EP2913533B1 - Stator disc - Google Patents
Stator disc Download PDFInfo
- Publication number
- EP2913533B1 EP2913533B1 EP15152240.6A EP15152240A EP2913533B1 EP 2913533 B1 EP2913533 B1 EP 2913533B1 EP 15152240 A EP15152240 A EP 15152240A EP 2913533 B1 EP2913533 B1 EP 2913533B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- stator disk
- sheet metal
- accordance
- individual sheet
- injection molded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002184 metal Substances 0.000 claims description 51
- 229910052751 metal Inorganic materials 0.000 claims description 51
- 238000002347 injection Methods 0.000 claims description 27
- 239000007924 injection Substances 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 20
- 238000001746 injection moulding Methods 0.000 claims description 18
- 229920000642 polymer Polymers 0.000 claims description 13
- 125000006850 spacer group Chemical group 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000005452 bending Methods 0.000 claims description 8
- 238000005520 cutting process Methods 0.000 claims description 7
- 239000000945 filler Substances 0.000 claims description 6
- 230000002787 reinforcement Effects 0.000 claims description 5
- 238000004080 punching Methods 0.000 claims description 4
- 239000011324 bead Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000005086 pumping Methods 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229920000106 Liquid crystal polymer Polymers 0.000 description 4
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000012778 molding material Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 230000002745 absorbent Effects 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004918 carbon fiber reinforced polymer Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
Definitions
- the invention relates to a stator disk for a vacuum pump according to the preamble of claim 1, in particular for a turbomolecular pump. Furthermore, the invention relates to a vacuum pump, in particular a turbomolecular pump, with at least one such stator disk and a method for producing such a stator disk according to the preamble of claim 12.
- Vacuum pumps such as Turbomolecular pumps are used to create a vacuum, for example for electron microscopes or mass spectrometers. Gas particles are accelerated by rotor disks of the turbomolecular pump and directed by stator disks in a preferred direction, which creates a flow that generates the vacuum.
- both the rotor disks and the stator disks comprise blades which are inclined to a plane perpendicular to a rotor axis and which accelerate or deflect the gas particles.
- the rotor disks are non-rotatably connected to a fast rotating shaft, the axis of rotation of which defines an axial direction of the turbomolecular pump, while the stator disks are not coupled to the shaft but are fixed to a housing of the turbomolecular pump.
- the rotor and stator disks are alternately arranged in the axial direction and spaced apart by spacer rings.
- the rotor and stator disks as well as the spacer rings are arranged on the shaft and the resulting package in introduced the housing of the turbomolecular pump. It is desirable that the stator disks in particular do not move laterally out of the package and that wedging with the housing is prevented when they are inserted into the package.
- a stator disk according to the preamble of claim 1 and a method according to the preamble of claim 12 are known.
- reference is also made to DE 699 28 866 T2 which has a turbomolecular pump with stator blades, which have a structure with relatively small curvatures, as well as EP 1 918 588 A2 , which shows a stator disk for a turbomolecular pump, which has tabs which protrude radially on the outside as a spacer ring and which protrude from the plane of the disk.
- stator disks are usually produced from a sheet metal part by means of a bending, stamping and / or cutting forming process. Such a method has significant economic advantages over the machining of stator disks.
- increasing dimensions of the stator disks entail a number of disadvantages.
- the tools required are relatively expensive.
- the stiffness of the stator washer is too low when the plate thickness is low. Thicker sheets must therefore be used, which, however, results in poorer conductance values and makes forming significantly more difficult.
- the geometries to be produced are severely limited, since open blade gaps are created by bending the blades out of the sheet metal plane.
- the invention is therefore based on the object of specifying a stator disk, a vacuum pump, in particular a turbomolecular pump, and a method of the type mentioned at the outset with which the aforementioned problems are eliminated.
- a particular stator disk should be as simple and inexpensive to manufacture as possible with high flexibility with regard to the realizable geometries of the stator disk.
- stator disk with the features of claim 1, a vacuum pump, in particular a turbomolecular pump, with the features of claim 10 and a method with the features of claim 12.
- a stator disk with the features of claim 1
- a vacuum pump in particular a turbomolecular pump
- a turbomolecular pump with the features of claim 10
- a method with the features of claim 12 Preferred embodiments of the stator disk according to the invention and the pump according to the invention as well as preferred configurations of the method according to the invention result from the subclaims.
- the stator disk according to the invention comprises at least two partially ring-shaped stator disk sections, preferably two stator disk halves, each with a plurality of sheet metal blades which follow one another in the circumferential direction.
- the partially ring-shaped stator disk sections are each formed from a plurality of individual sheet metal part segments, the individual sheet metal part segments of a respective partially ring-shaped stator disk section being connected to one another in the region of their inner and / or outer circumference by means of a common injection molding, in particular in a form-fitting manner.
- stator disk is composed of individual sheet metal parts, which are primarily connected to one another by means of injection molding technology in the area of their inner and / or outer circumference, forming tools of less complexity can be used for their production, since the individual sheet metal parts result in a correspondingly simpler geometry.
- the individual sheet metal part segments can each comprise only one or even a plurality of sheet metal blades.
- the material of the injection molded part preferably contains at least one polymer.
- This material can in particular contain at least one liquid crystal polymer (LCP polymer).
- the material of the injection molded part can contain at least one polymer with reinforcement and / or at least one polymer without reinforcement.
- the material of the injection molded part contains at least one filler material, in particular at least one filler material with increased thermal conductivity.
- the individual sheet metal part segments of a respective part-ring-shaped stator disk section are preferably connected to one another in the region of their inner and / or outer circumference via a form-fitting common injection molded part.
- the individual sheet metal part segments of a respective part-ring-shaped stator disk section are reinforced in the region of their inner circumference, in particular in the axial direction by the injection molded part or by additional injection molding material.
- the axial gaps in the area of the inner circumference of the stator disks can be reduced in connection with the rotor disks surrounding the stator disk, without the stator disks otherwise having to be made thicker.
- the surface of the injection molded part and / or of the injection molding material can be structured at least in regions in order to create a pump structure or pump-active structure on the surface.
- a corresponding structure in particular, can counteract a backflow within the pump.
- the vacuum pump according to the invention in particular turbomolecular pump, is characterized in that it comprises at least one stator disk according to the invention.
- the individual sheet metal part segments in the area of their outer circumference are connected metallically with a metallic spacer ring.
- a metallic spacer ring serves in particular for the thermal connection of the sheet metal part segments and their better integration into the pump. Because the sheet metal part segments are metallically connected to the spacer ring, they can better transfer the heat to the outer shell of the pump.
- the method according to the invention for producing a stator disk of a vacuum pump, in particular a turbomolecular pump, with at least two partially ring-shaped stator disk sections, preferably two stator disk halves, each with a plurality of sheet metal blades that follow one another in the circumferential direction, is characterized in that the partially ring-shaped stator disk sections are each formed from a plurality of individual sheet metal part segments and the individual sheet metal part segments of a respective partially ring-shaped stator disk section can be connected to one another in the injection molding process, in particular in a form-fitting manner.
- the individual sheet metal part segments of a respective part-ring-shaped stator disk section are connected to one another in the area of their inner and / or outer circumference by means of a common injection molded part.
- the individual sheet metal part segments can each be formed in particular by means of a bending, stamping and / or cutting process.
- the stator disk is thus composed of individual sheet metal parts which are primarily connected to one another by means of injection molding technology in the area of the outer and / or inner circumference.
