EP3170196A1 - Vacuum system, in particular a plasma system, having a completely enclosed chamber extruded profile - Google Patents

Vacuum system, in particular a plasma system, having a completely enclosed chamber extruded profile

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Publication number
EP3170196A1
EP3170196A1 EP15739229.1A EP15739229A EP3170196A1 EP 3170196 A1 EP3170196 A1 EP 3170196A1 EP 15739229 A EP15739229 A EP 15739229A EP 3170196 A1 EP3170196 A1 EP 3170196A1
Authority
EP
European Patent Office
Prior art keywords
chamber
extruded profile
vacuum
vacuum chamber
vacuum system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15739229.1A
Other languages
German (de)
French (fr)
Other versions
EP3170196B1 (en
Inventor
Christof-Herbert Diener
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Individual
Original Assignee
Individual
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Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP3170196A1 publication Critical patent/EP3170196A1/en
Application granted granted Critical
Publication of EP3170196B1 publication Critical patent/EP3170196B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14—Plasma, i.e. ionised gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma

Definitions

  • Vacuum system in particular plasma system, with a completely closed chamber extruded profile
  • the invention relates to a vacuum system with a vacuum chamber, in which the parallel to the central vacuum chamber longitudinal axis extending outside of the vacuum chamber is integrally formed from a chamber extruded profile.
  • the side walls of the vacuum chamber consist of a chamber extruded profile.
  • the front sides of the vacuum chamber consist of a chamber extruded profile.
  • Chamber extruded profiles are closed by bolted to the chamber extruded profile plates.
  • the chamber extruded profile has at least one perpendicular to the end face of the chamber extruded profile trained outside, ie on a side wall, an opening for loading and unloading the vacuum chamber. The opening must be milled consuming in the chamber extruded profile.
  • Object of the present invention is in contrast, a
  • Vacuum system with a vacuum chamber in which the parallel to the central vacuum chamber longitudinal axis extending outside of the vacuum chamber is integrally formed from a chamber extruded profile, the chamber extruded across the central vacuum chamber longitudinal axis is formed completely closed and has a front reversibly open and closeable door.
  • Chamber extrusion profile formed transversely to the central vacuum chamber longitudinal axis completely closed.
  • Vacuum chamber via the end face which is formed in the form of a reversibly open and closeable door.
  • the vacuum chamber may have a hinged door on a first end face. Such an attachable door can be used to lock the
  • Vacuum chamber are sucked by a pump.
  • the vacuum chamber may have a sliding door at a first end face. Both in the case of a hinged door and in the case of a sliding door, the vacuum chamber can be formed without hinges.
  • the vacuum chamber preferably has a pivotably openable and closable door on a first end side.
  • Swivel axis of the door is preferably transverse to the central
  • Vacuum chamber longitudinal axis in particular perpendicular to an axis parallel to the central vacuum chamber longitudinal axis.
  • the vacuum system can be structurally particularly simple and inexpensive.
  • Chamber extruded profile the chamber extrusion profile on its outer side a longitudinal axis parallel to the central vacuum chamber extending first hinge projection, on which a first hinge for pivotal connection between the door and
  • Chamber extruded profile is arranged.
  • the chamber extruded profile can on its outer side a parallel to the central vacuum chamber longitudinal axis extending second
  • Vacuum system having a first closure, which is arranged on a first closure holder projection, wherein the closure holder projection is formed parallel to the central vacuum chamber longitudinal axis on the neglectedse ite of the chamber extruded profile.
  • the chamber extruded profile on its outside a parallel to the central vacuum chamber longitudinal axis extending second closure holder projection on which a second closure for closing the door on
  • Chamber extruded profile is arranged.
  • the second closure further increases the tightness between the door and the chamber extruded profile.
  • the chamber extruded profile may further have on its outer side a parallel to the central vacuum chamber longitudinal axis extending cooling rib.
  • the chamber extruded profile on its outer side a plurality of parallel to the central
  • Vacuum chamber longitudinal axis extending cooling fins on. Due to the cooling fin (s), water cooling can be dispensed with in many applications.
  • the vacuum system preferably has a housing.
  • the chamber extruded profile on its outside a parallel to the central Having vacuum chamber longitudinal axis extending first fastening projection.
  • the first attachment projection facilitates the assembly of the vacuum chamber to the housing, so that assembly costs are reduced.
  • the Kammerstrangpressprofii on its outer side a parallel to the central vacuum chamber longitudinal axis extending second mounting projection for attaching the vacuum chamber to the housing of the vacuum system.
  • the vacuum chamber is structurally particularly simple and at the same time securely attached to the housing of the vacuum system.
  • the Kammerstrangpressprofii has on its inner side a plurality of opposite parallel to the central
  • Chamber extrusions this way several plate mounts are made, whereby the production of the vacuum system is significantly simplified.
  • Extruded profiles can be a flange for insertion and or
  • Vacuum chamber takes place when the chamber extruded profile
  • Aluminum or an aluminum alloy is formed.
  • the production of the vacuum system is further significantly simplified if the vacuum system has a housing in which the
  • Vacuum chamber is added, with a parallel to the center
  • Vacuum chamber longitudinal axis extending part of the housing is designed in the form of a housing extrusion profile.
  • the production of the vacuum system is simplified in that not only a significant part of the vacuum chamber, namely the
  • Chamber extruded but also a part of the housing, namely the housing extruded profile can be produced by an extrusion process.
  • Chamber extruded profile formed integrally with the housing of the extruded profile.
  • the vacuum system can be designed in the form of a vacuum dryer.
  • the vacuum system can for this purpose have a pump for at least partial evacuation of the vacuum chamber. Furthermore, the vacuum system can for this purpose have a pump for at least partial evacuation of the vacuum chamber. Furthermore, the vacuum system can for this purpose have a pump for at least partial evacuation of the vacuum chamber. Furthermore, the vacuum system can for this purpose have a pump for at least partial evacuation of the vacuum chamber. Furthermore, the vacuum system can for this purpose have a pump for at least partial evacuation of the vacuum chamber. Furthermore, the
  • Vacuum system have a heater.
