EP3171030B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP3171030B1
EP3171030B1 EP15195364.3A EP15195364A EP3171030B1 EP 3171030 B1 EP3171030 B1 EP 3171030B1 EP 15195364 A EP15195364 A EP 15195364A EP 3171030 B1 EP3171030 B1 EP 3171030B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
installation
external device
accordance
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15195364.3A
Other languages
German (de)
English (en)
Other versions
EP3171030A1 (fr
Inventor
Tobias Stoll
Michael Schweighöfer
Martin Lohse
Jan Hofmann
Robert Walz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15195364.3A priority Critical patent/EP3171030B1/fr
Priority to JP2016224789A priority patent/JP6351693B2/ja
Publication of EP3171030A1 publication Critical patent/EP3171030A1/fr
Application granted granted Critical
Publication of EP3171030B1 publication Critical patent/EP3171030B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the present invention relates to a vacuum pump, in particular a turbomolecular pump, with a housing with at least one opening which can be connected to an opening of an external device.
  • Vacuum pumps are used in a wide variety of technical processes in order to create the vacuum necessary for the respective process.
  • a vacuum pump typically includes a housing that encloses a pump chamber with a rotor shaft.
  • a pump structure of the vacuum pump is generally arranged in the pump chamber and conveys a gas present in the pump chamber or in an area (recipient) to be evacuated from an inlet to an outlet of the vacuum pump.
  • connection is made at one of the points, the production of further connections is made difficult due to tolerances that are hardly avoidable in practice. In general, especially for connections based on a positive connection, there is a difficulty in establishing a tolerance compensation that can compensate for the stresses that occur.
  • the DE 10 2004 012 677 A1 discloses a vacuum pump with the features of the preamble of claim 1.
  • the tolerance compensation mentioned above is carried out elegantly via the non-positive connection, so that the pump can be integrated into a vacuum system without tension.
  • the opening in the housing of the vacuum pump is preferably an inlet through which a gas present in an area to be evacuated is pumped into the interior of the vacuum pump.
  • the opening can also be an outlet of the vacuum pump through which the gas to be evacuated is expelled from the housing.
  • the external device is preferably a recipient, i.e. an area to be evacuated, which is connected to the opening of a pump inlet.
  • the recipient can, for example, be part of a scientific instrument (e.g. mass spectrometer or electron microscope).
  • the external device can also be a forevacuum pump, for example a diaphragm pump, which is connected to an opening of a pump outlet, so that the vacuum pump according to the invention does not have to expel the gas to be pumped against atmospheric pressure.
  • the preferably cylindrical mounting section can be a flange, in particular a vacuum flange.
  • the mounting section can also be designed, for example, as an oval, rectangular, square or hexagonal hollow profile.
  • the separate mounting element provided for tension-free mounting is preferably adapted to the geometry of the mounting section; it therefore has essentially the same geometry as the assembly section.
  • the mounting element is ring-shaped, the mounting section then being cylindrical.
  • the mounting element is a coupling ring or a coupling sleeve, which can be plugged or pushed onto the mounting section of the housing or a corresponding mounting section of an external device.
  • the mounting element is preferably made of metal and is preferably formed in one piece.
  • the fixing means of the mounting element for producing the non-positive connection between the mounting element and the mounting section preferably comprises an inner surface which widens in the direction of the external device and which forms an groove for receiving a sealing ring with an outer surface of the mounting section.
  • the fixing means of the mounting element for establishing the non-positive connection between the mounting element and the external device preferably comprises one in the opposite direction, i.e. in the direction of the vacuum pump, expanding inner surface which forms a groove for receiving a sealing ring with an outer surface of the mounting section of the external device.
  • the fixing means is preferably formed in one piece with the mounting element.
