EP3135917A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3135917A1
EP3135917A1 EP15182200.4A EP15182200A EP3135917A1 EP 3135917 A1 EP3135917 A1 EP 3135917A1 EP 15182200 A EP15182200 A EP 15182200A EP 3135917 A1 EP3135917 A1 EP 3135917A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pump according
groove
component
molded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15182200.4A
Other languages
German (de)
English (en)
Other versions
EP3135917B1 (fr
Inventor
Sönke Gilbrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15182200.4A priority Critical patent/EP3135917B1/fr
Publication of EP3135917A1 publication Critical patent/EP3135917A1/fr
Application granted granted Critical
Publication of EP3135917B1 publication Critical patent/EP3135917B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a vacuum pump, in particular a turbomolecular pump, comprising a first component and a second component, which are interconnected in a final assembled state, wherein a seal is provided for sealing the connection.
  • the O-rings used often have to be deformed due to the cramped conditions in order to be able to be used correctly. Not infrequently, the O-rings fall down even during pre-assembly, resulting in unnecessary loss of time.
  • At least one separate, one-piece molded seal is provided for sealing the connection between the two components, which can be fastened detachably to one of the two components for pre-assembly and which defines at least two circumferentially closed sealing regions which are to be sealed separately from one another.
  • the way is taken to provide a mold seal adapted to the respective construction, which seals two or more sealing areas.
  • the molded seal can be arranged on one of the two components.
  • the connection component / molded seal is solvable. so that even in case of service an easy replacement of the molded seal is possible. Since only a single, specially adapted seal is provided, the assembly of the two components can be performed quickly, easily and reliably.
  • the first component and / or the second component has a groove into which the molded seal for pre-assembly at least in sections can be introduced.
  • the groove is dimensioned such that the molded seal is at least partially clamped in the groove and / or braced.
  • a jamming can be achieved, for example, in that a width of the groove in at least one section of the groove is slightly smaller than a thickness of the molded seal in a section of the groove assigned to the section of the molded seal.
  • a narrowing of the groove - or a thickening of the molded seal - provided to secure the molded seal against accidental falling out. It is not necessary that the clamping is present everywhere. In principle, it is sufficient if at least one "clamping point" is provided. However, "complete" clamping may be appropriate in certain cases.
  • the profile of the groove may be selected such that the molded seal is stretched or compressed in a state introduced into the groove.
  • distortion can be produced if a groove section associated with one of the two closed sealing areas is slightly longer than the corresponding section of the molded seal. In order to introduce this section of the molded seal, it must therefore be stretched, whereby the molded seal is pressed against an inner wall of the groove.
  • an inverse embodiment is possible in which at least one of the two sealing regions defining section of the molded seal is compressed and pressed against an outer wall of the groove.
  • Another measure, which - alone or in combination with the measures described above - can serve to prevent unintentional falling out of the molded seal, is to provide at least one recess on the first and / or the second component, into which a securing portion of Form seal is at least partially introduced.
  • the recess is in particular dimensioned such that the securing portion is clamped in the recess.
  • the securing portion may be formed, for example, tab-shaped and / or comprise a web, at the end of a thickened pin is arranged. This can be pressed into the aforementioned recess to releasably secure the mold seal to the first or the second component.
  • the molded seal has a peripheral portion, which encloses the sealing areas together in the circumferential direction.
  • the area enclosed by the peripheral portion is divided by at least one dividing portion connected to the peripheral portion into the at least two separate sealing portions. It is understood that in principle any number of dividing sections and arbitrarily shaped dividing sections can be provided in order to obtain the required number and shape of the sealing regions.
  • the division section may be web-like. In particular, it extends essentially in a straight line.
  • the dividing section has a smaller cross section than the peripheral section.
  • the peripheral portion may have a substantially rectangular, in particular square basic shape. The corners of the above basic shape may be rounded. It is understood, however, that any other basic forms are conceivable.
  • a round, oval, square or rectangular cross-section of the molded seal offers in many cases good sealing properties at comparatively low production costs.
  • the cross-section of the molded seal may also be more complex.
  • the cross-section of the molded seal may vary locally. That it is not absolutely necessary that the molded gasket has a substantially identical cross-section and / or everywhere the same cross-sectional geometry everywhere.