  • the extruded profile can be nickel-plated at least on its inside to avoid corrosion. Preferably, the entire
  • the vacuum system is designed in the form of a plasma system.
  • at least one plasma electrode can be arranged in this case.
  • the vacuum system in the form of a plasma system may further comprise a pump, a vent valve, a gas flow meter, a pressure gauge and / or a high voltage power supply.
  • the vacuum system has a housing extruded profile.
  • the chamber extruded profile can be connected to the housing extruded profile.
  • the chamber extruded profile can be welded and / or screwed to the housing extruded profile.
  • FIG. 1 shows a perspective view of a vacuum system in the form of a plasma system; a plan view of a first chamber extruded profile; a top view of the first chamber extruded profile according to Figure 2, wherein the first chamber extruded profile is attached to a first housing extruded profile; and a plan view of a second chamber extruded profile which is integrally formed with a second housing extruded profile.
  • FIG. 1 shows a vacuum system 10 with a vacuum chamber 12.
  • the vacuum chamber 12 is largely surrounded by a housing 14.
  • the vacuum chamber 12 has a door 16 which is pivotally openable and closable by means of hinges 18, 20.
  • the hinges 18, 20 are one end on the door 16 and other ends on one
  • Chamber extruded profile 22 (see Figure 2) attached.
  • closures 24, 26 are provided.
  • the closures 24, 26 are a Ends am
  • Chamber extruded 22 (see Figure 2) attached and engage other ends with closed door 16 in corresponding brackets of the door 16 a.
  • the vacuum chamber 12 is arranged horizontally, ie a central one
  • Vacuum chamber longitudinal axis 28 extends in the operating state of
  • the vacuum system 10 has a pressure indicator 30, a timer 32,
  • the pressure display 30 is used to display the internal pressure of the vacuum chamber 12.
  • the timer 32 is the
  • the gas flow measuring devices 34, 36 By the gas flow measuring devices 34, 36, the gas flow can be adjusted and controlled in the vacuum chamber 12.
  • the high-voltage control 38 serves to supply power to a plasma electrode (not shown) in the vacuum chamber 12.
  • FIG. 2 shows the chamber extruded profile 22
  • Chamber extruded profile 22 is uniformly formed in the direction of the central vacuum chamber longitudinal axis 28, which is shown only point-shaped in Figure 2. Furthermore, the chamber extruded profile 22 is formed symmetrically to a central vacuum chamber longitudinal plane 40. The chamber extruded profile 22 is formed of aluminum.
  • the chamber extruded profile 22 has on its outer side a first hinge projection 42 and a second hinge projection 44.
  • the hinges 18, 20 are mounted on the hinge projections 42, 44.
  • the chamber extrusion profile 22 also has a first closure holder projection 46 on which the first closure 24 (see FIG. 1) is mounted.
  • the second closure 26 is fastened to a second closure holder projection 48.
  • the projections 42, 44, 46, 48 allow a structurally simple and at the same time very dense arrangement of the door 16 (see Figure 1) on the
  • Chamber extruded profile 22 in a pivotable arrangement.
  • this may have on its outer side one or more cooling ribs 50, 52, 54 (in FIG. 2)
  • the chamber extrusion press profile 22 has on its inside a plurality of insertion recesses, in each of which a plate (not shown) can be inserted. For reasons of clarity, only a first insertion recess 56 and a second one are shown in FIG.
  • Insertion recess 58 provided with a reference numeral.
  • Insert recesses 56, 58 are opposite each other
  • the chamber extruded profile 22 For fastening the chamber extruded profile 22 to the housing 14 (see FIG. 1), the chamber extruded profile 22 is provided
  • FIG. 3 shows the chamber extruded profile 22 via
  • Fastener 64, 66 is mounted on a housing extrusion profile 68.
  • the housing extruded profile 68 constitutes a part of the housing 14 (see FIG. 1).
  • the fastening means 64, 66 are designed in the form of screws.
  • FIG. 4 shows a second chamber extruded profile 70 and a second housing extruded profile 72, wherein the extruded profiles 70, 72, in contrast to the extruded profiles 22, 68 (see FIG. 3), are integrally formed with one another.
  • the invention relates to a vacuum system, in particular in the form of a plasma system.
  • the vacuum system has a vacuum chamber.
  • the side walls of the vacuum chamber are formed in the form of a continuous closed chamber extruded profile.
  • a first end face of the chamber extruded profile is preferably closed with a plate.
  • a second end face of the chamber extruded profile which is opposite the first end face, has a reversibly openable and closable door.
  • the door is preferably fixed by at least one hinge pivotally mounted on the chamber extruded profile. The completely closed transversely to the longitudinal axis of the chamber extruded profile
  • the vacuum chamber is at least partially received in a housing which is at least partially also formed in the form of an extruded profile.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Epidemiology (AREA)
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  • Pressure Vessels And Lids Thereof (AREA)
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Abstract

The invention relates to a vacuum system (10), in particular in the form of a plasma system. The vacuum system (10) has a vacuum chamber (12), the side walls of the vacuum chamber (12) being designed in the shape of a continuously closed chamber extruded profile. A first end face of the chamber extruded profile is preferably closed with a plate. A second end face of the chamber extruded profile, which is diametrically opposite the first end face, has a reversibly openable and closeable door (16). The door (16) is fixed preferably by at least one hinge (18, 20) pivotably on the chamber extruded profile. The continuously closed side walls transverse to the longitudinal axis of the chamber extruded profile enable a simple and cost-efficient manufacture of the vacuum chamber (12). The vacuum chamber (12) is preferably accommodated at least partially in a housing (14) which is likewise formed at least partially in the form of an extruded profile.

Description

Vakuumanlage, insbesondere Plasmaanlage, mit einem rundum geschlossenen Kammerstrangpressprofil  Vacuum system, in particular plasma system, with a completely closed chamber extruded profile
Die Erfindung betrifft eine Vakuumanlage mit einer Vakuumkammer, bei der die parallel zur mittigen Vakuumkammerlängsachse verlaufende Aussenseite der Vakuumkammer einteilig aus einem Kammerstrangpressprofil ausgebildet ist. The invention relates to a vacuum system with a vacuum chamber, in which the parallel to the central vacuum chamber longitudinal axis extending outside of the vacuum chamber is integrally formed from a chamber extruded profile.