  • the sealing ring is preferably made of an elastic material (eg rubber) and is pressed into the groove under elastic pretension.
  • the groove depth is usually selected so that the sealing ring does not completely fit into the cavity formed by the groove during preassembly (ie before the pump is connected to the external device). In other words, the sealing ring can protrude from the groove. In this sense it can be preferred be that the groove depth is less than the cross-sectional diameter of the sealing ring.
  • the sealing ring is supported either on the mounting section (for example on a wall or a flange) of the external device or that of the vacuum pump and deforms during the further mounting, when the mounting element and the corresponding mounting section move towards each other.
  • the sealing ring is compressed or compressed axially within the groove and stretched in the radial direction. This causes a clamping action between the fixing means of the mounting element and the outer surface of the mounting section of the housing opening or the mounting section of the external device. This results in a non-positive connection.
  • the deformability of the sealing ring enables tolerance compensation between the mounting element and the mounting section. Vibrations during the operation of the pump are also absorbed. In addition, the tolerance compensation improves the tightness properties of the pump since voltage-related leaks no longer occur.
  • the expanding inner surface of the fixing means is a chamfer or a conical surface.
  • the chamfer surface or the conical surface has a chamfer or cone angle (angle of inclination) between 15 ° and 75 °, preferably between 30 ° and 60 °, particularly preferably between 40 ° and 50 °, in particular of about 45 °.
  • the chamfer width can be, for example, between 0.1 and 4 cm, preferably between 0.2 and 3 cm, particularly preferably between 0.3 and 2 cm.
  • the mounting element in particular the coupling ring, has on its inside a shoulder or radial step which acts as a stop.
  • the shoulder can abut when attaching the mounting element to a complementary shoulder or radial step of the mounting section of the opening or the external device, so as to define a starting position for mounting.
  • the sealing ring can be pressed into the formed groove in this position and preferably remains in this position without jumping out.
  • the mounting element has bores and / or radially extending notches for axially connecting or coupling the mounting element to the external device or the mounting element to the mounting section of the vacuum pump.
  • the bores and / or radially extending notches are preferably distributed uniformly over the circumference of the mounting element.
  • Screws or bolts can be passed through the bores and / or notches, which are screwed to the external device or to the mounting section of the vacuum pump. At this point it should be pointed out again that the coupling between the external device and the opening of the vacuum pump ultimately comes about through the pressure forces provided with the aid of the fixing element of the mounting element.
  • screws or bolts are assigned spacer sleeves in order to set an optimal distance between the external device and the vacuum pump.
  • the bolts and / or screws can be assigned O-rings which hold the screws and / or bolts in the bores and / or notches in a manner which prevents them from slipping or being lost.
  • This preferably O-rings made of an elastic plastic or rubber can be inserted into the bores and / or radially extending notches through radially extending recesses or slots in the mounting element.
  • the assembly section of the opening or the assembly section of the external device can comprise a positioning aid which interacts with a mounting device of the external device or the opening of the vacuum pump.
  • the positioning aid defines a starting position for the coupling between the external device and the vacuum pump before the bolts and / or screws of the assembly section are fixed.
  • the positioning aid can be an axial projection of the mounting section which interacts with a complementary groove on the side of the external device. In this way, mutual slipping can be prevented during the fastening of the bolts and / or screws.
  • the positioning aid can also be a centering section which is inserted into the opening of the external device or the vacuum pump.
  • a first opening in particular a first inlet, is arranged on an axial end face of the vacuum pump with respect to an axis of rotation of a pump stage arranged in the housing (axial opening).
