EP3531437A1 - Electron-emitting device - Google Patents
Electron-emitting device Download PDFInfo
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- EP3531437A1 EP3531437A1 EP18158898.9A EP18158898A EP3531437A1 EP 3531437 A1 EP3531437 A1 EP 3531437A1 EP 18158898 A EP18158898 A EP 18158898A EP 3531437 A1 EP3531437 A1 EP 3531437A1
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- Prior art keywords
- electron
- grid
- emission device
- emitter
- electron emission
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/46—Control electrodes, e.g. grid; Auxiliary electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/045—Electrodes for controlling the current of the cathode ray, e.g. control grids
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/06—Cathode assembly
- H01J2235/062—Cold cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/064—Details of the emitter, e.g. material or structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/065—Field emission, photo emission or secondary emission cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
Definitions
- the invention relates to an electron emission device.
- an electron emission device which is designed as a thermionic emission device is, for example in the US 8,374,315 B2 described.
- the electron emission device comprises at least one flat emitter with at least one emission surface which emits electrons thermally when a heating voltage is applied.
- the known electron emission device comprises at least one barrier grid, which is spaced from the emission surface of the flat emitter.
- the barrier grid acts as a control electrode, since the emission of electrons from the material of the emission surface can be varied by applying a grid voltage. As a result, defined partial beams of the electron emission can be generated.
- Field effect emission cathodes are eg in US 7,751,528 B2 (in particular FIG. 11b and FIG. 8) and in the publication " Multisource inverse-geometry CT. Part II. X-ray source design and prototype "(authors: V. Bogdan Neculaes et al.) In Medical Physics 43 (8), August 2016, pages 4617-4627 , in particular FIG. 7).
- a metal grid Over a large area emitting surface of an emitter material (carbon nanotube or dispenser cathode material, such as barium oxide) is a metal grid. By applying a voltage across the complete grid, the emission current intensity of the complete area is controlled. The current flowing on the barrier grid heats the barrier grid and limits the current intensity and pulse time of the electron emission, thereby preventing damage to the barrier grid.
- the object of the present invention is to provide an electron emission device for an X-ray tube, which allows a simple adjustment of the image quality with the lowest possible anode load.
- the electron emission device comprising at least one electron emitter with at least one emission surface and at least one barrier grid, which is spaced from the emission surface of the electron emitter and has a predeterminable number of individually controllable grid segments.
- the barrier grid thus forms a reliable control electrode in the electron emission device according to claim 1.
- the segmented barrier grid is spaced from the emission surface of the electron emitter. Due to the individually controllable Grid segments can be generated different voltage patterns, by which a plurality of different electron beams can be generated. Within the scope of the invention, it is possible, for example, to alternately allow electron emission by a single grid segment. However, it is also possible that multiple grating segments, which need not necessarily be located adjacent, simultaneously allow emission of electrons from the emission surface of the electron emitter. Thus, by selectively blocking individual grid segments, the electron emission and thus the local distribution of the emitted electrons, which determines the focal spot shape, can be selectively varied. Thus, an optimal adaptation to the particular application is reliably possible.
- the barrier grid or the grid segments always have a positive potential with respect to the emission surface of the electron emitter.
- the grid segments in the non-emitting regions are either at the potential of the emission surface of the electron emitter or at a potential that is more negative than the potential of the electron emitter. If one chooses the potentials accordingly, then the electron beam can be deflected or focused in the emission area. The distribution of the emitted electrons is thus almost arbitrary.
- the electron emitter is designed as a dispenser cathode (also referred to as “spindt cathode”) which emits electrons when an electric field strength is applied (claim 2).
- dispenser cathode is understood to mean a cathode in which the carrier material is coated with a dispenser cathode material which emits electrons when an electric field strength is applied.
- Suitable dispenser cathode materials include, for example, barium oxide (BaO) and lanthanum hexaboride (LaB 6 ).
- the electron emitter is designed as a field effect emitter, which also emits electrons when an electric field strength is applied (claim 3).
- the field effect emitters can be designed, for example, as CNT-based field emitters (CNT, carbon nanotubes, carbon nanotubes) or as Si-based field emitters (Si, silicon).
