EP3442691A4 - Verfahren, system und vorrichtung zur abgabe von prozessgas - Google Patents
Verfahren, system und vorrichtung zur abgabe von prozessgas Download PDFInfo
- Publication number
- EP3442691A4 EP3442691A4 EP17783234.2A EP17783234A EP3442691A4 EP 3442691 A4 EP3442691 A4 EP 3442691A4 EP 17783234 A EP17783234 A EP 17783234A EP 3442691 A4 EP3442691 A4 EP 3442691A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- delivery
- process gas
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title 2
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/38—Removing components of undefined structure
- B01D53/44—Organic components
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01B—BOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
- B01B1/00—Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
- B01B1/005—Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/36—Pervaporation; Membrane distillation; Liquid permeation
- B01D61/363—Vapour permeation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
- B01D63/02—Hollow fibre modules
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/06—Organic material
- B01D71/30—Polyalkenyl halides
- B01D71/32—Polyalkenyl halides containing fluorine atoms
- B01D71/36—Polytetrafluoroethene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/10—Mixing gases with gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C11/00—Use of gas-solvents or gas-sorbents in vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
- B01D2053/221—Devices
- B01D2053/223—Devices with hollow tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/42—Ion-exchange membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/08—Hollow fibre membranes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Environmental & Geological Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- Mechanical Engineering (AREA)
- Water Supply & Treatment (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE17783234.2T DE17783234T1 (de) | 2016-04-16 | 2017-04-14 | Verfahren, system und vorrichtung zur abgabe von prozessgas |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662323697P | 2016-04-16 | 2016-04-16 | |
PCT/US2017/027634 WO2017181013A1 (en) | 2016-04-16 | 2017-04-14 | Method, system, and device for delivery of process gas |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3442691A1 EP3442691A1 (de) | 2019-02-20 |
EP3442691A4 true EP3442691A4 (de) | 2019-12-18 |
Family
ID=60042719
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP17783234.2A Pending EP3442691A4 (de) | 2016-04-16 | 2017-04-14 | Verfahren, system und vorrichtung zur abgabe von prozessgas |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP3442691A4 (de) |
JP (1) | JP6918921B2 (de) |
KR (1) | KR102483803B1 (de) |
CN (1) | CN109152990B (de) |
DE (1) | DE17783234T1 (de) |
WO (1) | WO2017181013A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10150048B2 (en) | 2014-10-23 | 2018-12-11 | Rasirc, Inc. | Method, system, and device for delivery of process gas |
WO2018102139A1 (en) * | 2016-12-01 | 2018-06-07 | Rasirc, Inc. | Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas delivery systems |
US11471816B2 (en) * | 2019-03-11 | 2022-10-18 | Karim Salehpoor | Pollutant capturer and mobilizer |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2785052A (en) * | 1951-06-22 | 1957-03-12 | Metalectro Corp | Production of hydrazine |
US2865714A (en) * | 1954-08-02 | 1958-12-23 | Guggenheim Brothers | Production of anhydrous hydrazine |
US3557009A (en) * | 1967-05-15 | 1971-01-19 | Norac Co | Nonhazardous polymerization initiators |
LU85789A1 (fr) * | 1985-02-26 | 1986-09-02 | Oreal | Utilisation dans les domaines therapeutique et cosmetique d'une solution anhydre de peroxyde d'hydrogene |
JPH04154193A (ja) * | 1990-10-18 | 1992-05-27 | Mitsubishi Gas Chem Co Inc | 多層プリント板の製造法 |