  • the housing has at least one second opening, in particular a second inlet, which is arranged on a side wall of the housing which is radial with respect to the axis of rotation (radial opening).
  • Both openings preferably have a mounting level defining mounting section, wherein the mounting planes of the openings are preferably arranged perpendicular to each other.
  • the vacuum pump has two or more radially arranged openings, in particular inlets, in addition to the axial opening.
  • at least one pump stage is arranged between the radial openings; the arrangement of two pump stages is particularly preferred.
  • a pump stage of a vacuum pump in particular a turbomolecular pump, is to be understood in the present case to mean, in particular, an arrangement of at least one rotor and one stator disk which are assigned to a rotor shaft.
  • the rotor disks are manufactured, for example, in a single sawing process and joined to the rotor shaft.
  • a vacuum pump in particular a turbomolecular pump, usually contains several pump stages of rotor and stator disks arranged in series or in pairs. Each pump stage, if assigned to an inlet of the pump, can provide a certain pressure in a recipient connected to the inlet, this pressure increasing for pump stages in the direction of the pump outlet.
  • a pump stage can also be a backing pump, in particular a molecular pump stage, for example a Holweck pump stage or a Siegbahn pump stage.
  • the bearing of the rotor shaft is usually - but not mandatory - a hybrid bearing, for example with a ball bearing on an outlet or fore-vacuum side and a magnetic bearing on a high-vacuum side of the pump.
  • Vacuum pumps with two or more, in particular radially arranged, inlets which are also referred to as split-flow vacuum pumps, enable the evacuation of several, in particular one behind the other, recipients with different pressures prevailing there.
  • Such pumps typically contain two to six inlets along the axis of rotation the pump are arranged spaced apart.
  • the vacuum pumps usually consist of a stack of pump stages connected in series within the housing.
  • the pump stages comprise a turbomolecular unit with at least one set of rotor and stator disks and optionally one or more forevacuum pumps.
  • the highest pumping speed and the lowest pressure range are available at the first inlet, ie at the inlet upstream of all other inlets.
  • the downstream inlets are in higher pressure ranges and deliver lower pumping speeds.
  • the compression ratio - for example for nitrogen - between two radially arranged openings of the pump is greater than 10, in particular greater than or equal to 100.
  • At least two radially arranged openings are at least partially surrounded by a common assembly section defining an assembly plane.
  • the two radially arranged openings can be sealed off from one another in such a way that a first sealing means, in particular a first sealing ring, surrounds both openings, while a second sealing means, in particular a second sealing ring, surrounds only one of the two openings.
  • a first sealing means in particular a first sealing ring
  • a second sealing means in particular a second sealing ring
  • a vacuum pump which comprises a housing with at least one opening which can be connected to an opening of an external device, in particular a recipient, the opening at least in sections is surrounded by an assembly device defining an assembly level.
  • the vacuum pump in each case comprises fastening elements, in particular screws and / or bolts, comprising at least one damping element for the stress-free connection of the mounting device to the external device.
  • the mounting device can in particular be the mounting section described above, which is preferably cylindrical.
  • the assembly device in particular in the case of radially arranged openings, is preferably a platform surrounding at least one opening, which forms a plane with an opening area of the opening.
  • the platform can have an area that is several times larger than the area of the opening surrounded by the platform.
  • the geometry of the platform is basically arbitrary, but is preferably rectangular or round.
  • the external device in particular an opening of the external device, has a mounting device of the type described above in order to be connected to the opening of a vacuum pump with the aid of the fastening elements.
  • the damping element effects a tolerance compensation when the mounting device assigned to the pump opening is coupled to an external device (or vice versa).