Eine solche gattungsgemäße Vakuumanlage ist aus der US 6,405,423 Bl bekannt geworden. Die bekannte Vakuumanlage weist eine Such a generic vacuum system has become known from US 6,405,423 Bl. The known vacuum system has a
Vakuumkammer auf. Die Seitenwände der Vakuumkammer bestehen aus einem Kammerstrangpressprofil. Die Stirnseiten des Vacuum chamber on. The side walls of the vacuum chamber consist of a chamber extruded profile. The front sides of the
Kammerstrangpressprofils sind durch an das Kammerstrangpressprofil angeschraubte Platten verschlossen. Das Kammerstrangpressprofil weist an zumindest einer senkrecht zur Stirnseite des Kammerstrangpressprofils ausgebildeten Außenseite, d.h. an einer Seitenwand, eine Öffnung zum Be- und Entladen der Vakuumkammer auf. Die Öffnung muss aufwändig in das Kammerstrangpressprofil gefräst werden. Chamber extruded profiles are closed by bolted to the chamber extruded profile plates. The chamber extruded profile has at least one perpendicular to the end face of the chamber extruded profile trained outside, ie on a side wall, an opening for loading and unloading the vacuum chamber. The opening must be milled consuming in the chamber extruded profile.
Aufgabe der vorliegenden Erfindung ist demgegenüber, eine Object of the present invention is in contrast, a
Vakuumanlage bereitzustellen, deren Vakuumkammer eine hohe Dichtheit aufweist und dennoch auf einfache und kostengünstige Art und Weise fertigbar ist. To provide vacuum system whose vacuum chamber has a high density and yet in a simple and cost-effective manner is manufacturable.
Diese Aufgabe wird erfindungsgemäß durch eine Vakuumanlage gemäß Anspruch 1 gelöst. Die Unteransprüche geben bevorzugte Weiterbildungen an. This object is achieved by a vacuum system according to claim 1. The dependent claims indicate preferred developments.
Die erfindungsgemäße Aufgabe wird somit gelöst durch eine The object of the invention is thus achieved by a
Vakuumanlage mit einer Vakuumkammer, bei der die parallel zur mittigen Vakuumkammerlängsachse verlaufende Aussenseite der Vakuumkammer einteilig aus einem Kammerstrangpressprofil ausgebildet ist, wobei das Kammerstrangpressprofil quer zur mittigen Vakuumkammerlängsachse vollständig geschlossen ausgebildet ist und eine stirnseitige reversibel offen- und schließbare Tür aufweist. Vacuum system with a vacuum chamber, in which the parallel to the central vacuum chamber longitudinal axis extending outside of the vacuum chamber is integrally formed from a chamber extruded profile, the chamber extruded across the central vacuum chamber longitudinal axis is formed completely closed and has a front reversibly open and closeable door.
Erfindungsgemäß wird somit auf das aufwändige Fräsen einer Öffnung in das Ka m m e rst ra n g p ress p rof i I verzichtet. Vielmehr wird das Thus, according to the invention, the time-consuming milling of an opening into the carm rst ra n p ress p rof i I is dispensed with. Rather, that will
Kammerstrangpressprofil quer zur mittigen Vakuumkammerlängsachse rundum geschlossen ausgebildet. Das Beladen und Entladen der Chamber extrusion profile formed transversely to the central vacuum chamber longitudinal axis completely closed. The loading and unloading of the
Vakuumkammer erfolgt über dessen Stirnseite die in Form einer reversibel offen- und schließbaren Tür ausgebildet ist. Im Gegensatz zur Vacuum chamber via the end face which is formed in the form of a reversibly open and closeable door. In contrast to
US 6,405,423 Bl wird das Ka m m e rstra n g p ress p rof i I somit bei der erfindungsgemäßen Vakuumanlage nicht vertikal stehend, sondern horizontal liegend eingesetzt. Die mittige Vakuumkammerlängsachse verläuft daher im Betrieb der Vakuumanlage horizontal. Insgesamt kann die erfindungsgemäße Vakuumanlage hierdurch konstruktiv deutlich einfacher ausgebildet und somit kostengünstiger gefertigt werden. US Pat. No. 6,405,423 Bl, therefore, does not use the cage loader in the vacuum installation according to the invention in a vertical position, but rather horizontally. The central vacuum chamber longitudinal axis therefore runs horizontally during operation of the vacuum system. Overall, the vacuum system according to the invention can be structurally made significantly simpler and thus made cheaper.
Die Vakuumkammer kann an einer ersten Stirnseite eine auflegbare Tür aufweisen. Eine solche auflegbare Tür kann zum Verschluss der The vacuum chamber may have a hinged door on a first end face. Such an attachable door can be used to lock the
Vakuumkammer mittels einer Pumpe angesaugt werden. Alternativ dazu kann die Vakuumkammer an einer ersten Stirnseite eine Schiebetür aufweisen. Sowohl im Falle einer auflegbaren Tür als auch im Falle einer schiebbaren Tür kann die Vakuumkammer scharnierfrei ausgebildet werden. Bevorzugt weist die Vakuumkammer jedoch an einer ersten Stirnseite eine schwenkbar offen- und schließbare Tür auf. Die Vacuum chamber are sucked by a pump. Alternatively, the vacuum chamber may have a sliding door at a first end face. Both in the case of a hinged door and in the case of a sliding door, the vacuum chamber can be formed without hinges. However, the vacuum chamber preferably has a pivotably openable and closable door on a first end side. The
Schwenkachse der Tür verläuft dabei bevorzugt quer zur mittigen Swivel axis of the door is preferably transverse to the central
Vakuum kammerlängsachse, insbesondere senkrecht zu einer Achse parallel zur mittigen Vakuum kammerlängsachse. Die Vakuumanlage kann dadurch konstruktiv besonders einfach und kostengünstig ausgebildet werden. Vacuum chamber longitudinal axis, in particular perpendicular to an axis parallel to the central vacuum chamber longitudinal axis. The vacuum system can be structurally particularly simple and inexpensive.