- nanocrystalline diamond is according to the DE 197 27 606 A1 suitable for the production of cold cathodes.
- the electron emitter is designed as a thermal emitter (incandescent emission) which emits electrons when a heating voltage is applied (claim 4).
- the emission surface of the electron emitter is structured. In the case of a flat emitter having a rectangular surface, this structuring can be realized, for example, by slits on the emission surface
- the electron emission device according to the invention or its advantageous embodiments are suitable for installation in a focus head (claim 6).
- the electron emission device shown in the principle illustration comprises an electron emitter 2 with an emission surface 3 and with a blocking grid 5, which is spaced apart from the emission surface 3 of the electron emitter 2.
- the invention is not limited to a single electron emitter 2 and not to a single emission surface 3.
- the barrier grille 5 Again, a plurality of barrier grille 5 may be provided. Only for reasons of clarity, this restriction was chosen in the principle representation.
- a freely selectable grid voltage U G1 to U GN can be applied (see FIG. 6 ).
- To each of the grid segments G 1 to G N can therefore be applied to a different grid voltage U GN .
- different electric fields are present in each case in the regions between the respective grid segments G 1 to G N and the emission surface 3, which leads to different emissions of electrons from the emission surface 3 of the electron emitter 1.
- FIG. 2 to FIG. 4 shown emission distributions for the emerging from the emission surface 3 electrons achievable.
- the grid segments G 1 to G N on the abscissa and the electron emission E is plotted on the ordinate.
- the emission voltages shown are the grid voltages U G1 to U GN at the grid segments G 1 to G N selected such that the grid segments G 1 and G N two equally strong grid voltages U G1 and U GN applied, whereby the electron emissions E are the same.
- the grid segments G 2 to G N-1 are blocked by the application of higher grid voltages U G2 to U GN-1 , so that no electrons emerge at the grid segments G 2 to G N-1 .
- the grid voltages U G1 to U GN at the grid segments G 1 to G N at the in FIG. 3 different emission distribution.
- the electron emissions E are freely selectable by applying a desired grid voltage U GN , whereby the MTF (modulation transfer function) can be influenced accordingly.
- the MTF of the distribution of the X-ray emission resulting on an anode thus contains high-frequency components, whereby the limiting resolution of the overall system can be positively influenced (coded spot).
- the grid segments G 2 and G 4 are completely blocked, whereas an at least partial electron emission E is possible through the grid segments G 1 , G 3 and G 5 to G N.
- the grid segments G 1 to G 5 are differently permeable to the emitted electrons by the respectively applied grid voltages U G1 to U GN .
- the grid segment G 1 has the lowest grid voltage U G1 and thus the highest electron emission E.
- the highest grid voltage U G5 resulting in a correspondingly low electron emission E results.
- the electrons emitted by the electron emitter 2 generate when hitting an in FIG. 4 not shown rotary anode an asymmetrical focal spot, which allows a higher electron beam power.
- FIG. 5 An embodiment of an electron emission device 1 is shown in FIG FIG. 5 in longitudinal section and in FIG. 6 shown in plan view.
- an emitter material 6 is applied, which emits 3 electrons in an emission surface (electron emission E).
- the substrate 4 is, for example, a base body made of a technical ceramic.
- the emitter material 6 is, for example, carbon nanotubes (CNT) or a dispenser cathode material, such as, for example, barium oxide (BaO) or lanthanum hexaboride (LaB 6 ).
- the grid segments G 1 to G N are each driven individually with the corresponding grid voltages U G1 to U GN .
- the grid segments G 3 to G N-1 are not shown.
- the blocking grid 5 can be made, for example, from a tungsten sheet, from which the grid segments G 1 to G N , which form the grid structure, have been cut out by laser cutting.
- the emission distribution E of the electrons can be arbitrarily controlled in two spatial directions.
- the segmented barrier grid 5 from the embodiment according to FIGS. 5 and 6 is also for an optimization of the US 8,374,315 B2 known electron emission device suitable.
- Illustrated embodiments can be achieved by the solution according to the invention in a simple way an improvement in image quality with reduced anode load by adjusting the focal spot geometry (shape and size) to the specific application.
