EP2994762A1 - Dispositif de mise en contact électrique - Google Patents

Dispositif de mise en contact électrique

Info

Publication number
EP2994762A1
EP2994762A1 EP14715230.0A EP14715230A EP2994762A1 EP 2994762 A1 EP2994762 A1 EP 2994762A1 EP 14715230 A EP14715230 A EP 14715230A EP 2994762 A1 EP2994762 A1 EP 2994762A1
Authority
EP
European Patent Office
Prior art keywords
contact
contacting device
electrical
elements
electrical contacting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14715230.0A
Other languages
German (de)
English (en)
Inventor
Gunther Böhm
Georg Steidle
Wolfgang Schäfer
Achim Weiland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Feinmetall GmbH
Original Assignee
Feinmetall GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Feinmetall GmbH filed Critical Feinmetall GmbH
Publication of EP2994762A1 publication Critical patent/EP2994762A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/70—Coupling devices
    • H01R12/71—Coupling devices for rigid printing circuits or like structures
    • H01R12/712—Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit
    • H01R12/714—Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit with contacts abutting directly the printed circuit; Button contacts therefore provided on the printed circuit
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/70—Coupling devices
    • H01R12/91—Coupling devices allowing relative movement between coupling parts, e.g. floating or self aligning

Definitions

  • the invention relates to an electrical contacting device for an electrical contact contacting of a test object, in particular a wafer, which takes place in a contacting direction, comprising at least one conductor substrate electrically connectable to a test device, at least one contact spacing transformer and at least one electrical contact element, in particular resilient contact elements Compensation of different, in contact direction especially at the contact elements existing contact contact intervals serving contact head.
  • An electrical contacting device of the type mentioned is known from US 5952843 A.
  • This contacting device has a conductor substrate which cooperates electrically with a contact spacing transformer, which is in electrical connection with a contact head, with which an electrical specimen can be tested.
  • contact elements of the contact head in touch contact make contact with corresponding test object contacts.
  • test circuits are switched to test the device under test for electrical functionality.
  • the field of application of the known contacting device is limited, in particular in the case of a very narrow contact position of the test object contacts of the test object.
  • the invention is therefore an object of the invention to provide an electrical contactor of the type mentioned, the is versatile.
  • the electrical contacting device should also be usable without problems even in the case of a very narrow contact position of the test object contacts.
  • This object is achieved in consideration of the above-mentioned electrical contacting device characterized in that the contact head between the conductor substrate and the Kunststoffabstandstrans- former is arranged.
  • a contact contacting of the test object takes place by means of the contact distance transformer.
  • the compensation of different contact contact distances (in particular by unevenness, imbalances and so on) of the contact elements requires a corresponding space which is present in the subject matter of the invention, as from the conductor substrate Seen in the direction of the test specimen - the contact paths have a sufficient gap between them, since they are substantially reduced in the contact contact transformers adjoining the contact head in the direction of the specimen.
  • the compensation of this imbalance ie the resulting different contact distances, does not have to take place in an extremely narrow space, but in the region of the contact distances or also in the region of the contact distances that are greater than the test object contact distances , as between the contact head and DUT still the contact distance transformer is located, which serves to reduce the contact distances in the direction of the DUT.
  • the contact elements are resilient as essentially in the contacting direction or are formed in the contact direction spring-acting spring contact elements substantially. If the contact elements are, in particular, contact elements extending in the contacting direction or approximately in the contact direction, particularly preferably so-called kink wires, their mutual contact is due to the invention and the associated relatively large distances between the contact elements, in particular if they are designed as non-insulated kink wires Not to be feared, so that electrical short circuits are not to be feared. Due to the invention, a relatively large-sized compensation existing contact contact distances (in the axial direction, ie in Kunststoffierraum) is possible without the spring action of the spring contact elements designed as contact elements is impaired.
  • the contact elements can also be made sufficiently stable, so that reliable contact contact comes about (in particular by means of the contact distance transformer), since a correspondingly high spring force acts on account of the stable design, ie the respective contact is correspondingly larger Contact force realized, whereby a secure contact is possible.
  • the relatively stable design of the contact elements of the invention allows a correspondingly high current load, which does not lead to an inadmissible heating and thus also to measurement errors.
  • test contacts for the electrical contact contacting of the test piece are displaceably held on the contact spacing transformer, or that test contacts for the electrical contact contact of the test object are fixed to the contact spacing transformer, the test contacts each being in the form of rigid test contacts or as resilient test contacts are formed, in particular as in Maisierraum rigid test contacts or as resilient in Maisierraum or resiliently formed in Kunststoffierraum test contacts are formed.
