EP3430864A1 - Plasmadüse - Google Patents
PlasmadüseInfo
- Publication number
- EP3430864A1 EP3430864A1 EP17712057.3A EP17712057A EP3430864A1 EP 3430864 A1 EP3430864 A1 EP 3430864A1 EP 17712057 A EP17712057 A EP 17712057A EP 3430864 A1 EP3430864 A1 EP 3430864A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- plasma
- electrode
- counter electrode
- nozzle
- discharge chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims abstract description 61
- 230000008569 process Effects 0.000 claims abstract description 44
- 239000007789 gas Substances 0.000 claims description 45
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 20
- 229910052786 argon Inorganic materials 0.000 claims description 10
- 239000001307 helium Substances 0.000 claims description 6
- 229910052734 helium Inorganic materials 0.000 claims description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 6
- 239000012080 ambient air Substances 0.000 claims description 4
- -1 polytetrafluoroethylene Polymers 0.000 claims description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 4
- 238000004382 potting Methods 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 2
- 210000002381 plasma Anatomy 0.000 description 102
- 238000004381 surface treatment Methods 0.000 description 12
- 238000004140 cleaning Methods 0.000 description 10
- 238000011282 treatment Methods 0.000 description 10
- 239000003570 air Substances 0.000 description 8
- 238000001994 activation Methods 0.000 description 6
- 230000004913 activation Effects 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 6
- 238000010891 electric arc Methods 0.000 description 6
- KEUKAQNPUBYCIC-UHFFFAOYSA-N ethaneperoxoic acid;hydrogen peroxide Chemical compound OO.CC(=O)OO KEUKAQNPUBYCIC-UHFFFAOYSA-N 0.000 description 5
- 239000003973 paint Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000004800 polyvinyl chloride Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000007306 functionalization reaction Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920000915 polyvinyl chloride Polymers 0.000 description 3
- TVTJUIAKQFIXCE-HUKYDQBMSA-N 2-amino-9-[(2R,3S,4S,5R)-4-fluoro-3-hydroxy-5-(hydroxymethyl)oxolan-2-yl]-7-prop-2-ynyl-1H-purine-6,8-dione Chemical compound NC=1NC(C=2N(C(N(C=2N=1)[C@@H]1O[C@@H]([C@H]([C@H]1O)F)CO)=O)CC#C)=O TVTJUIAKQFIXCE-HUKYDQBMSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229940125851 compound 27 Drugs 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000000678 plasma activation Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2439—Surface discharges, e.g. air flow control
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
- H05H1/2465—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated by inductive coupling, e.g. using coiled electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3478—Geometrical details
Definitions
- the invention relates to a plasma jet for generating a plasma jet with at least one electrode, a jacket surrounding the electrode concentrically, wherein between the electrode and the jacket a discharge chamber is formed, and wherein the discharge chamber has an inlet opening for a process gas and a nozzle opening for the exit of the plasma jet and the sheath contains or consists of a dielectric and a first counterelectrode annularly surrounding the discharge chamber in a first longitudinal section. Furthermore, the invention relates to a method for using the plasma nozzle for treating a surface of a workpiece or a workpiece with the plasma jet thus generated.
- a treatment of a workpiece is a surface activation and / or - functionalization and a fine cleaning of the treated surface by the plasma jet.
- the plasma can be operated with an inert gas or a reactive gas, so that physical and / or chemical processes take place on the surface of the workpiece to be treated. This will e.g. improves the adhesion between materials, for example in the case of
- Sheath itself forms the counter electrode, so that between the electrode and the counter electrode after exposure to a high voltage thermal
- remote plasma the resulting plasmas are called "remote plasma.”
- reactive species are not generated directly on the workpiece surface, but at some distance, these species may be on their way to the surface eg with the ambient air or the
- Bridging medium for generating discharge filaments In this case, depending on the process gas used only sliding discharges at discharge intervals by 1 mm can be realized. These methods are therefore suitable only for flat surfaces with low dimensional tolerances, since the plasma can not penetrate into undercuts or depressions and the distance of the high voltage electrodes must be precisely controlled. In the case of dielectrically impeded or barrier discharges, the in
- Discharge gap recorded workpiece also be thin to create the discharge with manageable electrical voltages and maintain.