  • the damping element preferably surrounds a fastening section of the fastening element at least in sections.
  • the damping element preferably comprises a sleeve and / or at least one O-ring.
  • the damping element is a sleeve and / or an O-ring.
  • the damping element preferably consists of an elastomer, in particular an elastic material, and preferably has a Shore hardness between 70 and 95.
  • the fastening element is a screw and / or bolt which is at least partially surrounded by a sleeve below the screw or bolt head, with an O-ring being assigned to at least one end of the sleeve.
  • the sleeve is preferably flanked at both ends by O-rings.
  • the sleeve and the one or more O-rings can have different elasticities.
  • the mounting device has bores and / or lateral notches for the axial connection with the external device.
  • the bores and / or the lateral notches are each already assigned a damping element, in particular a sleeve and / or at least one O-ring.
  • the O-ring and / or the sleeve can also act as a loss or slip protection for the fastening means.
  • the sleeve can also function as a spacer sleeve in order to set a desired distance between the external device and the mounting device.
  • the sleeve comprises an inner jacket and an outer jacket, the jackets having a different elasticity.
  • the inner jacket is preferably more elastic than the outer jacket.
  • a preferred embodiment of a vacuum pump according to the invention comprises an axially arranged opening, in particular an inlet, the mounting section of which can be coupled to an external device with the aid of the separate mounting element. Furthermore, the vacuum pump has at least two radially arranged Openings, in particular inlets, which are at least partially surrounded by an assembly device.
  • the mounting device can be coupled to at least one fastening element comprising a damping element, in particular a screw and / or a bolt, to an external device.
  • the mounting planes which are defined by the mounting section of the axial opening on the one hand and the mounting device of the radial openings on the other hand, are arranged perpendicular to one another. In this way, it is particularly advantageously possible to couple the vacuum pump to the respective external devices without stress, regardless of which opening is coupled first.
  • parts of the vacuum pump are enclosed by a housing of the external device.
  • parts of the vacuum pump in particular parts located on the end face, can protrude into the housing of an external device. For example, this can be accomplished with assembly sections and / or assembly devices that are set back from the external device.
  • Another aspect of the invention relates to a vacuum system with a plurality of external devices, in particular recipients, and at least one vacuum pump according to the invention, at least one external device having an opening, in particular an inlet, being coupled to the pump in a voltage-free manner.
  • the Fig. 1A shows a vacuum pump 10 with a housing 12. Inside the housing 12 and not visible at least three pump stages are arranged, which are assigned to a common rotor shaft. The rotor shaft also defines an axis of rotation A.
  • the vacuum pump 10 has an axial opening 14 on its axial end face 11 and two radial openings on its radial side wall 13 15a, 15b.
  • the openings 14, 15a, 15b are inlets, each of which is assigned a pump stage.
  • the vacuum pump 10 is a split-flow vacuum pump which enables three receivers connectable to the openings 14, 15a, 15b to be pumped, in which different pressures prevail.
  • the vacuum pump 10 is shown in cross section.
  • the opening 14 has a round cross section and is surrounded by a cylindrical mounting section 18 which defines a mounting plane 16.
  • a mounting element 20a for tension-free coupling to a recipient is attached to the mounting section 18.
  • the mounting element 20a is a coupling ring which has a shoulder 34 on its inside, which can abut on a shoulder 35 formed on an outer surface 26 of the mounting section 18 (see also Figure 1B ).
  • the mounting element 20a further comprises a fixing means 22a for establishing a non-positive connection between the mounting element 20a and the mounting section 18.
  • the fixing means 22a which is detailed in a detailed view in FIG Figure 1B is shown, it is a chamfered inner edge of the mounting element 20a with an inner surface 24 widening in the direction of the external device.
  • the phase angle or the angle of inclination of the inner surface 24 is approximately 45 °, but can be selected larger or smaller if required become.
