EP3530776B1 - Anlage und verfahren zur lokalisierten oberflächenbehandlung von industriellen werkstücken - Google Patents

Anlage und verfahren zur lokalisierten oberflächenbehandlung von industriellen werkstücken Download PDF

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Publication number
EP3530776B1
EP3530776B1 EP18158520.9A EP18158520A EP3530776B1 EP 3530776 B1 EP3530776 B1 EP 3530776B1 EP 18158520 A EP18158520 A EP 18158520A EP 3530776 B1 EP3530776 B1 EP 3530776B1
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EP
European Patent Office
Prior art keywords
treatment
cell
station
treated
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP18158520.9A
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English (en)
French (fr)
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EP3530776A1 (de
Inventor
Luc Vanhee
Daniel GMUR
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
John Cockerill SA
IRT Saint Exupery
Original Assignee
Cockerill Maintenance and Ingenierie SA
IRT Saint Exupery
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Priority to EP18158520.9A priority Critical patent/EP3530776B1/de
Application filed by Cockerill Maintenance and Ingenierie SA, IRT Saint Exupery filed Critical Cockerill Maintenance and Ingenierie SA
Priority to ES18158520T priority patent/ES2816180T3/es
Priority to PCT/EP2019/051663 priority patent/WO2019162026A1/fr
Priority to BR112020017330-4A priority patent/BR112020017330A2/pt
Priority to CA3092271A priority patent/CA3092271A1/en
Priority to RU2020126270A priority patent/RU2020126270A/ru
Priority to US16/971,731 priority patent/US11168409B2/en
Priority to CN201980015090.2A priority patent/CN111971422A/zh
Publication of EP3530776A1 publication Critical patent/EP3530776A1/de
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Publication of EP3530776B1 publication Critical patent/EP3530776B1/de
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/005—Apparatus specially adapted for electrolytic conversion coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/004—Sealing devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/02—Tanks; Installations therefor
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/04—Removal of gases or vapours ; Gas or pressure control
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas

Definitions

  • the present invention relates to an installation and a method of localized surface treatment for industrial parts, on a 2D or 3D geometry and on a predetermined and perfectly bounded surface.
  • the invention applies in particular to the localized treatment of aeronautical parts of large dimensions and in particular to the local repair of the pre-existing surface treatment of parts having been welded by friction (FSW for "Friction Stir Welding").
  • the invention can also be applied in any industrial sector where a localized surface treatment must be carried out, whether in the field of production (new manufacturing) or that of repair (maintenance).
  • a processing sequence can for example consist of the successive stages of: degreasing, rinsing, pickling, rinsing, conversion treatment, rinsing, passivation, rinsing and drying.
  • the weight of the parts and assemblies is an important constraint.
  • assembly by bolting or riveting can advantageously be replaced in particular by the friction welding technique (FSW).
  • FSW friction welding technique
  • This technique makes it possible to assemble two parts in the solid state, using a non-consumable tool and without melting the material of the parts to be assembled.
  • the disadvantage of this technique is the deterioration of the surface coating of each part in the vicinity of the weld produced by friction, following the production of the weld itself and / or its cleaning.
  • the document WO 2016/071633 A1 (or FR 3 027 826 A1 ) describes a system and a method for local surface treatment of industrial parts.
  • the assembled part can be treated locally in deteriorated places.
  • the disclosed system comprises a plurality of reservoirs comprising treatment chemicals, as well as treatment cells, called “bath boxes”, making it possible to delimit a sealed space located on the part to be treated.
  • a controlled pressure circuit comprising a set of valves makes it possible to supply the cells with the treatment products contained in the various reservoirs.
  • a part can be treated locally, coated or painted with products identical to those used in the techniques of dipping by bath of parts whole.
  • This technique makes it possible not to jeopardize the quality and the possible certifications of the treatment compared to a bath soaking, in the case of parts welded after this surface treatment of the individual parts by bath.
  • the existing solutions generally consist of a mechanical preparation with or without addition of material and local painting. They can also implement an alternative and therefore less efficient surface treatment, applied manually, either with a brush or with a pad (example: electrolysis with Dalistick TM).
  • the treated area is not covered in a leaktight manner and there follows flows which generate loss of solutions and which can pollute or alter the areas adjacent to the area which requires treatment.
  • This treatment is for example a passivation treatment which can also promote the adhesion of the paint which will cover the area. In the case where it is imperative to follow different successive chemical treatments, this is carried out in several stages, not in the same apparatus and generally in a non-automated manner.
  • the document US 5,173,161 A relates to a device and a method of using the device to apply and / or remove a coating on workpieces.
  • the device includes a fluid transport device and a container adapted to receive the workpieces.
  • the container comprises an inlet line connected to a source of fluid, an outlet line connecting the container to the source of fluid, the source of fluid being positioned under the transport device, and a control device connecting the lines of inlet and outlet to the fluid source.
  • the transport device is a vacuum pump incorporated in the outlet line of the container.
  • the present invention aims to provide a solution for the local treatment of large industrial parts (typically up to 10 meters long), part of which has been locally damaged as a result of a process such as welding.
  • the invention aims to develop an apparatus having cells having a perfect seal to locally allow an exact reproduction of the surface treatment protocol described by the aircraft manufacturers (eg AIPI 02-01-003 from Airbus ).
  • Another particular aim of the invention is to develop equipment and cells capable of locally carrying out a surface treatment with the appropriate parameters of the solution and of performing an electrolytic surface treatment such as anodization, in a context of following constraints. : rapid temperature change (from room temperature to 70 ° C for example and vice versa), use of corrosive solutions (acids, alkalines, etc.), treatment of long and narrow parts, in 2D or even 3D form, distribution of current and electrical insulation in the case of electrolytic treatment, rapid treatment (filling, emptying) due to the passage of a large number of solutions (eg> 10) in the cells and finally the need for sealing in a context of expansion thermal.