  • the mobility of the test contacts allows, for example, to compensate for minor unevenness an improvement in the touch contact.
  • slidably held test contacts can be removed from the contact spacing transformer in a simple manner in order, for example, to exchange them for new test contacts in the event of a defect.
  • test contacts do not have the mentioned displacements.
  • the test contacts can be designed as rigid test contacts or as resilient test contacts. In the case of rigid test contacts, they do not compensate for unevenness and so on.
  • Springy test contacts can compensate for comparatively small unevenness and so on in the case of contact contacting.
  • the contact elements are in touching contact with the test contacts or that the contact elements are electrically connected to the test contacts by means of non-detachable connections or that the contact elements and the test contacts are integrally formed with each other. If the mentioned contact contact, so has the contactor on this and another contact contact, namely the between the contact distance transformer and the DUT. Another contact may be between the contact head and the conductor substrate.
  • the non-detachably interconnected contact elements and test contacts form a unit, which is brought about for example by gluing, soldering, welding, in particular cold welding. Another alternative is the integral nature of the contact elements with the test contacts, which in particular creates very low-resistance current paths.
  • the contact distance transformer by means of a spring bearing in Kunststoffierraum resiliently or im Is arranged substantially resiliently in Kunststoffier direction or that the Kunststoffabstandstransformer displaceable in the contact direction or substantially displaceably arranged in the contact direction by means of a guide bearing and is resiliently supported by means of substantially resilient in contact direction or substantially spring-acting in Maisierraum spring contact elements.
  • the contact head is preferably arranged stationary.
  • the conductor substrate is preferably also arranged stationary.
  • the test object for carrying out the touch contact is moved in the direction of the electrical contacting device until the contact contact takes place.
  • the electrical contacting device can also be moved in the direction of the stationary test object.
  • the guide bearing is also a kind of spring mounting, which arises because the contacting device is displaceable by means of the guide bearing only displaceably, that is not against a spring bearing inherent in the guide bearing, but the spring contact elements act resiliently in the contacting direction Kunststoffabstandstransformer together, whereby this along the displacement of the guide bearing also a receives resilient property, and / or it is provided the separate spring means.
  • a center-centering device is provided for the contact-distance transformer.
  • the spring bearing or the guide bearing forms the centering device for the contact distance transformer with.
  • the spring mounting has at least one leaf spring element.
  • This leaf spring element permits a resilient mounting of the contact spacing transformer acting in the contacting direction or in the substantially contacting direction.
  • the spring element has a leaf surface which extends transversely, in particular at right angles or substantially at right angles to the (axial) contacting direction.
  • the leaf spring element is slidably inserted with a first end portion in a lying on one side of the Kunststoffabstandstransformers side recess and that another, further end portion of the leaf spring element is stationary and / or held directly or indirectly on the contact head.
  • the mentioned indirect holding at the contact head takes place by interposing at least one further component.
  • the first end region of the leaf spring element can be resiliently displaced toward the further end region, in particular the second end region of the leaf spring element. This is transverse, in particular at right angles, to the leaf surface, in particular in the axial direction, whereby the spring bearing is achieved. If a corresponding deflection of the spring bearing, so the first end portion can move slightly in the side recess radially. This is necessary for the displacement in the contacting direction.
  • a development of the invention provides that at least two, preferably three or four, are each provided a particular acute angle between them, with their first end portions converging leaf spring element are provided, in particular formed on a leaf spring leaf spring elements are provided in on different sides of Kunststoffabstststransformers lying side recesses are slidably inserted plugged. Either it is about a plurality of individual leaf spring elements, which are each set for themselves at their other, in particular second end portions and with their first end portions hold the Needlesabstandstransfornner or the leaf spring elements are formed together on one and the same leaf spring.
  • their angular offset arrangement to each other they create, especially when it comes to three or more Blattfe- derimplantation, a centering of Maisabstands- transformers, so form the spring mounting on the one hand and the centering on the other.
  • the leaf spring has a multi-clover-shaped, in particular triangular-leaf-like or four-clover-shaped, opening, wherein one of the leaf-spring elements is formed between each two adjacent leaves of the cloverleaf. Accordingly, the plurality of leaf spring elements are formed integrally with each other on the leaf spring.
  • each of the leaf spring elements with the associated side recess forms a radial bearing for a radially displaceable bearing of the contact spacing transformer. This function has already been discussed above.