- the object of the present invention is thus to provide a cleaning method and a cleaning device for activating or fine cleaning a surface, which allows an improved, in particular more efficient treatment of the surface and can be used universally on even or uneven surfaces of workpieces.
- a plasma nozzle for generating a plasma jet contains at least one electrode.
- the electrode may be elongated or rod-shaped in some embodiments of the invention.
- the electrode may be hollow or contain a cavity.
- the at least one electrode is surrounded by a jacket, so that between the electrode and the
- Sheath forms a discharge chamber.
- the sheath and the electrode may be concentric with each other.
- the sheath contains or consists of a dielectric.
- the discharge chamber further has at least one
- Inlet opening for a process gas and a nozzle opening for the exit of the plasma jet are provided.
- the device according to the invention has at least one first counterelectrode, which surrounds the discharge chamber in a ring-shaped manner in a first longitudinal section.
- the first counter electrode is through the sheath of the
- Electrode electrically isolated.
- a second counterelectrode is additionally provided, which surrounds the discharge chamber in a ring-shaped manner in a second longitudinal section.
- the counterelectrodes can also be arranged concentrically with respect to the electrode and the sheath.
- a method according to the invention for the use or operation of a plasma nozzle according to the invention has the following method steps:
- Discharge chamber a plasma by igniting dielectrically impeded discharges in the process gas in the
- Forming discharge chamber and generating a plasma jet from the expelled from the flow of the nozzle opening plasma.
- a plasma jet is generated by means of a dielectrically impeded discharge (Dielectric Barrier Discharge or DBD) (DBD jet).
- the discharge filaments of the DBD are generated by applying an electrical high voltage between the electrode and the counter electrode (s).
- DBD discharge filaments are in
- the discharge process in the individual discharge filaments is so short in time due to the dielectric barrier that no thermal equilibrium can form.
- Such plasmas, or a plasma jet generated therefrom, can therefore be used as direct-acting plasmas for surface treatment. Due to the possibility of plasma generation in
- the plasma nozzle according to the invention thus combines the Advantages of known plasma jets such as high fissuring with the efficiency of sliding discharges or barrier discharges on the surface of the workpiece.
- the plasma nozzle of the present invention can be used.
- Environmentally damaging and time-consuming wet-chemical surface treatment processes can be replaced by this.
- the use of the plasma nozzle according to the invention similar to a G investigatingtladungsario enables planar applications. Due to the sufficiently high allowable discharge distances between the workpiece surface and the mouth of the nozzle opening can
- the second counter electrode is arranged at the nozzle opening such that the
- Nozzle opening runs centrally through the counter electrode.
- Discharge filaments of the DBD are thus produced not only in the discharge chamber, but also directly in the area of
- Nozzle opening can thus affect the surface to be treated of the workpiece.
- the reactive species generated in the plasma jet can interact directly with the surface without first coming into contact with the ambient air or other reactants.
- the second counterelectrode may have a dish-shaped widened ring surface. This has the advantage that discharge filaments can be produced directly on a surface to be treated.
- the plate surface normal should be approximately parallel to the plasma jet direction.
- Insulating workpieces with material thicknesses of more than 10 mm are treated with a DBD, since the workpiece no longer has to be completely absorbed in the discharge gap.
- the surface of the second counterelectrode may be covered by the sheath.
- the sheath thus forms a continuous dielectric which shields the electrode surface from the discharge chamber and from the workpiece. This allows for easy design and manufacture and reliable operation of the plasma nozzle.
- the dielectric may be a glass, a ceramic, or a glass
- the polymer may be or contain polytetrafluoroethylene (PTFE).
- the electrode is coated in the discharge space with a dielectric. This additional coating provides an even more homogeneous discharge characteristic of the plasma generated by the DBD.
- the coating may contain or consist of a polymer or a ceramic.
