EP3494246A1 - Verfahren zum oberflächenbeschichten eines bauteils sowie beschichtungseinrichtung zur durchführung des verfahrens - Google Patents
Verfahren zum oberflächenbeschichten eines bauteils sowie beschichtungseinrichtung zur durchführung des verfahrensInfo
- Publication number
- EP3494246A1 EP3494246A1 EP17757473.8A EP17757473A EP3494246A1 EP 3494246 A1 EP3494246 A1 EP 3494246A1 EP 17757473 A EP17757473 A EP 17757473A EP 3494246 A1 EP3494246 A1 EP 3494246A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- coating
- furnace
- process gas
- coated
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0209—Pretreatment of the material to be coated by heating
- C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45595—Atmospheric CVD gas inlets with no enclosed reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
Definitions
- the invention relates to a method for surface coating of a component, the surface to be coated is wholly or at least partially formed as a metal surface, wherein the surface to be coated is provided with a friction-reducing and / or strength-enhancing coating.
- the invention also relates to a coating device for carrying out such a method.
- the surface coating of components with friction-reducing and / or strength-increasing coatings is a method used in many fields of technology for achieving the desired component properties.
- a field of use is e.g. the development of lightweight components.
- a weight reduction of a component is in many cases accompanied by a decrease in the strength and the surface hardness of the materials used.
- PVD Physical Vapor Deposition
- CVD Chemical Vapor Deposition
- Both methods are relatively expensive in terms of the necessary equipment and the residence time of the components in the plants.
- the heat input in the component can not always be influenced as desired, so that undesirable side effects can occur with certain components or certain materials, such as, for example, an unwanted heat treatment of the component to be coated.
- the invention has for its object to provide an improved method for surface coating of a component, which is more efficient.
- This object is achieved according to claim 1 in a method of the type mentioned above in that the component is transported through an oven and in the oven with heating by means of a process gas introduced into the furnace, which is admixed with a coating additional material with the friction-reducing and / or strength-increasing coating is coated.
- the invention has the advantage that instead of complicated PVD or CVD apparatus, the coating method can be carried out by means of a furnace.
- Such an oven can be relatively simple in construction and can be provided at low cost.
- an improved control of the heating of the component to be coated so that in particular an unwanted
- Heat treatment or other damage to the component by the coating process can be avoided.
- the inventive method can be carried out at lower temperatures.
- no expensive additional apparatuses are required, such as e.g. for plasma support in CVD processes.
- the generation of a negative pressure is not required in the method according to the invention.
- the stove can basically be an oven of any kind. In principle, a commercial oven is also suitable. More advantageous are industrial furnaces set up for such coating processes.
- the furnace may in particular be designed as an open furnace, i. unlike PVD or CVD equipment, have a heating chamber that is not hermetically sealed from the outside environment.
- the furnace can be formed as a continuous furnace. Accordingly, the component can be transported through the continuous furnace, e.g. by a conveyor of the continuous furnace. The component can be transported further during the coating process. It is also possible to stop transporting the component during the entire coating process or part of the coating process, i. to stop.
- a continuous furnace also called tunnel kiln
- tunnel kiln refers to a special type of furnace, in which the supply of processing material is carried out continuously.
- the components are moved by means of a conveyor in the continuous furnace and transported in particular by a heated heat treatment section.
- the Components can be on a conveyor or stand or be transported hanging by the continuous furnace.
- the conveying device can be, for example, a conveyor belt, in particular at high temperatures around a metallic conveyor belt, which is guided through the continuous furnace at a certain speed and thereby transports the processing material through the continuous furnace.
- the desired coating can be applied to the component surface relatively quickly in the furnace, in particular in the continuous furnace, so that a short process time can be achieved for the production of a coated component.
- Another advantage is that a continuous coating process can be realized by the continuous furnace by a variety of components to be coated is continuously transported through the continuous furnace. So it is possible, e.g. Aluminum components with a process time of about 10 minutes with a ceramic coating to provide.
- the process gas may be a shielding gas, e.g. an inert gas.