Zur Ausbildung einer stirnseitig schwenkbaren Tür an dem To form a frontally pivotable door on the
Kammerstrangpressprofil kann das Kammerstrangpressprofil an seiner Aussenseite einen parallel zur mittigen Vakuum kammerlängsachse verlaufenden ersten Scharniervorsprung aufweisen, an dem ein erstes Scharnier zur schwenkbaren Verbindung zwischen Tür und Chamber extruded profile, the chamber extrusion profile on its outer side a longitudinal axis parallel to the central vacuum chamber extending first hinge projection, on which a first hinge for pivotal connection between the door and
Kammerstrangpressprofil angeordnet ist. Durch den ersten Chamber extruded profile is arranged. By the first
Scharniervorsprung wird die Montage eines ersten Scharniers deutlich erleichtert. Hinge projection, the installation of a first hinge is significantly facilitated.
Das Kammerstrangpressprofil kann an seiner Aussenseite einen parallel zur mittigen Vakuumkammerlängsachse verlaufenden zweiten The chamber extruded profile can on its outer side a parallel to the central vacuum chamber longitudinal axis extending second
Scharniervorsprung aufweisen, an dem ein zweites Scharnier zur schwenkbaren Verbindung zwischen Tür und Kammerstrangpressprofil angeordnet ist. Das zweite Scharnier festigt die schwenkbare Verbindung zwischen Tür und Kammerstrangpressprofil, so dass die Dichtheit zwischen Tür und Kammerstrangpressprofil signifikant erhöht wird. Have hinge projection on which a second hinge for pivotable connection between the door and chamber extruded profile is arranged. The second hinge strengthens the pivotal connection between the door and the chamber extruded profile, so that the tightness between the door and the chamber extruded profile is significantly increased.
Zum Schließen der Tür am Kammerstrangpressprofil kann die To close the door on the chamber extruded profile, the
Vakuumanlage einen ersten Verschluss aufweisen, der an einem ersten Verschlusshaltervorsprung angeordnet ist, wobei der Verschlusshaltervorsprung parallel zur mittigen Vakuumkammerlängsachse an der Aussense ite des Kammerstrangpressprofils ausgebildet ist. Vacuum system having a first closure, which is arranged on a first closure holder projection, wherein the closure holder projection is formed parallel to the central vacuum chamber longitudinal axis on the Außense ite of the chamber extruded profile.
In bevorzugter Ausgestaltung der Erfindung weist das Kammerstrangpressprofil an seiner Aussenseite einen parallel zur mittigen Vakuumkammerlängsachse verlaufenden zweiten Verschlusshaltervorsprung auf, an dem ein zweiter Verschluss zum Schließen der Tür am In a preferred embodiment of the invention, the chamber extruded profile on its outside a parallel to the central vacuum chamber longitudinal axis extending second closure holder projection on which a second closure for closing the door on
Kammerstrangpressprofil angeordnet ist. Durch den zweiten Verschluss wird die Dichtheit zwischen Tür und Kammerstrangpressprofil weiter erhöht. Chamber extruded profile is arranged. The second closure further increases the tightness between the door and the chamber extruded profile.
Das Kammerstrangpressprofil kann weiterhin an seiner Aussenseite eine parallel zur mittigen Vakuumkammerlängsachse verlaufende Kühlrippe aufweisen. Bevorzugt weist das Kammerstrangpressprofil an seiner Aussenseite eine Vielzahl von parallel zur mittigen The chamber extruded profile may further have on its outer side a parallel to the central vacuum chamber longitudinal axis extending cooling rib. Preferably, the chamber extruded profile on its outer side a plurality of parallel to the central
Vakuumkammerlängsachse verlaufenden Kühlrippen auf. Durch die Kühlrippe(n) kann in vielen Anwendungen auf eine Wasserkühlung verzichtet werden. Vacuum chamber longitudinal axis extending cooling fins on. Due to the cooling fin (s), water cooling can be dispensed with in many applications.
Die Vakuumanlage weist bevorzugt ein Gehäuse auf. Zur Befestigung der Vakuumkammer an diesem Gehäuse kann das Kammerstrangpressprofil an seiner Aussenseite einen parallel zur mittigen Vakuumkammerlängsachse verlaufenden ersten Befestigungsvorsprung aufweisen. Der erste Befestigungsvorsprung erleichtert die Montage der Vakuumkammer am Gehäuse, so dass Montagekosten gesenkt werden. The vacuum system preferably has a housing. To attach the vacuum chamber to this housing, the chamber extruded profile on its outside a parallel to the central Having vacuum chamber longitudinal axis extending first fastening projection. The first attachment projection facilitates the assembly of the vacuum chamber to the housing, so that assembly costs are reduced.
Bevorzugt weist das Kammerstrangpressprofii an seiner Aussenseite einen parallel zur mittigen Vakuumkammerlängsachse verlaufenden zweiten Befestigungsvorsprung zur Befestigung der Vakuumkammer an dem Gehäuse der Vakuumanlage auf. Durch den zweiten Preferably, the Kammerstrangpressprofii on its outer side a parallel to the central vacuum chamber longitudinal axis extending second mounting projection for attaching the vacuum chamber to the housing of the vacuum system. By the second
Befestigungsvorsprung wird die Vakuumkammer konstruktiv besonders einfach und gleichzeitig sicher am Gehäuse der Vakuumanlage befestigt. Mounting projection, the vacuum chamber is structurally particularly simple and at the same time securely attached to the housing of the vacuum system.
In weiterer bevorzugter Ausgestaltung der Erfindung weist das In a further preferred embodiment of the invention, the
Kammerstrangpressprofii an seiner Innenseite zwei sich Kammerstrangpressprofii on its inside two itself
gegenüberliegende parallel zur mittigen Vakuumkammerlängsachse verlaufende Einschubausnehmungen zum Einschub einer Platte auf. opposing parallel to the central vacuum chamber longitudinal axis extending Einschubausnehmungen for insertion of a plate.
