EP3166909A1 - Laminated ceramic molded article having recesses - Google Patents

Laminated ceramic molded article having recesses

Info

Publication number
EP3166909A1
EP3166909A1 EP15744498.5A EP15744498A EP3166909A1 EP 3166909 A1 EP3166909 A1 EP 3166909A1 EP 15744498 A EP15744498 A EP 15744498A EP 3166909 A1 EP3166909 A1 EP 3166909A1
Authority
EP
European Patent Office
Prior art keywords
ceramic
molded body
recesses
plates
sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15744498.5A
Other languages
German (de)
French (fr)
Inventor
Thomas Betz
Harald KREß
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BETZ, THOMAS
Original Assignee
Ceramtec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ceramtec GmbH filed Critical Ceramtec GmbH
Publication of EP3166909A1 publication Critical patent/EP3166909A1/en
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/616—Liquid infiltration of green bodies or pre-forms
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04—Ceramic interlayers
    • C04B2237/06—Oxidic interlayers
    • C04B2237/062—Oxidic interlayers based on silica or silicates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04—Ceramic interlayers
    • C04B2237/06—Oxidic interlayers
    • C04B2237/064—Oxidic interlayers based on alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04—Ceramic interlayers
    • C04B2237/06—Oxidic interlayers
    • C04B2237/066—Oxidic interlayers based on rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04—Ceramic interlayers
    • C04B2237/08—Non-oxidic interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04—Ceramic interlayers
    • C04B2237/08—Non-oxidic interlayers
    • C04B2237/083—Carbide interlayers, e.g. silicon carbide interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04—Ceramic interlayers
    • C04B2237/09—Ceramic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/341—Silica or silicates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C04B2237/348—Zirconia, hafnia, zirconates or hafnates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/365—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/368—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/58—Forming a gradient in composition or in properties across the laminate or the joined articles
    • C04B2237/582—Forming a gradient in composition or in properties across the laminate or the joined articles by joining layers or articles of the same composition but having different additives
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings

Definitions

  • the invention relates to ceramic molded bodies with recesses, processes for their preparation and their use.
  • Dry-pressed, extruded or foil-cast ceramic moldings can be milled or punched particularly easily in the still unsintered state.
  • a plurality of shaped bodies for example by an applied ceramic paste, moldings with more complicated geometries such as undercut openings can be produced.
  • a ceramic shaped body has been developed with recesses, which is characterized in that the shaped body contains at least two plates (joining parts) of ceramic material, namely a lower bottom plate, an upper cover plate and optionally one or more intermediate plate (s), the Stapeiförmig lie on each other and are connected to each other flat to the molding and wherein between the plates (parts to be joined) a joining material (paste) is located.
  • a method for producing the shaped body is proposed, which is characterized a. that flat ceramic greenware plates are possibly made with recesses from a ceramic base material, which is mixed with green body sintering aids, and then these are sintered to create flat ceramic plates,
  • the ceramic plates may be lasered or hard machined to bring in the required recesses and
  • a paste of the agitated ceramic base material is applied to the sintered ceramic plates in a staggered manner with sintering aids, the ceramic boards thus coated, also referred to as joining parts, being stacked into a stack and this stack being sintered.
  • Aluminum nitride AIN and as sintering aid Y 2 O 3 or CaO is preferably used as the ceramic base material.
  • the parts to be joined have a thickness of less than 2 mm, preferably ⁇ 1 mm.
  • metallizations are applied to the parts to be joined before or after the sintering of the stack. These are preferably printed on and then sintered or cured. To create cooling or heating chambers and channels, these are lasered into the ceramic plates as recesses in such a way that cooling or heating structures, such as channels or meanders, are formed in the joined shaped body. If, after lasering, wall structures remain in the ceramic plates, the cooling or heating medium can be directed to those locations where special cooling or heating or tempering is required.
  • connecting elements or closing elements are connected to the shaped body, which are sintered in one embodiment and which are connected to the recesses.
  • the connecting elements are advantageously connecting tubes with a hose nozzle or tube pieces, which have a projecting flange, which is connected in the region of the recesses with the molding or which is sintered between two ceramic plates.
  • a shaped body according to the invention is characterized in that the shaped body consists of at least two ceramic plates, a lower base plate, optionally one or more intermediate plate (s) and an upper cover plate, wherein bores in the base plate or cover plate, in the base plate or the intermediate plate (s) Channels and / or recesses are arranged, wherein the bores are connected to the channels and / or recesses.
  • the shaped body is a micropump, which is characterized in that it consists of three ceramic plates, a lower one Base plate with an axis on which a metallic or metallized impeller is arranged, an intermediate plate which contains the delivery space and the supply lines and an upper cover plate which covers the delivery space and the supply lines.
  • sintered flat ceramic plates are first lasered in accordance with the invention in order to introduce the required recesses. Then a paste of agitated ceramic is applied by screen printing, roller (or other coating method). The coated parts are then assembled into a stack and sintered again.
  • the ceramic is made of AIN, which is usually added with a sintering aid such as Y 2 O 3 in a concentration of 2-5%
  • a joining material having a slightly increased or decreased concentration of Y 2 O 3 to the base material, enhanced diffusion of the Y 2 O 3 or the YAIO phases formed can be achieved from the joining material into the moldings, which leads to an almost complete freedom from defects in the joining zone and to hermetically sealed components.
  • the moldings can also be metallized inside as well as on the surface.
  • An internal metallization can be carried out particularly suitable with refractory metals such as platinum, molybdenum or tungsten.
  • An external metallization can be done with the known methods / materials (W, Mo, Ag, Cu etc.). It can be introduced into the individual levels of the shaped body openings with different diameters, for example via lasers (exact geometry), wherein the openings through the shaped body consistently the same size, or staggered, or can be arbitrarily alternating.
  • Channels or meanders which can be used for tempering can also be incorporated into the joined shaped bodies.
  • the shaped bodies can also have recesses for reasons of weight saving, with ultimately only a fine, stable ceramic framework being created.
  • shaped bodies joined from n planes can also be hermetically sealed laterally like tiles with other shaped bodies. Use is made of such layered shaped bodies, e.g. in vacuumchucks, hotplates, coolers.
  • a paste of AIN and Y 2 O 3 is prepared by suspending the solids in a suitable oil (screen printing oil or paste organics). The is printed by screen printing on the plates to be joined and then coated plates then placed / glued. This arrangement of three bonded AIN plates is sintered at suitable temperatures in N 2 .