- the coating may contain polytetrafluoroethylene or an oxide or an oxynitride.
- the inlet opening may be formed by at least one gas passage in the electrode.
- the gas passages may comprise a plurality of bores, which are arranged radially symmetrically in the electrode, a uniform flow of the process gas through the
- Discharge chamber reached. This also leads to one
- a plasma nozzle housing may be present, wherein the counter electrodes by means of a potting compound between the sheath and the
- Plasma nozzle housing are fixed. Such is one
- the first counter electrode may be at a ground potential and the second counter electrode may be at a floating potential. This will be a
- Plasma jet expelled from the nozzle which may have a range of more than 10 mm or more than 20 mm or more than 30 mm.
- the second counter electrode upon operation of the device, may be mounted on a
- Ground potential lie and the first counter electrode on a floating potential.
- the plasma filaments slide over the underside of the plasma nozzle or over the partial surface of the casing extending parallel to the plate surface of the second electrode.
- sliding discharges may be generated on the workpiece at a distance of about 1 mm to about 3 mm.
- the first counter electrode and the second counter electrode may be at a ground potential.
- a discharge is generated between the first counterelectrode and the electrode in the interior of the discharge space, the plasma of which is expelled from the plasma nozzle.
- the second counterelectrode forms a counterpotential to the plasma emerging from the nozzle. In this way, sliding discharges at a distance of about 3 mm to about 20 mm to the workpiece surface are possible.
- the process gas may be selected from argon and / or helium and / or
- FIG. 1 shows a section through an embodiment of a plasma nozzle according to the invention during its use in the surface treatment of a workpiece.
- FIG. 1 shows a sectional view of a plasma nozzle 1 according to the invention during its use in the surface treatment of a workpiece 3 with a plasma jet 5.
- the plasma nozzle 1 has a pin-shaped electrode 7 for applying a particular
- This pin electrode 7 will therefore also be referred to below as a high voltage electrode
- the pin electrode 7 is surrounded concentrically by a sheath 9 made of a dielectric material.
- the casing 9 has a cylindrical basic shape.
- the discharge chamber 11 has an inlet opening 12 for a process gas, for example argon, helium and / or air, and a nozzle opening 14 for the exit of the plasma jet 5.
- the plasma jet 5 is generated in the discharge chamber 11 and driven out of the nozzle opening 14 by a flow of the process gas plasma generated.
- the flowing process gas is shown symbolically in the figure by a block arrow in the region of the inlet opening 12.
- a second counterelectrode 16 which surrounds the discharge chamber 11 in an annular manner in a region, is provided made of metal.
- the second counter electrode 16 is penetrated by the dielectric jacket 9 from the electrode 7, to
- Counter electrode 16 may be grounded to produce dielectrically impeded discharges, i. H. be electrically grounded, which is why it is also referred to below as Massering. The electrical contact is not shown in the figure.
- the second counter electrode 16 is in the range of
- Nozzle opening 14 is arranged so that the nozzle opening 14 extends centrally through the second counter electrode 16.
- the second counter electrode 16 has a plate-shaped widened annular surface 18.
- Under plate-shaped widened is understood a ring with a shape whose radial ring width is greater than its axial ring height.
- the plasma surface facing away from the ring surface 18 of the plate-shaped widened counter electrode 16 is covered by the casing 9 and thus also of the
- the plasma nozzle 1 has in its lower portion, i. in the region of the nozzle opening 14, a plate-shaped widening (plate underside) on.
- the casing 9 is therefore also referred to below as a plate rod, and the entire plasma nozzle 1 is also referred to below as "disk jet.”
- appropriately shaped plate underside extend approximately parallel to the exit direction of the generated plasma jet 5.
- the nozzle opening 14 extends radially in the middle through the plate-shaped counter electrode 16.
- the plasma nozzle 1 also has a first counter-electrode 20 made of metal, which can also be electrically grounded to operate the plasma nozzle 1.