Hierdurch wird die Herstellung einer Probenhalterung im Inneren einer Vakuumkammer deutlich vereinfacht. As a result, the production of a sample holder inside a vacuum chamber is significantly simplified.
Vorzugsweise weist das Kammerstrangpressprofii an seiner Innenseite mehrere sich gegenüberliegende parallel zur mittigen Preferably, the Kammerstrangpressprofii has on its inner side a plurality of opposite parallel to the central
Vakuumkammerlängsachse verlaufende Einschubausnehmungen zum Einschub von Platten auf. Bereits bei der Herstellung des Vacuum chamber longitudinal axis extending Einschubausnehmungen for insertion of plates. Already in the production of the
Kammerstrangpressprofils werden hierdurch mehrere Plattenhalterungen gefertigt, wodurch die Herstellung der Vakuumanlage deutlich vereinfacht wird. Chamber extrusions this way several plate mounts are made, whereby the production of the vacuum system is significantly simplified.
Eine der ersten Stirnseite gegenüberliegende zweite Stirnseite des One of the first end opposite the second end of the
Strangpressprofils kann einen Flansch zur Einführung und oder Extruded profiles can be a flange for insertion and or
Ausführung eines Mediums in bzw. aus der Kammer aufweisen. Eine besonders einfache und kostengünstige Herstellung derExecution of a medium in or out of the chamber. A particularly simple and inexpensive production of
Vakuumkammer erfolgt, wenn das Kammerstrangpressprofil aus Vacuum chamber takes place when the chamber extruded profile
Aluminium oder einer Aluminiumlegierung ausgebildet ist. Aluminum or an aluminum alloy is formed.
Die Herstellung der Vakuumanlage wird weiterhin signifikant vereinfacht, wenn die Vakuumanlage ein Gehäuse aufweist, in dem die The production of the vacuum system is further significantly simplified if the vacuum system has a housing in which the
Vakuumkammer aufgenommen ist, wobei ein parallel zur mittigen Vacuum chamber is added, with a parallel to the center
Vakuumkammerlängsachse verlaufender Teil des Gehäuses in Form eines Gehäusestrangpressprofils ausgebildet ist. Mit anderen Worten wird die Herstellung der Vakuumanlage dadurch vereinfacht, dass nicht nur ein maßgeblicher Teil der Vakuumkammer, nämlich das Vacuum chamber longitudinal axis extending part of the housing is designed in the form of a housing extrusion profile. In other words, the production of the vacuum system is simplified in that not only a significant part of the vacuum chamber, namely the
Kammerstrangpressprofil, sondern auch ein Teil des Gehäuses, nämlich das Gehäusestrangpressprofil, durch ein Strangpressverfahren herstellbar ist. Chamber extruded, but also a part of the housing, namely the housing extruded profile can be produced by an extrusion process.
In weiterer bevorzugter Ausgestaltung der Erfindung ist das In a further preferred embodiment of the invention that is
Kammerstrangpressprofil einteilig mit dem Gehäuse des Strangpressprofil ausgebildet. Chamber extruded profile formed integrally with the housing of the extruded profile.
Die Vakuumanlage kann in Form eines Vakuumtrockners ausgebildet seit. The vacuum system can be designed in the form of a vacuum dryer.
Die Vakuumanlage kann hierzu eine Pumpe zur zumindest teilweisen Evakuierung der Vakuumkammer aufweisen. Weiterhin kann die The vacuum system can for this purpose have a pump for at least partial evacuation of the vacuum chamber. Furthermore, the
Vakuumanlage eine Heizung aufweisen . Vacuum system have a heater.
Das Strang pressprofil kann zumindest an seiner Innenseite vernickelt sein, um Korrosion zu vermeiden. Bevorzugt ist die gesamte The extruded profile can be nickel-plated at least on its inside to avoid corrosion. Preferably, the entire
Vakuumkammer an ihrer Innenseite vernickelt. In weiterer bevorzugter Ausgestaltung der Erfindung ist die Vakuumanlage in Form einer Plasmaanlage ausgebildet. Im Inneren der Vakuumkammer kann in diesem Fall zumindest eine Plasmaelektrode angeordnet sein. Die Vakuumanlage in Form einer Plasmaanlage kann weiterhin eine Pumpe, ein Belüftungsventil, einen Gasflussmesser, eine Druckanzeige und/oder eine Hochspannungsversorgung aufweisen. Vacuum chamber nickel plated on its inside. In a further preferred embodiment of the invention, the vacuum system is designed in the form of a plasma system. In the interior of the vacuum chamber, at least one plasma electrode can be arranged in this case. The vacuum system in the form of a plasma system may further comprise a pump, a vent valve, a gas flow meter, a pressure gauge and / or a high voltage power supply.
Zusammenfassend sind folgende Varianten zum Einsatz eines In summary, the following variants are for use of a
Strangpressprofils im Rahmen der erfindungsgemäßen Vakuumanlage denkbar: a) Die Vakuumkammer weist ein Kammerstrangpressprofil auf; Extruded profiles in the context of the vacuum system according to the invention conceivable: a) the vacuum chamber has a chamber extruded profile;
b) Die Vakuumanlage weist ein Gehäusestrangpressprofil auf.  b) The vacuum system has a housing extruded profile.
Das Kammerstrangpressprofil kann mit dem Gehäusestrangpressprofil verbunden sein. Beispielsweise kann das Kammerstrangpressprofil mit dem Gehäusestrang pressprofil verschweißt und/oder verschraubt sein. Alternativ dazu können das Kammerstrangpressprofil und das The chamber extruded profile can be connected to the housing extruded profile. For example, the chamber extruded profile can be welded and / or screwed to the housing extruded profile. Alternatively, the chamber extruded profile and the
Gehäusestrangpressprofil einteilig, d.h . einstückig, ausgebildet sein. Housing extrusion profile in one piece, i. in one piece, be formed.