  • each radial bearing transversely, in particular perpendicular or substantially perpendicular, extends to the contacting direction representing the axial direction.
  • a development of the invention provides that the contact elements of the contact head are designed and / or arranged such that the contact head forms a further contact distance transformer.
  • the aforementioned contact spacing reduction of the first-mentioned contact spacing transformer is thus supported by the contact head, which forms the further contact spacing transformer.
  • the arrangement is such that the substantial contact pitch reduction of the former Druckabstandstransformer is formed, while a contrast smaller contact distance reduction by means of the further contact distance transformer is thus achieved by means of the contact head.
  • the spring constant of at least one of the contact elements is greater or smaller than the spring constant of the associated or respectively associated test contact. A stronger spring effect is thus achieved by the at least one contact element, while a less powerful-acting spring effect is achieved by the associated or respectively associated test contact ("larger”, in particular FIG. 8) or vice versa ("smaller”, in particular FIG. 6).
  • the arrangement may preferably be such that the spring travel of at least one of the test contacts is limited by means of a stop before the entire spring travel of the associated or respective associated spring contact element has been passed through. Consequently, during the compression process, the test contact under consideration springs into contact contact as a result of the differently sized spring constants, along a larger spring travel than the associated contact element. In the course of the further compression, the test contact comes to the mentioned stop, with the result that he now no further spring-loaded or only slightly further spring-loaded and thus in increasing the loading. RhackungsAuthierkraft now only or substantially only the deflection of the contact element takes place. Thus, the resulting from the test contact and the contact element spring characteristic (travel over force) has a kink, from which - in a further increase in the spring travel - the force increases sharply.
  • Figure 1 shows a first embodiment of an electrical
  • FIG. 3 shows a detail of the contacting device of FIG. 2
  • Figure 4 shows another embodiment of an electrical
  • Figure 5 shows another embodiment of an electrical
  • Figure 6 shows another embodiment of an electrical
  • Figure 7 shows another embodiment of an electrical
  • Figure 8 shows another embodiment of an electrical
  • FIGS. 9 to 11 Details of the contacting device of FIG. 8
  • FIG. 12 shows a contact spacing transformer of one of the above contacting devices
  • Figure 13 is a side sectional view of the arrangement of
  • FIG. 14 shows a contacting device with the contact spacing transformer of FIGS. 12 and
  • Figure 15 shows the arrangement of Figure 14 in disassembly position.
  • 1 shows - in a schematic representation - an electrical contacting device.
  • the contacting device 1 has a conductor substrate 2, a contact head 3 and a contact spacing transformer 4.
  • the contacting device 1 serves to test an electrical specimen 5, in particular wafer, for electrical functional capability.
  • the test object 5 can be electrically contacted by means of the contacting device 1 in order to switch test current paths.
  • the conductor substrate 2 can preferably be embodied as a printed circuit board 7, which has conductor tracks 8, which on the one hand are electrically connected to the electrical connections 6 and on the other hand lead to contact fields (pads), which interact with electrical contact elements 9 of the contact head 3.
  • the contact head 3 has at least two guide plates 10, 1 1, which are spaced apart by means of a spacer 12.
  • the guide plates 10, 1 1 are provided with guide holes 13, 14, in which the contact elements 9 are slidably inserted.
  • the contact elements 9 are designed as resilient contact elements 16 in the contacting direction 15, in particular as bend wires 17. This means that the buckling wires 17 between the two guide plates 10 and 1 1 have at least one bend.
  • the resilient property is given to the buckling wires 17 by the bending and by their material properties.
  • the contact distance transformer 4 has a main body 18, on which - in the direction of the test piece 5 facing - test contacts 19 are attached.
  • the test contacts 19 are electrically connected to electrical connections 20, which are guided to an upper side 21 of the main body 18 and can cooperate there with the electrical contact elements 9 of the contact head 3.
  • the specimen 5 has slaughters Scotlande 22 which protrude like a column in this embodiment and can cooperate with the test contacts 19 of the Kunststoffabstandstransformers 4. It can be seen from FIG. 1 that the electrical connections 20 on the side of the test contacts 19 have a narrower contact spacing than on the upper side 21, ie, the contact spacing is reduced in the direction of the test object 5. Not every contact element 9 must be assigned an electrical connection 20, as can be seen in FIG.
  • the contacting device 1 and the specimen 5 are shown only in two dimensions. This means that the spatially especially matrix-like contact arrangement said components is only two-dimensionally visible.