Abstract
Die Erfindung betrifft eine Elektronen-Emissionsvorrichtung, umfassend wenigstens einen Elektronen-Emitter (2) mit wenigstens einer Emissionsfläche (3) und wenigstens ein Sperrgitter (5), das zur Emissionsfläche (3) des Elektronen-Emitters (2) beabstandet ist und eine vorgebbare Anzahl von einzeln ansteuerbaren Gittersegmenten (G- G, G) aufweist. Eine derartige Elektronen-Emissionsvorrichtung erlaubt auf einfache Weise eine Anpassung der Bildqualität bei geringstmöglicher Anodenbelastung.The invention relates to an electron emission device, comprising at least one electron emitter (2) with at least one emission surface (3) and at least one barrier grid (5), which is spaced from the emission surface (3) of the electron emitter (2) and a predefinable Number of individually controllable grid segments (GG, G). Such an electron emission device allows a simple adjustment of the image quality with the lowest possible anode load.
Description
Die Erfindung betrifft eine Elektronen-Emissionsvorrichtung.The invention relates to an electron emission device.
Eine Elektronen-Emissionsvorrichtung, die als thermionische Emissionsvorrichtung ausgebildet ist, ist beispielsweise in der
In der
Weiterhin ist aus der
Außerdem sind in der
Feldeffekt-Emissionskathoden sind z.B. in
Aus der
Aufgabe der vorliegenden Erfindung ist es, eine Elektronen-Emissionsvorrichtung für eine Röntgenröhre zu schaffen, die auf einfache Weise eine Anpassung der Bildqualität bei geringstmöglicher Anodenbelastung erlaubt.The object of the present invention is to provide an electron emission device for an X-ray tube, which allows a simple adjustment of the image quality with the lowest possible anode load.
Die Aufgabe wird erfindungsgemäß durch eine Elektronen-Emissionsvorrichtung gemäß Anspruch 1 gelöst. Vorteilhafte Ausgestaltungen der Erfindung sind jeweils Gegenstand von weiteren Ansprüchen.The object is achieved by an electron emission device according to
Die Elektronen-Emissionsvorrichtung, nach Anspruch 1 umfasst wenigstens einen Elektronen-Emitter mit wenigstens einer Emissionsfläche und wenigstens ein Sperrgitter, das zur Emissionsfläche des Elektronenemitters beabstandet ist und eine vorgebbare Anzahl von einzeln ansteuerbaren Gittersegmenten aufweist.The electron emission device according to
Durch die vorgebbare Anzahl von einzeln ansteuerbaren Gittersegmenten können bei der erfindungsgemäßen Lösung gezielt definierte Teilstrahlen des Elektronenstrahls (Elektronen-Teilstrahlen) erzeugt werden. Das Sperrgitter bildet damit bei der Elektronen-Emissionsvorrichtung gemäß Anspruch 1 eine zuverlässige Steuerelektrode.By the predeterminable number of individually controllable grid segments can be generated in the inventive solution selectively defined partial beams of the electron beam (electron partial beams). The barrier grid thus forms a reliable control electrode in the electron emission device according to
Das segmentierte Sperrgitter ist zur Emissionsfläche des Elektronen-Emitters beabstandet. Aufgrund der einzeln ansteuerbaren Gittersegmente können verschiedene Spannungsmuster erzeugt werden, durch die eine Vielzahl von unterschiedlichen Elektronenstrahlen generierbar sind. Im Rahmen der Erfindung ist es z.B. möglich abwechselnd jeweils durch ein einzelnes Gittersegment eine Elektronenemission zu ermöglichen. Es ist jedoch ebenfalls möglich, dass mehrere Gittersegmente, die nicht notwendigerweise benachbart angeordnet sein müssen, gleichzeitig eine Emission von Elektronen aus der Emissionsfläche des Elektronen-Emitters ermöglichen. Somit kann durch das gezielte Sperren einzelner Gittersegmente die Elektronenemission und damit die Ortsverteilung der emittierten Elektronen, die die die Brennfleckform bestimmt, gezielt variiert werden. Damit ist eine optimale Anpassung an den jeweiligen Anwendungsfall zuverlässig möglich.The segmented barrier grid is spaced from the emission surface of the electron emitter. Due to the individually controllable Grid segments can be generated different voltage patterns, by which a plurality of different electron beams can be generated. Within the scope of the invention, it is possible, for example, to alternately allow electron emission by a single grid segment. However, it is also possible that multiple grating segments, which need not necessarily be located adjacent, simultaneously allow emission of electrons from the emission surface of the electron emitter. Thus, by selectively blocking individual grid segments, the electron emission and thus the local distribution of the emitted electrons, which determines the focal spot shape, can be selectively varied. Thus, an optimal adaptation to the particular application is reliably possible.