  • the inner surface 24 forms, together with the outer surface 26 of the mounting section 18, a groove 28 in which a sealing ring 30 is arranged.
  • the sealing ring 30 consists of an elastomer and has, for example, a Shore hardness between 70 and 95.
  • the 1C shows a detailed view of an external device 70 with a mounting element 20b, which with the mounting section of a vacuum pump according to the invention (not shown) can be coupled.
  • An opening 71 of the external device 70 is surrounded by a mounting section 73, onto which the mounting element 20b is attached.
  • the mounting element 20b comprises a fixing means 22b for producing a non-positive connection between the mounting element 20b and the mounting section 73 of the external device 70.
  • the fixing means 22b forms a groove 28 with an outer surface 72 of the mounting section 73, in which a sealing ring 30 is arranged.
  • the mounting element 20a comprises a total of four bores 36, each of which is assigned a slot 38 which extends radially from an outside of the mounting element 20a to the bore 36.
  • Figure 2A shows a partial cross section of one of the bores 36 of the vacuum pump 10 Fig. 1A , A detailed view of this cross section is in the Figure 2B shown.
  • the vacuum pump 10 according to Figure 2A is in a ready-to-install state since there are already screws 39 in the bores 36.
  • An O-ring 40 can be clearly seen, which was introduced into the bore 36 through the slot 38 before the screw 52 is countersunk in the bore 36. If the screw 39 into the bore 36 and through the O-ring 40, the latter prevents the screw 39 from slipping or falling out during assembly.
  • the mounting element 20b according to 1C can be designed accordingly.
  • the pump 10 according to the Figs. 1A, 1B and 2A, 2B furthermore has a mounting device 46b which surrounds the openings 15a, 15b.
  • the assembly device 46b defines an assembly plane 44b, which in the present exemplary embodiment is arranged perpendicular to the assembly plane 16 (other relative positions of the planes 16, 44b are quite conceivable).
  • the mounting device 46b is described in more detail below.
  • the mounting element 20a is screwed by means of the screws 39 to a flange or a wall of the external device.
  • the external device moves - from the point of view of the pump 10 - towards the mounting element 20a, and the sealing ring 30 protruding from the groove 28 is compressed in the axial direction on further approach.
  • the sealing ring 30 is stretched in the radial direction, which leads to a clamping effect between the fixing means 22a of the mounting element 20a and the outer surface 26 of the mounting section 18 of the vacuum pump 10. This purely frictional connection between the mounting element 20a and the mounting section 18 holds the vacuum pump 10 in place with respect to the external device.
  • the flexibility of the sealing ring 30 also brings about tolerance compensation in relation to the angle that the vacuum pump 10 must take in relation to the external device. In other words, a certain malposition - due to assembly and / or vibration - is absorbed and compensated for by the sealing ring 30, without compromising the sealing properties of the connection.
  • connection of the external device 70 to a vacuum pump is analogous, except that here the mounting element 20b is screwed to the mounting section of the vacuum pump.
  • a flange is provided on the pump 10, for example. The screwing again creates a non-positive connection between the mounting element 20b and the mounting section 73 of the external device 70, which has the same tolerance properties as the connection described above.
  • FIG. 3A shows a vacuum pump 100 according to the invention, which differs from the previously described vacuum pump 10 in the type of connecting means with which the axial opening 14 is coupled to an external device becomes.
  • the vacuum pump 100 comprises an assembly device 46a, which surrounds the axial opening 14 and defines an assembly plane 44a. Furthermore, the vacuum pump 100 comprises a further assembly device 46b, which surrounds the radial openings 15a, 15b (not visible) and defines an assembly plane 44b.
  • the mounting planes 44a, 44b are arranged perpendicular to one another (other relative positions of the planes 44a, 44b are quite conceivable).
  • the mounting device 46a has four bores 54, of which only two are visible due to the illustration.
  • the assembly device 46b associated with the radial openings 15a, 15b has a total of four notches 56, of which only two are visible due to the illustration.