  • Yet another object of the invention is to ensure the integration of a specific complex treatment system in an industrial production line, continuous or with treatment by successive baths.
  • Another object of the invention is to design an equipment which allows a treatment equivalent to the treatment with a tampon, but which, by being waterproof, avoids pollution of the environment by the treatment products and allows the protection of the adjacent surfaces on the piece vis-à-vis the drips, as well as the protection of the user.
  • Another object of the invention is a use both in manufacturing and in local maintenance or repair operations, either on two sides simultaneously, or on a single surface at a time.
  • the invention also relates to a production line for industrial parts comprising a first station for assembling the parts comprising a welding step, a second station for non-destructive testing of the welds produced, a localized processing station for the parts according to the description above. above and a final inspection station for the treated parts.
  • the process is repeated for treatments with different fluids, possibly interspersed with rinses, so as to constitute a treatment cycle.
  • the treated areas of the part are dried with dried air and heated for approximately 5 minutes.
  • a third aspect of the present invention relates to a use of the method described above, in a manufacturing process to provide additional functionality or assembly, or even during a maintenance or repair operation of a part already in use. .
  • the invention proposes a treatment installation which is intended to locally treat an area having a friction weld of width +/- 30 mm on a large piece which can go up to 6 and even 10 m in length.
  • the installation according to the invention therefore comprises at least one cell (in the case of a single face of the part to be treated) or two half-cells (in the case of two faces of the part to be treated) applicable (s) by means cylinders, or any other suitable application device, around the weld, if necessary a half-cell on each side of the part, the pressure and the application of the cells being controlled.
  • a partial vacuum is advantageously established in the cell, which makes it possible to quickly fill and empty it with the appropriate products.
  • ambient air re-enters the cell and the product outlet is avoided.
  • the cell will preferably be made of coated steel or aluminum coated to have a coefficient of thermal expansion identical or similar to that of the part to be treated, the coating being deposited on the surfaces in contact with the fluid, to resist the various solutions used and the temperatures of the processes used.
  • one of the planned treatments is electrochemical (eg anodization)
  • the cell will be provided with specific electrodes compatible with the different solutions passing through the cell. This installation allows both chemical and electrochemical treatments, as well as the drying of cells and treated parts before cell opening. In this case, the cells or half-cells must be electrically isolated.
  • the coating or the choice of construction materials for cells or half-cells can fulfill this role.
  • the solution proposed consists of a processing cell in which the identical successive treatments will be reproduced and according to the same operating mode as those used during the initial production of the part.
  • the invention relates to the implementation of this solution.
  • This solution can be applied either on a single face, or on several faces, such as for example on either side of a wall. It can be applied during a maintenance or repair operation of the part already in use (for example a touch-up on the fuselage surface of an aircraft). However, it can also be carried out during a manufacturing process, for example in the case where part of the surface (s) already treated beforehand requires local modification to provide additional functionality or assembly.
  • the equipment is provided and is designed to work at a pressure below atmospheric pressure.
  • the vacuum level is sufficient to contribute to the sealing of the device and allow, in the event of a local rupture of the mechanical sealing system of the cell, generate an air intake rather than a fluid leak to the outside, the air being subsequently separated from the solutions.
  • the level of vacuum must be low enough to limit the evaporation of part of the solutions and more particularly when they have to be hot.
  • the invention advantageously provides an inflatable seal which can be replaced for certain applications by another type of seal (o-ring or in "musical note” for example).
  • This joint will allow a limited effort on the surface of the part while conforming to its geometry. It will also make it possible to come to stop / locate the body of the cell at a few tenths of a mm from the surface of the part and by inflation to bridge this gap.
  • the proposed solution consists in reproducing on a weld bead, which can be up to 6 m long and 22 mm wide, the preparation and anodization treatment as described in the document AIPS 02-01-003 of Airbus.
  • the cell in which the various treatment solutions and the intermediate rinses will succeed one another is for example a cavity 6 m long, 40 mm wide internally having a depth of approximately 50 mm.
  • Two similar cells but arranged symmetrically on either side of the part to be repaired allow to close on the part and simultaneously treat the two faces of the weld bead.
  • the radius of curvature of the part generates deviations from a flat surface of for example +/- 0.4 mm.
  • the two half-cells are positioned using cylinders on either side of the room at a distance of a few tenths of a mm but adjustable by adjustable stops.
  • the device is then pinned in place.
  • the seal is for example ensured by a seal, preferably inflatable in EPDM, width 12 mm and inflated with air.
  • the latter is held in place on its 12 m circumference by a lip pinched on the side, between the half-cell and a holding piece.
  • the inflation air pressure is adjustable, for example between zero and 5 bar. A pressure of 1 to 2 bars is preferred.
  • the treatment cell is connected to the chemical solution tanks in a sealed and submerged manner. The two connections allow circulation of the fluid in the treatment chamber. This ensures the renewal of the solution, the turbulence necessary for the treatments, the calorific intake necessary for maintaining a uniform temperature but also the evacuation of the gases entering or produced during the treatments.
  • a set of valves allows the passage from one treatment solution to another.
  • the vacuum is preferably provided by a centrifugal liquid ring pump, but any other vacuum system can be considered.
  • the vacuum is measured and is regulated by a vacuum breaker valve.
  • the suction is done through a buffer pot (or vacuum regulation flask) ensuring the filling of the two half-cells and facilitating the regulation of the depression.
  • the vacuum pump is connected to this buffer pot through a condenser allowing the vapors naturally emitted or generated by the vacuum to be condensed.
  • Such a device also allows the drying of the part at the end of the cycle.
  • the present invention provides a local surface treatment system, such as treatment in the vicinity of welds of parts having been assembled by friction (FSW). These parts, before being assembled, underwent several surface treatments, but the surface located at the location of the weld was deteriorated following the friction assembly and the making / cleaning of the weld.