Das Sperrgitter bzw. die Gittersegmente besitzen immer ein positives Potential gegenüber der Emissionsfläche des Elektronen-Emitters. Die Gittersegmente in den nicht-emittierenden Bereichen liegen entweder auf dem Potential der Emissionsfläche des Elektronen-Emitters oder auf einem Potential, das negativer ist als das Potential des Elektronen-Emitters. Wählt man die Potentiale entsprechend, dann kann der Elektronenstrahl im Emissionsbereich abgelenkt oder fokussiert werden. Die Verteilung der emittierten Elektronen ist damit nahezu frei wählbar.The barrier grid or the grid segments always have a positive potential with respect to the emission surface of the electron emitter. The grid segments in the non-emitting regions are either at the potential of the emission surface of the electron emitter or at a potential that is more negative than the potential of the electron emitter. If one chooses the potentials accordingly, then the electron beam can be deflected or focused in the emission area. The distribution of the emitted electrons is thus almost arbitrary.
Bei Röntgenröhren für diagnostische Bildgebung werden Eigenschaften benötigt, durch welche der Brennfleck auf der Anode, der die Röntgenquellfläche ("Point-Spread-Function", PSF, Punktspreizfunktion, bzw. die Emissionsverteilung) bildet, dynamisch verändert werden kann. Mit einer solchen Funktion können eine Reihe von Verbesserungen erreicht werden:
- Erhöhung der elektrischen Leistungsdichte im Brennfleck (durch asymmetrische Emissionsverteilung)
- Erhöhung der Dauerleistung bei geschalteten Carbon-Nano-Tube-Emittern (durch Nutzung mehrerer Elektronenstrahlen)
- Verbesserung des Auflösungsvermögens (durch Coded-Spot-Algorithmen).
- Increasing the electric power density in the focal spot (due to asymmetric emission distribution)
- Increasing the continuous power of switched carbon nanotube emitters (using multiple electron beams)
- Improvement of resolution (by coded spot algorithms).
Gemäß einem bevorzugten Ausführungsbeispiel der Elektronen-Emissionsvorrichtung ist der Elektronen-Emitter als Dispenser-Kathode (auch als "Spindtkathode" bezeichnet) ausgebildet, die beim Anlegen einer elektrischen Feldstärke Elektronen emittiert (Anspruch 2). Unter dem Begriff "Dispenser-Kathode" ist eine Kathode zu verstehen, bei dem das Trägermaterial mit einem Dispenser-Kathodenmaterial beschichtet ist, das beim Anlegen einer elektrischen Feldstärke Elektronen emittiert. Geeignete Dispenser-Kathodenmaterialien sind z.B. Bariumoxid (BaO) und Lanthanhexaborid (LaB6).According to a preferred embodiment of the electron emission device, the electron emitter is designed as a dispenser cathode (also referred to as "spindt cathode") which emits electrons when an electric field strength is applied (claim 2). The term "dispenser cathode" is understood to mean a cathode in which the carrier material is coated with a dispenser cathode material which emits electrons when an electric field strength is applied. Suitable dispenser cathode materials include, for example, barium oxide (BaO) and lanthanum hexaboride (LaB 6 ).