  • the components to be connected each have planar connecting surfaces, so that a substantially in one plane extending mold seal proves to be suitable.
  • the molded seal can also have any three-dimensional shapes to account for complex connection geometries of the two components.
  • the first component is a main body or housing component of the vacuum pump.
  • Fig. 1 shows a molded seal 10 which is inserted into a groove 12 which is formed on a component 14 of a vacuum pump.
  • the component 14 may, for example, be a base body of a turbomolecular pump to which a further component is fastened, for example a lubricant pump.
  • the component 14 has a number of channels 16, 18 and (mounting) holes 20 which are to be connected to corresponding channels or holes of the component to be fastened.
  • the molded seal 10 is inserted into the groove 12 during assembly of the vacuum pump.
  • the one-piece molded gasket 10 is used. This comprises a peripheral portion 22 which is formed substantially square and has rounded corners. Webs 24, which are connected to side portions 26a, 26b of the peripheral portion 22, divide the area surrounded by the peripheral portion 22 into three sealing portions 28a, 28b, 28c. Each sealing area 28a, 28b, 28c is sealed off from the outer space and from the respectively adjacent sealing area.
  • the molded seal 10 has the advantage that only a specially adapted for the present design component is required, which can be used precisely in the groove 12.
  • a thickness d of the web 24 is smaller than a width s of the corresponding portion of the groove 12.
  • the peripheral portion 22 In order to prevent the mold seal 10 from accidentally falling out of the groove 12 during pre-assembly , it may be provided that the thickness d is slightly greater than the width s, so that the molded seal 10 held in the groove 12 by clamping forces is. The required clamping forces to secure against unintentional falling out of the molded seal 10 are comparatively small, so that even a small excess of the molded seal 10 with respect to the groove 12 ensures a reliable fixation of the molded seal 10.
  • the molded gasket 10 is not provided with a greater thickness d than the width s of the groove 12 in all regions. In many cases, it is sufficient to provide only one or more sections in which the thickness d is greater than that Width s.
  • the molded seal 10 is clamped in the groove 12. This is achieved, for example, in that the side sections 26a, 26b between the webs 24 are slightly shorter than the corresponding sections of the groove 12. Then, in fact, the molded seal 10 has to be slightly stretched in sections in order to be inserted into the groove 12, whereby sections the mold seal 10 are pressed against the inner sides of corresponding portions of the groove 12, which in Fig. 3 indicated by an arrow.
  • the same can also be achieved by an inverse construction in which the molded seal 10 at least in sections has a certain excess with respect to corresponding sections of the groove 12, so that parts of the molded seal 10 are pressed against an outer side of the groove 12.
  • the molded seal 10 has to be slightly compressed in this case in order to be inserted into the groove 12 can.
  • Fig. 4 clarifies that it is not absolutely necessary to design the molded gasket with respect to its thickness d everywhere the same.
  • the lands 24 are made thinner than the peripheral portion 22 (d2 ⁇ d1).
  • it can also be provided to locally vary the thickness d, d1, d2.
  • certain areas of the peripheral portion 22 constricted or thickened be formed. Thickening, for example, allow local terminal points.
  • securing sections 30 may be provided, which is described with reference to FIGS Fig. 5
  • the securing sections 30 each comprise a web 24 'which connects a pin 32 to the peripheral section 22.
  • the pins 32 are pressed into recesses provided for this purpose in the component 14 in order to form the molded gasket 10 "in the Groove 12 to fix or contribute to their fixation.
  • securing sections 30 are conceivable. These may be formed, for example, tab-like.
  • the number, configuration and arrangement of the securing sections 30 to be provided depends inter alia on the available installation space and the required reliability of the fixing.
  • the above-described molded gaskets 10, 10 ', 10 define a substantially square base area, which is divided into three sealing regions 28a, 28b, 28c by two straight and symmetrically arranged webs 24. Deviations from this design are entirely possible
  • the shape of the mold seal may be dictated by the geometry of the areas to be sealed
  • Form seal is not a substantially planar structure (see mold seals 10, 10 ', 10 "), but has a three-dimensional structure.
  • a closed sealing region 28d by a sealing section 34, wherein the sealing section 34 is connected to the peripheral section 22 with at least one connecting section 36 (eg web-like) (see molded seal 10 "'in FIG Fig. 6 ).
  • the sealing area 28d lies completely within the peripheral portion 22 which encloses a sealing area 28e surrounding the sealing area 28d.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Gasket Seals (AREA)
EP15182200.4A 2015-08-24 2015-08-24 Pompe à vide Active EP3135917B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP15182200.4A EP3135917B1 (fr) 2015-08-24 2015-08-24 Pompe à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15182200.4A EP3135917B1 (fr) 2015-08-24 2015-08-24 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3135917A1 true EP3135917A1 (fr) 2017-03-01
EP3135917B1 EP3135917B1 (fr) 2020-10-07