  • Moldings for cooling power components, light sources or temperature-sensitive components can also be produced with the moldings according to the invention.
  • the shaped bodies according to the invention thus comprise a plurality of plates, each of which consists of a ceramic material and are stacked on top of each other and flatly connected to the shaped body.
  • the shaped body preferably has metallizations on its surface, onto which power components can be soldered.
  • a cooling or heating structure i. Flow paths for a cooling or heating medium, which are acted upon by a cooling or heating medium, preferably a cooling or heating fluid, so that the cooling or heating structure can be used for tempering.
  • the cooling or heating medium is pumped through the cooling or heating structure, sucked or can flow through gravity.
  • cooling or heating medium can be conducted into the molded body, there are at least two openings in the bottom plate or in the cover plate which can be connected to connection flanges.
  • the cooling or heating channels are in the axial direction parallel to the surface sides of the bottom or top plate.
  • At least one elevation which is at the same height as the edge region of the bottom plate, is located in the bottom plate of the shaped body according to the invention.
  • These surveys thus have the full height of the bottom plate and serve firstly to guide the cooling or heating medium and secondly as a support surface for the cover plate or the ceramic plate located above it.
  • the ceramic material of the ceramic plates may be selected from one or more of the following groups: aluminum oxide, aluminum nitride, silicon nitride, silicon carbide or a mixed ceramic of aluminum oxide and zirconium oxide (ATZ or ZTA) or silicon oxide (aluminosilicate).
  • the ceramic shaped bodies according to the invention can be used as heatable vacuum chucks for the production of Si wafers.
  • the ceramic shaped bodies according to the invention are suitable for use as a setetter plate, for example for metal injection molding.
  • the ceramic shaped bodies according to the invention can also be used as a (heatable / coolable) module for the temperature control of energy stores such as batteries or rechargeable batteries.
  • FIG. 1 shows a detail of a ceramic shaped body 1 according to the invention, which consists of several ceramic plates 3.
  • intermediate plates made of a ceramic material.
  • a ceramic cover plate 8 is placed and sintered.
  • holes 10 are introduced, through which a cooling medium can be introduced into the molding.
  • recesses 2 are lasered, which form bores, channels and recesses 12 in the molding.
  • connection elements 4 are connected to the molded body 1.
  • These connection elements have in the embodiment shown a projecting flange 6 and a through hole 17, which communicates with the recesses 2 or recesses 12. (Not shown: the connecting elements may be in the form of hose nozzles or pipe pieces).
  • the projecting flange 6 is either adhered to the molded body 1, but can also be sintered between two ceramic plates 3.
  • FIG. 2 shows the same embodiment as in FIG. 1, but only with one connection element 4.
  • FIG. 3 shows the same embodiment as in FIGS. 1 and 2, but additionally with a closure element 5 and a bottom plate 9.
  • FIGS. 4 and 5 show a shaped body 1 according to the invention, which in this embodiment represents the exemplary embodiment of a micropump.
  • the micropump consists of three ceramic plates 3, a lower base plate 9 with an axis 13 on which a metallic or metallized impeller 14 (only schematically drawn) is arranged, an intermediate plate 7, which contains a conveying space 15 as a recess 12 and with leads 16 and Channels 1 1 for the medium to be conveyed.
  • An upper cover plate 8 covers the delivery chamber 15 and the supply lines 16.
  • Reference numeral 18 schematically shows a paste before sintering. In Figure 5, the impeller 14 is not shown.
  • FIGS. 6 and 7 a shaped body 1 is shown prior to sintering from two ceramic plates 3.
  • This consists of a bottom plate 9 and a cover plate 8.
  • a recess 2 is lasered.
  • two holes 10 lead from the outside into the recess 2.
  • a survey 19 is arranged, whose surface is at the same height as the edge region 21 of the bottom plate 9.
  • This elevation 19 thus has the full height of the bottom plate 9 and serves firstly to guide the cooling medium and secondly as a bearing surface for the cover plate 8.
  • the elevation 19 is arranged between the bores 10, so that a desired flow path is formed.
  • FIGS. 11 and 12 each show a connecting element 4 with radial projections 6.
  • the connection element 4 according to FIG. 12 is made of a flexible material, for. B. rubber and can close the channels with its hooks 20.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ceramic Products (AREA)
  • Furnace Charging Or Discharging (AREA)

Abstract

The invention relates to a ceramic molded article (1) that has recesses (2) and comprises at least two plates (joined parts) (3) made of a ceramic material, i.e. a lower base plate (9), an upper cover plate (8) and, optionally, one or more intermediate plates (7) which are stacked on top of each other and are joined to each other on the surfaces thereof to form the molded article (1); a joining material (paste) is placed between the plates (joined parts) (3).

Description

KERAMISCHER LAMINIERTER FORMKÖRPER MIT AUSSPARUNGEN  CERAMIC LAMINATED FORM BODY WITH GAPS
Die Erfindung betrifft keramische Formkörper mit Aussparungen, Verfahren zu deren Herstellung sowie deren Verwendung. The invention relates to ceramic molded bodies with recesses, processes for their preparation and their use.
Trockengepresste, stranggepresste oder foliengegossene keramische Formkörper können besonders leicht im noch ungesinterten Zustand gefräst oder gestanzt werden. Durch Fügen mehrerer Formkörper, beispielsweise durch eine aufgebrachte keramische Paste, können Formkörper mit komplizierteren Geometrien wie hinterschnittige Öffnungen hergestellt werden. Es gibt allerdings gravierende Einschränkungen. Dry-pressed, extruded or foil-cast ceramic moldings can be milled or punched particularly easily in the still unsintered state. By joining a plurality of shaped bodies, for example by an applied ceramic paste, moldings with more complicated geometries such as undercut openings can be produced. However, there are serious limitations.
Bei grösseren und/oder ungleichmässig geformten Formkörpern (über etwa 100 mm) können durch eine inhomogene Schwindung beim Sintern Abweichungen von der gewünschten Endgeometrie auftreten. Die Handhabung dünner, aber in der Fläche ausgedehnter Formkörper (beispielsweise bei 1 mm Dicke eine laterale Abmessung von 200*300 mm) ist schwierig. Grossflächige Formteile mit Kanalstrukturen (üblicherweise gefräste trockengepresste Teile) müssten mehrere Millimeter dick sein, um eine ausreichende Stabilität für die Verarbeitung zu bieten. Dünne keramische Folien sind zwar handzuhaben, aber die Kombination (Stackbildung) von vielen Folien mit unterschiedlich weiten Bohrungen oder Fenstern ist schwierig, da die Verdichtung an den Öffnungen beim Laminieren ungleichmässig ist. In the case of larger and / or irregularly shaped moldings (over about 100 mm), deviations from the desired final geometry may occur due to inhomogeneous shrinkage during sintering. The handling of thin, but in the surface of expanded moldings (for example, at 1 mm thickness, a lateral dimension of 200 * 300 mm) is difficult. Large-area moldings with channel structures (usually milled dry-pressed parts) would have to be several millimeters thick to provide sufficient stability for processing. Although thin ceramic films are manageable, the combination (stacking) of many films with different width holes or windows is difficult because the densification at the openings during lamination is uneven.