Bei einer ebenfalls vorteilhaften Ausgestaltung der Elektronen-Emissionsvorrichtung ist der Elektronen-Emitter als Feldeffekt-Emitter ausgebildet, der ebenfalls beim Anlegen einer elektrischen Feldstärke Elektronen emittiert (Anspruch 3). Im Rahmen der Erfindung können die Feldeffekt-Emitter beispielsweise als CNT-basierte Feldemitter (CNT, Carbon Nano Tubes, Kohlenstoff-Nanoröhren) oder als Si-basierte Feldemitter (Si, Silizium) ausgeführt sein. Auch nanokristalliner Diamant ist gemäß der
Nach einer weiteren vorteilhaften Alternative der Elektronen-Emissionsvorrichtung ist der Elektronen-Emitter als thermischer Emitter (Glühemission) ausgebildet, der beim Anlegen einer Heizspannung Elektronen emittiert (Anspruch 4). Vorzugsweise ist die Emissionsfläche des Elektronen-Emitters strukturiert. Diese Strukturierung ist bei einem Flachemitter mit rechteckiger Oberfläche beispielsweise durch Schlitze auf der Emissionsfläche realisierbarAccording to a further advantageous alternative of the electron emission device, the electron emitter is designed as a thermal emitter (incandescent emission) which emits electrons when a heating voltage is applied (claim 4). Preferably, the emission surface of the electron emitter is structured. In the case of a flat emitter having a rectangular surface, this structuring can be realized, for example, by slits on the emission surface
Für spezielle Anforderungen kann es vorteilhaft sein, beabstandet zu dem Sperrgitter ein zweites Sperrgitter parallel und orthogonal anzuordnen, wobei das zweite Sperrgitter ebenfalls eine vorgebbare Anzahl von einzeln ansteuerbaren Gittersegmenten aufweist (Anspruch 5). Damit kann die Emissionsverteilung der Elektronen in zwei Raumrichtungen beliebig gesteuert werden.For special requirements, it may be advantageous to arrange a second barrier grid parallel and orthogonal spaced from the barrier grid, wherein the second barrier grid also has a predeterminable number of individually controllable grid segments has (claim 5). Thus, the emission distribution of the electrons in two spatial directions can be controlled arbitrarily.
Die Elektronen-Emissionsvorrichtung gemäß der Erfindung bzw. deren vorteilhafte Ausgestaltungen (Ansprüche 2 bis 5) sind für den Einbau in einen Fokuskopf geeignet (Anspruch 6).The electron emission device according to the invention or its advantageous embodiments (
Mit der Elektronen-Emissionsvorrichtung (Ansprüche 1 bis 5) bzw. mit einem damit ausgestatteten Fokuskopf (Anspruch 6) ist es möglich, auf einfache Weise eine Röntgenröhre (Ansprüche 7 und 8) herstellbar, die eine Anpassung der Bildqualität bei geringer Anodenbelastung ermöglicht.With the electron emission device (claims 1 to 5) or with a focus head equipped therewith (claim 6), it is possible to easily produce an X-ray tube (
Die vorstehend beschriebenen Röntgenröhren (Ansprüche 7 und 8) können ohne Modifikationen in das Strahlergehäuse eines Röntgenstrahlers eingebaut werden (Anspruch 9).The above-described X-ray tubes (
Nachfolgend werden schematisch dargestellte Ausführungsbeispiele der Erfindung anhand der Zeichnung näher erläutert, ohne jedoch darauf beschränkt zu sein. Es zeigen:
- FIG 1
- eine Prinzip-Darstellung der erfindungsgemäßen Elektronen-Emissionsvorrichtung,
- FIG 2
- ein erstes Beispiel für eine Emissionsverteilung der aus der Elektronen-Emissionsvorrichtung gemäß
FIG 1 austretenden Elektronen, - FIG 3
- ein zweites Beispiel für eine Emissionsverteilung der aus der Elektronen-Emissionsvorrichtung gemäß
FIG 1 austretenden Elektronen, - FIG 4
- ein drittes Beispiel für eine Emissionsverteilung der aus der Elektronen-Emissionsvorrichtung gemäß
FIG 1 austretenden Elektronen, - FIG 5
- einen Längsschnitt durch eine Ausführungsform einer Elektronen-Emissionsvorrichtung,
- FIG 6
- eine Draufsicht auf die Elektronen-Emissionsvorrichtung gemäß
FIG 5 .
