EP2863063A3 - Vakuumpumpe - Google Patents
Vakuumpumpe Download PDFInfo
- Publication number
- EP2863063A3 EP2863063A3 EP14188325.6A EP14188325A EP2863063A3 EP 2863063 A3 EP2863063 A3 EP 2863063A3 EP 14188325 A EP14188325 A EP 14188325A EP 2863063 A3 EP2863063 A3 EP 2863063A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- stator
- rotor
- pump
- disks
- active structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 abstract 3
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/16—Sealings between pressure and suction sides
- F04D29/161—Sealings between pressure and suction sides especially adapted for elastic fluid pumps
- F04D29/164—Sealings between pressure and suction sides especially adapted for elastic fluid pumps of an axial flow wheel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
- F04D29/526—Details of the casing section radially opposing blade tips
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19201021.3A EP3608545B1 (de) | 2013-10-15 | 2014-10-09 | Vakuumpumpe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201310220879 DE102013220879A1 (de) | 2013-10-15 | 2013-10-15 | Vakuumpumpe |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19201021.3A Division EP3608545B1 (de) | 2013-10-15 | 2014-10-09 | Vakuumpumpe |
EP19201021.3A Division-Into EP3608545B1 (de) | 2013-10-15 | 2014-10-09 | Vakuumpumpe |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2863063A2 EP2863063A2 (de) | 2015-04-22 |
EP2863063A3 true EP2863063A3 (de) | 2015-08-26 |
EP2863063B1 EP2863063B1 (de) | 2019-12-11 |
Family
ID=51687900
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14188325.6A Active EP2863063B1 (de) | 2013-10-15 | 2014-10-09 | Vakuumpumpe |
EP19201021.3A Active EP3608545B1 (de) | 2013-10-15 | 2014-10-09 | Vakuumpumpe |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19201021.3A Active EP3608545B1 (de) | 2013-10-15 | 2014-10-09 | Vakuumpumpe |
Country Status (2)
Country | Link |
---|---|
EP (2) | EP2863063B1 (de) |
DE (1) | DE102013220879A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2552793A (en) | 2016-08-08 | 2018-02-14 | Edwards Ltd | Vacuum pump |
JP7134053B2 (ja) * | 2018-10-05 | 2022-09-09 | ミネベアミツミ株式会社 | 軸流ファン |
CN114593075B (zh) * | 2022-03-15 | 2023-03-24 | 北京中科科仪股份有限公司 | 一种分子泵 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
JPH0444496U (de) * | 1990-08-16 | 1992-04-15 | ||
EP0773367A1 (de) * | 1995-11-10 | 1997-05-14 | VARIAN S.p.A. | Turbomolekularpumpe |
EP0967395A2 (de) * | 1998-06-23 | 1999-12-29 | Seiko Seiki Kabushiki Kaisha | Turbomolekularpumpe |
DE10203648A1 (de) * | 2001-02-10 | 2002-12-12 | Pfeiffer Vacuum Gmbh | Rotor-und Statorscheiben für eine Turbomolekularpumpe |
EP2019208A1 (de) * | 2006-05-19 | 2009-01-28 | Edwards Japan Limited | Vakuumpumpe |
DE202010011790U1 (de) * | 2010-08-25 | 2011-12-05 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpen |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6185599A (ja) * | 1984-10-03 | 1986-05-01 | Ulvac Corp | タ−ボ分子ポンプ |
JPS62203995A (ja) * | 1986-03-04 | 1987-09-08 | Anelva Corp | 真空装置 |
JPS6314893U (de) * | 1986-07-11 | 1988-01-30 | ||
DE3722164C2 (de) * | 1987-07-04 | 1995-04-20 | Balzers Pfeiffer Gmbh | Turbomolekularpumpe |
IT1241177B (it) * | 1990-02-16 | 1993-12-29 | Varian Spa | Statore per pompa turbomolecolare. |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
JPH0687691U (ja) * | 1993-05-28 | 1994-12-22 | セイコー精機株式会社 | ターボ分子ポンプ |
DE10142567A1 (de) * | 2001-08-30 | 2003-03-20 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
GB0618745D0 (en) * | 2006-09-22 | 2006-11-01 | Boc Group Plc | Molecular drag pumping mechanism |
-
2013
- 2013-10-15 DE DE201310220879 patent/DE102013220879A1/de active Pending
-
2014
- 2014-10-09 EP EP14188325.6A patent/EP2863063B1/de active Active
- 2014-10-09 EP EP19201021.3A patent/EP3608545B1/de active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
JPH0444496U (de) * | 1990-08-16 | 1992-04-15 | ||
EP0773367A1 (de) * | 1995-11-10 | 1997-05-14 | VARIAN S.p.A. | Turbomolekularpumpe |
EP0967395A2 (de) * | 1998-06-23 | 1999-12-29 | Seiko Seiki Kabushiki Kaisha | Turbomolekularpumpe |
DE10203648A1 (de) * | 2001-02-10 | 2002-12-12 | Pfeiffer Vacuum Gmbh | Rotor-und Statorscheiben für eine Turbomolekularpumpe |
EP2019208A1 (de) * | 2006-05-19 | 2009-01-28 | Edwards Japan Limited | Vakuumpumpe |
DE202010011790U1 (de) * | 2010-08-25 | 2011-12-05 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpen |
Also Published As
Publication number | Publication date |
---|---|
EP3608545B1 (de) | 2021-02-17 |
EP3608545A1 (de) | 2020-02-12 |
EP2863063B1 (de) | 2019-12-11 |
EP2863063A2 (de) | 2015-04-22 |
DE102013220879A1 (de) | 2015-04-16 |
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