Das schnelle, blasenfreie Zusammenbringen grossflächiger, saugender, mit Flüssigkeit beschichteter, mechanisch noch instabiler Formkörper ist schwierig. The rapid, bubble-free bringing together large-area, absorbent, liquid-coated, mechanically unstable molded body is difficult.
Weiterhin ist die Gefahr der Rissbildung während des Sinterns bei komplizierten Geometrien hoch. Zur Lösung dieser Probleme wurde ein keramischer Formkörper mit Aussparungen entwickelt, welcher dadurch gekennzeichnet ist, dass der Formkörper mindestens zwei Platten (Fügeteile) aus keramischem Werkstoff enthält, nämlich eine untere Bodenplatte, eine obere Deckplatte und optional eine oder mehrere Zwischenplatte(n), die stapeiförmig aufeinander liegen und miteinander flächig zu dem Formkörper verbunden sind und wobei sich zwischen den Platten (Fügeteile) ein Fügematerial (Paste) befindet. Furthermore, the risk of cracking during sintering in complicated geometries is high. To solve these problems, a ceramic shaped body has been developed with recesses, which is characterized in that the shaped body contains at least two plates (joining parts) of ceramic material, namely a lower bottom plate, an upper cover plate and optionally one or more intermediate plate (s), the Stapeiförmig lie on each other and are connected to each other flat to the molding and wherein between the plates (parts to be joined) a joining material (paste) is located.
Außerdem wird ein Verfahren zur Herstellung der Formkörper vorgeschlagen, welches dadurch gekennzeichnet ist, a. dass aus einem keramischen Grundmaterial, das mit Grünkörper-Sinterhilfsmitteln versetzt ist, flache keramische Grünkörper-Platten ggf. mit Aussparungen hergestellt und diese anschließend gesintert werden zur Schaffung flacher Keramikplatten, In addition, a method for producing the shaped body is proposed, which is characterized a. that flat ceramic greenware plates are possibly made with recesses from a ceramic base material, which is mixed with green body sintering aids, and then these are sintered to create flat ceramic plates,
b. dass die Keramikplatten ggf. gelasert oder hart bearbeitet werden, um die benötigten Aussparungen einzubringen und b. that the ceramic plates may be lasered or hard machined to bring in the required recesses and
c. dass auf die gesinterten Keramikplatten eine Paste des aufgerührten keramischen Grundmaterials versetzt mit Sinterhilfsmitteln aufgetragen wird, die so beschichteten Keramikplatten, auch Fügeteile genannt, zu einem Stapel geschichtet werden und dieser Stapel gesintert wird. c. in that a paste of the agitated ceramic base material is applied to the sintered ceramic plates in a staggered manner with sintering aids, the ceramic boards thus coated, also referred to as joining parts, being stacked into a stack and this stack being sintered.
Bevorzugt wird als keramisches Grundmaterial Aluminiumnitrid AIN und als Sinterhilfsmittel Y2O3 oder CaO verwendet. Aluminum nitride AIN and as sintering aid Y 2 O 3 or CaO is preferably used as the ceramic base material.
Damit kein unnötig großer Bauraum entsteht, haben die Fügeteile eine Dicke unter 2 mm bevorzugt < 1 mm. ln einer erfindungsgemäßen Ausgestaltung werden auf die Fügeteile vor oder nach dem Sintern des Stapels Metallisierungen aufgebracht. Diese werden bevorzugt aufgedruckt und anschließend versintert oder ausgehärtet. Zur Schaffung von Kühl- oder Heizräumen und Kanälen werden diese als Aussparungen in die Keramikplatten so eingelasert, dass im gefügten Formkörper Kühl- oder Heizstrukturen, wie Kanäle oder Mäander eingeformt sind. Wenn nach dem Lasern Wandstrukturen in den Keramikplatten verbleiben, kann das Kühl- oder Heizmedium an die Stellen geleitet werden, an denen eine besondere Kühlung oder Heizung bzw. Temperierung erforderlich ist. So that no unnecessarily large space is created, the parts to be joined have a thickness of less than 2 mm, preferably <1 mm. In an embodiment according to the invention, metallizations are applied to the parts to be joined before or after the sintering of the stack. These are preferably printed on and then sintered or cured. To create cooling or heating chambers and channels, these are lasered into the ceramic plates as recesses in such a way that cooling or heating structures, such as channels or meanders, are formed in the joined shaped body. If, after lasering, wall structures remain in the ceramic plates, the cooling or heating medium can be directed to those locations where special cooling or heating or tempering is required.
Damit Kühl- oder Heizmedium in den Formkörper geleitet werden kann, werden mit dem Formkörper Anschlusselemente oder Verschlusselemente verbunden, die in einer Ausführungsform versintert werden und die mit den Aussparungen verbunden sind. So that cooling or heating medium can be conducted into the shaped body, connecting elements or closing elements are connected to the shaped body, which are sintered in one embodiment and which are connected to the recesses.
Die Anschlusselemente sind vorteilhaft Anschlussrohre mit einer Schlauchtülle oder Rohrestücke, die einen auskragenden Flansch aufweisen, der im Bereich der Aussparungen mit dem Formkörper verbunden ist oder der zwischen zwei Keramikplatten versintert ist. The connecting elements are advantageously connecting tubes with a hose nozzle or tube pieces, which have a projecting flange, which is connected in the region of the recesses with the molding or which is sintered between two ceramic plates.
Ein erfindungsgemäßer Formkörper ist dadurch gekennzeichnet, dass der Formkörper aus mindestens zwei Keramikplatten besteht, einer unteren Bodenplatte, optional einer oder mehrerer Zwischenplatte/n und einer oberen Deckplatte, wobei in der Bodenplatte oder Deckplatte Bohrungen, in der Bodenplatte oder der oder den Zwischenplatte/n Kanäle und/oder Ausnehmungen angeordnet sind, wobei die Bohrungen mit den Kanälen und/oder Ausnehmungen verbunden sind. A shaped body according to the invention is characterized in that the shaped body consists of at least two ceramic plates, a lower base plate, optionally one or more intermediate plate (s) and an upper cover plate, wherein bores in the base plate or cover plate, in the base plate or the intermediate plate (s) Channels and / or recesses are arranged, wherein the bores are connected to the channels and / or recesses.