  • a fastening element 50 in the present case screws 52, is assigned to each bore 54 and each notch 56.
  • the screws 52 are surrounded in sections by a damping element 47, which enables a stress-free connection to an external device.
  • the damping element 47 which partially surrounds the screws 52 of the mounting device 46b, comprises two O-rings 49 and a sleeve 48 arranged between the O-rings 49.
  • the screws 52 of the mounting device 46a are partially surrounded by a damping element 47, which has a sleeve 48 and includes only one O-ring 49.
  • rings with a rectangular cross section can also be used if necessary.
  • FIG. 3B The detailed view of a screw 52 received by a notch 56 of the mounting device 46b and having a longitudinal axis A S according to Figure 3B shows that an O-ring 49 assigned to the screw head 53 on one side 57 of FIG Mounting device 46b is present.
  • An O-ring 49 assigned to the screw end 55 is partially arranged in a recess 58 surrounding the lateral notch 56 on the side 59 of the mounting device 46b opposite the side 57.
  • the O-ring 49 assigned to the screw head 53 has a rectangular cross-sectional area and is wider than the O-ring 49 assigned to the screw end 55, which has a round cross-sectional area.
  • a sleeve 48 is arranged, which also acts as a spacer sleeve and thus prevents excessive pressing of the O-rings 49 during assembly.
  • Both the O-rings 49 and the sleeve 48 - possibly also the damping element 47 - consist for example of an elastomer which in particular has a Shore hardness between 70 and 95.
  • the longitudinal screw axis A S coincides with a longitudinal axis of the corresponding bores or the bore channels (ie from an external device and a vacuum pump 100).
  • the damping element 47 surrounding the screws 52 in sections introduces a certain tolerance with respect to this requirement.
  • the pump 100 is screwed at several points, it is hardly possible to achieve an exact coincidence of the above-mentioned axes in many cases. Due to its elasticity, the damping element 47 which partially surrounds the screws 52 is able to compensate for inclined positions of the screws 52 in the bores 54 due to material defects / vibration and / or occurring during assembly, without impairing the tightness of the connection.
  • Fig. 4 shows the vacuum pump 100 Figure 3A , with the assembly device 46a being omitted for reasons of clarity.
  • the axial opening 14, which is surrounded by a sealing ring 60, can be seen in this illustration.
  • the opening 14 has a cylindrical positioning aid 42 which is connected to a complementary section of an external device to be connected cooperates (for example, can be inserted into this) in order to facilitate the assembly of the vacuum pump 100.
  • the radial openings 15a, 15b, which are jointly surrounded by the mounting device 46b, are also visible in this illustration.
  • Fig. 5 shows the radial openings 15a, 15b and the mounting device 46b surrounding them from above.
  • the openings 15a, 15b have approximately the same axial width L B , the axial distance L A between the openings 15a, 15b being smaller than L B.
  • the distance L A is preferably smaller by a factor of 0.75, in particular 0.5, than the length L B.
  • the openings 15a, 15b are surrounded by a sealant 62a, which seals both openings from the environment / atmosphere when the mounting device 46b is coupled to an external device.
  • a sealant 62a which seals both openings from the environment / atmosphere when the mounting device 46b is coupled to an external device.
  • the opening 15a is surrounded by a sealing means 62b.
  • the sealing means 62a, 62b are, for example, ring-like rubber seals with a Shore hardness between 70 and 95.
  • the special arrangement of the sealing means 62a, 62b makes it possible to keep the distance L A between the openings 15a, 15b small, since only one opening 15a has to be surrounded by a sealing means 62b in order to seal the openings 15a, 15b against one another realize.
  • the axial length of the pump L C can also be kept short in this way and is typically by a factor of 2.5, preferably 2.4, particularly preferably 2.3, smaller than the diameter of a rotor disk, as it is in the interior of the vacuum pump 10 , 100 is arranged.
  • the axial length L C of a vacuum pump 10, 100 can be less than 30 cm, preferably less than 26 cm, in particular less than 25 cm.
  • the ratio of the axial length L B to the rotor diameter is preferably less than 1/4, particularly preferably less than 9/40, in particular less than 1/5.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (15)

