EP2932213A1 - Vorrichtung und verfahren zur messung einer ortsaufgelösten temperaturverteilung - Google Patents
Vorrichtung und verfahren zur messung einer ortsaufgelösten temperaturverteilungInfo
- Publication number
- EP2932213A1 EP2932213A1 EP13805824.3A EP13805824A EP2932213A1 EP 2932213 A1 EP2932213 A1 EP 2932213A1 EP 13805824 A EP13805824 A EP 13805824A EP 2932213 A1 EP2932213 A1 EP 2932213A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- spatially resolved
- radiation
- pyrometer
- temperature
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000009826 distribution Methods 0.000 title claims abstract description 76
- 238000000034 method Methods 0.000 title claims abstract description 19
- 230000005855 radiation Effects 0.000 claims abstract description 46
- 238000005259 measurement Methods 0.000 claims abstract description 44
- 238000003384 imaging method Methods 0.000 claims abstract description 43
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 21
- 230000003595 spectral effect Effects 0.000 claims description 32
- 230000035945 sensitivity Effects 0.000 claims description 21
- 238000012545 processing Methods 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000000875 corresponding effect Effects 0.000 description 11
- 238000012937 correction Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013178 mathematical model Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0077—Imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J2005/106—Arrays
Definitions
- the present invention relates to a device for measuring a spatially resolved temperature distribution, which comprises an imaging detector and a pyrometer, wherein the imaging detector is adapted to provide a spatially resolved intensity distribution k from the electromagnetic radiation originating from a region A of a measurement object, wherein the Pyrometer has a radiation-sensitive sensor which is set up such that it provides a reference temperature ⁇ , at least for a predetermined, within the region A measuring field i, wherein the detector and the sensor for the measurement of electromagnetic radiation at least partially overlapping wavelength ranges are established ,
- the present invention further relates to a method for the measurement of a spatially resolved temperature distribution GL.
- thermographic cameras which detect the electromagnetic radiation emitted by a measurement object in the infrared wavelength range with a detector constructed in a matrix-like manner.
- the intensity is determined by the electromagnetic radiation impinging on the respective matrix or detector element.
- the measured radiation intensity is then assigned a temperature according to a predetermined physical model.
- the disadvantage is that the temperature determined in this way with conventional thermographic cameras strongly depends on the emissivity and the surface quality of the object to be measured. Any foreign objects, such as dust particles or water droplets, between the test object and the camera lens also influence the intensity or temperature measurement.
- thermographic cameras the temperature of a measurement object is often subject to temporal variations, which can often be detected only insufficiently by the slowly reacting detectors of the thermographic cameras. This often leads to the fact that the temperature distributions determined with conventional thermographic cameras are very inaccurate and unsuitable for many applications.
- thermographic cameras it is generally possible to determine a temperature using pyrometers which are known per se, in particular with ouiotic pyrometers, which do not have the absolute te intensity of the radiation but the ratio of the intensities in closely adjacent or overlapping spectral regions determine.
- pyrometers which are known per se, in particular with ouiotic pyrometers, which do not have the absolute te intensity of the radiation but the ratio of the intensities in closely adjacent or overlapping spectral regions determine.
- other 2-channel or multichannel (multispectral) pyrometers are also contemplated for use with the present invention.
- the present invention will hereinafter be described primarily with reference to a quotient pyrometer, which in any case represents a preferred embodiment.
- the invention also includes devices of the above-mentioned type which use a different type of pyrometer.
- pyrometers on the one hand are very accurate temperature measuring devices, on the other hand always only detect temperatures more or less punctually, and thus are not suitable as such for the direct
- a quotient pyrometer has at least two sensor elements or partial sensors, which are designed for the measurement of each wavelength range.
- the temperature of the measured object can be deduced from the relationship between the values determined using the sensor elements and Planck's Law of Radiation. Instead of the Planck's Law of Radiation or in addition thereto correction functions and modifications or approximations, such as the Wien's law of displacement, Rayleigh-Jeans Law or the Stefan Boltzmann Law. If variations in the emissivity and in the surface quality of the measurement object are equally effective in both measured wavelength ranges, ie are wavelength or color neutral, a quotient pyrometer can be used to measure a temperature that is independent of other properties of the measurement object.
- the sensor elements or partial sensors of a quotient pyrometer will be described in the following as far as it does not depend on a distinction of the sensor elements, summarized as a "sensor" of the quotient pyrometer.