In einer Ausführungsform ist der Formkörper eine Mikropumpe, die dadurch gekennzeichnet ist, dass sie aus drei Keramikplatten besteht, einer unteren Bodenplatte mit einer Achse auf der ein metallisches oder metallisiertes Flügelrad angeordnet ist, einer Zwischenplatte, die den Förderraum und die Zuleitungen enthält und aus einer oberen Deckplatte, die den Förderraum und die Zuleitungen abdeckt. In one embodiment, the shaped body is a micropump, which is characterized in that it consists of three ceramic plates, a lower one Base plate with an axis on which a metallic or metallized impeller is arranged, an intermediate plate which contains the delivery space and the supply lines and an upper cover plate which covers the delivery space and the supply lines.
Zur Herstellung von geometrisch komplizierten, exakt dimensionierten Formkörpern werden erfindungsgemäß gesinterte flache keramische Platten zunächst gelasert, um die benötigten Aussparungen einzubringen. Dann wird eine Paste von aufgerührter Keramik mit Siebdruck, Walze (oder anderen Beschichtungsverfahren) aufgetragen. Die beschichteten Fügeteile werden dann zu einem Stack zusammengestellt und erneut gesintert. For the production of geometrically complicated, precisely dimensioned moldings, sintered flat ceramic plates are first lasered in accordance with the invention in order to introduce the required recesses. Then a paste of agitated ceramic is applied by screen printing, roller (or other coating method). The coated parts are then assembled into a stack and sintered again.
Besteht die Keramik aus AIN, welches üblicherweise mit einem Sinterhilfsmittel wie Y2O3 in einer Konzentration von 2-5% versetzt ist, kann durch Anwendung eines Fügematerials mit einer leicht erhöhten oder erniedrigten Konzentration an Y2O3 gegenüber dem Grundmaterial eine verstärkte Diffusion des Y2O3 bzw. der gebildeten YAIO-Phasen vom Fügematerial in die Formkörper zu erreicht werden, welche zu einer fast völligen Freiheit von Fehlstellen in der Fügezone und zu hermetisch gasdichten Bauteilen führt. If the ceramic is made of AIN, which is usually added with a sintering aid such as Y 2 O 3 in a concentration of 2-5%, by applying a joining material having a slightly increased or decreased concentration of Y 2 O 3 to the base material, enhanced diffusion of the Y 2 O 3 or the YAIO phases formed can be achieved from the joining material into the moldings, which leads to an almost complete freedom from defects in the joining zone and to hermetically sealed components.
Da diese vorgesinterten Fügeteile bereits sehr stabil sind, können die einzelnen Fügeteile daher relativ dünn, beispielsweise weniger als 1 mm dick, ausgestaltet werden. Die Formkörper können im Inneren wie auf der Oberfläche auch metallisiert sein. Eine innere Metallisierung kann besonders geeignet mit hochschmelzenden Metallen wie Platin, Molybdän oder Wolfram erfolgen. Eine äussere Metallisierung kann mit den bekannten Methoden/Materialien erfolgen (W, Mo, Ag, Cu etc.). Es können in die einzelnen Ebenen des Formkörpers Öffnungen mit unterschiedlichen Durchmessern beispielsweise über Lasern (exakte Geometrie) eingebracht werden, wobei die Öffnungen durch den Formkörper durchgängig gleich gross, oder gestaffelt, oder beliebig alternierend sein können. Since these pre-sintered joining parts are already very stable, the individual joining parts can therefore be made relatively thin, for example less than 1 mm thick. The moldings can also be metallized inside as well as on the surface. An internal metallization can be carried out particularly suitable with refractory metals such as platinum, molybdenum or tungsten. An external metallization can be done with the known methods / materials (W, Mo, Ag, Cu etc.). It can be introduced into the individual levels of the shaped body openings with different diameters, for example via lasers (exact geometry), wherein the openings through the shaped body consistently the same size, or staggered, or can be arbitrarily alternating.
In die gefügten Formkörper können auch Kanäle oder Mäander (Kühl- oder Heizstrukturen) eingearbeitet sein, die zum Temperieren verwendet werden können. Channels or meanders (cooling or heating structures) which can be used for tempering can also be incorporated into the joined shaped bodies.
Die Formkörper können Aussparungen auch aus Gründen der Gewichtsersparnis besitzen, wobei letztendlich nur ein feines stabiles Keramikgerüst entsteht. The shaped bodies can also have recesses for reasons of weight saving, with ultimately only a fine, stable ceramic framework being created.
Mehrere aus n Ebenen gefügte Formkörper können auch lateral wie Kacheln mit weiteren Formkörpern hermetisch dicht verbunden sein. Verwendung finden solche geschichteten Formkörper z.B. in Vakuumchucks, Heizplatten, Kühlern. Several shaped bodies joined from n planes can also be hermetically sealed laterally like tiles with other shaped bodies. Use is made of such layered shaped bodies, e.g. in vacuumchucks, hotplates, coolers.
Das nachfolgende Beispiel soll die Erfindung näher erläutern, ohne sie einzuschränken. The following example is intended to explain the invention in more detail without restricting it.
Beispiel: Example:
Drei halbkreisförmige, foliengegossene und gesinterte Platten - 1 mm dick, Radius 100 mm - aus AIN mit Y2O3 als Sinterhilfsmittel, werden gelasert. Dabei werden unterschiedlich grosse Kreise aus jeder Platte derart ausgeschnitten, dass nach Übereinanderlegen der 3 Platten auch unterschiedlich weite Öffnungen zentrisch aufeinander liegen. Three semi-circular, foil-cast and sintered plates - 1 mm thick, radius 100 mm - of AIN with Y 2 O 3 as sintering aid, are lasered. In this case, different sized circles are cut out of each plate so that after superimposing the 3 plates also different wide openings are centered on each other.