  • FSW local surface treatment system
  • the parts to be treated will generally have a maximum dimension of 10 m in length, 4 m in width (diameter).
  • these are half-tubes of the same type as illustrated (and shown in dotted lines at the level of the cabin of an Airbus A320) on the figure 1 .
  • the welds given in example are longitudinal and are 2D welds. They will serve as an illustration when describing the installation below, without the longitudinal nature or any other property of these welds being limiting for the scope of the invention.
  • These parts will generally have an average thickness for example of 1.9 mm in the case of aircraft parts but may be thinner or thicker locally (thickness typically varying from 1.2 mm to 6 mm in the case of parts plane).
  • each weld should easily be transposable to other dimensions and geometries, in particular complex 3D geometries.
  • each weld may be different and must be able to be treated specifically by a cell adapted to its dimensions and geometric characteristics. In particular, it may have several curvatures.
  • each weld location will be "enclosed” in a sealed cell for treatment with different chemicals or fluids (see below).
  • the various treatment fluids for example respective degreasing, pickling, stripping, anodizing, etc. fluids
  • storage tanks 3A, 3B, 3C, 3D, etc. located below the treatment station 1 proper are brought sequentially, one after the other, by a vacuum system 6 ensuring the automated depression of the cells.
  • the part to be treated 2 is maintained using suction cups (not shown) and moved from one station to another, in this case on a suitable support 11 (depositing station) located in station 1, at the using a transport gantry or manipulator 7 ( figure 3 ).
  • This transport tool 7 has the capacity to locate its location on each station and to locate the location of the part to be moved.
  • the gantry 7 has a variable diameter, which allows it to pick up the part 2 deposited in the previous station, adjusted to its smallest diameter before then adjusting to the diameter of the part (its maximum diameter) but without touch her. These are then suction cups (not shown) in contact with the part which, by vacuum, will “press” the part against the supports, for example made of Ertalon® included in the structure of the gantry 7. The gantry 7 will then close the part to its minimum diameter by simple pivot of the upper parts and can then lift it and transport it to the next station. The removal mechanism is similar but reversed.
  • the part to be treated 2 is a set of elements assembled by FSW 16 welds made on the assembly station.
  • the parts 2 were implemented by machining and have undergone a surface treatment. For example, they have been degreased, prepared, anodized and painted.
  • paint is an anti-corrosion primer and of course cannot be damaged during treatment or during handling.
  • the two faces of the weld beads 16 therefore have untreated surfaces. On the upper face, these zones are for example exposed by milling with a milling cutter. On the underside, these areas are for example bare due to masking by a tape during the treatments.
  • the two welds 16 making up the assembly will preferably be reprocessed simultaneously in station 1.
  • the part to be treated 2 comprises ears 9, 10A, 10B, as illustrated in figures 1 , 10 and 11 , some of which are drilled, used to fix or transport the parts and precise holes ("locatings") are also used to locate the part.
  • Ears 10A, 10B are also produced at each end of the weld 16 and are centered on the axis thereof, to allow the start and end of the weld 16 ( figures 10 and 11 ).
  • the ears 10A are partially cut (in ears 10B) to make control coupons, for analysis purposes (non-destructive testing) and to eliminate the improper soldering parts 16 ( figure 11 ).
  • holes can be made. They will allow communication between the treatment chambers and the evacuation of the liquid or gas, as explained below.
  • two half-cells As shown in the figure 5 , two half-cells, an upper half-cell 4A and a lower half-cell 4B are positioned in use on either side of the part to be treated 2, so as to create a sealed chamber 5 centered over the entire length of the weld 16, where the required treatment will be applied.
  • Anodization treatment of the weld can also be carried out using electrodes 15 provided in cells 4A, 4B (see figure 9 ).
  • the surface treatment station 1 comprises the station for depositing the part 11 as well as all of the treatment half-cells 4A, 4B.
  • the manipulator gantry 7 places the part on the treatment station by sliding the part 2 between the depositing station 11 and the upper half-cells (not shown).
  • the half-cells 4A, 4B remain in place in station 1 but are retracted when they are not in use. Their movement can be for example vertical or perpendicular with respect to the positioning of the weld, with for example a stroke of approximately 100 mm for the lower half-cells, and of minimum 400 mm for the upper half-cells, the latter being able to be provided by the positioning cylinders 12 or any other similar assembly.
  • positioning jacks 12 make it possible to precisely position the two half-cells 4A, 4B around the part 2, or more exactly in jaw around the weld 16, in order to form the sealed chamber 5.
  • These jacks will be generally two in number per half-cell 4A, 4B.
  • application cylinders 17 can also be provided to allow precise application of the chamber 5 on the part 2. These are illustrated on the figures 5 and 6 , purely by way of illustration, eleven in number, making it possible to distribute the pressure of the corresponding cell 4A, 4B over a maximum of points to avoid deformation of the part 2.
  • These application cylinders 17 are absolutely necessary only in the case where the seal used is not an inflation seal, that is to say in the case where it is necessary to ensure compression effort.
  • the two half-cells 4A, 4B are designed to allow the entire weld 16 of the part to be covered, that is to say its two faces / sides on either side of the part 2 ( figure 5 ). These are aligned on the axis of the weld 16 and are placed below and above the part to be treated 2. Each chamber 5 creates a seal with the part to be treated 2.
  • One or both cells 4A, 4B are advantageously removable in order to allow the removal and recovery of the part 2 on the tool.
  • each half-cell 4A, 4B has a profile which ensures rapid evacuation and drainage of the walls. For example, they essentially have the form of half-tubes closed at their ends by a part of essentially spherical shape.
  • the retention zones are thus reduced to their minimum. If retention areas of the tool persist, their content can then advantageously be aspirated by means of a venturi system or equivalent in order to be returned to the supply and evacuation pipes.