- an imaging device for measuring a spatially resolved temperature distribution and a corresponding method which is suitable for the measurement of a spatially resolved temperature distribution and inexpensive to manufacture.
- the number of components required for the realization of such a device should be reduced. be graced.
- a goal to be achieved is that the device enables a rapid or quasi-continuous measurement of a spatially resolved temperature distribution.
- a device having the features mentioned in the introduction, which detects the maximum intensity 1, in the partial area i 'and assigns the reference temperature ⁇ in a partial area i' of the spatially resolved intensity distribution li_ comprising the predetermined measuring field i, wherein a calibration module is provided, which in operation, based on the at least one measured value pair ( ⁇ ,, ⁇ ,) and a predetermined approximation function F (k, ( ⁇ ,, I,)) assigns each value of the spatially resolved intensity distribution k a temperature ⁇ _.
- the imaging device proposed according to the invention combines the advantages of an imaging detector for the measurement of a spatially resolved intensity distribution L with the advantages of a (quotient) pyrometer, which selectively determines an exact temperature ⁇ . Both an elaborate scanning of the measurement object with a single quotient pyrometer and the use of a large number of quotient pyrometers can thus be avoided.
- the electromagnetic radiation originating from a region A of a measurement object is detected by the imaging detector, which during operation provides a spatially resolved intensity distribution k of this radiation.
- the spatially resolved intensity distribution k corresponds to an image of the region A of the measurement object.
- An imaging chip for example a CCD chip, can be used as the imaging detector.
- a reference temperature ⁇ can be measured and provided during operation for at least one predetermined measuring field i within the region A.
- the measured reference temperature ⁇ corresponds to the maximum temperature in the measuring field i, which can be measured with a quotient pyrometer with a high degree of accuracy.
- the predetermined measurement field i corresponds to a section of the region A of the measurement object and is therefore generally much smaller than the region A.
- the measurement field i is further associated with a partial area i 'of the spatially resolved intensity distribution k, which includes the measurement field i and preferably with this matches and thus approximately in the same section of the region A of the measurement object. It makes sense if the subarea i 'and the measuring field i in Are substantially equal in size, so that their measurements are to be assigned to the electromagnetic radiation approximately at the same place of origin. In any case, the predetermined measurement field i should be within the subrange i '.
- the assignment of measuring field i and partial region i 'of the spatially resolved intensity distribution L can be realized optically, mechanically, electrotechnically and / or image processing technology, as long as it is ensured that they reflect at least approximately the same origin of the radiation.
- a measured value pair ( ⁇ ,, ⁇ ,) can be formed from the reference temperature ⁇ determined for the measuring field i, and the maximum intensity I, the spatially resolved intensity distribution L measured in the partial region i '.
- a value can be assigned to each value of the spatially resolved intensity distribution L using a calibration module, so that the spatially resolved intensity distribution L is transferred to a spatially resolved temperature distribution ⁇ _.
- an approximation function F for example, Planck's law of radiation and / or changes thereof can be used. Other approximations, correction functions, physical and / or mathematical models describing a relationship between radiation intensity and temperature and as discussed above may also be used. It is understood that the use of exactly one predetermined measuring field i and an associated subarea i 'of the spatially resolved intensity distribution L, ie exactly one pair of measured values ( ⁇ , Ii) is sufficient to use the predetermined approximation function F to resolve the spatially resolved intensity distribution k into a spatially resolved temperature distribution ⁇ _ to convict. However, additional measured value pairs can also be used for calibration in order to increase the accuracy of the approximation. Individual measuring fields i and their corresponding partial regions i 'can also overlap.
- the imaging detector and the radiation-sensitive sensor of the quotient pyrometer are each designed to measure at least partially overlapping wavelength ranges, ie one have at least partially overlapping spectral sensitivity.
- a spectral filter is therefore provided in the beam path in front of the imaging detector whose spectral passband substantially corresponds to the spectral sensitivity of the radiation-sensitive sensor of the quotient pyrometer.
- the imaging detector can be selected such that it has a spectral sensitivity that essentially corresponds to the spectral sensitivity of the radiation-sensitive sensor.
- the spectral filter can also be a daylight filter for filtering out the daylight or the ambient light.