Eine Paste aus AIN und Y2O3 wird durch Suspendieren der Feststoffe in einem geeigneten Öl (Siebdrucköl oder Pastenorganik) hergestellt. Die wird im Siebdruckverfahren auf die zu verbindenden Platten gedruckt und die so beschichteten Platten dann aufeinander gelegt/verklebt. Diese Anordnung von drei verklebten AIN-Platten wird bei geeigneten Temperaturen in N2 gesintert. A paste of AIN and Y 2 O 3 is prepared by suspending the solids in a suitable oil (screen printing oil or paste organics). The is printed by screen printing on the plates to be joined and then coated plates then placed / glued. This arrangement of three bonded AIN plates is sintered at suitable temperatures in N 2 .
Mit den erfindungsgemäßen Formkörpern können auch Formteile zur Kühlung von Leistungs-Bauelementen, Lichtquellen oder temperatursensiblen Bauteilen hergestellt werden. Moldings for cooling power components, light sources or temperature-sensitive components can also be produced with the moldings according to the invention.
Der Ausdruck "im Wesentlichen" bzw. "etwa" bedeutet im Sinne der Erfindung Abweichungen vom jeweils exakten Wert um +/- 10%, bevorzugt um +/- 5% und/oder Abweichungen in Form von für die Funktion unbedeutenden Änderungen. The expression "essentially" or "approximately" in the sense of the invention means deviations from the exact value by +/- 10%, preferably by +/- 5% and / or deviations in the form of changes that are insignificant for the function.
Die erfindungsgemäßen Formkörper enthalten somit mehrere Platten, die jeweils aus keramischem Werkstoff bestehen und stapeiförmig aufeinander liegend und miteinander flächig zu dem Formkörper verbunden sind. Bevorzugt weist der Formkörper auf seiner Oberfläche Metallisierungen auf, auf die Leistungsbauelemente aufgelötet sein können. Im Formkörper befindet sich zum Temperieren eine Kühl- oder Heizstruktur, d.h. Strömungswege für ein Kühl- oder Heizmedium, die von einem Kühl oder Heizmedium, bevorzugt einer Kühl oder Heizflüssigkeit beaufschlagt werden, sodass die Kühl- oder Heizstruktur zum Temperieren verwendet werden kann. Das Kühl- oder Heizmedium wird durch die Kühl- oder Heizstruktur gepumpt, gesaugt oder kann durch Schwerkraft hindurch fließen. Damit das Kühl- oder Heizmedium in den Formkörper geleitet werden kann, befinden sich in der Bodenplatte oder in der Deckplatte zumindest zwei Öffnungen, die mit Anschlussflanschen verbunden sein können. In einer vorzugsweisen Ausgestaltung befinden sich die Kühl- oder Heizkanäle in Achsrichtung parallel zu den Oberflächenseiten der Boden- oder Deckplatte. The shaped bodies according to the invention thus comprise a plurality of plates, each of which consists of a ceramic material and are stacked on top of each other and flatly connected to the shaped body. The shaped body preferably has metallizations on its surface, onto which power components can be soldered. In the molded body is for tempering a cooling or heating structure, i. Flow paths for a cooling or heating medium, which are acted upon by a cooling or heating medium, preferably a cooling or heating fluid, so that the cooling or heating structure can be used for tempering. The cooling or heating medium is pumped through the cooling or heating structure, sucked or can flow through gravity. So that the cooling or heating medium can be conducted into the molded body, there are at least two openings in the bottom plate or in the cover plate which can be connected to connection flanges. In a preferred embodiment, the cooling or heating channels are in the axial direction parallel to the surface sides of the bottom or top plate.
Bevorzugt befindet sich in der Bodenplatte des erfindungsgemäßen Formkörpers zumindest eine Erhebung, die auf der gleichen Höhe wie der Randbereich der Bodenplatte ist. Diese Erhebungen weisen also die volle Höhe der Bodenplatte auf und dienen erstens zum Leiten des Kühl- oder Heizmediums und zweitens als Auflagefläche für die Deckplatte oder die sich darüber befindliche Keramikplatte. Preferably, at least one elevation, which is at the same height as the edge region of the bottom plate, is located in the bottom plate of the shaped body according to the invention. These surveys thus have the full height of the bottom plate and serve firstly to guide the cooling or heating medium and secondly as a support surface for the cover plate or the ceramic plate located above it.
Der keramische Werkstoff der Keramikplatten kann ausgewählt sein aus einer oder mehreren der nachstehenden Gruppen: Aluminiumoxid, Aluminiumnitrid, Siliziumnitrid, Siliziumcarbid oder eine Mischkeramik aus Aluminiumoxid und Zirkonoxid (ATZ oder ZTA) bzw. Siliziumoxid (Alumosilikat) . The ceramic material of the ceramic plates may be selected from one or more of the following groups: aluminum oxide, aluminum nitride, silicon nitride, silicon carbide or a mixed ceramic of aluminum oxide and zirconium oxide (ATZ or ZTA) or silicon oxide (aluminosilicate).
Weiterbildungen, Vorteile und Anwendungsmöglichkeiten der Erfindung ergeben sich auch aus der nachfolgenden Beschreibung von Ausführungsbeispielen. Dabei sind alle beschriebenen und/oder bildlich dargestellten Merkmale für sich oder in beliebiger Kombination grundsätzlich Gegenstand der Erfindung, unabhängig von ihrer Zusammenfassung in den Ansprüchen oder deren Rückbeziehung. Auch wird der Inhalt der Ansprüche zu einem Bestandteil der Beschreibung gemacht. Further developments, advantages and applications of the invention will become apparent from the following description of exemplary embodiments. In this case, all described and / or illustrated features alone or in any combination are fundamentally the subject of the invention, regardless of their summary in the claims or their dependency. Also, the content of the claims is made an integral part of the description.
Die erfindungsgemäßen keramischen Formkörper können als temperierbarer Vakuumchuck für die Fertigung von Si-Wafern verwendet werden. The ceramic shaped bodies according to the invention can be used as heatable vacuum chucks for the production of Si wafers.
Zudem eignen sich die erfindungsgemäßen keramischen Formkörper zur Verwendung als Setterplatte beispielsweise für das Metal-Injection-Molding. In addition, the ceramic shaped bodies according to the invention are suitable for use as a setetter plate, for example for metal injection molding.
Die erfindungsgemäßen keramischen Formkörper sind außerdem als (beheizbares/ kühlbares) Modul für die Temperierung von Energiespeichern wie Batterien oder Akkus verwendbar. The ceramic shaped bodies according to the invention can also be used as a (heatable / coolable) module for the temperature control of energy stores such as batteries or rechargeable batteries.
Die Erfindung wird im Folgenden anhand der Figuren von Ausführungsbeispielen näher erläutert. The invention will be explained in more detail below with reference to the figures of exemplary embodiments.