  1. Pompe à vide (10), en particulier pompe turbomoléculaire, comportant
    - un boîtier (12) présentant au moins une ouverture (14) susceptible d'être reliée à une ouverture (71) d'un moyen externe (70), en particulier d'un récipient, et entourée au moins localement par une portion de montage (18) qui définit un plan de montage (16) et qui est réalisée de préférence en forme de cylindre, et
    - un élément de montage séparé (20) pour monter le boîtier (12) sur le moyen externe (70), l'élément de montage (20) pouvant être couplé au moyen externe (70),
    caractérisée en ce que
    en vue d'un montage exempt de contrainte, l'élément de montage (20) comprend un moyen de fixation (22) coopérant avec un anneau d'étanchéité (30) pour établir une liaison purement par coopération de force entre l'élément de montage (20) et la portion de montage (18), ou en ce que l'élément de montage (20) peut être couplé à la portion de montage (18), et en vue d'un montage exempt de contrainte, l'élément de montage (20) comprend un moyen de fixation (22) coopérant avec un anneau d'étanchéité (30) pour établir une liaison purement par coopération de force entre l'élément de montage (20) et le moyen externe (70).
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    l'élément de montage (20) est de forme sensiblement annulaire.
  3. Pompe à vide selon la revendication 1 ou 2,
    caractérisée en ce que
    le moyen de fixation (22) comprend une surface intérieure (24) qui s'élargit en direction vers le moyen externe (70) ou en sens opposé et qui constitue une rainure (28) pour recevoir un anneau d'étanchéité (30), conjointement avec une surface extérieure (26) de la portion de montage (18) ou avec une surface extérieure (72) d'une portion de montage (73) du moyen externe (70).
  4. Pompe à vide selon la revendication 3,
    caractérisée en ce que
    la surface intérieure (24) s'élargissant est un chanfrein ou une surface conique.
  5. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'élément de montage (20) présente sur une face intérieure (32) un épaulement (34) faisant office de butée.
  6. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    l'élément de montage (20) présente des perçages (36) et/ou des entailles s'étendant radialement pour la liaison axiale de l'élément de montage (20) avec le moyen externe (70) ou avec la portion de montage (18).
  7. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    la portion de montage (18) présente un moyen d'aide au positionnement (42) qui coopère avec un dispositif de montage du moyen externe (70).
  8. Pompe à vide selon l'une des revendications précédentes,
    caractérisée en ce que
    une première ouverture (14), en particulier une première entrée, est disposée sur une face frontale axiale (11) du boîtier (12) par rapport à un axe de rotation (A) d'un étage de pompage disposé dans le boîtier (12), et en ce que
    le boîtier (12) présente au moins une seconde ouverture (15a, 15b), en particulier une seconde entrée, qui est disposée sur une paroi latérale radiale (13) du boîtier (12) par rapport à l'axe de rotation.
  9. Pompe à vide selon la revendication 8,
    caractérisée en ce que
    la pompe présente deux ouvertures (15a, 15b) disposées radialement, en particulier au moins un étage de pompage étant disposé entre les ouvertures (15a, 15b).
  10. Pompe à vide selon la revendication 9,
    caractérisée en ce que
    un premier moyen d'étanchéité (62a), en particulier un premier anneau d'étanchéité, entoure les deux ouvertures (15a, 15b), tandis qu'un second moyen d'étanchéité (62b), en particulier un second anneau d'étanchéité, n'entoure que l'une des deux ouvertures (15a, 15b).
  11. Pompe à vide (100), de préférence pompe turbomoléculaire, selon l'une des revendications précédentes, comportant
    - un boîtier (12) présentant au moins une ouverture (14, 15a, 15b) susceptible d'être reliée à une ouverture d'un moyen externe, en particulier d'un récipient, et entourée au moins localement par un moyen de montage (46a, 46b) définissant un plan de montage (44a, 44b),
    - des éléments de fixation (50), en particulier des vis et/ou des boulons (52), comprenant chacun au moins un élément d'amortissement (47), pour la liaison exempte de contrainte du moyen de montage (46a, 46b) avec le moyen externe.
  12. Pompe à vide selon la revendication 11,
    caractérisée en ce que
    l'élément d'amortissement (47) entoure au moins localement une portion de fixation (51) de l'élément de fixation (50) et/ou comporte une douille (48) et/ou au moins un joint torique (49).
  13. Pompe à vide selon l'une des revendications 11 et 12,
    caractérisée en ce que
    l'élément d'amortissement (47) est constitué en un élastomère, en particulier en un matériau élastique, et présente de préférence une dureté Shore comprise entre 70 et 95.
  14. Pompe à vide selon l'une des revendications 11 à 13,
    caractérisée en ce que
    le moyen de montage (46a, 46b) présente des perçages (54) et/ou des entailles latérales (56) pour la liaison axiale avec le moyen externe.
  15. Système à vide comportant plusieurs moyens externes à évacuer, en particulier des récipients, et au moins une pompe à vide (10, 100) selon l'une des revendications précédentes.
EP15195364.3A 2015-11-19 2015-11-19 Pompe à vide Active EP3171030B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15195364.3A EP3171030B1 (fr) 2015-11-19 2015-11-19 Pompe à vide
JP2016224789A JP6351693B2 (ja) 2015-11-19 2016-11-18 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15195364.3A EP3171030B1 (fr) 2015-11-19 2015-11-19 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3171030A1 EP3171030A1 (fr) 2017-05-24
EP3171030B1 true EP3171030B1 (fr) 2020-01-08