  • a drying system detailed below can be provided.
  • the open area of the treatment chamber 5 has a dimension of 45 mm wide and 50 mm high.
  • the length of the treatment chamber 5 is limited by the length of the part as well as by the remaining part of the ears 10B mentioned above in order to carry out a treatment on the entire weld 16.
  • each half-cell 4A, 4B must be adapted to the geometry of the part, its design will be such that a reduction in section of the cell, and in particular in its overall dimensions in width will always be possible depending on the development of the process, this in order to allow an adaptation to a narrower weld 16 and to be able to carry out a treatment in a place confined in width (see figure 10 ).
  • the half-cell 4A, 4B is perfectly sealed on the part and its emptying must be almost complete.
  • a seal is produced on the part 2 as well as on the remaining part of the ears 10B. All the equipment also has a slight inclination (approximately 2% slope), for the evacuation of air during the filling phases and liquids during the emptying phases. Likewise, the evacuation of gas pockets which may form during filling or during the treatment phases must be evacuated from the treatment chamber 5 via channels or, if necessary, by drilling holes in the ears 10A, 10B located at the ends of the welds 16.
  • the material used for the treatment chamber 5 may require the use of a support in order to stiffen it and accept the mechanical stresses.
  • the choice of materials for chamber 5 as well as its support and their method of assembly preferably take account of the differential thermal expansion of the materials and their chemical resistance.
  • the choice of polypropylene for the material of the chamber causes it to be extended by 45mm at a temperature of 60 ° C.
  • the half-cell 4A, 4B can be left free on the part or, conversely, constrained on its support to reduce these expansion phenomena.
  • the constraints caused by this contained expansion must be taken into account in the dimensioning of the components.
  • the cell will alternately and preferably be made of coated steel or coated aluminum to have a coefficient of thermal expansion identical or similar to that of the part to be treated, with for example a coating in the form of Halar®.
  • the tanks 3A to 3D are provided with all the instrumentation necessary for the autonomous operation of the chamber 5 (temperatures, levels, pH, conductivity among others will be measured individually for each of the products used).
  • connection boxes 14 of the treatment chambers 5 make it possible to make the junction between the upper half-cells and the lower half-cells upstream and downstream thereof and thus, from a common pipe, supply (or drain) the two half-cells at the same time and with the same solution.
  • the connection system 14 of the chambers must allow a sealed connection between the two half-cells 4A, 4B. Preferably, this system 14 does not require human intervention for its installation. Only an intervention may be required to lock it.
  • seals 13 ( figures 7 , 8 and 9 ). Inflatable seals 13 can advantageously be used to perform this function.
  • connection system 14 also performs the filling functions upstream of the two half-cells 4A, 4B and must allow the evacuation of air bubbles in the treatment chambers 5 downstream.
  • connection system 14 Another function of the connection system 14 is to ensure a good distribution of the flow rates between the upper and lower half-cells.
  • the use of diaphragms may be required or any other system ensuring this distribution.
  • a common flow measurement to all the products having to circulate in the treatment chambers 5 can be implemented.
  • the treatment chambers 5 produced by the connection of the cells 4A, 4B are placed under vacuum in order to allow them to be filled with the various liquids coming from the storage tanks 3A, 3B, etc. Circulation pumps are not used in this step.
  • a balloon having the function of expansion vessel 18 is placed at a higher level than that of the treatment chambers 5 ( figures 2 and 4 ).
  • This vacuum regulation balloon 18 comprises various equipment, including a connection to a system generating vacuum 6 in all of the cells, pipes 19 which make it possible to create a vacuum in the circuit and fluid connections. The vacuum produced enables the assembly to be filled and the liquid to rise in this reservoir 18.
  • the circulation pumps take over for the treatment phase (not shown). These are installed downstream of the treatment cells 5 to maintain a slight depression during treatment.
  • the expansion tank 18 also allows the evacuation of the residual air or the gas produced by the treatment of the part 2.
  • the system generating the vacuum 6 can be produced in the form of a positive displacement pump or a vacuum pump, capable of ensuring the desired vacuum, and is connected to the half-cells 4A, 4B by a pipe 19 through the expansion tank 18 and equipped with an automatic isolation valve. A vent valve is also installed on this tank.
  • a level control function is installed on the expansion tank 18. During the filling phase, the fluid must reach a certain threshold before allowing the circulation pumps to start. Then, the fluid level is continuously monitored during the treatment cycle to ensure proper degassing of the chambers.
  • a pressure measurement function in this balloon 18 or at the level of the treatment chambers 5 can also be installed. This checks that the vacuum is properly placed during the filling phase and that the installation is placed under vacuum during the treatment phases.
  • the discharges from the pumping group are channeled to a gaseous effluent treatment system.
  • the equipment in contact with the part to be treated 2 and the parts of circuits common to the different treatment solutions and to the rinsing water preferably have the capacity to be completely emptied without leaving any dead volume.
  • This emptying can be done by gravity (storage in a pit below the level of the treatment cells) but can also be assisted (by compressed air for example).
  • the equipment according to the invention can be used in stationary mode (therefore without circulation) but forced agitation can also be implemented, the aim of which is to standardize the treatments but also to bring the calories necessary for rapid heating and maintaining the temperature of chamber 5 and the part to be treated 2.
  • This agitation will be done by the shearing and the turbulence of the flow.
  • a flow rate greater than 1 m / s will then preferably be ensured in the half-cells 4A, 4B.
  • An alternative could supplement this device by placing turbulence promoters throughout the half-cell. In this specific case, care will be taken not to locally disturb the electric field necessary for anodization.
  • the heat losses are minimized by means of thermally insulated pipes.
  • the thicknesses of insulation do not exceed 25 mm so as not to interfere with their size, and thus avoid the addition of a significant calorific mass hindering changes in temperature due to its inertia.