Figur 1 zeigt einen Ausschnitt aus einem erfindungsgemäßen keramischen Formkörper 1 , der aus mehreren Keramikplatten 3 besteht. Mit dem Bezugszeichen 7 sind Zwischenplatten aus einem keramischen Material bezeichnet. Auf die oberste Zwischenplatte 7 ist eine keramische Deckplatte 8 gelegt und versintert. In der Deckplatte 8 sind Bohrungen 10 eingebracht, durch die ein Kühlmedium in den Formkörper eingeleitet werden kann. In die Zwischenplatten 3 sind Aussparungen 2 eingelasert, die im Formkörper Bohrungen, Kanäle und Ausnehmungen 12 bilden. Zum Anschluss von Temperiermedien sind Anschlusselemente 4 mit dem Formkörper 1 verbunden. Diese Anschlusselemente haben in der gezeigten Ausführungsform einen auskragenden Flansch 6 und eine durchgehende Bohrung 17, die mit den Aussparungen 2 oder Ausnehmungen 12 in Verbindung steht. (Nicht gezeigt: die Anschlusselemente können in Form von Schlauchtüllen oder Rohrstücken ausgestaltet sein). Der auskragende Flansch 6 ist entweder auf den Formkörper 1 aufgeklebt, kann aber auch zwischen zwei Keramikplatten 3 eingesintert werden. Figur 2 zeigt die gleiche Ausführungsform wie in Figur 1 , jedoch nur mit einem Anschlusselement 4. FIG. 1 shows a detail of a ceramic shaped body 1 according to the invention, which consists of several ceramic plates 3. With the reference number 7 are intermediate plates made of a ceramic material. On the top intermediate plate 7, a ceramic cover plate 8 is placed and sintered. In the cover plate 8 holes 10 are introduced, through which a cooling medium can be introduced into the molding. In the intermediate plates 3 recesses 2 are lasered, which form bores, channels and recesses 12 in the molding. For connection of tempering media connection elements 4 are connected to the molded body 1. These connection elements have in the embodiment shown a projecting flange 6 and a through hole 17, which communicates with the recesses 2 or recesses 12. (Not shown: the connecting elements may be in the form of hose nozzles or pipe pieces). The projecting flange 6 is either adhered to the molded body 1, but can also be sintered between two ceramic plates 3. FIG. 2 shows the same embodiment as in FIG. 1, but only with one connection element 4.
Figur 3 zeigt die gleiche Ausführungsform wie in den Figuren 1 und 2, jedoch zusätzlich mit einem Verschlusselement 5 und einer Bodenplatte 9. FIG. 3 shows the same embodiment as in FIGS. 1 and 2, but additionally with a closure element 5 and a bottom plate 9.
Die Figuren 4 und 5 zeigen einen erfindungsgemäßen Formkörper 1 , der in dieser Ausführungsform die exemplarische Ausgestaltung einer Mikropumpe darstellt. Die Mikropumpe besteht aus drei Keramikplatten 3, einer unteren Bodenplatte 9 mit einer Achse 13 auf der ein metallisches oder metallisiertes Flügelrad 14 (nur schematisch eingezeichnet) angeordnet ist, einer Zwischenplatte 7, die als Ausnehmung 12 einen Förderraum 15 enthält und mit Zuleitungen 16 bzw. Kanälen 1 1 für das zu fördernde Medium. Eine obere Deckplatte 8 deckt den Förderraum 15 und die Zuleitungen 16 ab. Bezugszeichen 18 zeigt schematisch eine Paste vor dem Sintern. In Figur 5 ist das Flügelrad 14 nicht gezeigt. In den Figuren 6 und 7 ist ein Formkorper 1 vor dem Sintern aus zwei Keramikplatten 3 gezeigt. Dieser besteht aus einer Bodenplatte 9 und einer Deckplatte 8. In die Bodenplatte 9 ist eine Aussparung 2 eingelasert. Außerdem führen zwei Bohrungen 10 von außen in die Aussparung 2. In der Aussparung in der Bodenplatte 9 ist eine Erhebung 19 angeordnet, deren Oberfläche auf der gleichen Höhe wie der Randbereich 21 der Bodenplatte 9 ist. Diese Erhebung 19 weist also die volle Höhe der Bodenplatte 9 auf und dient erstens zum Leiten des Kühlmediums und zweitens als Auflagefläche für die Deckplatte 8. Die Erhebung 19 ist zwischen den Bohrungen 10 angeordnet, so dass sich ein gewünschter Strömungsweg bildet. FIGS. 4 and 5 show a shaped body 1 according to the invention, which in this embodiment represents the exemplary embodiment of a micropump. The micropump consists of three ceramic plates 3, a lower base plate 9 with an axis 13 on which a metallic or metallized impeller 14 (only schematically drawn) is arranged, an intermediate plate 7, which contains a conveying space 15 as a recess 12 and with leads 16 and Channels 1 1 for the medium to be conveyed. An upper cover plate 8 covers the delivery chamber 15 and the supply lines 16. Reference numeral 18 schematically shows a paste before sintering. In Figure 5, the impeller 14 is not shown. In FIGS. 6 and 7, a shaped body 1 is shown prior to sintering from two ceramic plates 3. This consists of a bottom plate 9 and a cover plate 8. In the bottom plate 9 a recess 2 is lasered. In addition, two holes 10 lead from the outside into the recess 2. In the recess in the bottom plate 9, a survey 19 is arranged, whose surface is at the same height as the edge region 21 of the bottom plate 9. This elevation 19 thus has the full height of the bottom plate 9 and serves firstly to guide the cooling medium and secondly as a bearing surface for the cover plate 8. The elevation 19 is arranged between the bores 10, so that a desired flow path is formed.
In den Figuren 8, 9 und 10 ist ein Formkörper 1 mit einem Kanal 1 1 gezeigt, der durch ein Verschlusselement 5 nach außen verschlossen ist. Dieses Verschlusselement 5 kann aufgeklebt oder aber auch versintert werden. In den Figuren 1 1 und 12 ist jeweils ein Anschlusselement 4 mit radialen Auskragungen 6 gezeigt. Das Anschlusselement 4 gemäß Figur 12 besteht aus einem flexiblen Material, z. B. Gummi und kann mit seinen Haken 20 die Kanäle verschließen. In the figures 8, 9 and 10, a molded body 1 with a channel 1 1 is shown, which is closed by a closure element 5 to the outside. This closure element 5 can be glued or else sintered. FIGS. 11 and 12 each show a connecting element 4 with radial projections 6. The connection element 4 according to FIG. 12 is made of a flexible material, for. B. rubber and can close the channels with its hooks 20.