- FIG. 1
- a schematic representation of the electron emission device according to the invention,
- FIG. 2
- a first example of an emission distribution from the electron emission device according to
FIG. 1 escaping electrons, - FIG. 3
- a second example of an emission distribution from the electron emission device according to
FIG. 1 escaping electrons, - FIG. 4
- a third example of an emission distribution from the electron emission device according to
FIG. 1 escaping electrons, - FIG. 5
- a longitudinal section through an embodiment of an electron emission device,
- FIG. 6
- a plan view of the electron emission device according to
FIG. 5 ,
Die in
An jedes der Gittersegmente G1 bis GN kann eine frei wählbare Gitterspannung UG1 bis UGN angelegt werden (siehe
Mit der erfindungsgemäßen Lösung sind beispielsweise die in den
Bei der in
Im Gegensatz dazu sind die Gitterspannungen UG1 bis UGN an den Gittersegmenten G1 bis GN bei der in
Bei der Emissionsverteilung gemäß
Eine Ausführungsform für eine Elektronen-Emissionsvorrichtung 1 ist in
Auf einem Substrat 4 ist ein Emittermaterial 6 aufgebracht, das in einer Emissionsfläche 3 Elektronen emittiert (Elektronenemission E).On a
Das Substrat 4 ist beispielsweise ein Grundkörper aus einer technischen Keramik. Bei dem Emittermaterial 6 handelt es sich z.B. um Carbon-Nano-Tubes (CNT) oder um ein Dispenser-Kathodenmaterial, wie z.B. Bariumoxid (BaO) oder Lanthanhexaborid (LaB6).The
Das Sperrgitter 5, das die Gittersegmente G1 bis GN umfasst, ist auf einem Keramikträger 7 beabstandet zum Substrat 4 (Grundkörper) angeordnet.The
Wie aus
Für spezielle Anforderungen kann es vorteilhaft sein, ein zweites Sperrgitter (nicht dargestellt) parallel und orthogonal sowie beabstandet zu dem Sperrgitter 5 anzuordnen. Das zweite Sperrgitter weist ebenfalls eine vorgebbare Anzahl von einzeln ansteuerbaren Gittersegmenten auf. Damit kann die Emissionsverteilung E der Elektronen in zwei Raumrichtungen beliebig gesteuert werden.For special requirements, it may be advantageous to arrange a second barrier grid (not shown) parallel and orthogonal and spaced from the
Das segmentierte Sperrgitter 5 aus dem Ausführungsbeispiel gemäß
Wie aus der Beschreibung der in
Obwohl die Erfindung im Detail durch bevorzugte Ausführungsbeispiele näher illustriert und beschrieben wurde, ist die Erfindung nicht durch die beschriebenen Ausführungsbeispiele eingeschränkt und andere Ausgestaltungen können vom Fachmann hieraus problemlos abgeleitet werden, ohne den Schutzumfang der Erfindung zu verlassen.While the invention has been further illustrated and described in detail by way of preferred embodiments, the invention is not limited to the embodiments described, and other embodiments may be readily derived by those skilled in the art without departing from the scope of the invention.
Claims (9)
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EP18158898.9A EP3531437A1 (en) | 2018-02-27 | 2018-02-27 | Electron-emitting device |
PCT/EP2019/051860 WO2019166161A1 (en) | 2018-02-27 | 2019-01-25 | Electron-emission device |
US16/971,018 US11373835B2 (en) | 2018-02-27 | 2019-01-25 | Electron-emission device |
EP19704225.2A EP3732702A1 (en) | 2018-02-27 | 2019-01-25 | Electron-emission device |
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EP18158898.9A EP3531437A1 (en) | 2018-02-27 | 2018-02-27 | Electron-emitting device |
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EP19704225.2A Pending EP3732702A1 (en) | 2018-02-27 | 2019-01-25 | Electron-emission device |
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Also Published As
Publication number | Publication date |
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EP3732702A1 (en) | 2020-11-04 |
US11373835B2 (en) | 2022-06-28 |
US20210082653A1 (en) | 2021-03-18 |
WO2019166161A1 (en) | 2019-09-06 |
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