  • Tanks of temperature exceeding 45 ° C are also insulated. Generally speaking, any surface whose temperature can reach or exceed 50 ° C will be insulated in this way.
  • the half-cells 4A, 4B are not necessarily insulated.
  • the heaters will be dimensioned so as to ensure temperature uniformity in the storage tanks 3, in the conduits 22, 23 and the cells 4A, 4B during the entire treatment time and this for the highest values.
  • the deviations must not exceed a total of 5 ° C compared to the target value while the variations will be +/- 2 ° C in stationary mode.
  • the cells 4A, 4B can be equipped with electrodes 15 allowing anodization or any other electrochemical treatment of the part to be treated ( figure 9 ).
  • These electrodes 15 are for example made of graphite, lead or stainless steel, with a preference for graphite, and placed inside the treatment chamber 5.
  • the shape of the electrodes 15 should not block the flow of liquid in the half-cells 4A, 4B but may participate in the increase in turbulence in them.
  • the profile of these electrodes 15 should preferably not have retention zones. To do this, they can for example be flat, cylindrical or in the form of a grid. Depending on the embodiment shown on the figure 9 , the electrodes are flat and of triangular section.
  • the electrodes 15 will advantageously consist of adjacent pieces making it possible to compensate for the expansion of the materials.
  • the anodizing electrodes 15 are for example supplied by a rectifier with a direct and smoothed current, to allow the anodization of two treatment chambers 5 (not shown).
  • the electrodes 15 are electrically connected to each other by a conductive material outside the treatment chamber 5.
  • the electrodes 15 must be individually replaceable without having to disassemble all of the connections.
  • the electrodes 15 ensure a uniform current density on the two faces of the part and an identical distribution between the two half-cells 4.
  • the treatment must be uniform over the entire length of the part and over the entire width treated, and is identical on both the lower and upper sides.
  • the distance between electrodes and zones to be coated is preferably uniform and sufficient to ensure the uniformity of the thickness of the deposit.
  • the treated areas of part 2 are dried at the end of the treatment cycle.
  • the use of dried and heated air will be preferred in order to increase the effectiveness of the treatment.
  • the drying is preferably carried out in approximately 5 minutes.
  • the main component of this system is an air heater which simultaneously increases the capacity for exchanging air with the humidity contained in the treatment chambers.
  • the drying system can be supplemented with an air dehydrator by solid absorbents such as silica gel or molecular sieve.
  • solid absorbents such as silica gel or molecular sieve.
  • the air conveyed through this dehumidifier passes over a tray in order to be dried.
  • the tray, support of the solid absorbent is divided into two sectors. One allows the dehumidification of the air and the second the regeneration of the absorbent with a dry or even heated air flow.
  • the support is generally rotatable to allow recycling of the absorbent continuously.
  • the drying will be limited to the treatment chambers 5 to the exclusion of the nurses and any liquid retention zone. This will allow to limit the volume of water to be evacuated to the treatment chambers 5 (zones which will open during the movement phases of the part).
  • the discharges of drying air leaving the chamber 5 containing water vapor are sent directly to a steam washer 6 before being evacuated.
  • the materials used must be compatible with the system temperatures.
  • a sleeve or a flame arrester may be installed on the discharge network.
  • the closing / opening system of the treatment chambers 5 makes it possible to move the latter and to ensure a sufficient approach and holding in position during the entire treatment cycle.
  • This system can be mechanical, electrical, hydraulic or pneumatic and is capable of ensuring slow movement of the treatment chambers 5 (to avoid dripping and stress on the parts). It compensates for the inclination of the part 2 and allows sufficient clearance of the treatment half-cells 4A, 4B to allow the passage of the parts and their handling system.
  • the actuators of the system must be guided if their section or design does not allow repetitive movement and positioning. Guiding columns then ensure repeatability of the movements. If several actuators are used, the movements must be perfectly coordinated.
  • the treatment chambers 5 can be secured in the open position by a pinout or by a lock.
  • the system must also make it possible to maintain the half-cells 4A, 4B in position during the treatment phases and to compensate for the possible internal pressure force in the treatment chambers 5 and that of the seal 13 .
  • the open and closed positions of the processing chambers 5 will be controlled by limit switches.
  • the closing / opening system takes into account any expansion of the treatment chambers 5 and their supports while respecting the arrow constraints.
  • the sealing system is a system which guarantees the sealing between the treatment cell 5 and the part to be treated 2.
  • the sealing system housed in the half-treatment cell 4A, 4B, is supported on the part to be treated 2 in order to achieve sealing.
  • the sealing of the treatment chambers 5 is preferably ensured by a seal 13 made of flexible material compatible with the various treatments defined in the AIPI (Airbus Process Instruction).
  • This seal 13 must resist the products contained in the treatment chamber 5.
  • the seal 13 is placed at the periphery of the weld in the longitudinal direction. It is also supported on the ear parts 10B (see above) on either side of the weld 16.
  • This seal 13 must be capable of ensuring the radius of curvature necessary for joining the cells 4 while ensuring the tightness of the chambers 5 with the part 2. It must also be capable of compensating for the radius of curvature of the lower surface of the part as well as the admissible arrows of the treatment chambers 5. Finally, it will be chosen according to its ability to minimize the leakage of liquid or air in the event of non-planar surfaces in the upper part.
  • tanks 3A, 3B, 3C, etc. allow the storage and heating of treatment products. They are arranged next to each other in station 1 but, in a pit, at a lower level relative to the treatment chambers 5 in order to allow a gravity return to the tanks of the fluids having were successively transferred to the rooms for treatment.
  • the depth of this pit will be of the order of 2.5 to 3.5 m, this depth being determined by the required accessibility to the equipment, instruments and taking of samples.
  • the tanks 3A, 3B, 3C, etc. are grouped by processing function. Each set of tanks has one enclosure for the treatment product and two enclosures for the associated rinses. These enclosures are closed by covers which allow access for the maintenance of the equipment inside the tanks as well as their cleaning.