- the complexity of the forming tool required to manufacture the stator disk is significantly reduced by the simple geometry of the individual sheet metal parts.
- the sheet metal parts produced are placed in an injection molding machine and connected to one another via an injection molding process.
- the sheet metal parts can be both individual blades and stator disk segments.
- stator disks are significantly increased. Overlaps and undercuts can be easily implemented.
- the injection molding process in particular also allows stiffening elements to be applied to the blades, as a result of which the pressing pressure required for their manufacture is significantly reduced compared to the manufacture of a complete stator disk or stator disk half. Correspondingly smaller presses can be used.
- stator disks can be made substantially stiffer in the pump-axial direction by means of advantageous injection molding geometries without the sheet thickness having to be increased.
- a metallic spacer ring can also be inserted to thermally connect the blades and to better integrate them into the vacuum pump.
- the blade parts or individual sheet metal part segments are fixed together using the injection molding process. In particular, positive connection elements can be used.
- the blades or individual sheet metal part segments can additionally be stiffened, in particular by means of one or more stiffening elements, in particular beads, produced in a bending, stamping and / or cutting process.
- the turbomolecular pump 10 shown comprises a pump inlet 14 surrounded by an inlet flange 12 and a plurality of pump stages for conveying the gas present at the pump inlet 14 to an in Fig. 1 Pump outlet, not shown.
- a rotor 18 with a rotor shaft 22 rotatably mounted about an axis of rotation 20 is arranged in a housing 16 of the turbomolecular pump 10.
- the turbomolecular pump 10 comprises a plurality of turbomolecular pumping stages, which are connected to one another in a pumping manner, with a plurality of rotor disks 24 attached to the rotor shaft 22 and stator disks 26 arranged in the axial direction between the rotor disks 24.
- the stator disks 26 are spaced apart from one another by spacer rings 28 held.
- Holweck pumping stages are arranged in the radial direction, one inside the other and connected in a pumping manner.
- the rotor-side part of the Holweck pump stages comprises one connected to the rotor shaft 22 Rotor hubs 30 and two cylindrical jacket-shaped Holweck rotor sleeves 32, 34 fastened to and supported by the rotor hub 30, which are oriented coaxially to the axis of rotation 22 and are nested one inside the other in the radial direction.
- two cylinder-shaped Holweck stator sleeves 36, 38 are provided, which are also oriented coaxially to the axis of rotation 22 and are nested one inside the other in the radial direction.
- the pump-active surfaces of the Holweck pump stages are each formed by the radial lateral surfaces of a respective Holweck rotor sleeve 32, 34 and a respective Holweck stator sleeve 36, 38 lying opposite one another, forming a narrow radial Holweck gap.
- One of the pump-active surfaces is smooth - predominantly that of the Holweck rotor sleeve 32, 34 - while the opposite pump-active surface of the Holweck stator sleeve 36, 38 has a structure with helical grooves around the axis of rotation 22 in the axial direction, in which the rotation of the Rotor 18 propels the gas and is thereby pumped.
- the rotatable mounting of the rotor shaft 22 is effected by a roller bearing 40 in the area of the pump outlet and a permanent magnet bearing 42 in the area of the pump inlet 14.
- the permanent magnet bearing 42 comprises a rotor-side bearing half 44 and a stator-side bearing half 46, each of which comprises an annular stack of a plurality of permanent magnetic rings 48, 50 stacked one on top of the other in the axial direction, the magnetic rings 48, 50 lying opposite one another to form a radial bearing gap 52.
- An emergency or catching bearing 54 is provided within the magnetic bearing 42, which is designed as an unlubricated or dry-lubricated rolling bearing and idles without contact during normal operation of the turbomolecular pump 10 and comes into engagement only in the event of an excessive radial deflection of the rotor 18 with respect to the stator, in order to form a radial stop for the rotor 18, which prevents a collision of the rotor-side structures with the stator-side structures.
- the emergency bearing 54 thus defines the maximum radial deflection of the rotor 18.
- a conical spray nut 56 is provided on the rotor shaft 22 with an outer diameter increasing toward the roller bearing 40.
- the spray nut 56 is in sliding contact with at least one scraper of an operating medium storage comprising a plurality of absorbent disks 58 stacked one on top of the other, which is connected to an operating medium such as e.g. are lubricated for the rolling bearing 40.
- the operating medium is transferred by capillary action from the operating medium storage via the wiper to the rotating injection nut 56 and, as a result of the centrifugal force along the injection nut, is conveyed in the direction of the increasing outer diameter of the injection nut 56 to the roller bearing 40, where it is, for example fulfills a lubricating function.
- the turbomolecular pump 10 comprises an engine compartment 60 into which the rotor shaft 22 extends.
- the engine compartment 60 is sealed in the region of the entry of the rotor shaft 22 by a Siegbahn stage 62 against a working or scooping space of the turbomolecular pump 10.
- the sealing can also be carried out using a labyrinth seal.
- a sealing gas inlet 64 enables a sealing gas to be fed into the engine compartment 60.
- a drive motor 66 is arranged in the engine compartment 60 and is used to drive the rotor 18 in rotation.
- the drive motor 66 comprises a motor stator 68 with a core 70 and with several in Fig. 1 only shown schematically Coils 72 which are fixed in grooves of the core 70 provided on the radial inside of the core 70.
- the core 70 consists of a laminated core with a plurality of laminated metal plates stacked on top of one another in the axial direction and made of a soft magnetic material.
- the rotor of the drive motor 77 which is also referred to as an armature, is formed by the rotor shaft 22, which extends through the motor stator 68.
- a permanent magnet arrangement 74 is fixed radially on the outside on the section of the rotor shaft 22 which extends through the motor stator 68.
- a radial motor gap 76 is formed, via which the motor stator 68 and the permanent magnet arrangement 74 influence one another magnetically for the transmission of the drive torque.
- the permanent magnet arrangement 74 is fixed to the rotor shaft 22 by means of gluing and / or shrinking and / or pressing.
- the permanent magnet arrangement 74 comprises a soft magnetic yoke 75a made of sheet iron or solid iron and a permanent magnet 75b.
- An encapsulation 80 which is designed as a CFRP or stainless steel sleeve, surrounds the permanent magnet arrangement 74 on its radial outside and seals it off from the motor gap 76.
- a balancing ring 78 is also mounted on the rotor shaft 22 by means of gluing and / or shrinking and / or pressing, which has threaded bores for receiving balancing weights.
- the balancing ring 78 has no direct mechanical connection to the permanent magnet arrangement 74 in order not to transmit any axial constraining forces to the permanent magnet arrangement 74.
- a control and power supply unit 82 is set up to supply the drive motor 66 with electrical energy during the operation of the turbomolecular pump 10.
- Fig. 2 shows a schematic cross-sectional view of part of an exemplary embodiment of a turbomolecular pump 84 according to the invention with at least one stator disk 86 according to the invention.
- FIG. 2 An exemplary embodiment of the stator disk 86 according to the invention can be seen, which is arranged between two rotor disks 90 fastened to a rotor shaft 88.
- the direction of pumping is indicated by arrows 106.
- HV indicates the high vacuum side
- VV indicates the fore vacuum side of the pump.
- the stator disk 86 comprises at least two partially ring-shaped stator disk sections 92, preferably two stator disk halves, each with a plurality of sheet metal blades which follow one another in the circumferential direction.
- the partially ring-shaped stator disk sections 92 are each formed from a plurality of individual sheet metal part segments 94.