Weitere Merkmale und Vorteile der Erfindung ergeben sich aus der nachfolgenden detaillierten Beschreibung mehrerer Ausführungsbeispiele der Erfindung, anhand der Figuren der Zeichnung, die Further features and advantages of the invention will become apparent from the following detailed description of several embodiments of the invention, with reference to the figures of the drawing, the
erfindungswesentliche Einzelheiten zeigt sowie aus den Ansprüchen. Essential to the invention shows details and from the claims.
Die in der Zeichnung gezeigten Merkmale sind derart dargestellt, dass die erfindungsgemäßen Besonderheiten deutlich sichtbar gemacht werden können . Die verschiedenen Merkmale können je einzeln für sich oder zu mehreren in beliebigen Kombinationen bei Varianten der Erfindung verwirklicht sein. Es zeigen : eine perspektivische Ansicht einer Vakuumanlage in Form einer Plasmaanlage; eine Draufsicht auf ein erstes Kammerstrangpressprofil; eine Draufsicht auf das erste Kammerstrangpressprofil gemäß Figur 2, wobei das erste Kammerstrangpressprofil an einem ersten Gehäusestrangpressprofil befestigt ist; und eine Draufsicht auf ein zweites Kammerstrangpressprofil das einteilig mit einem zweiten Gehäusestrangpressprofil ausgebildet ist. The features shown in the drawing are shown such that the features of the invention can be made clearly visible. The various features may be implemented individually for themselves or for a plurality of combinations in variants of the invention. It shows: a perspective view of a vacuum system in the form of a plasma system; a plan view of a first chamber extruded profile; a top view of the first chamber extruded profile according to Figure 2, wherein the first chamber extruded profile is attached to a first housing extruded profile; and a plan view of a second chamber extruded profile which is integrally formed with a second housing extruded profile.
Figur 1 zeigt eine Vakuumanlage 10 mit einer Vakuumkammer 12. Die Vakuumkammer 12 ist weitestgehend von einem Gehäuse 14 umgeben. Die Vakuumkammer 12 weist eine Tür 16 auf die durch Scharniere 18, 20 schwenkbar offen- und schließbar ist. Die Scharniere 18, 20 sind einen Ends an der Tür 16 und anderen Ends an einem FIG. 1 shows a vacuum system 10 with a vacuum chamber 12. The vacuum chamber 12 is largely surrounded by a housing 14. The vacuum chamber 12 has a door 16 which is pivotally openable and closable by means of hinges 18, 20. The hinges 18, 20 are one end on the door 16 and other ends on one
Kammerstrangpressprofil 22 (siehe Figur 2) befestigt. Zum Schließen der Tür 16 an dem Kammerstrangpressprofil 22 sind Verschlüsse 24, 26 vorgesehen. Die Verschlüsse 24, 26 sind einen Ends am  Chamber extruded profile 22 (see Figure 2) attached. To close the door 16 on the chamber extruded profile 22 closures 24, 26 are provided. The closures 24, 26 are a Ends am
Kammerstrangpressprofil 22 (siehe Figur 2) befestigt und greifen anderen Ends bei verschlossener Tür 16 in entsprechende Halterungen der Tür 16 ein. Die Vakuumkammer 12 ist horizontal angeordnet, d.h. eine mittige Chamber extruded 22 (see Figure 2) attached and engage other ends with closed door 16 in corresponding brackets of the door 16 a. The vacuum chamber 12 is arranged horizontally, ie a central one
Vakuumkammerlängsachse 28 verläuft im Betriebszustand der Vacuum chamber longitudinal axis 28 extends in the operating state of
Vakuumanlage 10 in horizontaler Richtung. Vacuum system 10 in the horizontal direction.
Die Vakuumanlage 10 weist eine Druckanzeige 30, einen Timer 32, The vacuum system 10 has a pressure indicator 30, a timer 32,
Gasflusssteuereinrichtungen 34, 36 sowie eine Gas flow control devices 34, 36 and a
Hochspannungssteuerung 38 auf. Die Druckanzeige 30 dient der Anzeige des Innendrucks der Vakuumkammer 12. Der Timer 32 dient der  High voltage control 38 on. The pressure display 30 is used to display the internal pressure of the vacuum chamber 12. The timer 32 is the
Einstellung einer Prozesszeit. Durch die Gasflussmesseinrichtungen 34, 36 kann der Gasfluss in die Vakuumkammer 12 eingestellt und kontrolliert werden. Die Hochspannungssteuerung 38 dient der Spannungsversorgung einer Plasmaelektrode (nicht gezeigt) in der Vakuumkammer 12. Setting a process time. By the gas flow measuring devices 34, 36, the gas flow can be adjusted and controlled in the vacuum chamber 12. The high-voltage control 38 serves to supply power to a plasma electrode (not shown) in the vacuum chamber 12.
Figur 2 zeigt das Kammerstrangpressprofil 22. Das FIG. 2 shows the chamber extruded profile 22
Kammerstrangpressprofil 22 ist gleichförmig in Richtung der mittigen Vakuumkammerlängsachse 28 ausgebildet, die in Figur 2 lediglich punktförmig gezeigt ist. Weiterhin ist das Kammerstrangpressprofil 22 symmetrisch zu einer mittigen Vakuumkammerlängsebene 40 ausgebildet. Das Kammerstrangpressprofil 22 ist aus Aluminium ausgebildet. Chamber extruded profile 22 is uniformly formed in the direction of the central vacuum chamber longitudinal axis 28, which is shown only point-shaped in Figure 2. Furthermore, the chamber extruded profile 22 is formed symmetrically to a central vacuum chamber longitudinal plane 40. The chamber extruded profile 22 is formed of aluminum.