  • All automatic intake or transfer valves between the baths are equipped with a manual upstream isolation valve.
  • the isolated sections must be able to be drained for safety intervention.
  • water supplies or bath transfers are controlled by a flow meter.
  • Water can also be supplied manually via a manual valve in parallel with the automatic valve.
  • the sets of storage tanks 3A, 3B, 3C, etc. are similar in terms of design and are installed on independent retentions so as not to cause mixing of products in the event of a leak.
  • the transfer of the baths between the treatment tanks 3A, 3B, 3C, etc. and the treatment chambers 5 is provided by a set of pipes 22, 23.
  • This connection system 22, 23 makes it possible to transfer all the supply requirements to the treatment chambers 5 automatically. It guarantees a sufficient flow to avoid thermal losses of the part and to ensure the process times.
  • the pipes are made by taking into account the constraints of mechanical resistance, support, expansion phenomena.
  • taking into account the operating temperature of the installation can make it more rational to continuously support pipes with a diameter less than 50mm outside.
  • This continuous support can be carried out for example in angles, U-shaped or semi-round profile made of metallic materials or of thermosetting plastic.
  • the pipes can be insulated in order to limit heat losses during liquid transfers.
  • This set of pipes can be protected from shocks by mechanical protections in the areas of passage of personnel and handling equipment.
  • the pipes carrying products dangerous to operators will be protected by masks or protection to prevent splashes.
  • the flange connections must be protected by a flexible anti-projection cover. Any projections when the pipes break will be channeled to the retentions.
  • the distribution manifolds will be installed near the storage tanks 3A, 3B, 3C, etc. to reduce the length of multiple pipes as well as the electrical cabinet.
  • the inlet and outlet manifolds allow the various preparation and storage tanks to be connected to the treatment chambers 5. These manifolds include all the isolation valves coming from the tanks. During the filling phase of the treatment chambers 5, a set of valves opens to let the liquid pass. During the emptying phase, the same set of valves opens to allow the liquid to return to the storage tank. Nurses are designed not to create fluid retention. The machined parts will be preferred in order to guarantee a collector without retention zones.
  • This type of solution can be used in different industries in which a surface treatment is necessary for the development of the product or part of the finished product and when this treatment must be done locally on the surface.
  • This type of solution can also be implemented during maintenance or repair operations (fuselage of aircraft in service, car body, etc.). It allows for example to prepare a surface before depositing the adhesion promoter necessary for painting.
  • the application being waterproof, the adjacent surfaces and the operators are thus protected.
  • the vacuum and the sealing then allow treatment on any surface, with a non-planar geometry and, within certain limits, non-continuous, for example a curved surface or a locally striated surface. It also offers the advantageous advantage of being able to be implemented whatever the orientation of the surface to be treated.
  • the vacuum does not only provide sealing, it contributes to the application of the treatment cell on the part.
  • a vacuum of 100 mbar contributes for a surface of 4 dm 2 to a plating effort of 400 Newton.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Automation & Control Theory (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Pressure Vessels And Lids Thereof (AREA)

Claims (17)

  1. Station zur lokalen Oberflächenbehandlung (1) eines zu behandelnden industriellen Werkstücks (2), die Folgendes umfasst:
    - mindestens eine Behandlungskammer (5), die aus einer Zelle oder zwei Halbzellen (4A, 4B) gefertigt ist, wobei jede Zelle oder Halbzelle (4A, 4B) Positionierungsmittel umfasst und darauf ausgelegt ist, um einen undurchlässigen Raum zwischen den Wänden der Zelle oder Halbzelle (4A, 4B) und einem jeweiligen Teil oder einer jeweiligen Seite (2) des zu behandelnden Werkstücks (2) zu begrenzen, wobei die Zelle oder jede Halbzelle (4A, 4B) eine Wand umfasst, die eine Öffnung (20) aufweist, die darauf ausgelegt ist, um den entsprechenden Teil oder die entsprechende Seite des zu behandelnden Werkstücks (2) abzudecken, wobei die Öffnung (20) der Zelle oder Halbzelle (4A, 4B) durch eine durchgehende Dichtung (13) begrenzt ist;
    - eine Vielzahl von Lagerbehältern (3A, 3B, 3C, 3D), die darauf ausgelegt sind, um jeweils ein Behandlungsfluid zu enthalten;
    - einen Kreislauf zur Versorgung und Entleerung (22, 23) der Behandlungskammer (5), der jeden Lagerbehälter (3A, 3B, 3C, 3D) mit der Behandlungskammer (5) verbindet, um die Behandlungskammer (5) mit den jeweiligen Behandlungsfluiden zu versorgen,
    dadurch gekennzeichnet, dass:
    - die Behandlungsstation ein System zur Erzeugung eines Unterdrucks (6) mit Bezug auf den atmosphärischen Druck der Behandlungskammer (5) und des Versorgungs- und Entleerungskreislaufs (22, 23) umfasst, das ermöglicht, dass die Kammer (5), bei der Erzeugung eines Unterdrucks, dank des Ansaugens des Behandlungsfluids über den Versorgungs- und Entleerungskreislauf (22, 23) von den Lagerbehältern (3A, 3B, 3C, 3D) bis zur Behandlungskammer (5) versorgt bzw., bei der Erzeugung eines atmosphärischen Drucks des Versorgungs- und Entleerungskreislaufs (22, 23), dank der Rückkehr durch Schwerkraft des Behandlungsfluids in die Lagerbehälter (3A, 3B, 3C, 3D), die sich auf einem niedrigeren Niveau als die Behandlungskammer (5) befinden, entleert wird;
    - der wasserdichte Raum, der zwischen den Wänden der Zelle oder Halbzelle (4A, 4B) und einem jeweiligen Teil oder einer jeweiligen Seite (2) des zu behandelnden Werkstücks (2) begrenzt ist, ist durch eine Dichtung (13) gewährleistet, die mit Luft mit einem Druck im Bereich zwischen 0 und 5 bar, vorzugsweise zwischen 1 und 2 bar, aufgeblasen wird, nachdem die Mittel zur Positionierung der Zelle oder jeder Halbzelle diese Letzere(n) einige Zehntel Millimeter von der Oberfläche des zu behandelnden Werkstücks entfernt positioniert haben.