  • several embodiments of this application show a contact head 3, in which the electrical contact elements 9 are substantially parallel to one another, that is to say have no contact gap change. Only in the embodiment of Figure 8 can be seen that the contact elements 9 in the region of the guide plate 1 1 have a closer contact spacing than in the region of the guide plate 10. This has the consequence that the contact head 3 forms a further Maisabstandstransformer 23.
  • FIG. 1 shows the contacting device 1 in the non-contacted state
  • FIG. 2 shows the contacting device 1 in the contacted state, ie, the test object 5 is touch-contacted in order to be able to test it for electrical functionality.
  • the conductor substrate 2 is not shown.
  • the test object contacts 22 of the test object 5 For the electrical contact contacting of the test object contacts 22 of the test object 5, the latter is moved in the direction of the contacting device 1 according to arrow 24 (FIG. 2), so that the test contacts 19 are placed on the test object contacts 22.
  • the test object 5 is located on a lifting table (not shown) which can be displaced in the contacting direction 15.
  • FIG. 1 shows the contacting device 1 in the non-contacted state
  • FIG. 2 shows the contacting device 1 in the contacted state, ie, the test object 5 is touch-contacted in order to be able to test it for electrical functionality.
  • the conductor substrate 2 is not shown.
  • test contacts 19 consist of a plurality of contact elements 25 which are provided with bevels 26.
  • the ramps 26 are based on theticianscard 22 and cause a corresponding elastic see Spreitzung the contact elements 25, with the result that this - in Kunststoffier exercises 15 - a certain spring action is formed to compensate for differences in contact between theticians giftede 22 and unevenness of the specimen 5.
  • This axial suspension is only relatively minor, but helps to achieve a clean and low-impedance fürlingsAuthtechnik ist.
  • the test contacts 19 are preferably crown contacts (see FIGS. 1 to 3).
  • the contact head 3 is located between the conductor substrate 2 and the contact spacing transformer 4.
  • the contact distance transformer 4 establishes electrical contact with the electrical test object 5 to be tested, and the conductor substrate 2 can be electrically connected to the test device (not shown).
  • the spring travel taking place in the contacting direction 15 is essentially formed by the contact head 3, that is to say by the electrical contact elements 9, in order for example to compensate for imbalances.
  • This principle applies to all embodiments of the invention, ie, larger axial spring travel are realized by the contact head 3, while the contact distance transformer 4, in particular the test contacts 19, realize only small spring travel.
  • FIG. 4 shows a further exemplary embodiment of a contacting device 1 which essentially corresponds to the embodiment of FIGS. 1 and 2. Reference is therefore made to the corresponding, above statements.
  • FIG. 5 shows a further exemplary embodiment of a contacting device 1, which substantially corresponds to the contacting device 1 of FIGS. 1 and 2. Reference is therefore made to the corresponding, above statements.
  • the test contacts 19 designed as crown contacts, axially resilient test contacts 19 are provided. These can be designed as axial springs, bent wires, Cobra contacts or curved, provided with at least one slot contact elements (striped beams).
  • the test contacts 19 can be arranged fixed at the contact distance transformer 4 or they are detachably mounted there.
  • FIG. 6 shows a further exemplary embodiment of a contacting device 1, which essentially corresponds to the contacting device 1 of FIGS. 1 and 2. Reference is therefore made to the corresponding, above statements. The only difference is the design of the contact distance transformer 4.
  • This has - according to Figure 6 - a base body 18 with electrical connections 20, as was already described in the embodiment of Figures 1 and 2.
  • the test contacts 19 are as resilient or rigid contact needles 28 are formed.
  • resilient contact needles 28 are shown by these are arcuately extending and can compress in the contact contacting of the test piece 5 in the contact direction 15.
  • the contact needles 28 are displaceably mounted in guide bores 29 of a guide plate 30, wherein the guide plate 30 are secured by means of holding elements 31 to the base body 18.
  • a contact contact is effected by means of the electrical contact elements 9 with the conductor substrate 2 (not illustrated). Furthermore, there is contact contact with the contact elements 9 with the electrical connections 20.
  • the electrical connections 20 are electrically and mechanically connected to the contact needles 28. This connection preferably takes place by means of non-detachable connections, in particular soldering, welding, gluing or the like. Alternatively, a one-piece design of the electrical connections 20 with the contact pins 28 is conceivable.