- This first counter electrode 20 also surrounds the discharge chamber 11 in a ring shape and is surrounded by the jacket 9 of the
- the first counterelectrode 20 is at the level of the rod-shaped electrode 7
- the electrical ground potential of the mass can also be replaced by any other potential and / or both mass rings can also occur
- the plasma nozzle 1 can therefore be referred to as a "double-mass disk jet.”
- a pre-discharge electrode is formed by the first counterelectrode 20 opposite the second counterelectrode 16 arranged in the region of the nozzle opening 14. That is, by discharges between the first counterelectrode 20 and the rod-shaped Electrode 7 generated plasma is transported by the flow of the process gas to the arranged in the region of the nozzle opening 14 second counter electrode 16, whereby the ignition of dielectric
- the high-voltage electrode 7 has gas passages 25 and thus at the same time acts as a process gas supply, ie inlet opening 12. It is made of a conductive material such as stainless steel, aluminum, and / or brass. Of the
- Plate bar serves as a dielectric and is made of a
- the dielectric material e.g. Ceramic, glass, and / or polymer manufactured.
- the discharge chamber forming part of the casing 9 the upper mass ring is mounted.
- Massering are outside the discharge chamber 11 with an optional high-voltage resistant potting compound 27 of the
- parasitic discharges occur inside the part of the plasma nozzle 1 forming an electrode head.
- Potting compound 27 also serves to fix the mass rings between the casing 9 and the housing 29 of the plasma nozzle first
- a plasma jet 5 with plasma generation from dielectrically impeded discharge (DBD jet) between the high-voltage electrode 7 and the upper can already be applied with the voltage applied and the process gas supply switched on
- Massering 20 are ignited. Depending on the process gas and
- Applied electric power can be driven out of the nozzle opening 14 of this DBD jet up to 50 mm.
- This DBD jet can also be ignited with compressed air as process gas, for example.
- Nozzle opening 14 expelled filaments of discharges thereto, at the bottom of the plate, i. at the
- Masserings 16 and is therefore repeated in the figurative sense.
- the filaments of the discharges in the region of the lower mass ring 16 can come into direct contact with the surface to be treated. Such surface discharges have better efficiency than remote plasmas.
- the reactive species in the plasma react to a large extent on their way to the workpiece surface in remote plasmas, resulting in large efficiency losses in the activation of the surface. The latter is not the case with surface discharges.
- the filaments come in surface discharges with the surface in contact, which allows a fine cleaning of the surface.
- One embodiment of the method according to the invention uses a DBD remote plasma as the ignition source and projects its potential onto the non-conductive surface of the workpiece. Since the non-conductive workpiece thus indirectly to a DBD remote plasma as the ignition source and projects its potential onto the non-conductive surface of the workpiece. Since the non-conductive workpiece thus indirectly to a DBD remote plasma as the ignition source and projects its potential onto the non-conductive surface of the workpiece. Since the non-conductive workpiece thus indirectly to a
- FIG. 2 shows the pin-shaped electrode 7 of the plasma nozzle from FIG. 1 as a detailed illustration.
- the illustrated pin electrode 7 is radially symmetrical. At their, the tip 30 of the pin electrode 7 facing away
- Electrode base 31 has the pin electrode 7 grooves 32, which serve to fix the pin electrode 7 in the sheath 9 of the plasma nozzle. Furthermore, 31 gas passages 25 are arranged radially symmetrically within the pin electrode 7 in the region of the electrode base. These form the inlet opening of the plasma nozzle for the process gas.
- FIGS. 3 a to c the plasma nozzle according to the invention from FIG. 1 is in different states during its operation
- the "Disk-Jet” can be operated in three different modes The three modes are shown in Figures 3a to c ..
- the electrical contact is drawn in each case like a circuit diagram.
- Plasma filaments 41 as a plasma jet, which ignite directly from the high voltage electrode to the lower mass ring.
- the plasma filaments 41 slide in this mode over the face of the electrode.
- Discharge filaments 41 with the workpiece surface is thereby possible.
- realizable discharge distances to the workpiece to be treated are between 1 mm for air as process gas and 3 mm for argon or helium as process gas.
