EP2715138A4 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
EP2715138A4
EP2715138A4 EP12791988.4A EP12791988A EP2715138A4 EP 2715138 A4 EP2715138 A4 EP 2715138A4 EP 12791988 A EP12791988 A EP 12791988A EP 2715138 A4 EP2715138 A4 EP 2715138A4
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12791988.4A
Other languages
English (en)
French (fr)
Other versions
EP2715138A1 (de
EP2715138B1 (de
Inventor
Soichi Kudara
Masami Nagayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP2715138A1 publication Critical patent/EP2715138A1/de
Publication of EP2715138A4 publication Critical patent/EP2715138A4/de
Application granted granted Critical
Publication of EP2715138B1 publication Critical patent/EP2715138B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/18Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00Application
    • F04C2220/30Use in a chemical vapor deposition [CVD] process or in a similar process
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/30Casings or housings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP12791988.4A 2011-06-02 2012-05-29 Vakuumpumpe Active EP2715138B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011123979A JP5793004B2 (ja) 2011-06-02 2011-06-02 真空ポンプ
PCT/JP2012/064347 WO2012165646A1 (en) 2011-06-02 2012-05-29 Vacuum pump

Publications (3)

Publication Number Publication Date
EP2715138A1 EP2715138A1 (de) 2014-04-09
EP2715138A4 true EP2715138A4 (de) 2014-12-17
EP2715138B1 EP2715138B1 (de) 2018-01-10

Family

ID=47259491

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12791988.4A Active EP2715138B1 (de) 2011-06-02 2012-05-29 Vakuumpumpe

Country Status (7)

Country Link
US (1) US20140112814A1 (de)
EP (1) EP2715138B1 (de)
JP (1) JP5793004B2 (de)
KR (1) KR101760549B1 (de)
CN (1) CN103502648A (de)
TW (1) TWI558917B (de)
WO (1) WO2012165646A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2615307B1 (de) * 2012-01-12 2019-08-21 Vacuubrand Gmbh + Co Kg Schraubenvakuumpumpe
JP6472653B2 (ja) * 2014-03-17 2019-02-20 株式会社荏原製作所 除害機能付真空ポンプ
DE202016001950U1 (de) * 2016-03-30 2017-07-03 Leybold Gmbh Vakuumpumpe
EP3382203B1 (de) 2017-03-30 2024-05-15 Roper Pump Company LLC Exzenterschneckenpumpe mit integriertem heizmantel
CN109026707B (zh) * 2018-08-22 2024-05-14 中北大学 爪式泵与滑阀泵组合的复合泵
KR102612571B1 (ko) * 2019-02-06 2023-12-11 아뜰리에 부쉬 에스.아. 다단 펌프 본체 및 다단 가스 펌프
EP3808983B1 (de) * 2019-10-15 2024-01-03 Ebara Corporation Vakuumpumpe mit heizung im seitendeckel
JP2021063503A (ja) 2019-10-15 2021-04-22 株式会社荏原製作所 真空ポンプ装置
JP7261139B2 (ja) 2019-10-15 2023-04-19 株式会社荏原製作所 真空ポンプ装置
JP7348132B2 (ja) * 2020-04-30 2023-09-20 株式会社豊田自動織機 ルーツポンプ
FR3112175B1 (fr) * 2020-07-01 2022-07-08 Pfeiffer Vacuum Pompe à vide de type sèche
JP2022151996A (ja) 2021-03-29 2022-10-12 株式会社荏原製作所 真空ポンプ装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0879964A1 (de) * 1997-05-22 1998-11-25 T.D. Engineering Co., Ltd. Verdrängungspumpe
US20030077182A1 (en) * 2001-10-24 2003-04-24 Aisin Seiki Kabushiki Kaisha Multi-stage vacuum pump
JP2004293377A (ja) * 2003-03-26 2004-10-21 Aisin Seiki Co Ltd 多段式ドライポンプ
JP2004300964A (ja) * 2003-03-28 2004-10-28 Aisin Seiki Co Ltd 真空ポンプ
GB2418958A (en) * 2004-10-06 2006-04-12 Boc Group Plc Vacuum pump with enhanced exhaust heat transfer to stator
WO2010134427A1 (ja) * 2009-05-20 2010-11-25 三菱重工業株式会社 ドライ真空ポンプ
WO2011019048A1 (ja) * 2009-08-14 2011-02-17 株式会社アルバック ドライポンプ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230060A (ja) 1988-03-10 1989-09-13 Konica Corp 感光体
JP4007130B2 (ja) 2002-09-10 2007-11-14 株式会社豊田自動織機 真空ポンプ
JP2004293434A (ja) * 2003-03-27 2004-10-21 Aisin Seiki Co Ltd ドライポンプ
JP2005105829A (ja) 2003-09-26 2005-04-21 Aisin Seiki Co Ltd ドライポンプ
JP2005036814A (ja) * 2004-11-01 2005-02-10 Nabtesco Corp 容積移送型ポンプ
GB0515905D0 (en) * 2005-08-02 2005-09-07 Boc Group Plc Vacuum pump
JP5330896B2 (ja) * 2009-05-20 2013-10-30 三菱重工業株式会社 ドライ真空ポンプ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0879964A1 (de) * 1997-05-22 1998-11-25 T.D. Engineering Co., Ltd. Verdrängungspumpe
US20030077182A1 (en) * 2001-10-24 2003-04-24 Aisin Seiki Kabushiki Kaisha Multi-stage vacuum pump
JP2004293377A (ja) * 2003-03-26 2004-10-21 Aisin Seiki Co Ltd 多段式ドライポンプ
JP2004300964A (ja) * 2003-03-28 2004-10-28 Aisin Seiki Co Ltd 真空ポンプ
GB2418958A (en) * 2004-10-06 2006-04-12 Boc Group Plc Vacuum pump with enhanced exhaust heat transfer to stator
WO2010134427A1 (ja) * 2009-05-20 2010-11-25 三菱重工業株式会社 ドライ真空ポンプ
WO2011019048A1 (ja) * 2009-08-14 2011-02-17 株式会社アルバック ドライポンプ

Also Published As

Publication number Publication date
US20140112814A1 (en) 2014-04-24
JP2012251470A (ja) 2012-12-20
TW201307686A (zh) 2013-02-16
WO2012165646A1 (en) 2012-12-06
CN103502648A (zh) 2014-01-08
EP2715138A1 (de) 2014-04-09
EP2715138B1 (de) 2018-01-10
KR20140017635A (ko) 2014-02-11
TWI558917B (zh) 2016-11-21
KR101760549B1 (ko) 2017-07-21
JP5793004B2 (ja) 2015-10-14

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