Das Kammerstrangpressprofil 22 weist an seiner Aussenseite einen ersten Scharniervorsprung 42 und einen zweiten Scharniervorsprung 44 auf. Die Scharniere 18, 20 (siehe Figur 1) sind an den Scharniervorsprüngen 42, 44 montiert. Das Kammerstrangpressprofil 22 weist weiterhin einen ersten Verschlusshaltervorsprung 46 auf, an dem der erste Verschluss 24 (siehe Figur 1) montiert ist. Der zweite Verschluss 26 (siehe Figur 1) ist an einem zweiten Verschlusshaltervorsprung 48 befestigt. Die Vorsprünge 42, 44, 46, 48 ermöglichen eine konstruktiv einfache und gleichzeitig sehr dichte Anordnung der Tür 16 (siehe Figur 1) an dem The chamber extruded profile 22 has on its outer side a first hinge projection 42 and a second hinge projection 44. The hinges 18, 20 (see FIG. 1) are mounted on the hinge projections 42, 44. The chamber extrusion profile 22 also has a first closure holder projection 46 on which the first closure 24 (see FIG. 1) is mounted. The second closure 26 (see FIG. 1) is fastened to a second closure holder projection 48. The projections 42, 44, 46, 48 allow a structurally simple and at the same time very dense arrangement of the door 16 (see Figure 1) on the
Kammerstrangpressprofil 22 in schwenkbarer Anordnung. Zur Kühlung des Kammerstrangpressprofils 22 kann dieses an seiner Aussenseite eine oder mehrere Kühlrippen 50, 52, 54 (in Figur 2 Chamber extruded profile 22 in a pivotable arrangement. For cooling the chamber extruded profile 22, this may have on its outer side one or more cooling ribs 50, 52, 54 (in FIG. 2)
gestrichelt dargestellt) aufweisen. shown in dashed lines).
Das Kammerstrang pressprofil 22 weist an seiner Innenseite mehrere Einschubausnehmungen auf, in die jeweils eine Platte (nicht gezeigt) eingeführt werden kann. Aus Gründen der Übersichtlichkeit sind in Figur 2 lediglich eine erste Einschubausnehmung 56 und eine zweite The chamber extrusion press profile 22 has on its inside a plurality of insertion recesses, in each of which a plate (not shown) can be inserted. For reasons of clarity, only a first insertion recess 56 and a second one are shown in FIG
Einschubausnehmung 58 mit einem Bezugszeichen versehen. Die Insertion recess 58 provided with a reference numeral. The
Einschubausnehmungen 56, 58 sind einander gegenüberliegend Insert recesses 56, 58 are opposite each other
symmetrisch zur Vakuumkammerlängsebene 40 ausgebildet. formed symmetrically to the vacuum chamber longitudinal plane 40.
Zur Befestigung des Kammerstrangpressprofils 22 an dem Gehäuse 14 (siehe Figur 1) weist das Kammerstrangpressprofil 22 For fastening the chamber extruded profile 22 to the housing 14 (see FIG. 1), the chamber extruded profile 22 is provided
Befestigungsvorsprünge 60, 62 auf. Attachment projections 60, 62 on.
Figur 3 zeigt das Kammerstrangpressprofil 22 das über FIG. 3 shows the chamber extruded profile 22 via
Befestigungsmittel 64, 66 an einem Gehäusestrangpressprofil 68 montiert ist. Das Gehäuse-strangpressprofil 68 stellt einen Teil des Gehäuses 14 (siehe Figur 1) dar. Im vorliegenden Fall sind die Befestigungsmittel 64, 66 in Form von Schrauben ausgebildet. Fastener 64, 66 is mounted on a housing extrusion profile 68. The housing extruded profile 68 constitutes a part of the housing 14 (see FIG. 1). In the present case, the fastening means 64, 66 are designed in the form of screws.
Figur 4 zeigt ein zweites Kammerstrangpressprofil 70 sowie ein zweites Gehäusestrangpressprofil 72, wobei die Strangpressprofile 70, 72 im Gegensatz zu den Strangpressprofilen 22, 68 (siehe Figur 3) einteilig miteinander ausgebildet sind. Hierdurch kann eine besonders effiziente Fertigung einer Vakuumanlage erreicht werden. Zusammenfassend betrifft die Erfindung eine Vakuumanlage, insbesondere in Form einer Plasmaanlage. Die Vakuumanlage weist eine Vakuumkammer auf. Die Seitenwände der Vakuumkammer sind in Form eines durchgängig geschlossenen Kammerstrangpressprofils ausgebildet. Eine erste Stirnseite des Kammerstrangpressprofils ist bevorzugt mit einer Platte verschlossen . Eine zweite Stirnseite des Kammerstrangpressprofils, die der ersten Stirnseite gegenüberliegt, weist eine reversibel offen- und schließbare Tür auf. Die Tür ist bevorzugt durch zumindest ein Scharnier schwenkbar an dem Kammerstrangpressprofil befestigt. Die quer zur Längsachse des Kammerstrangpressprofils vollständig geschlossenenFIG. 4 shows a second chamber extruded profile 70 and a second housing extruded profile 72, wherein the extruded profiles 70, 72, in contrast to the extruded profiles 22, 68 (see FIG. 3), are integrally formed with one another. As a result, a particularly efficient production of a vacuum system can be achieved. In summary, the invention relates to a vacuum system, in particular in the form of a plasma system. The vacuum system has a vacuum chamber. The side walls of the vacuum chamber are formed in the form of a continuous closed chamber extruded profile. A first end face of the chamber extruded profile is preferably closed with a plate. A second end face of the chamber extruded profile, which is opposite the first end face, has a reversibly openable and closable door. The door is preferably fixed by at least one hinge pivotally mounted on the chamber extruded profile. The completely closed transversely to the longitudinal axis of the chamber extruded profile
Seitenwände ermöglichen eine einfache und kostengünstige Fertigung der Vakuumkammer. Bevorzugt ist die Vakuumkammer zumindest teilweise in einem Gehäuse aufgenommen, das zumindest teilweise ebenfalls in Form eines Strangpressprofils ausgebildet ist. Side walls allow a simple and cost-effective production of the vacuum chamber. Preferably, the vacuum chamber is at least partially received in a housing which is at least partially also formed in the form of an extruded profile.