JPH07230953A (ja) * | 1994-02-15 | 1995-08-29 | Sumitomo Chem Co Ltd | 3b−5b族化合物半導体の気相成長方法 |
JP4232264B2 (ja) * | 1999-03-26 | 2009-03-04 | 株式会社Ihi | 窒化物半導体の製造方法および製造装置 |
FR2802829B1 (fr) * | 1999-12-24 | 2002-05-17 | Atofina | Procede de concentration de solution d'hydrazine aqueuse et dispositif pour sa mise en oeuvre |
FR2815956B1 (fr) * | 2000-10-26 | 2003-05-23 | Atofina | Procede d'obtention d'hydrazine anhydre et dispositif pour sa mise en oeuvre |
WO2013148262A1 (en) * | 2012-03-28 | 2013-10-03 | Rasirc | Method of delivering a process gas from a multi-component solution |
US9545585B2 (en) * | 2012-07-16 | 2017-01-17 | Rasirc, Inc. | Method, system, and device for delivery of high purity hydrogen peroxide |
JP6514189B2 (ja) * | 2013-04-05 | 2019-05-15 | ラシリック, インコーポレイテッドRASIRC, Inc. | 高濃度過酸化水素ガスストリームの供給 |
WO2016065132A1 (en) * | 2014-10-23 | 2016-04-28 | Rasirc, Inc. | Method, system, and device for delivery of process gas |
-
2017
- 2017-04-14 KR KR1020187031690A patent/KR102483803B1/ko active IP Right Grant
- 2017-04-14 DE DE17783234.2T patent/DE17783234T1/de active Pending
- 2017-04-14 CN CN201780029147.5A patent/CN109152990B/zh active Active
- 2017-04-14 WO PCT/US2017/027634 patent/WO2017181013A1/en active Application Filing
- 2017-04-14 EP EP17783234.2A patent/EP3442691A4/de active Pending
- 2017-04-14 JP JP2019505137A patent/JP6918921B2/ja active Active
Non-Patent Citations (1)
Title |
---|
No further relevant documents disclosed * |
Also Published As
Publication number | Publication date |
---|---|
CN109152990A (zh) | 2019-01-04 |
DE17783234T1 (de) | 2019-06-27 |
EP3442691A1 (de) | 2019-02-20 |
JP6918921B2 (ja) | 2021-08-11 |
WO2017181013A1 (en) | 2017-10-19 |
CN109152990B (zh) | 2021-11-09 |
KR102483803B1 (ko) | 2022-12-30 |
JP2019521948A (ja) | 2019-08-08 |
KR20180135915A (ko) | 2018-12-21 |
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Legal Events
Date | Code | Title | Description |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
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17P | Request for examination filed |
Effective date: 20181023 |
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AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
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AX | Request for extension of the european patent |
Extension state: BA ME |
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RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: HEINLEIN, EDWARD Inventor name: TRAMMEL, JEREMIAH Inventor name: ALVAREZ, JR., DANIEL Inventor name: HOLMES, RUSSELL J. Inventor name: RAMOS, CHRISTOPHER Inventor name: SPIEGELMAN, JEFFREY J. |
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STAA | Information on the status of an ep patent application or granted ep patent |
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REG | Reference to a national code |
Ref country code: DE Ref legal event code: R210 |
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DAV | Request for validation of the european patent (deleted) | ||
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20191119 |
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RIC1 | Information provided on ipc code assigned before grant |
Ipc: B01B 1/00 20060101ALI20191113BHEP Ipc: B01J 20/292 20060101ALI20191113BHEP Ipc: B01D 53/77 20060101ALI20191113BHEP Ipc: B01D 53/44 20060101ALI20191113BHEP Ipc: B01D 63/02 20060101ALN20191113BHEP Ipc: F17C 11/00 20060101ALI20191113BHEP Ipc: H01G 4/06 20060101ALI20191113BHEP Ipc: B01D 69/08 20060101ALN20191113BHEP Ipc: C23C 16/448 20060101ALI20191113BHEP Ipc: B01F 3/02 20060101AFI20191113BHEP Ipc: B01D 71/36 20060101ALI20191113BHEP Ipc: B01D 69/02 20060101ALI20191113BHEP |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: EXAMINATION IS IN PROGRESS |
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17Q | First examination report despatched |
Effective date: 20240524 |