EP2715138A4 - Vakuumpumpe - Google Patents
VakuumpumpeInfo
- Publication number
- EP2715138A4 EP2715138A4 EP12791988.4A EP12791988A EP2715138A4 EP 2715138 A4 EP2715138 A4 EP 2715138A4 EP 12791988 A EP12791988 A EP 12791988A EP 2715138 A4 EP2715138 A4 EP 2715138A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- vacuum
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/30—Casings or housings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2280/00—Arrangements for preventing or removing deposits or corrosion
- F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011123979A JP5793004B2 (ja) | 2011-06-02 | 2011-06-02 | 真空ポンプ |
PCT/JP2012/064347 WO2012165646A1 (en) | 2011-06-02 | 2012-05-29 | Vacuum pump |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2715138A1 EP2715138A1 (de) | 2014-04-09 |
EP2715138A4 true EP2715138A4 (de) | 2014-12-17 |
EP2715138B1 EP2715138B1 (de) | 2018-01-10 |
Family
ID=47259491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP12791988.4A Active EP2715138B1 (de) | 2011-06-02 | 2012-05-29 | Vakuumpumpe |
Country Status (7)
Country | Link |
---|---|
US (1) | US20140112814A1 (de) |
EP (1) | EP2715138B1 (de) |
JP (1) | JP5793004B2 (de) |
KR (1) | KR101760549B1 (de) |
CN (1) | CN103502648A (de) |
TW (1) | TWI558917B (de) |
WO (1) | WO2012165646A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2615307B1 (de) * | 2012-01-12 | 2019-08-21 | Vacuubrand Gmbh + Co Kg | Schraubenvakuumpumpe |
JP6472653B2 (ja) * | 2014-03-17 | 2019-02-20 | 株式会社荏原製作所 | 除害機能付真空ポンプ |
DE202016001950U1 (de) * | 2016-03-30 | 2017-07-03 | Leybold Gmbh | Vakuumpumpe |
EP3382203B1 (de) | 2017-03-30 | 2024-05-15 | Roper Pump Company LLC | Exzenterschneckenpumpe mit integriertem heizmantel |
CN109026707B (zh) * | 2018-08-22 | 2024-05-14 | 中北大学 | 爪式泵与滑阀泵组合的复合泵 |
KR102612571B1 (ko) * | 2019-02-06 | 2023-12-11 | 아뜰리에 부쉬 에스.아. | 다단 펌프 본체 및 다단 가스 펌프 |
EP3808983B1 (de) * | 2019-10-15 | 2024-01-03 | Ebara Corporation | Vakuumpumpe mit heizung im seitendeckel |
JP2021063503A (ja) | 2019-10-15 | 2021-04-22 | 株式会社荏原製作所 | 真空ポンプ装置 |
JP7261139B2 (ja) | 2019-10-15 | 2023-04-19 | 株式会社荏原製作所 | 真空ポンプ装置 |
JP7348132B2 (ja) * | 2020-04-30 | 2023-09-20 | 株式会社豊田自動織機 | ルーツポンプ |
FR3112175B1 (fr) * | 2020-07-01 | 2022-07-08 | Pfeiffer Vacuum | Pompe à vide de type sèche |
JP2022151996A (ja) | 2021-03-29 | 2022-10-12 | 株式会社荏原製作所 | 真空ポンプ装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0879964A1 (de) * | 1997-05-22 | 1998-11-25 | T.D. Engineering Co., Ltd. | Verdrängungspumpe |
US20030077182A1 (en) * | 2001-10-24 | 2003-04-24 | Aisin Seiki Kabushiki Kaisha | Multi-stage vacuum pump |
JP2004293377A (ja) * | 2003-03-26 | 2004-10-21 | Aisin Seiki Co Ltd | 多段式ドライポンプ |
JP2004300964A (ja) * | 2003-03-28 | 2004-10-28 | Aisin Seiki Co Ltd | 真空ポンプ |
GB2418958A (en) * | 2004-10-06 | 2006-04-12 | Boc Group Plc | Vacuum pump with enhanced exhaust heat transfer to stator |
WO2010134427A1 (ja) * | 2009-05-20 | 2010-11-25 | 三菱重工業株式会社 | ドライ真空ポンプ |
WO2011019048A1 (ja) * | 2009-08-14 | 2011-02-17 | 株式会社アルバック | ドライポンプ |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01230060A (ja) | 1988-03-10 | 1989-09-13 | Konica Corp | 感光体 |
JP4007130B2 (ja) | 2002-09-10 | 2007-11-14 | 株式会社豊田自動織機 | 真空ポンプ |
JP2004293434A (ja) * | 2003-03-27 | 2004-10-21 | Aisin Seiki Co Ltd | ドライポンプ |
JP2005105829A (ja) | 2003-09-26 | 2005-04-21 | Aisin Seiki Co Ltd | ドライポンプ |
JP2005036814A (ja) * | 2004-11-01 | 2005-02-10 | Nabtesco Corp | 容積移送型ポンプ |
GB0515905D0 (en) * | 2005-08-02 | 2005-09-07 | Boc Group Plc | Vacuum pump |
JP5330896B2 (ja) * | 2009-05-20 | 2013-10-30 | 三菱重工業株式会社 | ドライ真空ポンプ |
-
2011
- 2011-06-02 JP JP2011123979A patent/JP5793004B2/ja active Active
-
2012
- 2012-05-25 TW TW101118675A patent/TWI558917B/zh active
- 2012-05-29 CN CN201280018841.4A patent/CN103502648A/zh active Pending
- 2012-05-29 KR KR1020137028884A patent/KR101760549B1/ko active IP Right Grant
- 2012-05-29 US US14/119,851 patent/US20140112814A1/en not_active Abandoned
- 2012-05-29 WO PCT/JP2012/064347 patent/WO2012165646A1/en active Application Filing
- 2012-05-29 EP EP12791988.4A patent/EP2715138B1/de active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0879964A1 (de) * | 1997-05-22 | 1998-11-25 | T.D. Engineering Co., Ltd. | Verdrängungspumpe |
US20030077182A1 (en) * | 2001-10-24 | 2003-04-24 | Aisin Seiki Kabushiki Kaisha | Multi-stage vacuum pump |
JP2004293377A (ja) * | 2003-03-26 | 2004-10-21 | Aisin Seiki Co Ltd | 多段式ドライポンプ |
JP2004300964A (ja) * | 2003-03-28 | 2004-10-28 | Aisin Seiki Co Ltd | 真空ポンプ |
GB2418958A (en) * | 2004-10-06 | 2006-04-12 | Boc Group Plc | Vacuum pump with enhanced exhaust heat transfer to stator |
WO2010134427A1 (ja) * | 2009-05-20 | 2010-11-25 | 三菱重工業株式会社 | ドライ真空ポンプ |
WO2011019048A1 (ja) * | 2009-08-14 | 2011-02-17 | 株式会社アルバック | ドライポンプ |
Also Published As
Publication number | Publication date |
---|---|
US20140112814A1 (en) | 2014-04-24 |
JP2012251470A (ja) | 2012-12-20 |
TW201307686A (zh) | 2013-02-16 |
WO2012165646A1 (en) | 2012-12-06 |
CN103502648A (zh) | 2014-01-08 |
EP2715138A1 (de) | 2014-04-09 |
EP2715138B1 (de) | 2018-01-10 |
KR20140017635A (ko) | 2014-02-11 |
TWI558917B (zh) | 2016-11-21 |
KR101760549B1 (ko) | 2017-07-21 |
JP5793004B2 (ja) | 2015-10-14 |
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