Claims

Patentansprüche claims
1. Vakuumanlage ( 10) mit einer Vakuumkammer ( 12), bei der die parallel zur mittigen Vakuumkammerlängsachse (28) verlaufende Außenseite der Vakuumkammer (12) einteilig aus einem 1. Vacuum system (10) having a vacuum chamber (12), in which the parallel to the central vacuum chamber longitudinal axis (28) extending outside of the vacuum chamber (12) in one piece from a
Kammerstrangpressprofil (22, 70) ausgebildet ist, dadurch gekennzeichnet, dass das Kammerstrangpressprofil (22, 70) quer zur mittigen Vakuumkammerlängsachse (28) vollständig  Chamber extruded profile (22, 70) is formed, characterized in that the chamber extruded profile (22, 70) transversely to the central vacuum chamber longitudinal axis (28) completely
geschlossenen ausgebildet ist und eine stirnseitige reversibel öffen- und schließbare Tür aufweist.  is closed and has a front side reversibly openable and closable door.
2. Vakuumanlage nach Anspruch 1, bei der die Vakuumkammer ( 12) an einer Stirnseite eine auflegbare Tür, eine schiebbar offen- und schließbare Tür oder eine schwenkbar offen- und schließbare2. Vacuum system according to claim 1, wherein the vacuum chamber (12) on an end face a hinged door, a sliding open and closeable door or a pivotally open and closable
Tür ( 16) aufweist. Door (16).
3. Vakuumanlage nach Anspruch 2, bei der das 3. Vacuum system according to claim 2, wherein the
Kammerstrangpressprofil (22, 70) an seiner Außenseite einen parallel zur mittigen Vakuumkammerlängsachse (28) verlaufenden Scharniervorsprung (42, 44) aufweist, an dem ein Scharnier ( 18, 20) zur schwenkbaren Verbindung zwischen Tür ( 16) und  Chamber extrusion profile (22, 70) on its outside a parallel to the central vacuum chamber longitudinal axis (28) extending hinge projection (42, 44), on which a hinge (18, 20) for pivotal connection between the door (16) and
Kammerstrangpressprofil (22, 70) angeordnet ist.  Chamber extruded profile (22, 70) is arranged.
4. Vakuumanlage nach einem der vorhergehenden Ansprüche, bei der das Kammerstrangpressprofil (22, 70) an seiner Außenseite einen parallel zur mittigen Vakuumkammerlängsachse (28) verlaufenden Verschlusshaltervorsprung (46, 48) aufweist, an dem ein 4. Vacuum system according to one of the preceding claims, wherein the chamber extruded profile (22, 70) on its outer side a parallel to the central vacuum chamber longitudinal axis (28) extending closure holder projection (46, 48), on which a
Verschluss (24, 26) zum Schließen der Tür ( 16) am  Closure (24, 26) for closing the door (16) on
Kammerstrangpressprofil (22, 70) angeordnet ist. Chamber extruded profile (22, 70) is arranged.
5. Vakuumanlage nach einem der vorhergehenden Ansprüche, bei der das Kammerstrangpressprofil (22, 70) an seiner Außenseite eine parallel zur mittigen Vakuumkammerlängsachse (28) verlaufende Kühlrippe (50, 52, 54) aufweist. 5. Vacuum system according to one of the preceding claims, wherein the chamber extruded profile (22, 70) on its outside a parallel to the central vacuum chamber longitudinal axis (28) extending cooling rib (50, 52, 54).
6. Vakuumanlage nach einem der vorhergehenden Ansprüche, bei der das Kammerstrangpressprofil (22, 70) an seiner Außenseite einen parallel zur mittigen Vakuumkammerlängsachse (28) verlaufenden Befestigungsvorsprung (60, 62) zur Befestigung der 6. Vacuum system according to one of the preceding claims, wherein the chamber extruded profile (22, 70) on its outer side a parallel to the central vacuum chamber longitudinal axis (28) extending fastening projection (60, 62) for fastening the
Vakuumkammer ( 12) an einem Gehäuse ( 14) der  Vacuum chamber (12) on a housing (14) of
Vakuumanlage ( 10) aufweist.  Vacuum system (10).
7. Vakuumanlage nach einem der vorhergehenden Ansprüche, bei der das Kammerstrangpressprofil (22, 70) an seiner Innenseite zwei sich gegenüberliegende, parallel zur mittigen 7. Vacuum system according to one of the preceding claims, wherein the chamber extruded profile (22, 70) on its inside two opposite, parallel to the central
Vakuumkammerlängsachse ((28) verlaufende  Vacuum chamber longitudinal axis ((28) extending
Einschubausnehmungen (56, 58) zum Einschub einer Platte aufweist.  Einschubausnehmungen (56, 58) for insertion of a plate.
8. Vakuumanlage nach einem der vorhergehenden Ansprüche, bei der die Vakuumanlage ( 10) ein Gehäuse ( 14) aufweist, in dem die Vakuumkammer ( 12) aufgenommen ist, wobei ein parallel zur mittigen Vakuumkammerlängsachse (28) verlaufender Teil des Gehäuses (14) in Form eines Gehäusestrangpressprofils (68, 72) ausgebildet ist. 8. Vacuum system according to one of the preceding claims, wherein the vacuum system (10) has a housing (14) in which the vacuum chamber (12) is received, wherein a parallel to the central vacuum chamber longitudinal axis (28) extending part of the housing (14) in Form of a housing extrusion profile (68, 72) is formed.
9. Vakuumanlage nach einem der Ansprüche 1 bis 8, bei der die 9. Vacuum system according to one of claims 1 to 8, wherein the
Vakuumanlage in Form eines Vakuumtrockners ausgebildet ist. Vacuum system is designed in the form of a vacuum dryer.
10. Vakuumanlage nach einem der Ansprüche 1 bis 8, bei der die Vakuumanlage ( 10) in Form einer Plasmaanlage ausgebildet ist. 10. Vacuum system according to one of claims 1 to 8, wherein the vacuum system (10) is designed in the form of a plasma system.
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CN106537551B (en) 2018-05-08
US10041730B2 (en) 2018-08-07
ES2670703T3 (en) 2018-05-31
DE102014213942A1 (en) 2016-01-21

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