  2. Station zur lokalen Oberflächenbehandlung (1) nach Anspruch 1, dadurch gekennzeichnet, dass die Zelle oder jede Halbzelle (4A, 4B) aus einem Metall, das auf die Oberflächen in Kontakt mit den Fluiden durch eine Beschichtung aufgetragen wird, die geeignet ist, der Korrosion der Fluide und den Betriebstemperaturen standzuhalten, oder aus synthetischen Materialien, vorzugsweise aus Polypropylen oder PVDF, hergestellt ist.
  3. Station zur lokalen Oberflächenbehandlung (1) nach Anspruch 1, dadurch gekennzeichnet, dass die durchgehende Dichtung (13) eine aufblasbare Lippendichtung ist, die vorzugsweise aus EPDM hergestellt ist.
  4. Station zur lokalen Oberflächenbehandlung (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das System zur Erzeugung eines Unterdrucks (6) der Kammer (5) mindestens eine Vakuumpumpe, ein Druckausgleichsventil zur Messung und Regulierung des Vakuums und einen Dichtungstopf oder Ballon zur Regulierung des Vakuums (18) umfasst, wobei der Dichtungstopf (18) mit der Vakuumpumpe durch einen Kondensator verbunden ist, der die Dämpfe kondensiert, die vom Unterdruck erzeugt werden.
  5. Station zur lokalen Oberflächenbehandlung (1) nach Anspruch 4, dadurch gekennzeichnet, dass die Vakuumpumpe eine Flüssigkeitsring-Zentrifugalpumpe ist.
  6. Station zur lokalen Oberflächenbehandlung (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Versorgungs- und Entleerungskreislauf (22, 23) wärmeisolierte Leitungen umfasst.
  7. Station zur lokalen Oberflächenbehandlung (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Behandlungskammer (5) Mittel zum Rühren des Behandlungsfluids im undurchlässigen Raum umfasst.
  8. Station zur lokalen Oberflächenbehandlung (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Zelle oder jede Halbzelle (4A, 4B) eine Elektrode für eine elektrochemische Behandlung (15) des zu behandelnden Werkstücks (2) umfasst.
  9. Station zur lokalen Oberflächenbehandlung (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie einen Betätigungs-Rahmenträger (7), der darauf ausgelegt ist, um das Werkstück (2) von einem Ablageträger einer vorhergehenden Station hin zu einem Ablageträger (11) der Behandlungsstation (1) dank eines variablen Durchmessers, der dem Rahmenträger ermöglicht, sich dem Werkstück (2) zu nähern, ohne es zu berühren, zu transportieren, und Saugnäpfen umfasst, die ermöglichen, dass das Werkstück (2) mit dem Ablageträger in Kontakt kommt und mittels Unterdruck in Position bleibt.
  10. Station zur lokalen Oberflächenbehandlung (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie eine Struktur umfasst, die ermöglicht, die Behandlungszelle oder -halbzellen (4A, 4B) einzufahren und zu positionieren, und die mit einer Vielzahl von Positionierungszylindern (12) ausgestattet ist, die ermöglichen, die Zelle oder die Halbzellen (4A, 4B) auf jeder Seite und in der Nähe des zu behandelnden Werkstücks (2) zu positionieren, und die eventuell mit Zylindern (17) zum Anbringen der Zelle oder Halbzellen (4A, 4B) an dem zu behandelnden Werkstück (2) ausgestattet ist, um eine wasserdichte Kammer (5), gegebenenfalls durch Klemmen, herzustellen.
  11. Station zur lokalen Oberflächenbehandlung (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie darauf ausgelegt ist, um eine lokale Oberflächenbehandlung auf industriellen Werkstücken mit großen Abmessungen (2) durchzuführen, die als "Ohren" bezeichnete Auswölbungen (10A, 10B) aufweisen, die bei jeder Schweißnahtende durchgeführt werden, wobei die Ohren (10A, 10B) auf der Schweißachse zentriert sind und den Beginn und das Ende des Schweißens ermöglichen, wobei die Ohren entweder einen entfernbaren Teil (10A) aufweisen, der abnehmbar ist und als Reagenzglas verwendet werden kann, z. B. um eine zerstörungsfreie Kontrolle durchzuführen, oder ein restlicher Teil (10B) ist, in dem eine Bohrung durchgeführt werden kann, um eine fluidische Kommunikation zwischen den Halbzellen (4A, 4B) zu ermöglichen.
  12. Station zur lokalen Oberflächenbehandlung (1) nach Anspruch 11, dadurch gekennzeichnet, dass die Dichtheit der Behandlungskammer (5) durch die durchgehende Dichtung (13) längs auf jeder Seite der Schweißnaht und auf dem restlichen Teil (10B) der Ohren an den Enden der Schweißnaht gewährleistet ist.
  13. Produktionslinie von industriellen Werkstücken, umfassend eine erste Station zum Zusammenbau der Werkstücke, die einen Schritt des Schweißens umfasst, eine zweite Station zur zerstörungsfreien Kontrolle der durchgeführten Schweißnähte, eine Station zur lokalen Behandlung der Werkstücke nach einem der vorhergehenden Ansprüche und eine abschließende Station zur Inspektion der behandelten Werkstücke.