- the process gas can be selected according to the properties of the component to be coated. If the metal surface to be coated is e.g. made of aluminum, nitrogen can be used as process gas. In the case of a metal surface made of steel or titanium, nitrogen can preferably be used as the process gas.
- the coating additive material can be admixed to the process gas, in particular in an already gaseous state.
- the friction-reducing and / or strength-increasing coating produced on the component can, after carrying out the method according to the invention, consist directly of the coating additional material or, e.g. due to a chemical reaction with the surface to be coated, another chemical substance formed with the coating additive.
- the process gas is heated by a heating device, eg a heating device of the furnace, and the component is heated in the furnace by means of the heated process gas to a process temperature suitable for the coating process.
- a heating device eg a heating device of the furnace
- the component is heated in the furnace by means of the heated process gas to a process temperature suitable for the coating process.
- the heating thus takes place by heat transfer of the heat contained in the process gas to the component.
- a certain proportion of the heating of the component can take place by heat radiation from the heating device.
- the coating of the component takes place in the furnace substantially at ambient pressure or a pressure above the ambient pressure.
- ambient pressure is meant the pressure in the environment outside the furnace. This has the advantage that no special measures for controlling the pressure in the furnace are required.
- the oven does not have to be sealed. It can be used an open furnace, in which the process gas can flow to the outside. Accordingly, the pressure in the furnace may be equal to or slightly above the ambient pressure, in particular by the fact that the introduction of the process gas, a slight pressure increase is generated inside the furnace.
- ambient pressure is meant in particular the atmospheric pressure, i. 1 bar.
- the surface to be coated in the furnace is first oxidized and then provided with the rubbing-reducing and / or strength-enhancing coating.
- This has the advantage that better adhesion of the coating to the component can be realized by the previous oxidation of the surface. It is advantageous to design the oxidation effectively, so that morphologically and chemically suitable oxide compounds are formed from the metal atoms of the component on the component surface, which can act as adhesion promoters for the subsequently applied coating.
- the process gas introduced into the furnace has an oxygen content and the oxidation of the surface to be coated is effected by the oxygen content of the process gas.
- the process gas can also be used as a carrier medium for the oxygen required for oxidation.
- For the oxidation of the coating surface is a relatively low oxygen content in the process gas sufficient, for example in the range of 10 to 30 ppm.
- the oxidation of the surface to be coated can be carried out such that initially only the process gas with the oxygen content is introduced into the furnace and only after a certain exposure time, when sufficient oxidation of the surface to be coated has occurred, the coating additive material is added.
- the coating process it is also possible to begin the coating process immediately with the addition of the coating additional material.
- the oxygen content present in the process gas is reduced by adding the coating additive to the process gas.
- a ceramic-like layer for example a ceramic layer
- a ceramic-like layer is produced on the surface of the component to be coated.
- the component is heated in the oven to a temperature below the recrystallization temperature. Accordingly, unwanted damage to the component avoided.
- the lowest recrystallization temperature of the respective materials is regarded as the recrystallization temperature.
- the invention allows a highly efficient surface coating of components, wherein the coating can also be done on an industrial scale, ie in large-scale productions of components.
- components for example, tools can be coated, for example in the field of metal forming, stamping tools, cutting blades, cutting inserts, turning tools and the like, and in the area of joining tools, for example, clinching tools.
- machines eg piston machines, cylinder running surfaces, parts of turbochargers and compressors as well as valve train components can be coated.
- the components coated according to the invention show reduced friction and increased strength at the coated surface. The reduced friction makes it possible to dispense in many applications on friction-reducing lubricants such as oil or at least reduce their required amount.
- a further advantage of the invention is that the coating can be produced in comparison with the prior art with improved crystal structures, in particular particularly fine-crystalline, homogeneous crystal structures can be produced.
- silane As a coating additive, which is also referred to as a precursor, for example, silane can be used. Particularly advantageous is the use of monosilane, but also higher silane chains can be used as precursor. If, for example, an aluminum surface is coated according to the invention, an oxide layer is first produced on the aluminum surface, on which an SiO 2 layer is then deposited by means of the monosilane. This is not only possible with pure aluminum, but also with aluminum alloys, eg AISM MgMn. According to an advantageous embodiment of the invention, it is provided that the friction-reducing and / or strength-increasing coating is produced as a crystalline coating, in particular in the form of deposited on the surface to be coated mixed crystals.