- the most effective mode is shown in Figure 3c ("Disc-Jet" operating mode) where both mass rings are electrically grounded, as described, the lower ground ring acts as a "repeater”. The generated between the high voltage electrode and the upper ground ring
- Discharge filaments 42 of a discharge ignite on the underside of the plate, which represents the dielectric for the lower Massering. In this way, sliding discharges at discharge distances to the workpiece to the nozzle opening of 3 mm with air as process gas up to 20 mm with argon or helium as process gas are possible.
- the discharge filaments 42 interact both chemically and physically with the surface to be treated and cause surface activation / functionalization as well as ultrafine cleaning of arbitrarily thick, nonconducting workpieces at the level of directly acting dielectrically impeded discharges.
- Effectiveness can also be used under industrial conditions. Both on flat plate / foil material, as well as on complicated workpiece geometries or undercuts a plasma using the "Disc-Jet" is to be applied optimally.
- FIG. 4a shows the lift-off strength of water-based paints on PVC in comparison with the surface treatment in operating mode "DBD-Jet” and "Disc-Jet” with process gas argon.
- Comparisons between the "Disc-Jet” mode and an identical DBD-Jet mode ie, the lower mass ring has been omitted or grounded, ie not electrically connected to ground potential
- the "Disc-Jet” is up to 100% better results in the adhesion of water-based paints (the so-called adhesive pull strength [MPa]) to polyvinyl chloride (PVC) and polypropylene (PP).
- MPa adhesive pull strength
- the process gas is argon.
- the discharge of the "Disc-Jet" has a sliding discharge character and may be in free operation, i.e. without a workpiece under the source
- Discharge distances between the nozzle opening and workpiece surface can be realized up to 20 mm.
- a high fissile property, i. Penetration depth in surface gaps realized on the basis of direct discharges, which enables an efficient treatment of profiled or structured surfaces or also workpieces with larger geometrical or positional tolerances.
- FIG. 4b compares the results of the lift-off resistance of water-based paints on PVC with a surface treatment with a plasma nozzle according to the invention in the Disc-Jet mode with two different process gases, namely argon and air.
- argon and air Two different process gases
- FIGS. 5a to c show photographic images of the plasma jet of a plasma nozzle according to the invention in the "disc-jet" operating mode.
- 5a shows the planar formation of the sliding discharge of the "Disc-Jet" on a workpiece surface
- Discharge distance is constant in the experiments carried out in accordance with the figures 4 for the surface treatment 3 mm. It is clearly visible a flat discharge over the workpiece surface.
- FIG. 5b shows the discharge characteristic of the "disk jet" in free operation (unloading without workpiece) .
- the filaments emerge from the mouth of the nozzle opening and after a certain distance ignite again up to the disk surface of the "disk jet".
- the filaments slide over the surface of the workpiece and form a surface discharge, which coincides with
- 5c shows the use of the "Disc-Jet" on a plastic profile with a 10 mm deep longitudinal groove with an undercut
- Plasma bundles emerge from the nozzle opening. This bundle forms a large one on the bottom of the longitudinal groove
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Fluid Mechanics (AREA)