Claims

Ansprüche claims
1 . Keramischer Formkörper (1 ) mit Aussparungen (2), dadurch gekennzeichnet, dass der Formkörper mindestens zwei Platten (Fügeteile) (3) aus keramischem1 . Ceramic shaped body (1) with recesses (2), characterized in that the shaped body at least two plates (joining parts) (3) made of ceramic
Werkstoff enthält, nämlich eine untere Bodenplatte (9), eine obere Deckplatte (8) und optional eine oder mehrere Zwischenplatte(n) (7), die stapeiförmig aufeinander liegen und miteinander flächig zu dem Formkörper (1 ) verbunden sind und wobei sich zwischen den Platten (Fügeteile) (3) ein Fügematerial (Paste) befindet. Material contains, namely a lower base plate (9), an upper cover plate (8) and optionally one or more intermediate plate (s) (7) which are stacked on each other and flat with each other to the molded body (1) are connected and between the Plates (adherends) (3) a joining material (paste) is located.
2. Keramischer Formkörper (1 ) nach Anspruch 1 , dadurch gekennzeichnet, dass als Aussparungen (2) in den Platten (3) Strukturen wie Kanäle oder Mäander eingeformt sind. 2. Ceramic molded body (1) according to claim 1, characterized in that as recesses (2) in the plates (3) structures such as channels or meanders are formed.
3. Keramischer Formkörper (1 ) nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die einzelnen Fügeteile (3) eine Dicke von unter 2 mm bevorzugt < 1 mm aufweisen. 3. Ceramic molded body (1) according to claim 1 or 2, characterized in that the individual joining parts (3) have a thickness of less than 2 mm, preferably <1 mm.
4. Keramischer Formkörper (1 ) nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Bodenplatte (9) und die Deckplatte (8) Bohrungen (10) aufweisen und in der Bodenplatte (9) oder der/den Zwischenplatte(n) (7) Kanäle (1 1 ) und/oder Ausnehmungen (12) vorhanden sind, wobei die Bohrungen (10) mit den Kanälen (1 1 ) und/oder Ausnehmungen (12) verbunden sind. 4. Ceramic molded body (1) according to claim 1 or 2, characterized in that the bottom plate (9) and the cover plate (8) bores (10) and in the bottom plate (9) or the / the intermediate plate (s) (7 ) Channels (1 1) and / or recesses (12) are present, wherein the bores (10) with the channels (1 1) and / or recesses (12) are connected.
5. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Formkörper (1 ) auf seiner Oberfläche eine Metallisierung aufweist. 5. Ceramic molded body (1) according to one of the preceding claims, characterized in that the shaped body (1) has on its surface a metallization.
6. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Formkörper (1 ) eine innere Metallisierung, insbesondere aus Platin, Molybdän oder Wolfram aufweist. 6. Ceramic molded body (1) according to any one of the preceding claims, characterized in that the shaped body (1) has an inner metallization, in particular of platinum, molybdenum or tungsten.
7. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sich in den einzelnen Ebenen des Formkörpers (1 )7. Ceramic molded body (1) according to one of the preceding claims, characterized in that in the individual planes of the shaped body (1)
Öffnungen mit unterschiedlichen Durchmessern befinden, wobei die Öffnungen durch den Formkörper (1 ) durchgängig gleich groß oder gestaffelt oder beliebig alternierend sind. Openings are located with different diameters, wherein the openings through the shaped body (1) are the same size or staggered continuously or arbitrarily alternating.
8. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass in den Formkörper (1 ) eine Kühl- oder8. Ceramic molded body (1) according to one of the preceding claims, characterized in that in the molded body (1) has a cooling or
Heizstruktur, die Strömungswege (Kühl- bzw. Heizkanäle) für das Kühl- oder Heizmedium umfasst, eingearbeitet ist und das Kühl- oder Heizmedium durch die Kühl- oder Heizstruktur gepumpt werden kann, wobei sich in der Bodenplatte (9) oder in der Deckplatte (8) zumindest zwei Öffnungen befinden, die mit Anschlussflanschen verbunden sein können. Heating structure, the flow paths (cooling or heating channels) for the cooling or heating medium is incorporated, and the cooling or heating medium can be pumped through the cooling or heating structure, wherein in the bottom plate (9) or in the cover plate ( 8) are at least two openings, which may be connected to connecting flanges.
9. Keramischer Formkörper (1 ) nach Anspruch 8, dadurch gekennzeichnet, dass sich die Kühl- oder Heizkanäle in Achsrichtung parallel zu den Oberflächenseiten der Boden- oder Deckplatte (8, 9) befinden. 9. Ceramic molded body (1) according to claim 8, characterized in that the cooling or heating channels are in the axial direction parallel to the surface sides of the bottom or cover plate (8, 9).
10. Keramischer Formkörper nach Anspruch 8 und 9, dadurch gekennzeichnet, dass Anschlusselemente (4) oder Verschlusselemente (5) mit dem Formkörper (1 ) verbunden sind, bevorzugt versintert sind, die mit den Aussparungen (2) verbunden sind. 10. Ceramic molding according to claim 8 and 9, characterized in that connection elements (4) or closure elements (5) are connected to the molded body (1), preferably sintered, which are connected to the recesses (2).
1 1 . Keramischer Formkörper (1 ) nach Anspruch 10, dadurch gekennzeichnet, dass die Anschlusselemente (4) Anschlussrohre sind, die einen auskragenden Flansch (6) aufweisen, der im Bereich der Aussparungen (2) mit dem Formkörper (1 ) verbunden ist oder der zwischen zwei Keramikplatten (3) versintert ist. 1 1. Ceramic molded body (1) according to claim 10, characterized in that the connecting elements (4) are connecting pipes, which have a projecting flange (6) which is connected in the region of the recesses (2) with the molded body (1) or between two Ceramic plates (3) is sintered.
12. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sich in der Bodenplatte (9) zumindest eine Erhebung befindet, die auf der gleichen Höhe wie der Randbereich der Bodenplatte (9) ist, also die volle Höhe der Bodenplatte (9) aufweist. 12. Ceramic molded body (1) according to one of the preceding claims, characterized in that in the bottom plate (9) is at least one elevation, which is at the same height as the edge region of the bottom plate (9), ie the full height of the bottom plate (9).