- the friction-reducing and / or strength-increasing coating can be produced from the gas phase, from the melt and from solutions. Such methods are particularly suitable for producing the aforementioned crystalline coating. Depending on the type of production of the coating, different attachment mechanisms of the coating material to the surface occur.
- the atmospheric production of a crystal from the gas phase produces a self-bound crystal which has no or substantially no bond with the environment. When producing a crystal from the melt, it is necessary to produce a crystallization seed in the melt and to use this as a nucleus of the crystal to be formed. Similar is the approach to solutions.
- the friction-reducing and / or strength-increasing coating is deposited from the gas phase, whereby crystallization nuclei are first applied to the surface to be coated to produce the crystalline coating and crystals are grown from these crystallization nuclei distributed over the surface become in the further course of the process to a crystalline coating forming, successive closing and thus at the end substantially closed crystal layer together.
- crystallization nuclei can be deposited from silicon or a silicon-containing substance and these can be applied to a diffusion-active surface.
- the crystalline coating is produced by metal-silicon mixed oxides deposited from the gas phase, wherein the silicon component can be formed from a gaseously supplied coating additive material and the oxidation can be formed by one in the process gas existing oxygen content can be done.
- the metal can be eg iron.
- the gaseous coating additive material may be, for example, a silicon-containing gas, for example silane.
- various nanoscale metal-silicon mixed oxides are generated, which may, for example, have a garnet-like crystal structure of stoichiometry, for example in the form of skiagite (Fe (III) 3Fe (II) 2 [SiO4] 3).
- crystal lattices of SiO4 tetrahedra are formed, in which two (Fe 2+ ) and trivalent (Fe 3+ ) iron ions are embedded in vacancies with corresponding oxygen atom environment (six or eight adjacent oxygen atoms).
- Characteristic of this type of oxide mixed crystals are high hardness and good thermal and chemical stability.
- Another advantage of the production of such coatings is that they are already produced at comparatively low temperatures, for example at 500 ° C.
- the procedure described for producing such mixed oxide layers at comparatively low temperatures has the further advantage that the coated component, eg a tool, does not undergo phase transition temperatures, in particular no recrystallization temperature, with regard to surface heating. For hardenable steels, this also applies below the tempering temperature. Such temperature limits are usually higher for tools.
- a crystalline surface coating produced in the manner described has in contrast to non-crystalline coatings particularly low coefficients of friction and a particularly high abrasion resistance.
- a device for carrying out a method according to one of the preceding claims comprising at least one furnace with at least one heating device and at least one supply connection for process gas, and with at least one process gas supply device which is connected to the process gas supply connection is and the to Admixed a coating additive material to the process gas is set up.
- the furnace may in particular be designed as an open furnace, in the interior of which substantially ambient pressure is present. In this way, the oven can be realized with little technical effort and, accordingly, inexpensive. Accordingly, a hermetic seal is not required.
- Fig. 1 - a coating device in a schematic representation
- Fig. 2 - a process gas supply device in a schematic representation.
- the coating device shown in Figure 1 has a continuous furnace 1, which is reproduced for clarity in a sectional view, in reality but apart from the inlet and outlet point of a conveyor 2 is substantially closed.
- the continuous furnace 1 has a longitudinal direction through the continuous furnace conveyor 2, which is designed to convey components 3 through the continuous furnace 1.
- the conveyor 2 may be formed as a conveyor belt or other suitable means for the transport of the processed material through the continuous furnace 1.
- the continuous furnace 1 may be formed, for example, as a roller kiln, conveyor belt kiln, walking beam kiln, chain kiln, piercing furnace or through-flow furnace, or as a combination thereof, if, for example, different configurations of the conveying device are realized in combination.
- the conveyor 2 which is moved in the arrow direction, the components 3 are transported through the continuous furnace 1.
- the conveyor 2 can be driven for example by a motor, not shown.
- the components 3 are first moved through an inlet section 4, then through a subsequent heat treatment section 5, which is also referred to as annealing channel, and then through an adjoining cooling section 8.