Family

ID=54601693

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15195364.3A Active EP3171030B1 (fr) 2015-11-19 2015-11-19 Pompe à vide

Country Status (2)

Country Link
EP (1) EP3171030B1 (fr)
JP (1) JP6351693B2 (fr)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5163712A (en) * 1991-10-28 1992-11-17 Varian Associates, Inc. Rotatable vacuum flange
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
DE102004012677A1 (de) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Vakuumsystem
WO2006068014A1 (fr) * 2004-12-20 2006-06-29 Boc Edwards Japan Limited Structure pour relier des parties d’extrémité et système de vide utilisant cette structure
DE102005020904A1 (de) * 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung
DE102014102680A1 (de) * 2014-02-28 2015-09-03 Pfeiffer Vacuum Gmbh Vakuumpumpenanordnung
DE102014103510B4 (de) * 2014-03-14 2016-02-25 Pfeiffer Vacuum Gmbh Vakuumpumpen-Dämpfer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
JP2017096286A (ja) 2017-06-01
EP3171030A1 (fr) 2017-05-24
JP6351693B2 (ja) 2018-07-04

Similar Documents

Publication Publication Date Title
EP1426639B1 (fr) Procédé de montage d'un roulement à deux rangées de rouleaux coniques avec des bagues en plusieurs pièces dans une éolienne
DE102009034012B4 (de) Verfahren und Vorrichtung zum axialen Sichern eines Maschinenelements
EP3092371B1 (fr) Rotor doté d'une bague d'appui bloquée axialement
EP2228540B1 (fr) Agencement doté d'une pompe à vide
EP2918843B1 (fr) Amortisseur pour pompes à vide
EP3171030B1 (fr) Pompe à vide
DE102012221232A1 (de) Lageranordnung, insbesondere für Spannlager
DE102015106638A1 (de) Befestigungsvorrichtung sowie Verfahren zur Befestigung eines Laufrades eines Verdichters auf einer Antriebswelle
EP2789889B1 (fr) Système à vide
WO2014173961A1 (fr) Étanchéité de l'interface entre une pompe à vide à entrées multiples et le boîtier dans lequel la pompe est insérée
EP3085963A1 (fr) Pompe à vide
DE102009032348B4 (de) Montagehilfe für einen Geberzylinder
EP1484590A2 (fr) Arrangement pour assurer l'étanchéité d'un élément de mesure
EP3333438B1 (fr) Cage pour roulement à billes linéaires, boîtier et procédé
DE102019118453A1 (de) Passverbindung
EP3064705B1 (fr) Rotor doté d'une tôle de sûreté destiné à protéger un verrouillage rotatif contre le dévissage
DE102007014013B4 (de) Flugkörperadapterring
DE102014016468A1 (de) Vorrichtung zur Messung einer Körperlänge
DE102018112448A1 (de) Werkzeug zur Halterung der Hochdruckwelle eines Flugzeugtriebwerks
EP2913534B1 (fr) Agencement de pompe à vide
DE102013110727A1 (de) Verdichteranordnung für einen Turbolader
CH714541A2 (de) Kabelverschraubung.
EP1245888B1 (fr) Adaptateur de position pour des connections de tuyaux et câbles
DE102016225506A1 (de) Halteelement und Ladeluftrohrsystem für ein Kraftfahrzeug
EP2559929B1 (fr) Traversée de conduite avec volume de contrôle

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20170626

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20190612

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502015011449

Country of ref document: DE

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1223065

Country of ref document: AT

Kind code of ref document: T

Effective date: 20200215

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20200108

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200408

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200531

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200508

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200409

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200408

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502015011449

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20201009

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20201119

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20201130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20201130

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20201130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20201130

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20201119

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 1223065

Country of ref document: AT

Kind code of ref document: T

Effective date: 20201119

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20201119

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200108

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20201130

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20231123

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20231124

Year of fee payment: 9

Ref country code: CZ

Payment date: 20231110

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240129

Year of fee payment: 9