- the individual sheet metal part segments 94 of a respective part-ring-shaped stator disk section 92 are connected to one another in the area of their inner and / or outer circumference 96 or 98, in the present case, for example, in the area of their inner circumference 96, via a common injection molded part 100.
- the individual sheet metal part segments 94 can each comprise at least one or even a plurality of sheet metal blades.
- the material of the injection molded part 100 can contain at least one polymer, in particular at least one LCP polymer.
- the material of the injection molded part 100 can contain at least one polymer with and / or at least one polymer without reinforcement.
- the material of the injection molded part 100 can in particular also contain at least one filler material, in particular at least one filler material with increased thermal conductivity.
- the axial gaps formed with the adjacent rotor disks 90 are each reduced by the injection molding 100.
- the injection molded part 100 is provided in the areas 102 with a pump-active structure, the direction of action of which is indicated by arrows 108 and which in particular has a Siegbahn geometry.
- the individual sheet metal part segments 94 can be metallically connected to a metallic spacer ring 104 in the area of their outer circumference 98.
- turbomolecular pump 84 can at least essentially be designed again like the turbomolecular pump 10 according to FIG Fig. 1 ,
- the method according to the invention relates to the production of such a stator disk 86 and is accordingly distinguished in that the partially ring-shaped stator disk sections 92 are each formed from a plurality of individual sheet metal part segments 94 and the individual sheet metal part segments 94 are connected to one another via a common injection molded part 100.
- the individual sheet metal part segments 94 can each be formed by means of a bending, stamping and / or cutting process.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Description
Die Erfindung betrifft eine Statorscheibe für eine Vakuumpumpe gemäß dem Oberbegriff des Anspruchs 1, insbesondere für eine Turbomolekularpumpe. Ferner betrifft die Erfindung eine Vakuumpumpe, insbesondere eine Turbomolekularpumpe, mit wenigstens einer solchen Statorscheibe sowie ein Verfahren zur Herstellung einer solchen Statorscheibe gemäß dem Oberbegriff des Anspruchs 12.The invention relates to a stator disk for a vacuum pump according to the preamble of
Vakuumpumpen wie z.B. Turbomolekularpumpen dienen der Erzeugung eines Vakuums, beispielsweise für Elektronenmikroskope oder Massenspektrometer. Dabei werden Gasteilchen von Rotorscheiben der Turbomolekularpumpe beschleunigt und von Statorscheiben in eine Vorzugsrichtung gelenkt, wodurch eine das Vakuum erzeugende Strömung entsteht. Zu diesem Zweck umfassen sowohl die Rotorscheiben als auch die Statorscheiben zu einer senkrecht zur einer Rotorachse verlaufenden Ebene schräg gestellte Schaufeln, die die Gasteilchen beschleunigen bzw. ablenken.Vacuum pumps such as Turbomolecular pumps are used to create a vacuum, for example for electron microscopes or mass spectrometers. Gas particles are accelerated by rotor disks of the turbomolecular pump and directed by stator disks in a preferred direction, which creates a flow that generates the vacuum. For this purpose, both the rotor disks and the stator disks comprise blades which are inclined to a plane perpendicular to a rotor axis and which accelerate or deflect the gas particles.
Die Rotorscheiben sind drehfest mit einer schnelldrehenden Welle verbunden, deren Rotationsachse eine axiale Richtung der Turbomolekularpumpe definiert, während die Statorscheiben nicht mit der Welle gekoppelt, sondern an einem Gehäuse der Turbomolekularpumpe fixiert sind. Die Rotor- und Statorscheiben sind in der axialen Richtung abwechselnd angeordnet und durch Distanzringe voneinander beabstandet.The rotor disks are non-rotatably connected to a fast rotating shaft, the axis of rotation of which defines an axial direction of the turbomolecular pump, while the stator disks are not coupled to the shaft but are fixed to a housing of the turbomolecular pump. The rotor and stator disks are alternately arranged in the axial direction and spaced apart by spacer rings.
Bei der Montage der Turbomolekularpumpe werden die Rotor- und Statorscheiben sowie die Distanzringe auf der Welle angeordnet und das so entstehende Paket in das Gehäuse der Turbomolekularpumpe eingeführt. Dabei ist es wünschenswert, dass sich insbesondere die Statorscheiben nicht seitlich aus dem Paket herausbewegen und beim Einführen in das Gehäuse ein Verkeilen mit demselben unterbunden wird.When assembling the turbomolecular pump, the rotor and stator disks as well as the spacer rings are arranged on the shaft and the resulting package in introduced the housing of the turbomolecular pump. It is desirable that the stator disks in particular do not move laterally out of the package and that wedging with the housing is prevented when they are inserted into the package.
Aus
Die Statorscheiben werden üblicherweise aus einem Blechteil mittels eines Biege-, Stanz- und/oder Schneidumformprozesses hergestellt. Ein solches Verfahren besitzt gegenüber einer spanenden Herstellung von Statorscheiben wesentliche wirtschaftliche Vorteile. Zunehmende Abmessungen der Statorscheiben bringen hierbei jedoch eine Reihe von Nachteilen mit sich. So ist das erforderliche Werkzeug relativ teuer. Bei geringeren Blechstärken ist die Steifigkeit der Statorscheibe zu gering. Es müssen daher dickere Bleche verwendet werden, womit sich jedoch schlechtere Leitwerte ergeben und die Umformung deutlich erschwert wird. Zudem sind die zu erzeugenden Geometrien stark begrenzt, da durch Aufbiegen der Schaufeln aus der Blechebene offene Schaufelzwischenräume entstehen.The stator disks are usually produced from a sheet metal part by means of a bending, stamping and / or cutting forming process. Such a method has significant economic advantages over the machining of stator disks. However, increasing dimensions of the stator disks entail a number of disadvantages. The tools required are relatively expensive. The stiffness of the stator washer is too low when the plate thickness is low. Thicker sheets must therefore be used, which, however, results in poorer conductance values and makes forming significantly more difficult. In addition, the geometries to be produced are severely limited, since open blade gaps are created by bending the blades out of the sheet metal plane.
Der Erfindung liegt somit die Aufgabe zugrunde, eine Statorscheibe, eine Vakuumpumpe, insbesondere eine Turbomolekularpumpe, sowie ein Verfahren der eingangs genannten Art anzugeben, mit denen die zuvor erwähnten Probleme beseitigt sind. Dabei soll eine jeweilige Statorscheibe bei hoher Flexibilität hinsichtlich der realisierbaren Geometrien der Statorscheibe möglichst einfach und entsprechend kostengünstig herstellbar sein.The invention is therefore based on the object of specifying a stator disk, a vacuum pump, in particular a turbomolecular pump, and a method of the type mentioned at the outset with which the aforementioned problems are eliminated. A particular stator disk should be as simple and inexpensive to manufacture as possible with high flexibility with regard to the realizable geometries of the stator disk.