- the radiation-sensitive sensor has a spectral sensitivity in the wavelength range from 0.3 ⁇ to 2.0 ⁇ , preferably a first partial sensor with a spectral sensitivity in the range of 0.7 ⁇ up to 1, 1 ⁇ , and a second partial sensor with a spectral sensitivity in the range of 0.95 ⁇ up to and including 1, 1 ⁇ .
- the accuracy of the spatially resolved temperature distribution OL can be improved if, as in one embodiment, an optic is provided which emits the electromagnetic radiation originating from the region A of the measurement object in the vertical incident radiation on the imaging detector and corresponding to the predetermined measurement field i also in the vertical Radiation incident on the radiation-sensitive sensor of the quotient pyrometer.
- An optical system for imaging with a radiation incidence perpendicular to the sensor surface ensures that the images on the imaging detector and the radiation-sensitive sensor are substantially distortion-free.
- the calibration module is connected to an image processing module in such a way that, during operation, the spatially resolved temperature distribution OL can be reworked.
- the at least one measurement field i can be assigned to a subarea i 'of the spatially resolved intensity distribution L determined with the imaging detector, or the assignment can be corrected and / or adjusted.
- the spatially resolved temperature distribution OL, the spatially resolved intensity distribution k and / or regions thereof image processing technology for example, with image filters, post-processed and z. B. converted into a false color representation.
- the calibration module and / or the image processing module is suitable for the continuous provision of a spatially resolved temperature distribution OL, for example in the form of a video signal.
- the calibration module and / or the image processing module of a further embodiment is / are arranged such that, during operation of the device, at least one predetermined region of the spatially resolved temperature distribution ⁇ _ over time observable, evaluable and / or documented.
- the calibration module and / or the image processing module provide a spatially resolved temperature distribution 6> L averaged over short times. With averaged over short times (for example, up to 5 seconds) temperature distribution 6> L measurement inaccuracies can be reduced or compensated.
- averaging or smoothing of the measured values can be carried out with the image processing module not only during the measurement but also after completion of the measurement.
- the temporal course of the intensity or temperature distribution can be detected.
- the calibration module and / or the image processing module is / are set up in such a way that at least one region of the spatially resolved intensity distribution L can be processed by image processing during operation of the device.
- the temperature ⁇ measured with the radiation-sensitive sensor of the pyrometer, the spatially resolved intensity distribution L and / or the spatially resolved temperature distribution ⁇ _ can be represented and processed separately from each other.
- the device is designed in such a way that a predetermined measuring field i and the associated partial region i 'of the spatially resolved intensity distribution L lie in a central region of the region A.
- the maximum temperature of the region A and the correspondingly determined maximum intensity can be taken into account as measured value pair ( ⁇ , Ii) in the approximation function.
- the above object is also achieved by a method for measuring a spatially resolved temperature distribution ⁇ _ with a device comprising an imaging detector and a pyrometer comprising a radiation-sensitive sensor, wherein the detector and the sensor for measuring electromagnetic radiation at least partially overlapping wavelength ranges set up are, the method comprising the steps of
- the method has the additional step:
- a spectral filter which limits the electromagnetic radiation impinging on the imaging detector to a wavelength range substantially corresponding to the spectral sensitivity of the radiation-sensitive sensor and / or selection of an imaging detector having a spectral sensitivity substantially corresponding to the radiation-sensitive sensor.
- the method has the additional step:
- the method according to the invention also has the feature that the average intensity of a group of brightest pixels of the subarea i 'is determined as the maximum intensity l; This is useful because in a quotient pyrometer naturally also the brightest area within the measuring field determines the value of the intensity quotient and thus the value of the temperature determined therefrom. As a result, a particularly good assignment of the quotient temperature to the brightness of the corresponding pixels of the imaging detector is achieved.
- the group could consist of the 10% brightest pixels of the subarea i '.
- an imaging pyrometer is used with at least one of the aforementioned features essential to the invention.
- Figure 1 is a schematic representation of an imaging pyrometer according to an embodiment of the present invention
- FIG. 1 shows an embodiment of a device 1 according to the present invention.
- the device 1 To measure the electromagnetic radiation originating from a region A of a measurement object, the device 1 has an imaging detector 2 which, during operation, provides a spatially resolved intensity distribution k over the radiation.
- the spatially resolved intensity distribution L corresponds to a two-dimensional intensity image of the region A.
- the device 1 has a quotient pyrometer 3 with a radiation-sensitive sensor 4.
- the sensor 4 determines a reference temperature ⁇ , which corresponds to the maximum temperature within the measuring field i, for a measuring field i lying within the region A.