  14. Verfahren zur lokalen Oberflächenbehandlung (1) eines zu behandelnden industriellen Werkstücks (2), das die Behandlungsstation (1) nach einem der Ansprüche 4 bis 12 anwendet, und durch die folgenden Schritte gekennzeichnet ist:
    - Einstellen eines Niveaus des Unterdrucks im System zum Erzeugen eines Unterdrucks (6) auf einen Wert, der höchstens 500 mbar, vorzugsweise 200 mbar und noch bevorzugter 100 mbar unter dem atmosphärischen Druck liegt;
    - Öffnen der Ventile und Füllen durch Ansaugen des Dichtungstopfs oder Ballons zur Regulierung des Vakuums (18) bis zu einem vorbestimmten Niveau mit einem Behandlungsfluid, das aus einem Lagerbehälter (3A, 3B, 3C, 3D) kommt;
    - In-Umlauf-Bringen durch Pumpen des Behandlungsfluids, das aus einem Lagerbehälter (3A, 3B, 3C, 3D) kommt, und Füllen der Behandlungskammer (5);
    - Behandeln des zu behandelnden Werkstücks (2);
    - Umlaufstopp des Behandlungsfluids;
    - Abbrechen des Erzeugens eines Unterdrucks, Rückstellen auf den atmosphärischen Druck und Entleeren durch die Schwerkraft des Behandlungsfluids in den Lagerbehälter (3A, 3B, 3C, 3D).
  15. Verfahren nach Anspruch 14, dadurch gekennzeichnet, dass es für die Behandlungen mit verschiedenen Fluiden wiederholt, und eventuell durch Spülungen unterbrochen wird, um einen Behandlungszyklus zu bilden.
  16. Verfahren nach Anspruch 15, dadurch gekennzeichnet, dass am Ende des Behandlungszyklus die behandelten Bereiche des Werkstücks (2) durch Luft, die während ungefähr 5 Minuten getrocknet und erhitzt wurde, getrocknet werden.
  17. Verwendung des Verfahrens nach Anspruch 14 oder 15 in einem Herstellungsprozess, der dazu bestimmt ist, eine Funktionalität oder eine zusätzliche Montage zu gewährleisten, oder auch während eines Wartungs- oder Reparaturbetriebs eines Werkstücks, das bereits in Verwendung ist.
EP18158520.9A 2018-02-26 2018-02-26 Anlage und verfahren zur lokalisierten oberflächenbehandlung von industriellen werkstücken Active EP3530776B1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
ES18158520T ES2816180T3 (es) 2018-02-26 2018-02-26 Instalación y método de tratamiento superficial localizado para piezas industriales
EP18158520.9A EP3530776B1 (de) 2018-02-26 2018-02-26 Anlage und verfahren zur lokalisierten oberflächenbehandlung von industriellen werkstücken
BR112020017330-4A BR112020017330A2 (pt) 2018-02-26 2019-01-23 Estação para tratamento localizado de superfície de uma peça industrial a ser tratada, linha de produção para peças industriais, método para tratamento localizado de superfície de uma peça industrial a ser tratada e uso do método para tratamento localizado de superfície de uma peça industrial a ser tratada
CA3092271A CA3092271A1 (en) 2018-02-26 2019-01-23 Facility and method for localized surface treatment for industrial workpieces
PCT/EP2019/051663 WO2019162026A1 (fr) 2018-02-26 2019-01-23 Installation et procede de traitement de surface localise pour pieces industrielles
RU2020126270A RU2020126270A (ru) 2018-02-26 2019-01-23 Станция и способ локализованной обработки поверхности промышленных деталей
US16/971,731 US11168409B2 (en) 2018-02-26 2019-01-23 Facility and method for localized surface treatment for industrial components
CN201980015090.2A CN111971422A (zh) 2018-02-26 2019-01-23 用于工业工件的局部表面处理的设施和方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18158520.9A EP3530776B1 (de) 2018-02-26 2018-02-26 Anlage und verfahren zur lokalisierten oberflächenbehandlung von industriellen werkstücken

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EP (1) EP3530776B1 (de)
CN (1) CN111971422A (de)
BR (1) BR112020017330A2 (de)
CA (1) CA3092271A1 (de)
ES (1) ES2816180T3 (de)
RU (1) RU2020126270A (de)
WO (1) WO2019162026A1 (de)

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FI53841C (fi) 1975-05-07 1978-08-10 Teuvo Tapio Korpi Elektrolytisk ytbelaeggningsanordning
JPH03505348A (ja) * 1988-11-24 1991-11-21 グラム，ゲルハルト ワークピースにおいて被覆部を積層および／または除去する装置
US5279725A (en) * 1992-03-18 1994-01-18 The Boeing Company Apparatus and method for electroplating a workpiece
DE69312636T2 (de) * 1992-11-09 1998-02-05 Canon Kk Anodisierungsapparat mit einer Trägervorrichtung für das zu behandelnde Substrat
US7479621B2 (en) * 2005-12-06 2009-01-20 Praxair Technology, Inc. Magnetic annealing tool heat exchange system and processes
TWI624567B (zh) * 2012-12-11 2018-05-21 諾發系統有限公司 真空電鍍槽
FR3027826B1 (fr) 2014-11-05 2018-11-02 Stelia Aerospace Systeme et procede de traitement local de surface
JP6847691B2 (ja) * 2017-02-08 2021-03-24 株式会社荏原製作所 めっき装置およびめっき装置とともに使用される基板ホルダ

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CA3092271A1 (en) 2019-08-29
RU2020126270A3 (de) 2022-03-28
BR112020017330A2 (pt) 2020-12-15
EP3530776A1 (de) 2019-08-28
ES2816180T3 (es) 2021-03-31
WO2019162026A1 (fr) 2019-08-29
US20200392638A1 (en) 2020-12-17
CN111971422A (zh) 2020-11-20
US11168409B2 (en) 2021-11-09
RU2020126270A (ru) 2022-03-28

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