Erfindungsgemäß wird diese Aufgabe durch eine Statorscheibe mit den Merkmalen des Anspruchs 1, eine Vakuumpumpe, insbesondere Turbomolekularpumpe, mit den Merkmalen des Anspruchs 10 sowie ein Verfahren mit den Merkmalen des Anspruchs 12 gelöst. Bevorzugte Ausführungsformen der erfindungsgemäßen Statorscheibe und der erfindungsgemäßen Pumpe sowie bevorzugte Ausgestaltungen des erfindungsgemäßen Verfahrens ergeben sich aus den Unteransprüchen.According to the invention, this object is achieved by a stator disk with the features of
Die erfindungsgemäße Statorscheibe umfasst wenigstens zwei teilringförmige Statorscheibenabschnitte, vorzugsweise zwei Statorscheibenhälften, mit jeweils mehreren in Umfangsrichtung aufeinanderfolgenden Blechschaufeln. Dabei sind die teilringförmigen Statorscheibenabschnitte jeweils aus mehreren einzelnen Blechteilsegmenten gebildet, wobei die einzelnen Blechteilsegmente eines jeweiligen teilringförmigen Statorscheibenabschnitts im Bereich deren Innen- und/oder Außenumfangs über ein gemeinsames Spritzgussformteil miteinander verbunden sind, insbesondere formschlüssig.The stator disk according to the invention comprises at least two partially ring-shaped stator disk sections, preferably two stator disk halves, each with a plurality of sheet metal blades which follow one another in the circumferential direction. The partially ring-shaped stator disk sections are each formed from a plurality of individual sheet metal part segments, the individual sheet metal part segments of a respective partially ring-shaped stator disk section being connected to one another in the region of their inner and / or outer circumference by means of a common injection molding, in particular in a form-fitting manner.
Nachdem die Statorscheibe aus einzelnen Blechteilen zusammengesetzt ist, die primär mittels Spritzgusstechnik im Bereich deren Innen- und/oder Außenumfangs miteinander verbunden sind, können zu deren Herstellung Umformwerkzeuge geringerer Komplexität eingesetzt werden, da sich mit den einzelnen Blechteilen eine entsprechend einfachere Geometrie ergibt.After the stator disk is composed of individual sheet metal parts, which are primarily connected to one another by means of injection molding technology in the area of their inner and / or outer circumference, forming tools of less complexity can be used for their production, since the individual sheet metal parts result in a correspondingly simpler geometry.
Die Flexibilität hinsichtlich der realisierbaren Geometrien der Statorscheiben wird deutlich erhöht.The flexibility with regard to the realizable geometries of the stator disks is significantly increased.
Die einzelnen Blechteilsegmente können jeweils nur eine oder auch jeweils mehrere Blechschaufeln umfassen.The individual sheet metal part segments can each comprise only one or even a plurality of sheet metal blades.
Bevorzugt enthält der Werkstoff des Spritzgussformteils wenigstens ein Polymer. Dabei kann dieser Werkstoff insbesondere wenigstens ein Flüssigkristallpolymer (LCP-Polymer) enthalten.The material of the injection molded part preferably contains at least one polymer. This material can in particular contain at least one liquid crystal polymer (LCP polymer).
Der Werkstoff des Spritzgussformteils kann wenigstens ein Polymer mit Verstärkung und/oder wenigstens ein Polymer ohne Verstärkung enthalten.The material of the injection molded part can contain at least one polymer with reinforcement and / or at least one polymer without reinforcement.
Von Vorteil ist insbesondere auch, wenn der Werkstoff des Spritzgussformteils wenigstens ein Füllmaterial, insbesondere wenigstens ein Füllmaterial mit erhöhter Wärmeleitfähigkeit enthält.It is also particularly advantageous if the material of the injection molded part contains at least one filler material, in particular at least one filler material with increased thermal conductivity.
Bevorzugt sind die einzelnen Blechteilsegmente eines jeweiligen teilringförmigen Statorscheibenabschnitts im Bereich deren Innen- und/oder Außenumfangs über ein formschlüssiges gemeinsames Spritzgussformteil miteinander verbunden.The individual sheet metal part segments of a respective part-ring-shaped stator disk section are preferably connected to one another in the region of their inner and / or outer circumference via a form-fitting common injection molded part.
Gemäß einer weiteren bevorzugten praktischen Ausführungsform der erfindungsgemäßen Statorscheibe sind die einzelnen Blechteilsegmente eines jeweiligen teilringförmigen Statorscheibenabschnitts im Bereich deren Innenumfangs insbesondere in Axialrichtung durch das Spritzgussformteil oder durch zusätzliches Spritzgussmaterial verstärkt. Auf diese Weise können die axialen Spalte im Bereich des Innenumfangs der Statorscheiben in Verbindung mit den die Statorscheibe umgebenden Rotorscheiben reduziert werden, ohne dass dazu die Statorscheiben im Übrigen dicker ausgeführt werden müssen.According to a further preferred practical embodiment of the stator disk according to the invention, the individual sheet metal part segments of a respective part-ring-shaped stator disk section are reinforced in the region of their inner circumference, in particular in the axial direction by the injection molded part or by additional injection molding material. In this way, the axial gaps in the area of the inner circumference of the stator disks can be reduced in connection with the rotor disks surrounding the stator disk, without the stator disks otherwise having to be made thicker.
Die Oberfläche des Spritzgussformteils und/oder des Spritzgussmaterials kann zumindest bereichsweise strukturiert sein, um eine Pumpstruktur bzw. pumpaktive Struktur auf der Oberfläche zu schaffen. Dabei kann durch eine entsprechende Struktur insbesondere einer Rückströmung innerhalb der Pumpe entgegengewirkt werden.The surface of the injection molded part and / or of the injection molding material can be structured at least in regions in order to create a pump structure or pump-active structure on the surface. A corresponding structure, in particular, can counteract a backflow within the pump.
Die erfindungsgemäße Vakuumpumpe, insbesondere Turbomolekularpumpe, zeichnet sich dadurch aus, dass sie zumindest eine erfindungsgemäße Statorscheibe umfasst.The vacuum pump according to the invention, in particular turbomolecular pump, is characterized in that it comprises at least one stator disk according to the invention.
Gemäß einer bevorzugten praktischen Ausführungsform der erfindungsgemäßen Vakuumpumpe sind die einzelnen Blechteilsegmente im Bereich deren Außenumfangs metallisch mit einem metallischen Distanzring verbunden. Ein solcher metallischer Distanzring dient insbesondere der thermischen Anbindung der Blechteilsegmente und deren besseren Integration in die Pumpe. Indem die Blechteilsegmente metallisch mit dem Distanzring verbunden sind, können sie die Wärme besser an die äußere Hülle der Pumpe abgeben.According to a preferred practical embodiment of the vacuum pump according to the invention, the individual sheet metal part segments in the area of their outer circumference are connected metallically with a metallic spacer ring. Such a metallic spacer ring serves in particular for the thermal connection of the sheet metal part segments and their better integration into the pump. Because the sheet metal part segments are metallically connected to the spacer ring, they can better transfer the heat to the outer shell of the pump.
Das erfindungsgemäße Verfahren zur Herstellung einer Statorscheibe einer Vakuumpumpe, insbesondere einer Turbomolekularpumpe, mit wenigstens zwei teilringförmigen Statorscheibenabschnitten, vorzugsweise zwei Statorscheibenhälften, mit jeweils mehreren in Umfangsrichtung aufeinanderfolgenden Blechschaufeln zeichnet sich dadurch aus, dass die teilringförmigen Statorscheibenabschnitte jeweils aus mehreren einzelnen Blechteilsegmenten gebildet und die einzelnen Blechteilsegmente eines jeweiligen teilringförmigen Statorscheibenabschnitts im Spritzgussverfahren miteinander verbunden werden, insbesondere formschlüssig.The method according to the invention for producing a stator disk of a vacuum pump, in particular a turbomolecular pump, with at least two partially ring-shaped stator disk sections, preferably two stator disk halves, each with a plurality of sheet metal blades that follow one another in the circumferential direction, is characterized in that the partially ring-shaped stator disk sections are each formed from a plurality of individual sheet metal part segments and the individual sheet metal part segments of a respective partially ring-shaped stator disk section can be connected to one another in the injection molding process, in particular in a form-fitting manner.