Family

ID=53969286

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15182200.4A Active EP3135917B1 (fr) 2015-08-24 2015-08-24 Pompe à vide

Country Status (1)

Country Link
EP (1) EP3135917B1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3470681A1 (fr) 2017-10-10 2019-04-17 Pfeiffer Vacuum Gmbh Traverse électrique pour appareil à vide, sous la forme d'une plaque de circuit imprimé

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4230710A1 (de) * 1992-09-14 1994-03-17 Goetze Ag Vorrichtung zur Abdichtung von Gehäusen
WO2001079730A2 (fr) * 2000-04-12 2001-10-25 Parker Hannifin Corporation Joint d'etancheite avec elastomere elastique et element de retenue metallique, destine a la formation d'un joint d'etancheite entre des surfaces incurvees
EP2636905A1 (fr) * 2012-03-05 2013-09-11 Sulzer Pumpen Ag Agencement de joint et pompe dotée d'un agencement de joint
EP2846044A1 (fr) * 2013-09-04 2015-03-11 Pfeiffer Vacuum GmbH Pompe à vide et système doté d'une pompe à vide
US20150204353A1 (en) * 2012-09-26 2015-07-23 Masahito Kogame Vacuum pump protection net, method for manufacturing the same, and vacuum pump

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014110078A1 (de) * 2014-07-17 2016-01-21 Pfeiffer Vacuum Gmbh Vakuumsystem

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4230710A1 (de) * 1992-09-14 1994-03-17 Goetze Ag Vorrichtung zur Abdichtung von Gehäusen
WO2001079730A2 (fr) * 2000-04-12 2001-10-25 Parker Hannifin Corporation Joint d'etancheite avec elastomere elastique et element de retenue metallique, destine a la formation d'un joint d'etancheite entre des surfaces incurvees
EP2636905A1 (fr) * 2012-03-05 2013-09-11 Sulzer Pumpen Ag Agencement de joint et pompe dotée d'un agencement de joint
US20150204353A1 (en) * 2012-09-26 2015-07-23 Masahito Kogame Vacuum pump protection net, method for manufacturing the same, and vacuum pump
EP2846044A1 (fr) * 2013-09-04 2015-03-11 Pfeiffer Vacuum GmbH Pompe à vide et système doté d'une pompe à vide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3470681A1 (fr) 2017-10-10 2019-04-17 Pfeiffer Vacuum Gmbh Traverse électrique pour appareil à vide, sous la forme d'une plaque de circuit imprimé

Also Published As

Publication number Publication date
EP3135917B1 (fr) 2020-10-07

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