- the heat treatment section 5 has a heating device 6 , eg in the form of incandescent filaments.
- a cooling of the heated components 3 for example by a guided through a wall of the cooling section 8 cooling medium.
- the continuous furnace 1 has a supply port 7 for supplying the process gas into the interior of the continuous furnace 1.
- the supply port 7 is connected to a process gas supply device 9.
- the process gas introduced into the continuous furnace 1 via the supply port 7 generally propagates in all directions, in particular entering the heat treatment section 5 in which the components 3 are heated and the generation according to the invention of the friction-reducing and / or strength-increasing coating on the to be coated surface is performed.
- the supply port 7 may also be divided into two strands, as will be explained below with reference to FIG. In this case, the one strand may be e.g. be aligned in the direction of the heat treatment section 5, the other strand in the direction of the cooling section 8. On the two strands of the supply port 7 different proportions of the amount of the supplied process gas can be initiated, e.g. a higher proportion via the first strand in the direction of the heat treatment section 5 and a lesser part in the direction of the cooling section 8.
- FIG. 2 shows the process gas supply device 9 with further details.
- the process gas supply device 9 may, for example, various reservoirs 10, 1 1, 12, 13 for different gases to be mixed, for example, a hydrogen tank 10, an argon container 1 1 and a nitrogen container 12. Further, a container 13 for the coating additive material may be present, for example monosilane.
- the containers 10, 1 1, 12, 13 are above a respective container respectively downstream quantity-influencing device 14, 15, 16, 17 connected to a mixing chamber 18. About the quantity-influencing means 14, 15, 16, 17, the respectively supplied amount of a gas from one of the containers 10, 1 1, 12, 13 are set to a desired value and in particular regulated to this value. This can be done, for example, via a variable area flowmeter.
- the supplied gas fractions are mixed together in the mixing chamber 18 and fed via the supply port 7, which is divided into two strands, the continuous furnace 1. In each of the strands, another variable area flowmeter 19 may be arranged.
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016114450.9A DE102016114450B4 (de) | 2016-08-04 | 2016-08-04 | Verfahren zum Oberflächenbeschichten eines Bauteils |
PCT/EP2017/069695 WO2018024837A1 (de) | 2016-08-04 | 2017-08-03 | Verfahren zum oberflächenbeschichten eines bauteils sowie beschichtungseinrichtung zur durchführung des verfahrens |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3494246A1 true EP3494246A1 (de) | 2019-06-12 |
Family
ID=59699654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP17757473.8A Withdrawn EP3494246A1 (de) | 2016-08-04 | 2017-08-03 | Verfahren zum oberflächenbeschichten eines bauteils sowie beschichtungseinrichtung zur durchführung des verfahrens |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP3494246A1 (de) |
DE (1) | DE102016114450B4 (de) |
WO (1) | WO2018024837A1 (de) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH654334A5 (de) * | 1982-09-02 | 1986-02-14 | Maschf Augsburg Nuernberg Ag | Verfahren zur bildung einer korrosionsbestaendigen oxidischen schicht auf einem metallischen substrat sowie verwendung dieser schicht. |
US4834020A (en) * | 1987-12-04 | 1989-05-30 | Watkins-Johnson Company | Atmospheric pressure chemical vapor deposition apparatus |
AT504482B1 (de) * | 2007-03-01 | 2008-06-15 | Ruebig Gmbh & Co Kg | Verfahren zur herstellung einer beschichtung |
US20100178435A1 (en) * | 2009-01-13 | 2010-07-15 | John Lawrence Ervin | Methods and systems for manufacturing polycrystalline silicon and silicon-germanium solar cells |
-
2016
- 2016-08-04 DE DE102016114450.9A patent/DE102016114450B4/de active Active
-
2017
- 2017-08-03 WO PCT/EP2017/069695 patent/WO2018024837A1/de unknown
- 2017-08-03 EP EP17757473.8A patent/EP3494246A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
DE102016114450A1 (de) | 2018-02-08 |
WO2018024837A1 (de) | 2018-02-08 |
DE102016114450B4 (de) | 2018-03-22 |
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