Gemäß einer bevorzugten praktischen Ausgestaltung des erfindungsgemäßen Verfahrens werden die einzelnen Blechteilsegmente eines jeweiligen teilringförmigen Statorscheibenabschnitts im Bereich deren Innen- und/oder Außenumfangs über ein gemeinsames Spritzgussformteil miteinander verbunden.According to a preferred practical embodiment of the method according to the invention, the individual sheet metal part segments of a respective part-ring-shaped stator disk section are connected to one another in the area of their inner and / or outer circumference by means of a common injection molded part.
Die einzelnen Blechteilsegmente können jeweils insbesondere mittels eines Biege-, Stanz- und/oder Schneidprozesses gebildet werden.The individual sheet metal part segments can each be formed in particular by means of a bending, stamping and / or cutting process.
Erfindungsgemäß wird die Statorscheibe also aus einzelnen Blechteilen zusammengesetzt, die primär mittels Spritzgusstechnik im Bereich des Außen- und/oder Innenumfangs miteinander verbunden werden. Die Komplexität des zur Herstellung der Statorscheibe erforderlichen Umformwerkzeugs wird durch die einfache Geometrie der einzelnen Blechteile deutlich reduziert. Die hergestellten Blechteile werden in eine Spritzgussmaschine eingelegt und über ein Spritzgussverfahren miteinander verbunden. Dabei können die Blechteile sowohl Einzelschaufeln als auch Statorscheibensegmente sein.According to the invention, the stator disk is thus composed of individual sheet metal parts which are primarily connected to one another by means of injection molding technology in the area of the outer and / or inner circumference. The complexity of the forming tool required to manufacture the stator disk is significantly reduced by the simple geometry of the individual sheet metal parts. The sheet metal parts produced are placed in an injection molding machine and connected to one another via an injection molding process. The sheet metal parts can be both individual blades and stator disk segments.
Die Flexibilität hinsichtlich der realisierbaren Geometrien der Statorscheibe wird deutlich erhöht. Überlappungen und Hinterschneidungen sind problemlos realisierbar. Durch das Spritzgussverfahren können insbesondere auch versteifende Elemente auf die Schaufeln aufgebracht werden, womit der zu deren Herstellung erforderliche Pressdruck im Vergleich zur Herstellung einer kompletten Statorscheibe bzw. Statorscheibenhälfte wesentlich reduziert wird. Es können entsprechend kleinere Pressen verwendet werden. Zudem können die Statorscheiben in pumpaxialer Richtung durch vorteilhafte Spritzgussgeometrien wesentlich steifer ausgeführt werden, ohne dass dazu die Blechdicke vergrößert werden muss.The flexibility with regard to the realizable geometries of the stator disk is significantly increased. Overlaps and undercuts can be easily implemented. The injection molding process in particular also allows stiffening elements to be applied to the blades, as a result of which the pressing pressure required for their manufacture is significantly reduced compared to the manufacture of a complete stator disk or stator disk half. Correspondingly smaller presses can be used. In addition, the stator disks can be made substantially stiffer in the pump-axial direction by means of advantageous injection molding geometries without the sheet thickness having to be increased.
Zudem kann die durch die Druckdifferenz zwischen der Ober- und Unterseite während des Flutvorgangs auftretende Durchbiegung der Statorscheibe reduziert werden. Zugunsten des Vakuumleistungsvermögens ist nunmehr auch eine Reduktion des Rotor/Stator-Spiels der Vakuumpumpe möglich.In addition, the deflection of the stator disk that occurs due to the pressure difference between the top and bottom sides during the flooding process can be reduced. A reduction in the rotor / stator play of the vacuum pump is now also possible in favor of the vacuum performance.
Infolge des reduzierten Aufwands im Zusammenhang mit dem Stanzwerkzeug ist der erfindungsgemäße Einsatz der Spritzgusstechnik bereits bei geringeren Stückzahlen wirtschaftlich möglich.As a result of the reduced expenditure in connection with the punching tool, the use of the injection molding technology according to the invention is economically possible even in the case of small quantities.
Als Spritzgusswerkstoff können unterschiedliche Polymere mit oder auch ohne Verstärkung eingesetzt werden, wobei insbesondere LCP-Polymere aufgrund ihrer Beständigkeit und Vakuumtauglichkeit sehr gut geeignet sind. Überdies ist auch der Einsatz von Füllmaterialien mit erhöhter Wärmeleitfähigkeit denkbar.Different polymers with or without reinforcement can be used as the injection molding material, in particular LCP polymers due to their Resistance and vacuum suitability are very suitable. In addition, the use of filling materials with increased thermal conductivity is also conceivable.
Zur thermischen Anbindung der Schaufeln und zu deren besseren Integration in die Vakuumpumpe kann zusätzlich ein metallischer Distanzring eingebracht werden. Indem die Schaufelteile metallisch mit dem metallischen Distanzring verbunden werden, können diese die Wärme besser an die äußere Hülle der Turbomolekularpumpe abgeben. Die Schaufelteile bzw. einzelnen Blechteilsegmente werden über das Spritzgussverfahren miteinander fixiert. Dabei können insbesondere formschlüssige Verbindungselemente Verwendung finden.A metallic spacer ring can also be inserted to thermally connect the blades and to better integrate them into the vacuum pump. By connecting the blade parts to the metallic spacer ring in a metallic manner, they can better transfer the heat to the outer shell of the turbomolecular pump. The blade parts or individual sheet metal part segments are fixed together using the injection molding process. In particular, positive connection elements can be used.
Während herkömmlich gestanzte komplette Statorscheibenhälften aus Blechmaterial in Kombination mit den sie umgebenden Rotorscheiben im Bereich des Innenumfangs zwei relativ große axiale Spalte aufweisen, die auf die unter Umformaspekten gesehen möglichst gering zu wählende Blechdicke zurückzuführen sind und sich aufgrund der begünstigten Rückströmung von Gasmolekülen während des Pumpvorgangs negativ auf das Vakuumleistungsvermögen der Pumpe auswirken, können diese Spalte infolge der erfindungsgemäß angewandten Spritzgusstechnik deutlich reduziert werden. So ist es mit dem erfindungsgemäßen Herstellungsverfahren möglich, die Statorscheibe im Bereich deren Innenumfangs durch Spritzgussmaterial aufzudicken, um die axialen Spalte möglichst klein zu halten. Zusätzlich kann eine der Rückströmung entgegenwirkende Pumpstruktur auf die gespritzte Oberfläche aufgebracht werden.While conventionally stamped complete stator disk halves made of sheet metal material in combination with the rotor disks surrounding them have two relatively large axial gaps in the area of the inner circumference, which can be attributed to the sheet thickness that is as small as possible from a forming point of view and are negative due to the favored backflow of gas molecules during the pumping process affect the vacuum performance of the pump, these gaps can be significantly reduced due to the injection molding technology used according to the invention. It is thus possible with the manufacturing method according to the invention to thicken the stator disk in the area of its inner circumference by means of injection molding material in order to keep the axial gaps as small as possible. In addition, a pump structure that counteracts the backflow can be applied to the sprayed surface.