  • FIG. 7 shows a contacting device 1, which substantially corresponds to the embodiment of Figure 6 in conjunction with the embodiments of Figures 1 and 2. Reference is therefore made to the corresponding statements above.
  • the resilient (because arc-shaped) extending contact needles 28 are displaceably guided not only in the direction of the test piece 5 in guide bores 29 of a guide plate 30, but also displaceably in guide bores 32 of a further guide plate 33, which is adjacent to the main body 18, store.
  • FIG. 8 shows an exemplary embodiment of a contacting device 1, which essentially corresponds to the exemplary embodiment of FIGS 2 corresponds. Reference is therefore made to the corresponding, above statements.
  • This is in the embodiment of Figure 8 similar to the contact head 3 is formed by having two spaced-apart guide plates 34 and 35, the guide holes 36, 37 have, which formed as kink wires 38 scholarheften 19 are interspersed.
  • the bending wires 38 are displaceably mounted both in the guide bores 36 and in the guide bores 37.
  • FIGS. 9 and 10 illustrate that the buckling wires 38 each cooperate with a stop 39. This may be a stop wall. If a buckling wire 38 is deflected, then it bends further according to FIGS. 9 and 10, wherein the increasing deflection abuts against the stop 39 (arrow 40). This limits the compression travel.
  • the arrangement is preferably such that the spring constant of the contact elements 9, in particular the buckling wires 17, is greater than the spring constant of the bend wires 38. This has the consequence that a characteristic according to the diagram of Figure 1 1 results.
  • the force K (spring force) is plotted on the spring travel F. It can be seen that, initially during compression, essentially the spring constant of the buckling wire 38 acts until the buckling wire 38 occurs against the stop 39. From there, the spring characteristic increases steeply at a crease, since now dominates the spring constant of the buckling wire 17.
  • the contact spacing transformer 4 is resiliently arranged in the contacting direction 15 or substantially resiliently in the contacting direction 15.
  • a spring bearing 41 is provided.
  • An embodiment of the spring bearing 41 is shown in FIG.
  • the spring bearing 41 has a leaf spring 42, which has a Merkleeblattartigen breakthrough 43.
  • a sackleeblatt- like breakthrough 43 is between each two adjacent leaves 44 of the aperture 43.
  • each have a leaf spring member 45 is formed like a tongue.
  • the leaf spring elements 45 have end regions 46 which converge toward one another and which are arranged so as to be displaceable in side recesses 47 of the base body 18. This embodiment is also apparent from the figure 13.
  • the leaf spring 42 can be fastened to the contact head 3 on the outside edge by means of holding elements 49. Furthermore, it is additionally or alternatively conceivable, but not necessary, for the leaf spring elements 45 to be provided somewhat in the direction of the test object.
  • the contact-spacing transformer 4 is resiliently displaced in the direction of contact head 3 in the contact direction 15, and upon termination of the contact contact, the contact distance transformer springs 4 back to its original position.
  • the arrangement may be such that an easy replacement of the leaf spring 42 can take place, in particular by the leaf spring 42 are released from the support members 49 and the inserted in the side recesses 47 only with their end portions 46 leaf spring elements 45 are pulled out. This can be done for example by axial strong pressure. In a corresponding manner, a new leaf spring 42 can be mounted.
  • a main contact head namely the contact head 3.
  • a further plane is used, in which a reduction of the contact distance in the direction of the test object 5 to be tested takes place. It is important that this plane is adjacent to the test piece 5, that is, that the contact head 3 is arranged between the conductor substrate 2 and the contact gap transformer 4.
  • the contact distance transformer 4 is used in the context of taktmaschine executes a stroke, so that it is so arranged displaceable in the contact direction 15, in particular resiliently displaceable.
  • test contacts 19 can be realized differently, for example as bellows-like contact needles, in particular made of metal or of non-conductive or weakly conductive material with a metallic or highly conductive surface.
  • buckling-beam-like contact needles can also be used which exploit the principles of the Eulerian buckling fall.
  • cobra-type vertical (axial) contact needles can be used which exploit self-bending.
  • horizontally-resilient (radially-resilient) contact needles according to the cantilever principle can be used, wherein the resilient member consists of one or optionally a plurality of parallel to each other and arranged perpendicular to the desired spring direction elements.
  • contact elements according to the striped-beam principle with a plurality of predominantly vertically (axially) aligned slats can be used, wherein the cross section is designed so that the direction of the rebound is predetermined.
  • crown-type contact needles are used, which are slotted in the direction of the specimen or formed in several pieces and realize by spreader a small spring travel.
