EP2772651A3 - Pompe - Google Patents
Pompe Download PDFInfo
- Publication number
- EP2772651A3 EP2772651A3 EP14154409.8A EP14154409A EP2772651A3 EP 2772651 A3 EP2772651 A3 EP 2772651A3 EP 14154409 A EP14154409 A EP 14154409A EP 2772651 A3 EP2772651 A3 EP 2772651A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- coolant
- side channel
- vacuum pump
- stator element
- pumping stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002826 coolant Substances 0.000 abstract 4
- 238000005086 pumping Methods 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/5806—Cooling the drive system
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/5813—Cooling the control unit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013203577.2A DE102013203577A1 (de) | 2013-03-01 | 2013-03-01 | Vakuumpumpe |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2772651A2 EP2772651A2 (fr) | 2014-09-03 |
EP2772651A3 true EP2772651A3 (fr) | 2014-12-24 |
EP2772651B1 EP2772651B1 (fr) | 2018-04-11 |
Family
ID=50070411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14154409.8A Active EP2772651B1 (fr) | 2013-03-01 | 2014-02-10 | Pompe |
Country Status (3)
Country | Link |
---|---|
US (1) | US20140248166A1 (fr) |
EP (1) | EP2772651B1 (fr) |
DE (1) | DE102013203577A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015213527A1 (de) * | 2015-07-17 | 2017-01-19 | Leybold Gmbh | Pumpensystem |
DE102015015863A1 (de) * | 2015-12-09 | 2017-06-14 | Fte Automotive Gmbh | Elektromotorisch angetriebene Flüssigkeitspumpe |
GB2569648A (en) * | 2017-12-22 | 2019-06-26 | Edwards Ltd | Magnetic shield for a vacuum pump |
DE102022213712A1 (de) * | 2022-12-15 | 2024-06-20 | Robert Bosch Gesellschaft mit beschränkter Haftung | Anodenrezirkulationsgebläse mit integriertem Sensor |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5020969A (en) * | 1988-09-28 | 1991-06-04 | Hitachi, Ltd. | Turbo vacuum pump |
US5664935A (en) * | 1994-09-19 | 1997-09-09 | Hitachi, Ltd. | Vacuum pump |
DE19819267A1 (de) * | 1998-04-30 | 1999-11-04 | Becker Kg Gebr | Strömungsmaschine |
US20120189436A1 (en) * | 2011-01-21 | 2012-07-26 | Toyota Motor Engineering & Manufacturing North America, Inc. | Temperature control ring for vehicle air pump |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0689756B2 (ja) * | 1986-05-02 | 1994-11-14 | 株式会社日立製作所 | ドライ真空ポンプ |
US5983777A (en) * | 1997-12-18 | 1999-11-16 | Cassaday; Michael M. | Method and apparatus for diaphragm pumping with adjustable flow |
DE10048695A1 (de) * | 2000-09-30 | 2002-04-11 | Leybold Vakuum Gmbh | Pumpe als Seitenkanalpumpe |
US20080066859A1 (en) * | 2006-08-30 | 2008-03-20 | Michiaki Kobayashi | Plasma processing apparatus capable of adjusting pressure within processing chamber |
US10001126B2 (en) * | 2009-08-21 | 2018-06-19 | Edwards Japan Limited | Vacuum pump |
-
2013
- 2013-03-01 DE DE102013203577.2A patent/DE102013203577A1/de active Pending
-
2014
- 2014-02-10 EP EP14154409.8A patent/EP2772651B1/fr active Active
- 2014-02-27 US US14/191,705 patent/US20140248166A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5020969A (en) * | 1988-09-28 | 1991-06-04 | Hitachi, Ltd. | Turbo vacuum pump |
US5664935A (en) * | 1994-09-19 | 1997-09-09 | Hitachi, Ltd. | Vacuum pump |
DE19819267A1 (de) * | 1998-04-30 | 1999-11-04 | Becker Kg Gebr | Strömungsmaschine |
US20120189436A1 (en) * | 2011-01-21 | 2012-07-26 | Toyota Motor Engineering & Manufacturing North America, Inc. | Temperature control ring for vehicle air pump |
Also Published As
Publication number | Publication date |
---|---|
EP2772651B1 (fr) | 2018-04-11 |
US20140248166A1 (en) | 2014-09-04 |
EP2772651A2 (fr) | 2014-09-03 |
DE102013203577A1 (de) | 2014-09-04 |
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