Die Schaufeln bzw. einzelnen Blechteilsegmente können erfindungsgemäß zusätzlich versteift sein bzw. werden, insbesondere mittels eines oder mehrerer in einem Biege-, Stanz- und/oder Schneidprozess hergestellter Versteifungselemente, insbesondere Sicken.According to the invention, the blades or individual sheet metal part segments can additionally be stiffened, in particular by means of one or more stiffening elements, in particular beads, produced in a bending, stamping and / or cutting process.
Die Erfindung wird im Folgenden anhand eines Ausführungsbeispiels unter Bezugnahme auf die Zeichnung näher erläutert; in dieser zeigen:
- Fig. 1
- eine schematische Querschnittsdarstellung einer beispielhaften Ausführungsform einer Turbomolekularpumpe zur Erläuterung des Grundprinzips einer solchen Turbomolekularpumpe, und
- Fig. 2
- eine schematische Querschnittsdarstellung eines Teils einer beispielhaften Ausführungsform einer erfindungsgemäßen Turbomolekularpumpe mit wenigstens einer erfindungsgemäßen Statorscheibe.
- Fig. 1
- 2 shows a schematic cross-sectional representation of an exemplary embodiment of a turbomolecular pump to explain the basic principle of such a turbomolecular pump, and
- Fig. 2
- is a schematic cross-sectional view of part of an exemplary embodiment of a turbomolecular pump according to the invention with at least one stator disk according to the invention.
Die in
Zur Erzeugung einer Pumpwirkung umfasst die Turbomolekularpumpe 10 mehrere pumpwirksam miteinander in Serie geschaltete turbomolekulare Pumpstufen mit mehreren an der Rotorwelle 22 befestigten Rotorscheiben 24 und in axialer Richtung zwischen den Rotorscheiben 24 angeordneten Statorscheiben 26. Die Statorscheiben 26 sind durch Distanzringe 28 in einem gewünschten axialen Abstand zueinander gehalten.In order to produce a pumping action, the turbomolecular pump 10 comprises a plurality of turbomolecular pumping stages, which are connected to one another in a pumping manner, with a plurality of
Des Weiteren sind drei in radialer Richtung ineinander angeordnete und pumpwirksam miteinander in Serie geschaltete Holweckpumpstufen vorgesehen. Der rotorseitige Teil der Holweckpumpstufen umfasst eine mit der Rotorwelle 22 verbundene Rotornäbe 30 und zwei an der Rotornabe 30 befestigte und von dieser getragene zylindermantelförmige Holweckrotorhülsen 32, 34, die koaxial zu der Rotationsachse 22 orientiert und in radialer Richtung ineinander geschachtelt sind. Ferner sind zwei zylindermantelförmige Holweckstatorhülsen 36, 38 vorgesehen, die ebenfalls koaxial zu der Rotationsachse 22 orientiert und in radialer Richtung ineinander geschachtelt sind.In addition, three Holweck pumping stages are arranged in the radial direction, one inside the other and connected in a pumping manner. The rotor-side part of the Holweck pump stages comprises one connected to the rotor shaft 22
Die pumpaktiven Oberflächen der Holweckpumpstufen sind jeweils durch die einander unter Ausbildung eines engen radialen Holweckspalts gegenüber liegenden radialen Mantelflächen einer jeweiligen Holweckrotorhülse 32, 34 und einer jeweiligen Holweckstatorhülse 36, 38 gebildet. Dabei ist jeweils eine der pumpaktiven Oberflächen glatt ausgebildet - vorwiegend diejenige der Holweckrotorhülse 32, 34 - während die gegenüberliegende pumpaktive Oberfläche der Holweckstatorhülse 36, 38 eine Strukturierung mit schraubenlinienförmig um die Rotationsachse 22 herum in axialer Richtung verlaufenden Nuten aufweist, in denen bei der Rotation des Rotors 18 das Gas vorangetrieben und dadurch gepumpt wird.The pump-active surfaces of the Holweck pump stages are each formed by the radial lateral surfaces of a respective
Die drehbare Lagerung der Rotorwelle 22 wird durch ein Wälzlager 40 im Bereich des Pumpenauslasses und ein Permanentmagnetlager 42 im Bereich des Pumpeneinlasses 14 bewirkt.The rotatable mounting of the rotor shaft 22 is effected by a
Das Permanentmagnetlager 42 umfasst eine rotorseitige Lagerhälfte 44 und eine statorseitige Lagerhälfte 46, welche jeweils einen Ringstapel aus mehreren in axialer Richtung aufeinander gestapelten permanentmagnetischen Ringen 48, 50 umfassen, wobei sich die Magnetringe 48, 50 einander unter Ausbildung eines radialen Lagerspalts 52 gegenüberliegen.The
Innerhalb des Magnetlagers 42 ist ein Not- bzw. Fanglager 54 vorgesehen, welches als ungeschmiertes oder trockengeschmiertes Wälzlager ausgebildet ist und im normalen Betrieb der Turbomolekularpumpe 10 ohne Berührung leerläuft und erst bei einer übermäßigen radialen Auslenkung des Rotors 18 gegenüber dem Stator in Eingriff gelangt, um einen radialen Anschlag für den Rotor 18 zu bilden, der eine Kollision der rotorseitigen Strukturen mit den statorseitigen Strukturen verhindert. Das Notlager 54 definiert somit die maximale radiale Auslenkung des Rotors 18.An emergency or catching bearing 54 is provided within the
Im Bereich des Wälzlagers 40 ist an der Rotorwelle 22 eine konische Spritzmutter 56 mit einem zu dem Wälzlager 40 hin zunehmenden Außendurchmesser vorgesehen. Die Spritzmutter 56 steht mit zumindest einem Abstreifer eines mehrere aufeinander gestapelte saugfähige Scheiben 58 umfassenden Betriebsmittelspeichers in gleitendem Kontakt, welche mit einem Betriebsmittel wie z.B. einem Schmiermittel für das Wälzlager 40 getränkt sind.In the area of the
Im Betrieb der Turbomolekularpumpe 10 wird das Betriebsmittel durch kapillare Wirkung von dem Betriebsmittelspeicher über den Abstreifer auf die rotierende Spritzmutter 56 übertragen und infolge der Zentrifugalkraft entlang der Spritzmutter in Richtung des größer werdenden Außendurchmessers der Spritzmutter 56 zu dem Wälzlager 40 hin gefördert, wo es zum Beispiel eine schmierende Funktion erfüllt.In operation of the turbomolecular pump 10, the operating medium is transferred by capillary action from the operating medium storage via the wiper to the rotating injection nut 56 and, as a result of the centrifugal force along the injection nut, is conveyed in the direction of the increasing outer diameter of the injection nut 56 to the