- Geometry (AREA)
- Plasma Technology (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16160623 | 2016-03-16 | ||
DE102016209097.6A DE102016209097A1 (de) | 2016-03-16 | 2016-05-25 | Plasmadüse |
PCT/EP2017/056052 WO2017157975A1 (de) | 2016-03-16 | 2017-03-15 | Plasmadüse |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3430864A1 true EP3430864A1 (de) | 2019-01-23 |
EP3430864B1 EP3430864B1 (de) | 2021-11-17 |
Family
ID=59751555
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP17712057.3A Active EP3430864B1 (de) | 2016-03-16 | 2017-03-15 | Plasmadüse und verfahren zur verwendung der plasmadüse |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP3430864B1 (de) |
CN (1) | CN108781498B (de) |
DE (1) | DE102016209097A1 (de) |
DK (1) | DK3430864T3 (de) |
WO (1) | WO2017157975A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108566714A (zh) * | 2018-06-09 | 2018-09-21 | 贵州电网有限责任公司 | 一种等离子体射流装置 |
WO2023034209A1 (en) * | 2021-09-01 | 2023-03-09 | Lam Research Corporation | Electrode-dielectric nozzle for plasma processing |
CN115501361A (zh) * | 2022-10-14 | 2022-12-23 | 嘉兴和禹净化科技有限公司 | 羟基等离子发生器和消毒净化设备 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5961772A (en) | 1997-01-23 | 1999-10-05 | The Regents Of The University Of California | Atmospheric-pressure plasma jet |
DE29911974U1 (de) * | 1999-07-09 | 2000-11-23 | Agrodyn Hochspannungstechnik GmbH, 33803 Steinhagen | Plasmadüse |
DE29921694U1 (de) | 1999-12-09 | 2001-04-19 | Agrodyn Hochspannungstechnik GmbH, 33803 Steinhagen | Plasmadüse |
KR20030091438A (ko) * | 2002-05-28 | 2003-12-03 | (주)플라젠 | 플라즈마 분사장치 및 그 장치를 이용한 표면처리방법 |
JP4447469B2 (ja) * | 2002-12-27 | 2010-04-07 | 株式会社日立国際電気 | プラズマ発生装置、オゾン発生装置、基板処理装置、及び半導体デバイスの製造方法 |
EP1689216A1 (de) * | 2005-02-04 | 2006-08-09 | Vlaamse Instelling Voor Technologisch Onderzoek (Vito) | Plasmastrahl unter atmosphärischem Druck |
JP4963360B2 (ja) * | 2006-01-31 | 2012-06-27 | 国立大学法人茨城大学 | 携帯型大気圧プラズマ発生装置 |
DE102008028167A1 (de) * | 2008-06-12 | 2009-12-31 | Maschinenfabrik Reinhausen Gmbh | Vorrichtung zur Erzeugung eines Plasma-Jets |
DE102009028462A1 (de) * | 2009-08-11 | 2011-03-24 | Leibniz-Institut für Plasmaforschung und Technologie e.V. | Vorrichtung und Verfahren zur Behandlung von lebenden Zellen mittels eines Plasmas |
CN201528464U (zh) * | 2009-09-18 | 2010-07-14 | 中国科学院等离子体物理研究所 | 一种新型大气压射流冷等离子发生器 |
DE102010011132A1 (de) * | 2010-03-11 | 2011-09-15 | Reinhausen Plasma Gmbh | Verfahren und Anordnung zur Plasmabehandlung eines Gasstroms |
CN201957326U (zh) * | 2010-12-01 | 2011-08-31 | 航天环境工程有限公司 | 自动调气式直流等离子体发生器 |
KR101474973B1 (ko) * | 2013-02-08 | 2014-12-22 | 한국기계연구원 | 분사형 플라즈마 발생기 |
KR101453856B1 (ko) * | 2013-03-04 | 2014-10-22 | 한국기계연구원 | 곡면 형상의 구동 전극을 구비한 분사형 플라즈마 발생기 |
CN103237404A (zh) * | 2013-05-14 | 2013-08-07 | 哈尔滨工业大学 | 同轴放电模式的大气等离子体发生装置 |
-
2016
- 2016-05-25 DE DE102016209097.6A patent/DE102016209097A1/de not_active Ceased
-
2017
- 2017-03-15 CN CN201780017388.8A patent/CN108781498B/zh active Active
- 2017-03-15 DK DK17712057.3T patent/DK3430864T3/da active
- 2017-03-15 WO PCT/EP2017/056052 patent/WO2017157975A1/de active Application Filing
- 2017-03-15 EP EP17712057.3A patent/EP3430864B1/de active Active
Also Published As
Publication number | Publication date |
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CN108781498B (zh) | 2021-07-23 |
DK3430864T3 (da) | 2022-02-21 |
WO2017157975A1 (de) | 2017-09-21 |
DE102016209097A1 (de) | 2017-09-21 |
CN108781498A (zh) | 2018-11-09 |
EP3430864B1 (de) | 2021-11-17 |
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