5 13. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das keramische Grundmaterial der Platten (3) ausgewählt ist aus Aluminiumoxid, Aluminiumnitrid, Siliziumnitrid und/oder Siliziumcarbid oder aus einer Mischkeramik aus Aluminiumoxid und Zirkonoxid bzw. Siliziumoxid und ggfls. ein Sinterhilfsmittel enthält. 5 13. Ceramic molded body (1) according to any one of the preceding claims, characterized in that the ceramic base material of the plates (3) is selected from aluminum oxide, aluminum nitride, silicon nitride and / or silicon carbide or a mixed ceramic of aluminum oxide and zirconium oxide or silicon oxide and sometimes. contains a sintering aid.
10 14. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Fügematerial ausgewählt ist aus Aluminiumoxid, Aluminiumnitrid, Siliziumnitrid und/oder Siliziumcarbid oder aus einer Mischkeramik aus Aluminiumoxid und Zirkonoxid bzw. Siliziumoxid und ein Sinterhilfsmittel enthält. 10 14. Ceramic molding (1) according to any one of the preceding claims, characterized in that the joining material is selected from aluminum oxide, aluminum nitride, silicon nitride and / or silicon carbide or a mixed ceramic of alumina and zirconia or silica and a sintering aid.
15 15. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Fügematerial als Sinterhilfsmittel Y2O3 oder CaO enthält. 15 15. Ceramic molded body (1) according to any one of the preceding claims, characterized in that the joining material contains as a sintering aid Y 2 O 3 or CaO.
16. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet dass das keramische Grundmaterial Aluminiumnitrid AIN16. Ceramic molded body (1) according to one of the preceding claims, characterized in that the ceramic base material aluminum nitride AIN
20 ist. 20 is.
17. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Sinterhilfsmittel des Fügematerials eine leicht erhöhte oder erniedrigte Konzentration gegenüber dem Sinterhilfsmittel des keramischen Grundmaterials aufweist. 17. Ceramic molded body (1) according to one of the preceding claims, characterized in that the sintering aid of the joining material has a slightly increased or decreased concentration relative to the sintering aid of the ceramic base material.
25 18. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Sinterhilfsmittel des keramischen Grundmaterials in einer Konzentration von 2 bis 5% enthalten ist und das Fügematerial eine erhöhte Konzentration an Sinterhilfsmittel gegenüber dem Grundmaterial von etwa +1 bis +5% aufweist. 25 18. A ceramic molded body (1) according to any one of the preceding claims, characterized in that the sintering aid of the ceramic base material is contained in a concentration of 2 to 5% and the Joining material has an increased concentration of sintering aid to the base material of about +1 to + 5%.
19. Keramischer Formkörper (1 ) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Sinterhilfsmittel Y2O3 oder CaO ist. 19. Ceramic molded body (1) according to one of the preceding claims, characterized in that the sintering aid Y 2 O 3 or CaO.
20. Verfahren zur Herstellung eines flachen keramischen Formkörpers (1 ) nach Anspruch 1 , dadurch gekennzeichnet, a. dass aus einem keramischen Grundmaterial, das mit Sinterhilfsmitteln versetzt ist, flache keramische Grünkörper-Platten hergestellt und diese anschließend gesintert werden zur Schaffung flacher Keramikplatten (3), b. dass die in die Keramikplatten (3) die benötigten Aussparungen (2) eingebracht werden, 20. A method for producing a flat ceramic shaped body (1) according to claim 1, characterized in that a. from a ceramic base material, which is mixed with sintering aids, flat green ceramic green sheets are prepared and then sintered to provide flat ceramic plates (3), b. that in the ceramic plates (3) the required recesses (2) are introduced,
c. dass auf die gesinterten Keramikplatten (3) eine Paste des keramischen Grundmaterials versetzt mit Sinterhilfsmitteln aufgetragen wird, die so beschichteten Keramikplatten (3), auch Fügeteile (3) genannt, zu einem Stapel geschichtet werden und dieser Stapel gesintert wird.  c. in that a paste of the ceramic base material is applied to the sintered ceramic plates (3) in a staggered manner with sintering aids, the ceramic plates (3), also referred to as joining parts (3) coated in this way, are stacked into a stack and this stack is sintered.
21 . Verfahren nach Anspruch 20, dadurch gekennzeichnet, dass die einzelnen Fügeteile (3) eine Dicke unter 2 mm bevorzugt < 1 mm haben. 21. A method according to claim 20, characterized in that the individual joining parts (3) have a thickness of less than 2 mm, preferably <1 mm.
22. Verfahren nach Anspruch 20 oder 21 , dadurch gekennzeichnet, dass auf die Fügeteile (3) vor oder nach dem Sintern des Stapels Metallisierungen aufgebracht werden. 22. The method according to claim 20 or 21, characterized in that on the joining parts (3) before or after sintering of the stack metallizations are applied.
23. Verfahren nach einem der Ansprüche 20 bis 22, dadurch gekennzeichnet, dass die Aussparungen (2) in die Keramikplatten (3) so eingebracht werden, dass im gefügten Formkörper (1 ) Strukturen, wie Kanäle oder Mäander eingeformt sind. 23. The method according to any one of claims 20 to 22, characterized in that the recesses (2) in the ceramic plates (3) are introduced so that in the joined molded body (1) structures, such as channels or meanders are formed.
24. Verfahren nach einem der Ansprüche 20 bis 23, dadurch gekennzeichnet, dass mit dem Formkörper (1 ) Anschlusselemente (4) oder Verschlusselemente (5) verbunden, bevorzugt versintert werden, die mit den Aussparungen (2) verbunden sind. 24. The method according to any one of claims 20 to 23, characterized in that with the molded body (1) connecting elements (4) or closure elements (5) connected, preferably sintered, which are connected to the recesses (2).
25. Verfahren nach Anspruch 24, dadurch gekennzeichnet, dass die Anschlusselemente (4) Anschlussrohre sind, die einen auskragenden Flansch (6) aufweisen, der im Bereich der Aussparungen (2) mit dem Formkörper (1 ) verbunden ist oder der zwischen zwei Keramikplatten (3) versintert ist. 25. The method according to claim 24, characterized in that the connecting elements (4) are connecting tubes, which have a projecting flange (6) which is connected in the region of the recesses (2) with the shaped body (1) or between two ceramic plates ( 3) is sintered.
EP15744498.5A 2014-07-10 2015-07-10 Laminated ceramic molded article having recesses Withdrawn EP3166909A1 (en)

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DE102014213480 2014-07-10
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US20190202746A1 (en) * 2016-02-26 2019-07-04 Kyocera Corporation Ceramic bonded body

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