Die Turbomolekularpumpe 10 umfasst einen Motorraum 60, in den sich die Rotorwelle 22 hinein erstreckt. Der Motorraum 60 ist im Bereich des Eintritts der Rotorwelle 22 durch eine Siegbahnstufe 62 gegenüber einem Arbeits- bzw. Schöpfraum der Turbomolekularpumpe 10 abgedichtet. Alternativ oder zusätzlich kann die Abdichtung auch durch eine Labyrinthdichtung erfolgen. Ein Sperrgaseinlass 64 ermöglicht die Zuführung eines Sperrgases in den Motorraum 60.The turbomolecular pump 10 comprises an
In dem Motorraum 60 ist ein Antriebsmotor 66 angeordnet, welcher zum drehenden Antreiben des Rotors 18 dient. Der Antriebsmotor 66 umfasst einen Motorstator 68 mit einem Kern 70 und mit mehreren in
Der Läufer des Antriebsmotors 77, welcher auch als Anker bezeichnet wird, ist durch die Rotorwelle 22 gebildet, die sich durch den Motorstator 68 hindurch erstreckt. Auf dem sich durch den Motorstator 68 hindurch erstreckenden Abschnitt der Rotorwelle 22 ist radial außenseitig eine Permanentmagnetanordnung 74 festgelegt. Zwischen dem Motorstator 68 und dem sich durch den Motorstator 68 hindurch erstreckenden Abschnitt der Rotorwelle 22 ist ein radialer Motorspalt 76 ausgebildet, über den sich der Motorstator 68 und die Permanentmagnetanordnung 74 zur Übertragung des Antriebsmoments magnetisch beeinflussen.The rotor of the drive motor 77, which is also referred to as an armature, is formed by the rotor shaft 22, which extends through the
Die Permanentmagnetanordnung 74 ist an der Rotorwelle 22 mittels Kleben und/oder Schrumpfen und/oder Aufpressen fixiert. Die Permanentmagnetanordnung 74 umfasst einen weichmagnetischen Rückschluss 75a aus Eisenblechen oder aus massivem Eisen sowie einen Permanentmagneten 75b. Eine Kapselung 80, die als CFK- oder Edelstahlhülse ausgebildet ist, umgibt die Permanentmagnetanordnung 74 an deren radialer Außenseite und dichtet diese gegenüber dem Motorspalt 76 ab. Auf der Rotorwelle 22 ist ferner ein Wuchtring 78 mittels Kleben und/oder Schrumpfen und/oder Aufpressen angebracht, welcher Gewindebohrungen zur Aufnahme von Wuchtgewichten aufweist. Der Wuchtring 78 besitzt keine direkte mechanische Verbindung zur Permanentmagnetanordnung 74, um keine axialen Zwangskräfte auf die Permanentmagnetanordnung 74 zu übertragen.The permanent magnet arrangement 74 is fixed to the rotor shaft 22 by means of gluing and / or shrinking and / or pressing. The permanent magnet arrangement 74 comprises a soft
Eine Steuer- und Stromversorgungseinheit 82 ist dazu eingerichtet, den Antriebsmotor 66 während des Betriebs der Turbomolekularpumpe 10 mit elektrischer Energie zu versorgen.A control and
In der
Die Statorscheibe 86 umfasst wenigstens zwei teilringförmige Statorscheibenabschnitte 92, vorzugsweise zwei Statorscheibenhälften, mit jeweils mehreren in Umfangsrichtung aufeinanderfolgenden Blechschaufeln.The stator disk 86 comprises at least two partially ring-shaped stator disk sections 92, preferably two stator disk halves, each with a plurality of sheet metal blades which follow one another in the circumferential direction.
Die teilringförmigen Statorscheibenabschnitte 92 sind jeweils aus mehreren einzelnen Blechteilsegmenten 94 gebildet. Dabei sind die einzelnen Blechteilsegmente 94 eines jeweiligen teilringförmigen Statorscheibenabschnitts 92 im Bereich deren Innen- und/oder Außenumfangs 96 bzw. 98, im vorliegenden Fall beispielsweise im Bereich deren Innenumfangs 96, über ein gemeinsames Spritzgussformteil 100 miteinander verbunden.The partially ring-shaped stator disk sections 92 are each formed from a plurality of individual sheet metal part segments 94. The individual sheet metal part segments 94 of a respective part-ring-shaped stator disk section 92 are connected to one another in the area of their inner and / or
Die einzelnen Blechteilsegmente 94 können jeweils wenigstens eine oder auch jeweils mehrere Blechschaufeln umfassen.The individual sheet metal part segments 94 can each comprise at least one or even a plurality of sheet metal blades.
Der Werkstoff des Spritzgussformteils 100 kann wenigstens ein Polymer, insbesondere wenigstens ein LCP-Polymer enthalten.The material of the injection molded
Dabei kann der Werkstoff des Spritzgussformteils 100 wenigstens ein Polymer mit und/oder wenigstens ein Polymer ohne Verstärkung enthalten.The material of the injection molded
Der Werkstoff des Spritzgussformteils 100 kann insbesondere auch wenigstens ein Füllmaterial, insbesondere wenigstens ein Füllmaterial mit erhöhter Wärmeleitfähigkeit enthalten.The material of the injection molded
Durch das Spritzgussformteil 100 sind jeweils die mit den benachbarten Rotorscheiben 90 gebildeten axialen Spalte reduziert.The axial gaps formed with the
Das Spritzgussformteil 100 ist in den Bereichen 102 mit einer pumpaktiven Struktur versehen, deren Wirkungsrichtung durch Pfeile 108 angedeutet ist und die insbesondere eine Siegbahngeometrie aufweist.The injection molded
Wie in der
Im Übrigen kann die Turbomolekularpumpe 84 zumindest im Wesentlichen wieder so ausgeführt sein wie die Turbomolekularpumpe 10 gemäß
Das erfindungsgemäße Verfahren betrifft die Herstellung einer solchen Statorscheibe 86 und zeichnet sich entsprechend dadurch aus, dass die teilringförmigen Statorscheibenabschnitte 92 jeweils aus mehreren einzelnen Blechteilsegmenten 94 gebildet und die einzelnen Blechteilsegmente 94 über ein gemeinsames Spritzgussformteil 100 miteinander verbunden werden.The method according to the invention relates to the production of such a stator disk 86 and is accordingly distinguished in that the partially ring-shaped stator disk sections 92 are each formed from a plurality of individual sheet metal part segments 94 and the individual sheet metal part segments 94 are connected to one another via a common injection molded
Die einzelnen Blechteilsegmente 94 können jeweils mittels eines Biege-, Stanz- und/oder Schneidprozesses gebildet werden.The individual sheet metal part segments 94 can each be formed by means of a bending, stamping and / or cutting process.