  • a printed circuit board in particular organic printed circuit board or ceramic circuit board can be used.
  • the use of a wafer with plated through holes is possible.
  • the contact spacing transformer 4 can be designed in such a way that an axial relative movement to the main contact head, that is to the contact head 3, occurs during each contact stroke.
  • the arrangement can also be made such that by resilient mounting of the contact spacer transformer 4 also in the non-test In the contacting state, a force is applied by the contact gap transformer 4 to the contact head 3, whereby a contact pressure is exerted on the electrical contact elements 9 of the contact head 3.
  • the aforementioned centering of the Kunststoffabstands- transformers 4 can also be realized in other ways, for example, by pins that extend in the contact direction 15 and engage in slots of the Kunststoffabstandstransformers 4.
  • the elongated holes are aligned in the longitudinal direction of the center, ie on the center of the Kunststoffabstandstransformers 4.
  • passive (capacitors, resistors, coils) or active (transistors, microelectronics) components may be present, which are either integral, ie provided as an integral part of Maisabstandstransformers 4 or applied thereto. Due to the design of the suspension of the Kunststoffabstandstransformers 4, so for example by means of the leaf spring 42, or on other by the average expert easy to implement measure, if he knows the basic principle of resilient mounting, a bias in the direction of the contact head 3 can be realized. The force-displacement characteristic of the contact distance Transformers 4 against the electrical contact elements 9 of the contact head 3 can be adjusted by appropriate realization of this spring in shape and pitch. A leveling can be realized so easily.
  • the contact elements 9 of the contact head 3 can - as shown in the figures - consist of axially extending spring elements, but there are also other possibilities conceivable, in particular a cantilever design, in particular of wire, for example tungsten alloys, a micro Cantilever direction (in LIGA Technology, for example of nickel alloys), as a membrane, pressurized with compressed air or sprung with a polymer cushion, made mainly of axial, in particular vertically oriented bending elements, guided in plates as shown in the figures, or freestanding, made of wire or in LIGA Technology, optionally according to the striped beam principle, ie as laminated contact elements.
  • a cantilever design in particular of wire, for example tungsten alloys, a micro Cantilever direction (in LIGA Technology, for example of nickel alloys), as a membrane, pressurized with compressed air or sprung with a polymer cushion, made mainly of axial, in particular vertically oriented bending elements, guided in plates as shown in the figures, or freestanding, made of
  • connection points between the spring elements (contact elements) of the contact head 3 and those in the spring-mounted Kunststoffabstandstransfor- mer 4 may be a pure physical contact.
  • the spring-mounted Kunststoffabstandstransformer 4 can be easily exchanged.
  • it may also be a non-releasable connection instead of the touch contact. It is also possible that these two spring elements are formed from one component.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

L'invention concerne un dispositif de mise en contact électrique (1) permettant une mise en contact électrique physique dans une direction de mise en contact (15) d'un élément à tester (5), en particulier d'une tranche. Ledit dispositif comprend au moins un substrat conducteur (2) pouvant être connecté électriquement à un dispositif de test, au moins un transformateur de distance de contact (4) et au moins une tête de contact (3) comportant des éléments de contact électrique (9) et servant en particulier à compenser des distances de contact physique différentes dans la direction de mise en contact (15) au niveau des éléments de contact (9). Selon l'invention, la tête de contact (3) est agencée entre le substrat conducteur (2) et le transformateur de distance de contact (4).
EP14715230.0A 2013-05-08 2014-03-25 Dispositif de mise en contact électrique Withdrawn EP2994762A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013008324.9A DE102013008324A1 (de) 2013-05-08 2013-05-08 Elektrische Kontaktiervorrichtung
PCT/EP2014/055890 WO2014180596A1 (fr) 2013-05-08 2014-03-25 Dispositif de mise en contact électrique

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US (1) US9863978B2 (fr)
EP (1) EP2994762A1 (fr)
JP (1) JP6132977B2 (fr)
CN (1) CN105308465A (fr)
DE (1) DE102013008324A1 (fr)
WO (1) WO2014180596A1 (fr)

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US9863978B2 (en) 2018-01-09
WO2014180596A1 (fr) 2014-11-13
US20160109483A1 (en) 2016-04-21
CN105308465A (zh) 2016-02-03
JP2016522404A (ja) 2016-07-28
DE102013008324A1 (de) 2014-11-13
JP6132977B2 (ja) 2017-05-24

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