- a partial area i 'of the spatially resolved intensity distribution k is assigned to the measuring field i, with the measuring field i and the partial area i' being approximately the same size and reflecting the same place of origin of the region A.
- the partial area i ' includes the measuring field i.
- the maximum intensity I measured in the partial area i 'and the measured reference temperature ⁇ form a measured value pair ( ⁇ ,, ⁇ ,).
- a value is assigned to each value of the spatially resolved intensity distribution L by means of a predetermined approximation function F (L, ( ⁇ , I,)) and the spatially resolved intensity distribution L is thus converted into a spatially resolved temperature distribution ⁇ _.
- the imaging detector 2 and the radiation-sensitive sensor 4 are designed for the measurement of electromagnetic radiation at least partially overlapping wavelength ranges, wherein in the beam path in front of the imaging detector 2, a spectral filter 6 is arranged.
- the passband of the spectral filter corresponds to the spectral sensitivity of the radiation-sensitive sensor 4.
- the radiation-sensitive sensor 4 has, for example, two partial sensors with overlapping spectral sensitivities in the range from 0.7 ⁇ m up to and including 1: 1 ⁇ m.
- an optical system 7 which images the originating from the region A electromagnetic radiation in the vertical incident radiation on the detector 2 and also, corresponding to the measuring field i, on the radiation-sensitive sensor 4.
- FIG. 2 shows, by way of example, the relationship between the determined reference temperature ⁇ and the measured intensity I, which are used as the measured value pair (,,, ⁇ ,) as the basis for the predetermined approximation function F (IL, ( ⁇ , I,). ) for transferring the spatially resolved intensity distribution li_ be used in a spatially resolved temperature distribution ⁇ _.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201210112412 DE102012112412A1 (de) | 2012-12-17 | 2012-12-17 | Vorrichtung und Verfahren zur Messung einer ortsaufgelösten Temperaturverteilung |
PCT/EP2013/075888 WO2014095442A1 (de) | 2012-12-17 | 2013-12-09 | Vorrichtung und verfahren zur messung einer ortsaufgelösten temperaturverteilung |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2932213A1 true EP2932213A1 (de) | 2015-10-21 |
Family
ID=49766057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP13805824.3A Withdrawn EP2932213A1 (de) | 2012-12-17 | 2013-12-09 | Vorrichtung und verfahren zur messung einer ortsaufgelösten temperaturverteilung |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2932213A1 (de) |
DE (1) | DE102012112412A1 (de) |
WO (1) | WO2014095442A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2582787A (en) * | 2019-04-02 | 2020-10-07 | Impression Tech Limited | Temperature mapping apparatus and method |
JP2022540835A (ja) | 2019-07-19 | 2022-09-20 | トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 放射線を監視するための方法と装置 |
WO2021142164A1 (en) * | 2020-01-10 | 2021-07-15 | Flir Commercial Systems, Inc. | Radiometric calibration systems for infrared imagers |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE60012474T2 (de) * | 2000-03-13 | 2004-11-25 | Csem Centre Suisse D'electronique Et De Microtechnique S.A. | Bildgebendes pyrometer |
US6667761B1 (en) * | 2000-04-14 | 2003-12-23 | Imaging & Sensing Technology Corporation | Instrument visualization system |
DE102007054314A1 (de) * | 2007-11-05 | 2009-05-07 | Institut Für Mikroelektronik Stuttgart | Schaltungsanordnung zum Erzeugen von licht- und temperaturabhängigen Signalen, insbesondere für ein bildgebendes Pyrometer |
DE102010005042B3 (de) * | 2010-01-20 | 2011-07-07 | Testo AG, 79853 | IR-Temperaturmesseinrichtung und Verfahren zur Bestimmung der tatsächlichen Lage eines Messflecks einer IR-Temperaturmesseinrichtung |
-
2012
- 2012-12-17 DE DE201210112412 patent/DE102012112412A1/de not_active Withdrawn
-
2013
- 2013-12-09 WO PCT/EP2013/075888 patent/WO2014095442A1/de active Application Filing
- 2013-12-09 EP EP13805824.3A patent/EP2932213A1/de not_active Withdrawn
Non-Patent Citations (2)
Title |
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None * |
See also references of WO2014095442A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE102012112412A1 (de) | 2014-06-18 |
WO2014095442A1 (de) | 2014-06-26 |
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