- 1010
- TurbomolekularpumpeTurbo molecular pump
- 1212
- Einlassflanschinlet flange
- 1414
- Pumpeneinlasspump inlet
- 1616
- Gehäusecasing
- 1818
- Rotorrotor
- 2020
- Rotorachserotor axis
- 2222
- Rotorwellerotor shaft
- 2424
- Rotorscheiberotor disc
- 2626
- Statorscheibestator
- 2828
- Distanzringspacer
- 3030
- Rotornaberotor hub
- 3232
- Holweck-RotorhülseHolweck rotor sleeve
- 3434
- Holweck-RotorhülseHolweck rotor sleeve
- 3636
- Holweck-StatorhülseHolweck stator
- 3838
- Holweck-StatorhülseHolweck stator
- 4040
- Wälzlagerroller bearing
- 4242
- PermamentmagnetlagerPermamentmagnetlager
- 4444
- rotorseitige Lagerhälftehalf of the bearing on the rotor side
- 4646
- statorseitige Lagerhälftestator side bearing half
- 4848
- Magnetringmagnetic ring
- 5050
- Magnetringmagnetic ring
- 5252
- Lagerspaltbearing gap
- 5454
- Fanglagersafety bearing
- 5656
- Spritzmutterspray mother
- 5858
- saugfähige Scheibeabsorbent disc
- 6060
- Motorraumengine compartment
- 6262
- SiegbahnstufeSiegbahn stage
- 6464
- SperrgaseinlassSealing gas inlet
- 6666
- Antriebsmotordrive motor
- 6868
- Motorstatormotor stator
- 7070
- Kerncore
- 7272
- SpuleKitchen sink
- 7474
- PermanentmagnetanordnungPermanent magnet assembly
- 75a75a
- weichmagnetischer Rückschlusssoft magnetic inference
- 75b75b
- Permanentmagnetpermanent magnet
- 7676
- Motorspaltmotor gap
- 7878
- Wuchtringbalancing ring
- 8080
- Kapselungencapsulation
- 8282
- Steuer- und StromversorgungseinheitControl and power supply unit
- 8484
- TurbomolekularpumpeTurbo molecular pump
- 8686
- Statorscheibestator
- 8888
- Rotorwellerotor shaft
- 9090
- Rotorscheiberotor disc
- 9292
- StatorscheibenabschnittStatorscheibenabschnitt
- 9494
- BlechteilsegmentSheet metal piece segment
- 9696
- Innenumfanginner circumference
- 9898
- Außenumfangouter periphery
- 100100
- SpritzgussformteilInjection molding
- 102102
- strukturierter Bereichstructured area
- 104104
- metallischer Distanzringmetallic spacer
- 106106
- Pumprichtungpumping direction
- 108108
- WirkungsrichtungMode of operation
Claims (15)
- A stator disk (86) of a vacuum pump, in particular of a turbomolecular pump (10, 84), which comprises at least two partly annular stator disk sections (92), preferably two stator disk halves, each having a plurality of sheet metal blades following one another in the peripheral direction, wherein the partly annular stator disk sections (92) are each formed from a plurality of individual sheet metal part segments (94),
characterized in that
the individual sheet metal part segments (94) of a respective partly annular stator disk section (92) are connected to one another via a common injection molded part (100) in the region of their inner and/or outer periphery (96 or 98). - A stator disk in accordance with claim 1,
characterized in that the individual sheet metal part segments (94) each comprise at least one sheet metal blade. - A stator disk in accordance with claim 1 or claim 2,
characterized in that the material of the injection molded part (100) includes at least one polymer, with in particular the material of the injection molded part (100) including at least one LCP polymer. - A stator disk in accordance with claim 3,
characterized in that the material of the injection molded part (100) includes at least one polymer with reinforcement. - A stator disk in accordance with at least one of the preceding claims, characterized in that the material of the injection molded part (100) includes at least one filler material, in particular at least one filler material with increased thermal conductivity.
- A stator disk in accordance with at least one of the preceding claims, characterized in that the individual sheet metal part segments (94) of a respective partly annular stator disk section (92) are connected to one another via a form-fit common injection molded part (100) in the region of their inner periphery and/or outer periphery (96 or 98).
- A stator disk in accordance with at least one of the preceding claims, characterized in that the individual sheet metal part segments (94) of a respective partly annular stator disk section (92) are reinforced by the injection molded part and/or by an additional injection molded material in the region of their inner periphery (96), in particular in the axial direction.
- A stator disk in accordance with at least one of the preceding claims, characterized in that the surface of the injection molded part and/or of the additional injection molded material is structured at least regionally and is in particular provided with a pump structure.
- A stator disk in accordance with at least one of the preceding claims, characterized in that the blades or the individual sheet metal part segments (94) are additionally stiffened, in particular by means of one or more stiffening elements, in particular beads, manufactured in a bending process, a punching process and/or a cutting process.
- A vacuum pump, in particular a turbomolecular pump (10, 84), having at least one stator disk (86) in accordance with at least one of the preceding claims.
- A vacuum pump in accordance with claim 10,
characterized in that the individual sheet metal part segments (94) are metallically connected to a metallic spacer ring (104) in the region of their outer periphery (98). - A method of manufacturing a stator disk (86) of a vacuum pump, in particular of a turbomolecular pump (10, 84), which comprises at least two partly annular stator disk sections (92), preferably two stator disk halves, each having a plurality of sheet metal blades following one another in the peripheral direction, with the partly annular stator disk sections (92) each being formed from a plurality of individual sheet metal part segments (94), characterized in that
the individual sheet metal part segments (94) of a respective partly annular stator disk section (92) are joined to one another in an injection molding process. - A method in accordance with claim 12,
characterized in that the individual sheet metal part segments (94) of a respective partly annular stator disk section (92) are connected to one another via a common injection molded part (100) in the region of their inner periphery and/or outer periphery (96 or 98). - A method in accordance with claim 12 or claim 13,
characterized in that the individual sheet metal part segments (94) are each formed by means of a bending process, a punching process and/or a cutting process. - A method in accordance with at least one of the claims 12 to 14, characterized in that the blades or the individual sheet metal part segments (94) are additionally stiffened, in particular by means of one or more stiffening elements, in particular beads, manufactured in a bending process, a punching process and/or a cutting process.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014102681.0A DE102014102681A1 (en) | 2014-02-28 | 2014-02-28 | stator |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2913533A1 EP2913533A1 (en) | 2015-09-02 |
EP2913533B1 true EP2913533B1 (en) | 2020-01-08 |
Family
ID=52394162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP15152240.6A Active EP2913533B1 (en) | 2014-02-28 | 2015-01-23 | Stator disc |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2913533B1 (en) |
JP (1) | JP6166296B2 (en) |
DE (1) | DE102014102681A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6586275B2 (en) * | 2015-01-30 | 2019-10-02 | エドワーズ株式会社 | Vacuum pump |
JP7108377B2 (en) | 2017-02-08 | 2022-07-28 | エドワーズ株式会社 | Vacuum pumps, rotating parts of vacuum pumps, and unbalance correction methods |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1503704C3 (en) * | 1966-12-30 | 1972-03-23 | Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar | BLADE FOR A WHEEL AND OR GUIDE WHEEL OF A TURBOMOLECULAR PUMP |
JP3013083B2 (en) * | 1998-06-23 | 2000-02-28 | セイコー精機株式会社 | Turbo molecular pump |
JP4527966B2 (en) * | 2003-05-01 | 2010-08-18 | 株式会社大阪真空機器製作所 | Molecular pump |
JP4676731B2 (en) * | 2004-09-10 | 2011-04-27 | エドワーズ株式会社 | Turbo molecular pump fixed blade and vacuum pump |
DE102006050565A1 (en) * | 2006-10-26 | 2008-04-30 | Pfeiffer Vacuum Gmbh | Stator disk for turbo-molecular pump, has plate at outer ring side, so that plate fulfills spacer ring function, and support ring connected with plate, where plate is turned away from plane, and side is turned outwards in radial direction |
ITTO20100070A1 (en) * | 2010-02-01 | 2011-08-02 | Varian Spa | VACUUM PUMP, IN PARTICULAR TURBOMOLECULAR VACUUM PUMP. |
JP5786639B2 (en) * | 2011-10-24 | 2015-09-30 | 株式会社島津製作所 | Turbo molecular pump |
-
2014
- 2014-02-28 DE DE102014102681.0A patent/DE102014102681A1/en not_active Withdrawn
-
2015
- 2015-01-23 EP EP15152240.6A patent/EP2913533B1/en active Active
- 2015-02-26 JP JP2015036440A patent/JP6166296B2/en active Active
Non-Patent Citations (1)
Title |
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None * |
Also Published As
Publication number | Publication date |
---|---|
DE102014102681A1 (en) | 2015-09-03 |
JP2015165135A (en) | 2015-09-17 |
JP6166296B2 (en) | 2017-07-19 |
EP2913533A1 (en) | 2015-09-02 |
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