007-01-26 2008-07-31 Christopher Stover Powder metal scroll hub joint
US20120134862A1 (en) * 2009-08-14 2012-05-31 Edwards Limited Scroll pump
US20130251543A1 (en) * 2012-03-23 2013-09-26 Bitzer Kuehlmaschinenbau Gmbh Compressor with Oil Return Passage Formed Between Motor and Shell
CN103084887A (en) * 2012-11-14 2013-05-08 柳州易舟汽车空调有限公司 Clamp for machining molded line of scroll plate
CN206010470U (en) * 2016-08-10 2017-03-15 鞍山新磁电子有限公司 A kind of can pinpoint orbiter structure frock clamp

Also Published As

Publication number Publication date
EP3617511B1 (en) 2021-12-08
EP3617511A2 (en) 2020-03-04

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